JP6309081B2 - 型の製造方法および反射防止膜の製造方法 - Google Patents
型の製造方法および反射防止膜の製造方法 Download PDFInfo
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- JP6309081B2 JP6309081B2 JP2016513746A JP2016513746A JP6309081B2 JP 6309081 B2 JP6309081 B2 JP 6309081B2 JP 2016513746 A JP2016513746 A JP 2016513746A JP 2016513746 A JP2016513746 A JP 2016513746A JP 6309081 B2 JP6309081 B2 JP 6309081B2
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- aluminum
- mold
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- etching
- substrate
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- 230000008569 process Effects 0.000 claims description 32
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Images
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C33/00—Moulds or cores; Details thereof or accessories therefor
- B29C33/38—Moulds or cores; Details thereof or accessories therefor characterised by the material or the manufacturing process
- B29C33/3842—Manufacturing moulds, e.g. shaping the mould surface by machining
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C33/00—Moulds or cores; Details thereof or accessories therefor
- B29C33/38—Moulds or cores; Details thereof or accessories therefor characterised by the material or the manufacturing process
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
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- B29C33/00—Moulds or cores; Details thereof or accessories therefor
- B29C33/38—Moulds or cores; Details thereof or accessories therefor characterised by the material or the manufacturing process
- B29C33/3828—Moulds made of at least two different materials having different thermal conductivities
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C33/00—Moulds or cores; Details thereof or accessories therefor
- B29C33/42—Moulds or cores; Details thereof or accessories therefor characterised by the shape of the moulding surface, e.g. ribs or grooves
- B29C33/424—Moulding surfaces provided with means for marking or patterning
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C33/00—Moulds or cores; Details thereof or accessories therefor
- B29C33/56—Coatings, e.g. enameled or galvanised; Releasing, lubricating or separating agents
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C33/00—Moulds or cores; Details thereof or accessories therefor
- B29C33/56—Coatings, e.g. enameled or galvanised; Releasing, lubricating or separating agents
- B29C33/60—Releasing, lubricating or separating agents
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C33/00—Moulds or cores; Details thereof or accessories therefor
- B29C33/76—Cores
