JP6305036B2 - 液体吐出ヘッド - Google Patents

液体吐出ヘッド Download PDF

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Publication number
JP6305036B2
JP6305036B2 JP2013248451A JP2013248451A JP6305036B2 JP 6305036 B2 JP6305036 B2 JP 6305036B2 JP 2013248451 A JP2013248451 A JP 2013248451A JP 2013248451 A JP2013248451 A JP 2013248451A JP 6305036 B2 JP6305036 B2 JP 6305036B2
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JP
Japan
Prior art keywords
region
substrate
liquid discharge
flow path
wall member
Prior art date
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Active
Application number
JP2013248451A
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English (en)
Japanese (ja)
Other versions
JP2015104877A5 (enExample
JP2015104877A (ja
Inventor
誠一郎 柳沼
誠一郎 柳沼
浅井　和宏
和宏 浅井
謙児 藤井
謙児 藤井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2013248451A priority Critical patent/JP6305036B2/ja
Priority to US14/553,765 priority patent/US9205650B2/en
Publication of JP2015104877A publication Critical patent/JP2015104877A/ja
Publication of JP2015104877A5 publication Critical patent/JP2015104877A5/ja
Application granted granted Critical
Publication of JP6305036B2 publication Critical patent/JP6305036B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14016—Structure of bubble jet print heads
    • B41J2/14032—Structure of the pressure chamber
    • B41J2/1404—Geometrical characteristics
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/1433—Structure of nozzle plates
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1601—Production of bubble jet print heads
    • B41J2/1603—Production of bubble jet print heads of the front shooter type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1628—Manufacturing processes etching dry etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1637—Manufacturing processes molding
    • B41J2/1639—Manufacturing processes molding sacrificial molding
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Geometry (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
JP2013248451A 2013-11-29 2013-11-29 液体吐出ヘッド Active JP6305036B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2013248451A JP6305036B2 (ja) 2013-11-29 2013-11-29 液体吐出ヘッド
US14/553,765 US9205650B2 (en) 2013-11-29 2014-11-25 Liquid ejection head

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2013248451A JP6305036B2 (ja) 2013-11-29 2013-11-29 液体吐出ヘッド

Publications (3)

Publication Number Publication Date
JP2015104877A JP2015104877A (ja) 2015-06-08
JP2015104877A5 JP2015104877A5 (enExample) 2017-01-12
JP6305036B2 true JP6305036B2 (ja) 2018-04-04

Family

ID=53264292

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2013248451A Active JP6305036B2 (ja) 2013-11-29 2013-11-29 液体吐出ヘッド

Country Status (2)

Country Link
US (1) US9205650B2 (enExample)
JP (1) JP6305036B2 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7413039B2 (ja) * 2020-01-22 2024-01-15 キヤノン株式会社 液体吐出ヘッド及び液体吐出ヘッドの製造方法
JP6977089B2 (ja) * 2020-03-25 2021-12-08 キヤノン株式会社 構造体の製造方法及び液体吐出ヘッドの製造方法
JP2023108679A (ja) * 2022-01-26 2023-08-07 キヤノン株式会社 記録素子基板及びその製造方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2932877B2 (ja) * 1992-02-06 1999-08-09 セイコーエプソン株式会社 インクジェットヘッドの製造方法
KR100474471B1 (ko) * 2002-08-20 2005-03-08 삼성전자주식회사 모노리식 버블 잉크젯 프린트 헤드 및 그 제조방법
JP4455287B2 (ja) * 2003-12-26 2010-04-21 キヤノン株式会社 インクジェット記録ヘッドの製造方法
KR100517515B1 (ko) 2004-01-20 2005-09-28 삼성전자주식회사 모놀리틱 잉크젯 프린트헤드의 제조방법

Also Published As

Publication number Publication date
US20150151543A1 (en) 2015-06-04
US9205650B2 (en) 2015-12-08
JP2015104877A (ja) 2015-06-08

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