BR112014011644A2 - célula transdutora micromecanizada capacitiva pré-colapsada e método de fabricação de uma célula transdutora micromecanizada capacitiva pré-colapsada - Google Patents

célula transdutora micromecanizada capacitiva pré-colapsada e método de fabricação de uma célula transdutora micromecanizada capacitiva pré-colapsada

Info

Publication number
BR112014011644A2
BR112014011644A2 BR112014011644A BR112014011644A BR112014011644A2 BR 112014011644 A2 BR112014011644 A2 BR 112014011644A2 BR 112014011644 A BR112014011644 A BR 112014011644A BR 112014011644 A BR112014011644 A BR 112014011644A BR 112014011644 A2 BR112014011644 A2 BR 112014011644A2
Authority
BR
Brazil
Prior art keywords
micromechanized
transducer cell
collapsed
collapsed capacitive
capacitive
Prior art date
Application number
BR112014011644A
Other languages
English (en)
Portuguese (pt)
Inventor
Lee Robinson Andrew
Douglas Fraser John
Original Assignee
Koninklijke Philips Nv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Koninklijke Philips Nv filed Critical Koninklijke Philips Nv
Publication of BR112014011644A2 publication Critical patent/BR112014011644A2/pt

Links

Classifications

    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N1/00Electrostatic generators or motors using a solid moving electrostatic charge carrier
    • H02N1/002Electrostatic motors
    • H02N1/006Electrostatic motors of the gap-closing type
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B06GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06BMETHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B06GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06BMETHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/0292Electrostatic transducers, e.g. electret-type
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00Metal working
    • Y10T29/49Method of mechanical manufacture
    • Y10T29/49002Electrical device making
    • Y10T29/49005Acoustic transducer

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Transducers For Ultrasonic Waves (AREA)
  • Pressure Sensors (AREA)
  • Micromachines (AREA)
  • Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
  • Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)
BR112014011644A 2011-11-17 2012-11-05 célula transdutora micromecanizada capacitiva pré-colapsada e método de fabricação de uma célula transdutora micromecanizada capacitiva pré-colapsada BR112014011644A2 (pt)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US201161560836P 2011-11-17 2011-11-17
PCT/IB2012/056152 WO2013072803A1 (en) 2011-11-17 2012-11-05 Pre-collapsed capacitive micro-machined transducer cell with annular-shaped collapsed region

Publications (1)

Publication Number Publication Date
BR112014011644A2 true BR112014011644A2 (pt) 2017-05-02

Family

ID=47324242

Family Applications (1)

Application Number Title Priority Date Filing Date
BR112014011644A BR112014011644A2 (pt) 2011-11-17 2012-11-05 célula transdutora micromecanizada capacitiva pré-colapsada e método de fabricação de uma célula transdutora micromecanizada capacitiva pré-colapsada

Country Status (9)

Country Link
US (2) US9762148B2 (enExample)
EP (1) EP2747905B1 (enExample)
JP (1) JP6265906B2 (enExample)
CN (1) CN103958079B (enExample)
BR (1) BR112014011644A2 (enExample)
IN (1) IN2014CN03656A (enExample)
MX (1) MX2014005795A (enExample)
RU (1) RU2609917C2 (enExample)
WO (1) WO2013072803A1 (enExample)