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C35/00—Heating, cooling or curing, e.g. crosslinking or vulcanising; Apparatus therefor
- B29C35/02—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould
- B29C35/08—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation
- B29C35/0805—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation using electromagnetic radiation
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
- B29C59/02—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing
- B29C59/04—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing using rollers or endless belts
- B29C59/046—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing using rollers or endless belts for layered or coated substantially flat surfaces
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
- C23C14/18—Metallic material, boron or silicon on other inorganic substrates
- C23C14/185—Metallic material, boron or silicon on other inorganic substrates by cathodic sputtering
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- C23F1/00—Etching metallic material by chemical means
- C23F1/10—Etching compositions
- C23F1/14—Aqueous compositions
- C23F1/16—Acidic compositions
- C23F1/20—Acidic compositions for etching aluminium or alloys thereof
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
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Description
(a)Al−Mg−Si系のアルミニウム合金で形成された円筒状のアルミニウム基材であって、機械的な鏡面加工が施されたアルミニウム基材を用意する工程
(b)アルミニウム基材の表面をフッ化水素とアンモニウムとの塩を含む水溶液によって梨地処理する工程
(c)工程(b)の後で、アルミニウム基材の表面に無機材料層を形成し、無機材料層の上にアルミニウム膜を形成することによって、型基材を作製する工程
(d)工程(c)の後で、アルミニウム膜の表面を陽極酸化することによって、複数のミクロな凹部を有するポーラスアルミナ層を形成する工程
(e)工程(d)の後に、ポーラスアルミナ層を、エッチング液に接触させることによって、ポーラスアルミナ層の複数のミクロな凹部を拡大させる工程
(f)工程(e)の後に、さらに陽極酸化することによって、複数のミクロな凹部を成長させる工程
Al−Mg系のアルミニウム合金
Al−Mg系のアルミニウム合金として、JIS A5052を用いた。JIS A5052は、下記の組成(mass%)を有している。
Si:0.25%以下、Fe:0.40%以下、Cu:0.10%以下、Mn:0.10%以下、Mg:2.2〜2.8%、Cr:0.15〜0.35%、Zn:0.10%以下、その他:個々は0.05%以下、全体は0.15%以下、残部:Al
Al−Mg−Si系のアルミニウム合金として、JIS A6063を用いた。JIS A6063は、下記の組成(mass%)を有している。
Si:0.20〜0.60%、Fe:0.35%以下、Cu:0.10%以下、Mn:0.10%以下、Mg:0.45〜0.9%、Cr:0.10%以下、Zn:0.10%以下、Ti:0.10%以下、その他:個々は0.05%以下で、全体は0.15%以下、残部:Al
冷間引抜き加工が施されたJIS A6063のアルミニウム基材に梨地処理を行うと、アルミニウム基材の表面にマクロなむらが発生することがあった。このマクロなむらの発生を防止するために、梨地処理の前処理として、脱脂と水洗の検討を行った。
アンチグレア機能を有する反射防止膜を形成するためのモスアイ用型を作製するために、梨地処理の時間と拡散反射性能の程度との関係を検討した結果を説明する。以下の実験では、冷間引抜き加工が施されたJIS A6063のアルミニウム基材を用いた。梨地処理のためのエッチング液として、フッ化水素アンモニウムを含む水溶液(フッ化水素アンモニウムの濃度は4mass%)を用いた。
冷間引抜き加工を施すことなく、バイト切削による鏡面加工を行ったアルミニウム基材に梨地処理を施すと、アルミニウム基材の表面に切削痕が形成されることがあった。この切削痕は、バイト切削による鏡面加工によって、アルミニウム基材の表面に形成された加工変質層に起因した、エッチングのむらであると考えられる。したがって、梨地処理によって切削痕が形成されるという問題は、バイト切削に限られず、加工変質層の形成を伴う鏡面加工が施されたアルミニウム基材を用いる場合に共通の問題である。なお、冷間引抜き加工を施すと、アルミニウム基材の全体にわたって塑性変形による加工変質層が形成されるので、その後の鏡面加工による影響が低減されると考えられる。
