JP6329491B2 - 荷電電圧源を有する容量性マイクロマシン加工超音波トランスデューサ装置 - Google Patents

荷電電圧源を有する容量性マイクロマシン加工超音波トランスデューサ装置 Download PDF

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JP6329491B2
JP6329491B2 JP2014561548A JP2014561548A JP6329491B2 JP 6329491 B2 JP6329491 B2 JP 6329491B2 JP 2014561548 A JP2014561548 A JP 2014561548A JP 2014561548 A JP2014561548 A JP 2014561548A JP 6329491 B2 JP6329491 B2 JP 6329491B2
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cmut
dielectric layer
charge
voltage
voltage source
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JP2015513272A (ja
JP2015513272A5 (cg-RX-API-DMAC10.html
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フィッシェル ヘオルヘ アンソニー ブロック
フィッシェル ヘオルヘ アンソニー ブロック
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Koninklijke Philips NV
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Koninklijke Philips NV
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/0292—Electrostatic transducers, e.g. electret-type
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22—Details, e.g. general constructional or apparatus details
    • G01N29/24—Probes
    • G01N29/2406—Electrostatic or capacitive probes, e.g. electret or cMUT-probes

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  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Transducers For Ultrasonic Waves (AREA)
  • Ultra Sonic Daignosis Equipment (AREA)
  • Surgical Instruments (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
  • Micromachines (AREA)
JP2014561548A 2012-03-13 2013-03-01 荷電電圧源を有する容量性マイクロマシン加工超音波トランスデューサ装置 Active JP6329491B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201261610130P 2012-03-13 2012-03-13
US61/610,130 2012-03-13
PCT/IB2013/051631 WO2013136212A1 (en) 2012-03-13 2013-03-01 Capacitive micro-machined ultrasound transducer device with charging voltage source

Publications (3)

Publication Number Publication Date
JP2015513272A JP2015513272A (ja) 2015-04-30
JP2015513272A5 JP2015513272A5 (cg-RX-API-DMAC10.html) 2016-04-21
JP6329491B2 true JP6329491B2 (ja) 2018-05-23

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JP2014561548A Active JP6329491B2 (ja) 2012-03-13 2013-03-01 荷電電圧源を有する容量性マイクロマシン加工超音波トランスデューサ装置

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US (1) US9950342B2 (cg-RX-API-DMAC10.html)
EP (1) EP2825856B1 (cg-RX-API-DMAC10.html)
JP (1) JP6329491B2 (cg-RX-API-DMAC10.html)
CN (1) CN104160250B (cg-RX-API-DMAC10.html)
WO (1) WO2013136212A1 (cg-RX-API-DMAC10.html)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6011235B2 (ja) * 2012-10-17 2016-10-19 セイコーエプソン株式会社 超音波測定装置、プローブヘッド、超音波プローブ、電子機器及び超音波診断装置
RU2658127C2 (ru) * 2013-09-27 2018-06-19 Конинклейке Филипс Н.В. Ультразвуковое преобразовательное устройство и способ передачи и приема ультразвуковых волн
EP3223709B1 (en) * 2014-11-25 2019-02-20 Koninklijke Philips N.V. Ultrasound system and method
US11766237B2 (en) 2015-07-02 2023-09-26 Philips Image Guided Therapy Corporation Multi-mode capacitive micromachined ultrasound transducer and associated devices, systems, and methods for multiple different intravascular sensing capabilities
US11097312B2 (en) 2015-08-11 2021-08-24 Koninklijke Philips N.V. Capacitive micromachined ultrasonic transducers with increased lifetime
US9987661B2 (en) 2015-12-02 2018-06-05 Butterfly Network, Inc. Biasing of capacitive micromachined ultrasonic transducers (CMUTs) and related apparatus and methods
US11458504B2 (en) 2016-12-22 2022-10-04 Koninklijke Philips N.V. Systems and methods of operation of capacitive radio frequency micro-electromechanical switches
JP6998379B2 (ja) * 2016-12-22 2022-01-18 コーニンクレッカ フィリップス エヌ ヴェ 容量性高周波微小電気機械スイッチのシステム及び動作方法
US11190868B2 (en) * 2017-04-18 2021-11-30 Massachusetts Institute Of Technology Electrostatic acoustic transducer utilized in a headphone device or an earbud
US11026662B2 (en) * 2018-01-11 2021-06-08 Siemens Medical Solutions Usa, Inc. Ultrasound transmit/receive for pulse inversion
FR3077162B1 (fr) * 2018-01-22 2020-02-07 Commissariat A L'energie Atomique Et Aux Energies Alternatives Transducteur piezoelectrique
US12226799B2 (en) 2019-07-26 2025-02-18 Vermon Sa Method of manufacturing capacitive micromachined ultrasonic transducer (CMUT)
JP2021038981A (ja) * 2019-09-02 2021-03-11 株式会社日立製作所 容量検出型超音波トランスデューサを使用した計測方法
US11738369B2 (en) * 2020-02-17 2023-08-29 GE Precision Healthcare LLC Capactive micromachined transducer having a high contact resistance part
DE102021200003A1 (de) * 2021-01-04 2022-07-07 Robert Bosch Gesellschaft mit beschränkter Haftung Verfahren und Vorrichtung zur Verwendung eines Halbleiterbauelements
JP7791115B2 (ja) * 2021-01-12 2025-12-23 富士フイルム株式会社 超音波内視鏡及び超音波内視鏡の組み立て方法
CN118744098A (zh) * 2022-05-05 2024-10-08 艾尔默斯半导体欧洲股份公司 用于驱动超声波换能器的装置

