JP6277760B2 - 物理量センサー、電子機器および移動体 - Google Patents

物理量センサー、電子機器および移動体 Download PDF

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Publication number
JP6277760B2
JP6277760B2 JP2014028021A JP2014028021A JP6277760B2 JP 6277760 B2 JP6277760 B2 JP 6277760B2 JP 2014028021 A JP2014028021 A JP 2014028021A JP 2014028021 A JP2014028021 A JP 2014028021A JP 6277760 B2 JP6277760 B2 JP 6277760B2
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physical quantity
sensor
quantity sensor
piezoresistive
diaphragm portion
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Expired - Fee Related
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JP2014028021A
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Japanese (ja)
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JP2015152501A (ja
JP2015152501A5 (enExample
Inventor
今井　英生
英生 今井
拓也 衣川
拓也 衣川
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Seiko Epson Corp
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Seiko Epson Corp
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  • Measuring Fluid Pressure (AREA)
  • Gyroscopes (AREA)
JP2014028021A 2014-02-17 2014-02-17 物理量センサー、電子機器および移動体 Expired - Fee Related JP6277760B2 (ja)

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JP2014028021A JP6277760B2 (ja) 2014-02-17 2014-02-17 物理量センサー、電子機器および移動体

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JP2014028021A JP6277760B2 (ja) 2014-02-17 2014-02-17 物理量センサー、電子機器および移動体

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JP2015152501A JP2015152501A (ja) 2015-08-24
JP2015152501A5 JP2015152501A5 (enExample) 2017-02-23
JP6277760B2 true JP6277760B2 (ja) 2018-02-14

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JP2014028021A Expired - Fee Related JP6277760B2 (ja) 2014-02-17 2014-02-17 物理量センサー、電子機器および移動体

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Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6222040A (ja) * 1985-07-22 1987-01-30 Fujikura Ltd 半導体圧力センサ−
JPH11304618A (ja) * 1998-04-23 1999-11-05 Matsushita Electric Works Ltd 半導体歪みセンサ
JP5092462B2 (ja) * 2006-06-13 2012-12-05 株式会社デンソー 力学量センサ
DE102010039057B4 (de) * 2010-08-09 2018-06-14 Robert Bosch Gmbh Sensormodul
WO2013061785A1 (ja) * 2011-10-24 2013-05-02 アルプス電気株式会社 物理量センサ装置とその製造方法

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