梨地処理の前処理として、アルカリ性のエッチング液を用いて、アルミニウム基材の表面をエッチングする工程(基材表面エッチング工程ということがある)について検討した結果を説明する。
12 アルミニウム基材
14 ポーラスアルミナ層
14p ミクロな凹部
16 無機材料層
18 アルミニウム膜
18r アルミニウム残存層
100 モスアイ用型
Claims (15)
- (a)Al−Mg−Si系のアルミニウム合金で形成された円筒状のアルミニウム基材であって、機械的な鏡面加工が施されたアルミニウム基材を用意する工程と、
(b)前記アルミニウム基材の表面をフッ化水素とアンモニウムとの塩を含む水溶液によって梨地処理する工程と、
(c)前記工程(b)の後で、前記アルミニウム基材の前記表面に無機材料層を形成し、前記無機材料層の上にアルミニウム膜を形成することによって、型基材を作製する工程と、
(d)前記工程(c)の後で、前記アルミニウム膜の表面を陽極酸化することによって、複数のミクロな凹部を有するポーラスアルミナ層を形成する工程と、
(e)前記工程(d)の後に、前記ポーラスアルミナ層を、エッチング液に接触させることによって、前記ポーラスアルミナ層の前記複数のミクロな凹部を拡大させる工程と、
(f)前記工程(e)の後に、さらに陽極酸化することによって、前記複数のミクロな凹部を成長させる工程と
を包含し、
前記工程(b)の前に、脱脂工程および水洗工程をさらに包含する、型の製造方法。 - 前記工程(b)は、前記水洗工程の後、15分を経過する前に行われる、請求項1に記載の型の製造方法。
- 前記工程(b)の前に、アルカリ性のエッチング液を用いて、前記アルミニウム基材の前記表面をエッチングする基材表面エッチング工程をさらに包含する、請求項1または2に記載の型の製造方法。
- 前記基材表面エッチング工程は、前記脱脂工程を兼ねる、請求項3に記載の型の製造方法。
- (a)Al−Mg−Si系のアルミニウム合金で形成された円筒状のアルミニウム基材であって、機械的な鏡面加工が施されたアルミニウム基材を用意する工程と、
(b)前記アルミニウム基材の表面をフッ化水素とアンモニウムとの塩を含む水溶液によって梨地処理する工程と、
(c)前記工程(b)の後で、前記アルミニウム基材の前記表面に無機材料層を形成し、前記無機材料層の上にアルミニウム膜を形成することによって、型基材を作製する工程と、
(d)前記工程(c)の後で、前記アルミニウム膜の表面を陽極酸化することによって、複数のミクロな凹部を有するポーラスアルミナ層を形成する工程と、
(e)前記工程(d)の後に、前記ポーラスアルミナ層を、エッチング液に接触させることによって、前記ポーラスアルミナ層の前記複数のミクロな凹部を拡大させる工程と、
(f)前記工程(e)の後に、さらに陽極酸化することによって、前記複数のミクロな凹部を成長させる工程と
を包含し、
前記工程(b)の前に、アルカリ性のエッチング液を用いて、前記アルミニウム基材の前記表面をエッチングする基材表面エッチング工程をさらに包含する、型の製造方法。 - 前記アルカリ性のエッチング液は、無機塩基または有機塩基を0.03mass%以上含む、請求項3から5のいずれかに記載の型の製造方法。
- 前記アルカリ性のエッチング液のpHは、10以上12以下である、請求項3から6のいずれかに記載の型の製造方法。
- 前記アルカリ性のエッチング液は、水酸化カリウムを含む、請求項3から7のいずれかに記載の型の製造方法。
- 前記アルカリ性のエッチング液は、アミノ基を有する有機化合物を含む、請求項3から8のいずれかに記載の型の製造方法。
- 前記基材表面エッチング工程および前記工程(b)によって、前記アルミニウム基材の前記表面の算術平均粗さRaは50nm以上300nm以下となる、請求項3から9のいずれかに記載の型の製造方法。
- 前記基材表面エッチング工程において、前記アルミニウム基材の表面から少なくとも1.4μmが除去される、請求項3から10のいずれかに記載の型の製造方法。
- 前記アルミニウム基材は、冷間引抜き加工が施されたアルミニウム基材である、請求項1から11のいずれかに記載の型の製造方法。
- 前記工程(b)の前に、前処理のための陽極酸化工程およびエッチング工程をさらに包含する、請求項1から12のいずれかに記載の型の製造方法。
- 前記工程(b)における、前記フッ化水素とアンモニウムとの塩は、フッ化水素アンモニウムである、請求項1から13のいずれかに記載の型の製造方法。
- 請求項1から14のいずれかに記載の型の製造方法によって製造された型を用意する工程と、
被加工物を用意する工程と、
前記型と前記被加工物の表面との間に光硬化樹脂を付与した状態で、前記光硬化樹脂に光を照射することによって前記光硬化樹脂を硬化させる工程と、
前記型を硬化させられた光硬化樹脂で形成された反射防止膜から剥離する工程とを包含する、反射防止膜の製造方法。
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US9914243B2 (en) | 2012-06-06 | 2018-03-13 | Sharp Kabushiki Kaisha | Mold base material, production method for mold base material, mold production method, and mold |
US9587298B2 (en) * | 2013-02-19 | 2017-03-07 | Arconic Inc. | Heat treatable aluminum alloys having magnesium and zinc and methods for producing the same |
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