JP6307840B2 - 検出装置、センサー、電子機器及び移動体 - Google Patents

検出装置、センサー、電子機器及び移動体 Download PDF

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Publication number
JP6307840B2
JP6307840B2 JP2013231341A JP2013231341A JP6307840B2 JP 6307840 B2 JP6307840 B2 JP 6307840B2 JP 2013231341 A JP2013231341 A JP 2013231341A JP 2013231341 A JP2013231341 A JP 2013231341A JP 6307840 B2 JP6307840 B2 JP 6307840B2
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Japan
Prior art keywords
circuit
agc loop
period
drive
signal
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Expired - Fee Related
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JP2013231341A
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Japanese (ja)
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JP2015090351A5 (enExample
JP2015090351A (ja
Inventor
牧　克彦
克彦 牧
崇 野宮
崇 野宮
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Seiko Epson Corp
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Seiko Epson Corp
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Priority to JP2013231341A priority Critical patent/JP6307840B2/ja
Priority to US14/533,578 priority patent/US9829316B2/en
Priority to CN201410642926.0A priority patent/CN104634337B/zh
Publication of JP2015090351A publication Critical patent/JP2015090351A/ja
Publication of JP2015090351A5 publication Critical patent/JP2015090351A5/ja
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5607—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks
    • G01C19/5614—Signal processing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5776—Signal processing not specific to any of the devices covered by groups G01C19/5607 - G01C19/5719

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  • Engineering & Computer Science (AREA)
  • Signal Processing (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)
  • Control Of Amplification And Gain Control (AREA)
JP2013231341A 2013-11-07 2013-11-07 検出装置、センサー、電子機器及び移動体 Expired - Fee Related JP6307840B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2013231341A JP6307840B2 (ja) 2013-11-07 2013-11-07 検出装置、センサー、電子機器及び移動体
US14/533,578 US9829316B2 (en) 2013-11-07 2014-11-05 Detection device, sensor, electronic apparatus, and moving object
CN201410642926.0A CN104634337B (zh) 2013-11-07 2014-11-07 检测装置、传感器、电子设备以及移动体

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2013231341A JP6307840B2 (ja) 2013-11-07 2013-11-07 検出装置、センサー、電子機器及び移動体

Publications (3)

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JP2015090351A JP2015090351A (ja) 2015-05-11
JP2015090351A5 JP2015090351A5 (enExample) 2016-12-22
JP6307840B2 true JP6307840B2 (ja) 2018-04-11

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JP2013231341A Expired - Fee Related JP6307840B2 (ja) 2013-11-07 2013-11-07 検出装置、センサー、電子機器及び移動体

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US (1) US9829316B2 (enExample)
JP (1) JP6307840B2 (enExample)
CN (1) CN104634337B (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2018044823A (ja) * 2016-09-13 2018-03-22 横河電機株式会社 駆動回路および物理量センサ装置

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6197323B2 (ja) * 2013-03-22 2017-09-20 セイコーエプソン株式会社 検出装置、センサー、ジャイロセンサー、電子機器及び移動体
JP6213165B2 (ja) 2013-11-07 2017-10-18 セイコーエプソン株式会社 検出装置、センサー、電子機器及び移動体
JP6303411B2 (ja) * 2013-11-07 2018-04-04 セイコーエプソン株式会社 検出装置、センサー、電子機器及び移動体
WO2015146165A1 (ja) * 2014-03-25 2015-10-01 旭化成エレクトロニクス株式会社 角速度センサ、その駆動回路及びその駆動方法並びに角速度検出センサ装置
CN104796114B (zh) * 2015-05-15 2017-07-28 哈尔滨工业大学 一种低泄漏误差的模拟积分器
CN105302047A (zh) * 2015-11-26 2016-02-03 无锡拓能自动化科技有限公司 一种家居燃气智能监控系统
DE102017205984A1 (de) * 2017-04-07 2018-10-11 Robert Bosch Gmbh Drehratensensor und Verfahren zum Betrieb eines Drehratensensors
DE102018219333B3 (de) * 2018-11-13 2020-03-26 Albert-Ludwigs-Universität Freiburg Verfahren zur automatischen frequenzanpassung eines filters in einer geschlossenen regelschleife
JP2020134369A (ja) * 2019-02-21 2020-08-31 セイコーエプソン株式会社 慣性センサー、電子機器および移動体
EP4187203B1 (en) * 2021-11-30 2024-10-23 STMicroelectronics S.r.l. Mems gyroscope device with improved hot startup and corresponding method
JP2023140589A (ja) * 2022-03-23 2023-10-05 セイコーエプソン株式会社 物理量検出回路及び物理量検出装置
US12276502B2 (en) * 2022-08-24 2025-04-15 Panasonic intellectual property Management co., Ltd Continuous monitoring of gyroscope sensor forced-to-rebalance loop electronics

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US4125809A (en) * 1977-11-09 1978-11-14 The United States Of America As Represented By The Secretary Of The Navy Digital C/kT meter
JPS6444126A (en) * 1987-08-12 1989-02-16 Hitachi Ltd A/d and d/a converter
US5229606A (en) * 1989-06-05 1993-07-20 Digital Instruments, Inc. Jumping probe microscope
US7149263B2 (en) * 2000-06-26 2006-12-12 Hitachi Kokusai Electric Inc. AGC method and circuit for digital radio receiver
JP4171191B2 (ja) * 2000-06-26 2008-10-22 株式会社日立国際電気 Ａｇｃ制御方法及びａｇｃ回路
JP5200491B2 (ja) * 2006-11-06 2013-06-05 セイコーエプソン株式会社 駆動装置、物理量測定装置及び電子機器
US7895894B2 (en) 2006-11-06 2011-03-01 Seiko Epson Corporation Driver device, physical quantity measuring device, and electronic instrument
JP4450029B2 (ja) * 2007-07-24 2010-04-14 セイコーエプソン株式会社 発振駆動回路、発振駆動装置、物理量測定回路、物理量測定装置および電子機器
JP4508230B2 (ja) * 2007-11-21 2010-07-21 ソニー株式会社 慣性センサ及びその検出装置
JP5365173B2 (ja) * 2008-02-29 2013-12-11 セイコーエプソン株式会社 物理量測定装置および電子機器
IT1394898B1 (it) * 2009-06-03 2012-07-20 St Microelectronics Rousset Giroscopio microelettromeccanico con attuazione a controllo di posizione e metodo per il controllo di un giroscopio microelettromeccanico
JP5368181B2 (ja) * 2009-06-12 2013-12-18 セイコーエプソン株式会社 物理量検出装置並びに物理量検出装置の制御方法、異常診断システム及び異常診断方法
JP5638419B2 (ja) * 2011-02-25 2014-12-10 セイコーエプソン株式会社 信号処理回路、物理量検出装置、角速度検出装置、集積回路装置及び電子機器

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2018044823A (ja) * 2016-09-13 2018-03-22 横河電機株式会社 駆動回路および物理量センサ装置

Also Published As

Publication number Publication date
CN104634337B (zh) 2018-10-12
CN104634337A (zh) 2015-05-20
JP2015090351A (ja) 2015-05-11
US20150122022A1 (en) 2015-05-07
US9829316B2 (en) 2017-11-28

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