JP6265906B2 - 円環形状の崩壊領域を持つ崩壊前の静電容量型トランスデューサーセル - Google Patents

円環形状の崩壊領域を持つ崩壊前の静電容量型トランスデューサーセル Download PDF

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Publication number
JP6265906B2
JP6265906B2 JP2014541778A JP2014541778A JP6265906B2 JP 6265906 B2 JP6265906 B2 JP 6265906B2 JP 2014541778 A JP2014541778 A JP 2014541778A JP 2014541778 A JP2014541778 A JP 2014541778A JP 6265906 B2 JP6265906 B2 JP 6265906B2
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region
electrode
collapse
membrane
cell
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JP2014533907A (ja
JP2014533907A5 (enExample
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アンドリュー リー ロビンソン
アンドリュー リー ロビンソン
ヨン ダフラス フラセル
ヨン ダフラス フラセル
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Koninklijke Philips NV
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Koninklijke Philips NV
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    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
    • H02N1/002—Electrostatic motors
    • H02N1/006—Electrostatic motors of the gap-closing type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/0292—Electrostatic transducers, e.g. electret-type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49005—Acoustic transducer

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Transducers For Ultrasonic Waves (AREA)
  • Pressure Sensors (AREA)
  • Micromachines (AREA)
  • Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
  • Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)
JP2014541778A 2011-11-17 2012-11-05 円環形状の崩壊領域を持つ崩壊前の静電容量型トランスデューサーセル Expired - Fee Related JP6265906B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201161560836P 2011-11-17 2011-11-17
US61/560,836 2011-11-17
PCT/IB2012/056152 WO2013072803A1 (en) 2011-11-17 2012-11-05 Pre-collapsed capacitive micro-machined transducer cell with annular-shaped collapsed region

Publications (3)

Publication Number Publication Date
JP2014533907A JP2014533907A (ja) 2014-12-15
JP2014533907A5 JP2014533907A5 (enExample) 2015-12-17
JP6265906B2 true JP6265906B2 (ja) 2018-01-24

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JP2014541778A Expired - Fee Related JP6265906B2 (ja) 2011-11-17 2012-11-05 円環形状の崩壊領域を持つ崩壊前の静電容量型トランスデューサーセル

Country Status (9)

Country Link
US (2) US9762148B2 (enExample)
EP (1) EP2747905B1 (enExample)
JP (1) JP6265906B2 (enExample)
CN (1) CN103958079B (enExample)
BR (1) BR112014011644A2 (enExample)
IN (1) IN2014CN03656A (enExample)
MX (1) MX2014005795A (enExample)
RU (1) RU2609917C2 (enExample)
WO (1) WO2013072803A1 (enExample)

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WO2017001636A1 (en) * 2015-06-30 2017-01-05 Koninklijke Philips N.V. Ultrasound system and ultrasonic pulse transmission method
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US10315222B2 (en) 2016-05-04 2019-06-11 Invensense, Inc. Two-dimensional array of CMOS control elements
US10656255B2 (en) * 2016-05-04 2020-05-19 Invensense, Inc. Piezoelectric micromachined ultrasonic transducer (PMUT)
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US11673165B2 (en) 2016-05-10 2023-06-13 Invensense, Inc. Ultrasonic transducer operable in a surface acoustic wave (SAW) mode
US11627938B2 (en) * 2016-08-30 2023-04-18 Koninklijke Philips N.V. Imaging device with ultrasound transducer array
US10891461B2 (en) 2017-05-22 2021-01-12 Invensense, Inc. Live fingerprint detection utilizing an integrated ultrasound and infrared sensor
US10474862B2 (en) 2017-06-01 2019-11-12 Invensense, Inc. Image generation in an electronic device using ultrasonic transducers
US10643052B2 (en) 2017-06-28 2020-05-05 Invensense, Inc. Image generation in an electronic device using ultrasonic transducers
US10997388B2 (en) 2017-12-01 2021-05-04 Invensense, Inc. Darkfield contamination detection
US10936841B2 (en) 2017-12-01 2021-03-02 Invensense, Inc. Darkfield tracking
US10984209B2 (en) 2017-12-01 2021-04-20 Invensense, Inc. Darkfield modeling
US11151355B2 (en) 2018-01-24 2021-10-19 Invensense, Inc. Generation of an estimated fingerprint
EP3533386A1 (en) 2018-02-28 2019-09-04 Koninklijke Philips N.V. Pressure sensing with capacitive pressure sensor
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CN108793061B (zh) * 2018-05-25 2020-11-27 岭南师范学院 一种全电极凸纹结构cmut器件的制备方法
CN112533529A (zh) * 2018-08-09 2021-03-19 皇家飞利浦有限公司 具有电容性压力传感器的腔内设备
CN109530194B (zh) * 2018-10-18 2020-07-14 天津大学 一种多电极cmut单元及多频式电容微机械超声换能器
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CN109909140B (zh) * 2019-03-06 2021-06-04 中国工程物理研究院电子工程研究所 一种压电微机械超声换能器及其制备方法
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US11216632B2 (en) 2019-07-17 2022-01-04 Invensense, Inc. Ultrasonic fingerprint sensor with a contact layer of non-uniform thickness
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US11232549B2 (en) 2019-08-23 2022-01-25 Invensense, Inc. Adapting a quality threshold for a fingerprint image
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US11243300B2 (en) 2020-03-10 2022-02-08 Invensense, Inc. Operating a fingerprint sensor comprised of ultrasonic transducers and a presence sensor
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Publication number Publication date
US20140265721A1 (en) 2014-09-18
US9762148B2 (en) 2017-09-12
JP2014533907A (ja) 2014-12-15
RU2014124363A (ru) 2015-12-27
WO2013072803A1 (en) 2013-05-23
CN103958079A (zh) 2014-07-30
US20170353129A1 (en) 2017-12-07
EP2747905B1 (en) 2021-10-20
CN103958079B (zh) 2016-08-24
EP2747905A1 (en) 2014-07-02
IN2014CN03656A (enExample) 2015-10-16
BR112014011644A2 (pt) 2017-05-02
US10128777B2 (en) 2018-11-13
MX2014005795A (es) 2014-05-30
RU2609917C2 (ru) 2017-02-07

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