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US10656255B2 (en) * 2016-05-04 2020-05-19 Invensense, Inc. Piezoelectric micromachined ultrasonic transducer (PMUT)
US10670716B2 (en) 2016-05-04 2020-06-02 Invensense, Inc. Operating a two-dimensional array of ultrasonic transducers
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US10452887B2 (en) 2016-05-10 2019-10-22 Invensense, Inc. Operating a fingerprint sensor comprised of ultrasonic transducers
US10408797B2 (en) 2016-05-10 2019-09-10 Invensense, Inc. Sensing device with a temperature sensor
CN109640832B (zh) * 2016-08-30 2022-05-27 皇家飞利浦有限公司 具有超声换能器阵列的成像设备
US10891461B2 (en) 2017-05-22 2021-01-12 Invensense, Inc. Live fingerprint detection utilizing an integrated ultrasound and infrared sensor
US10474862B2 (en) 2017-06-01 2019-11-12 Invensense, Inc. Image generation in an electronic device using ultrasonic transducers
US10643052B2 (en) 2017-06-28 2020-05-05 Invensense, Inc. Image generation in an electronic device using ultrasonic transducers
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US10997388B2 (en) 2017-12-01 2021-05-04 Invensense, Inc. Darkfield contamination detection
US10984209B2 (en) 2017-12-01 2021-04-20 Invensense, Inc. Darkfield modeling
US11151355B2 (en) 2018-01-24 2021-10-19 Invensense, Inc. Generation of an estimated fingerprint
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US10755067B2 (en) 2018-03-22 2020-08-25 Invensense, Inc. Operating a fingerprint sensor comprised of ultrasonic transducers
CN108793061B (zh) * 2018-05-25 2020-11-27 岭南师范学院 一种全电极凸纹结构cmut器件的制备方法
CN112533529A (zh) * 2018-08-09 2021-03-19 皇家飞利浦有限公司 具有电容性压力传感器的腔内设备
CN109530194B (zh) * 2018-10-18 2020-07-14 天津大学 一种多电极cmut单元及多频式电容微机械超声换能器
US10936843B2 (en) 2018-12-28 2021-03-02 Invensense, Inc. Segmented image acquisition
KR102196437B1 (ko) 2019-01-29 2020-12-30 한국과학기술연구원 정전용량형 미세가공 초음파 트랜스듀서
CN109909140B (zh) * 2019-03-06 2021-06-04 中国工程物理研究院电子工程研究所 一种压电微机械超声换能器及其制备方法
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US11176345B2 (en) 2019-07-17 2021-11-16 Invensense, Inc. Ultrasonic fingerprint sensor with a contact layer of non-uniform thickness
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CN115551650A (zh) 2020-03-09 2022-12-30 应美盛公司 具有非均匀厚度的接触层的超声指纹传感器
US11243300B2 (en) 2020-03-10 2022-02-08 Invensense, Inc. Operating a fingerprint sensor comprised of ultrasonic transducers and a presence sensor
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US11995909B2 (en) 2020-07-17 2024-05-28 Tdk Corporation Multipath reflection correction
US12174295B2 (en) 2020-08-07 2024-12-24 Tdk Corporation Acoustic multipath correction
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US12197681B2 (en) 2021-08-25 2025-01-14 Tdk Corporation Anchor configurations for an array of ultrasonic transducers
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Also Published As

Publication number Publication date
CN103958079B (zh) 2016-08-24
MX2014005795A (es) 2014-05-30
EP2747905B1 (en) 2021-10-20
JP6265906B2 (ja) 2018-01-24
RU2014124363A (ru) 2015-12-27
US20140265721A1 (en) 2014-09-18
JP2014533907A (ja) 2014-12-15
IN2014CN03656A (enExample) 2015-10-16
US20170353129A1 (en) 2017-12-07
US10128777B2 (en) 2018-11-13
EP2747905A1 (en) 2014-07-02
RU2609917C2 (ru) 2017-02-07
US9762148B2 (en) 2017-09-12
WO2013072803A1 (en) 2013-05-23
CN103958079A (zh) 2014-07-30

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Legal Events

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B06F Objections, documents and/or translations needed after an examination request according [chapter 6.6 patent gazette]
B06U Preliminary requirement: requests with searches performed by other patent offices: procedure suspended [chapter 6.21 patent gazette]
B11B Dismissal acc. art. 36, par 1 of ipl - no reply within 90 days to fullfil the necessary requirements
B350 Update of information on the portal [chapter 15.35 patent gazette]