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6443901B1 (en) 2000-06-15 2002-09-03 Koninklijke Philips Electronics N.V. Capacitive micromachined ultrasonic transducers
JP4746291B2 (ja) 2004-08-05 2011-08-10 オリンパス株式会社 静電容量型超音波振動子、及びその製造方法
CN101227863B (zh) * 2005-09-05 2011-08-31 株式会社日立医药 超声波摄像装置
JP4434109B2 (ja) * 2005-09-05 2010-03-17 株式会社日立製作所 電気・音響変換素子
EP1952767B1 (en) * 2005-11-18 2015-07-15 Hitachi Medical Corporation Ultrasound diagnostic apparatus and method of calibrating the same
US7599254B2 (en) * 2005-12-20 2009-10-06 Siemens Medical Solutions Usa, Inc. Transducer static discharge methods and apparatus
JP4852356B2 (ja) * 2006-06-27 2012-01-11 株式会社日立メディコ 超音波診断装置
JP4839176B2 (ja) 2006-10-12 2011-12-21 オリンパスメディカルシステムズ株式会社 超音波トランスデューサ及び超音波診断装置
CN101662989B (zh) * 2006-11-03 2013-10-30 研究三角协会 使用挠曲模式压电换能器的增强的超声成像探头
WO2009073562A1 (en) * 2007-12-03 2009-06-11 Kolo Technologies, Inc. Dual-mode operation micromachined ultrasonic transducer
JP2009272824A (ja) 2008-05-02 2009-11-19 Olympus Medical Systems Corp 超音波振動子セル、超音波振動子および超音波内視鏡
WO2010000020A1 (en) 2008-06-30 2010-01-07 Cathrx Ltd A catheter
US8315125B2 (en) * 2009-03-18 2012-11-20 Sonetics Ultrasound, Inc. System and method for biasing CMUT elements
CN105828962B (zh) * 2013-12-12 2019-07-23 皇家飞利浦有限公司 单片集成的三电极cmut设备

Also Published As

Publication number Publication date
EP2825856A1 (en) 2015-01-21
JP2015513272A (ja) 2015-04-30
US9950342B2 (en) 2018-04-24
CN104160250A (zh) 2014-11-19
EP2825856B1 (en) 2023-09-27
CN104160250B (zh) 2017-10-27
WO2013136212A1 (en) 2013-09-19
US20150016227A1 (en) 2015-01-15

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