JP6271836B2 - 分散したパターンを有するマスクを介したレーザーアブレーションツール - Google Patents

分散したパターンを有するマスクを介したレーザーアブレーションツール Download PDF

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Publication number
JP6271836B2
JP6271836B2 JP2012529790A JP2012529790A JP6271836B2 JP 6271836 B2 JP6271836 B2 JP 6271836B2 JP 2012529790 A JP2012529790 A JP 2012529790A JP 2012529790 A JP2012529790 A JP 2012529790A JP 6271836 B2 JP6271836 B2 JP 6271836B2
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Japan
Prior art keywords
mask
substrate
pattern
openings
dispersed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
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JP2012529790A
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English (en)
Japanese (ja)
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JP2013505136A (ja
JP2013505136A5 (enExample
Inventor
アール．コーリガン トーマス
アール．コーリガン トーマス
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3M Innovative Properties Co
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3M Innovative Properties Co
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Publication date
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Publication of JP2013505136A5 publication Critical patent/JP2013505136A5/ja
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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/066—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms by using masks
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B23K26/083—Devices involving movement of the workpiece in at least one axial direction
    • B23K26/0853—Devices involving movement of the workpiece in at least in two axial directions, e.g. in a plane
    • B23K26/0861—Devices involving movement of the workpiece in at least in two axial directions, e.g. in a plane in at least in three axial directions
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2101/00—Articles made by soldering, welding or cutting
    • B23K2101/18—Sheet panels
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2103/00—Materials to be soldered, welded or cut
    • B23K2103/30—Organic material
    • B23K2103/42—Plastics
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2103/00—Materials to be soldered, welded or cut
    • B23K2103/50—Inorganic material, e.g. metals, not provided for in B23K2103/02 – B23K2103/26
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24273—Structurally defined web or sheet [e.g., overall dimension, etc.] including aperture
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24479—Structurally defined web or sheet [e.g., overall dimension, etc.] including variation in thickness

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Laser Beam Processing (AREA)
JP2012529790A 2009-09-18 2010-09-01 分散したパターンを有するマスクを介したレーザーアブレーションツール Expired - Fee Related JP6271836B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US12/562,369 US20110070398A1 (en) 2009-09-18 2009-09-18 Laser ablation tooling via distributed patterned masks
US12/562,369 2009-09-18
PCT/US2010/047475 WO2011034728A2 (en) 2009-09-18 2010-09-01 Laser ablation tooling via distributed patterned masks

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2016092574A Division JP2016190270A (ja) 2009-09-18 2016-05-02 分散したパターンを有するマスクを介したレーザーアブレーションツール

Publications (3)

Publication Number Publication Date
JP2013505136A JP2013505136A (ja) 2013-02-14
JP2013505136A5 JP2013505136A5 (enExample) 2013-10-10
JP6271836B2 true JP6271836B2 (ja) 2018-01-31

Family

ID=43756870

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2012529790A Expired - Fee Related JP6271836B2 (ja) 2009-09-18 2010-09-01 分散したパターンを有するマスクを介したレーザーアブレーションツール
JP2016092574A Pending JP2016190270A (ja) 2009-09-18 2016-05-02 分散したパターンを有するマスクを介したレーザーアブレーションツール

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2016092574A Pending JP2016190270A (ja) 2009-09-18 2016-05-02 分散したパターンを有するマスクを介したレーザーアブレーションツール

Country Status (4)

Country Link
US (2) US20110070398A1 (enExample)
EP (1) EP2478418A4 (enExample)
JP (2) JP6271836B2 (enExample)
WO (1) WO2011034728A2 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20110070398A1 (en) * 2009-09-18 2011-03-24 3M Innovative Properties Company Laser ablation tooling via distributed patterned masks
CN104570611B (zh) * 2013-10-21 2016-06-08 合肥京东方光电科技有限公司 掩膜板及其改善拼接曝光姆拉现象的方法
US10251606B2 (en) * 2014-01-14 2019-04-09 Volcano Corporation Systems and methods for evaluating hemodialysis arteriovenous fistula maturation

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Also Published As

Publication number Publication date
US20110070398A1 (en) 2011-03-24
EP2478418A4 (en) 2017-10-18
EP2478418A2 (en) 2012-07-25
JP2013505136A (ja) 2013-02-14
JP2016190270A (ja) 2016-11-10
WO2011034728A2 (en) 2011-03-24
WO2011034728A3 (en) 2011-07-14
US20130003030A1 (en) 2013-01-03

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