JP6264525B2 - 赤外線センサー、熱検知素子及びそれを用いた熱検知方法 - Google Patents

赤外線センサー、熱検知素子及びそれを用いた熱検知方法 Download PDF

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JP6264525B2
JP6264525B2 JP2013062664A JP2013062664A JP6264525B2 JP 6264525 B2 JP6264525 B2 JP 6264525B2 JP 2013062664 A JP2013062664 A JP 2013062664A JP 2013062664 A JP2013062664 A JP 2013062664A JP 6264525 B2 JP6264525 B2 JP 6264525B2
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dielectric film
heat
heat detection
phase
amount
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Japanese (ja)
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JP2014186002A (ja
JP2014186002A5 (enExample
Inventor
貴幸 米村
貴幸 米村
貴史 野田
貴史 野田
泰 土屋
泰 土屋
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Seiko Epson Corp
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Seiko Epson Corp
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Priority to JP2013062664A priority Critical patent/JP6264525B2/ja
Priority to CN201410105432.9A priority patent/CN104075810B/zh
Priority to EP20140161094 priority patent/EP2784460A1/en
Priority to US14/221,951 priority patent/US9182287B2/en
Publication of JP2014186002A publication Critical patent/JP2014186002A/ja
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
    • G01J5/20—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using resistors, thermistors or semiconductors sensitive to radiation, e.g. photoconductive devices
    • G01J5/22—Electrical features thereof
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
    • G01J5/34—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using capacitors, e.g. pyroelectric capacitors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K7/00—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
  • Radiation Pyrometers (AREA)
JP2013062664A 2013-03-25 2013-03-25 赤外線センサー、熱検知素子及びそれを用いた熱検知方法 Expired - Fee Related JP6264525B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2013062664A JP6264525B2 (ja) 2013-03-25 2013-03-25 赤外線センサー、熱検知素子及びそれを用いた熱検知方法
CN201410105432.9A CN104075810B (zh) 2013-03-25 2014-03-20 红外线传感器、热检测元件及使用了它的热检测方法
EP20140161094 EP2784460A1 (en) 2013-03-25 2014-03-21 Infrared sensor, heat sensing element, and heat sensing method using the same
US14/221,951 US9182287B2 (en) 2013-03-25 2014-03-21 Infrared sensor, heat sensing element, and heat sensing method using the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2013062664A JP6264525B2 (ja) 2013-03-25 2013-03-25 赤外線センサー、熱検知素子及びそれを用いた熱検知方法

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JP2014186002A JP2014186002A (ja) 2014-10-02
JP2014186002A5 JP2014186002A5 (enExample) 2016-05-26
JP6264525B2 true JP6264525B2 (ja) 2018-01-24

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US (1) US9182287B2 (enExample)
EP (1) EP2784460A1 (enExample)
JP (1) JP6264525B2 (enExample)
CN (1) CN104075810B (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109802033B (zh) * 2018-12-19 2023-04-28 华南师范大学 一种利用离子注入诱导BiFeO3薄膜可逆相变的方法
CN111297336B (zh) * 2020-02-24 2021-08-06 清华大学 一种基于红外和太赫兹的体温测量方法、装置及安检设备
US11933524B2 (en) * 2020-09-10 2024-03-19 The Regents Of The University Of California Tandem-structured cooling device driven by electrostatic force
WO2024206081A1 (en) * 2023-03-24 2024-10-03 Sri International Materials for temperature-actuated optical switching at infrared wavelengths

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JPS5721802B2 (enExample) * 1974-07-20 1982-05-10
JPS60131703A (ja) * 1983-12-20 1985-07-13 松下電器産業株式会社 焦電形熱検出素子
GB2217442B (en) 1988-04-22 1992-04-15 Philips Electronic Associated Temperature compensated thermal radiation detectors
US5141903A (en) * 1989-03-31 1992-08-25 Mitsubishi Mining And Cement Co. Ltd. Pyroelectric ceramic composition
JPH04357888A (ja) * 1991-06-04 1992-12-10 Ube Ind Ltd 焦電型赤外線検出素子
US5293261A (en) * 1992-12-31 1994-03-08 The United States Of America As Represented By The Secretary Of The Navy Device for low electric-field induced switching of Langmuir-Blodgett ferroelecric liquid crystal polymer films
JPH07106658A (ja) * 1993-10-04 1995-04-21 Matsushita Electric Ind Co Ltd 薄膜材料
US5612536A (en) * 1994-02-07 1997-03-18 Matsushita Electric Industrial Co., Ltd. Thin film sensor element and method of manufacturing the same
JPH09126895A (ja) 1995-11-07 1997-05-16 Matsushita Electric Ind Co Ltd 焦電型赤外線検出器
DE19547934A1 (de) * 1995-12-22 1997-06-26 Deutsche Telekom Ag Verfahren zur Herstellung einer pyroelektrischen Mischung
US5949071A (en) 1997-08-14 1999-09-07 Sandia Corporation Uncooled thin film pyroelectric IR detector with aerogel thermal isolation
JP3975518B2 (ja) * 1997-08-21 2007-09-12 株式会社豊田中央研究所 圧電セラミックス
JP2000019013A (ja) * 1998-04-30 2000-01-21 Nissan Motor Co Ltd 赤外線検出装置
JP4257989B2 (ja) * 1998-10-19 2009-04-30 三菱電機株式会社 赤外線検出装置及びそれを用いた赤外線検出器アレイ
EP1250620A2 (en) 2000-01-03 2002-10-23 Mems Optical, Inc. An optical router including bistable optical switch and method thereof
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CN101670691B (zh) * 2005-12-29 2013-04-17 同济大学 工作温区可调且热释电系数较大的反铁电薄膜及其制备
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JP2009068863A (ja) 2007-09-10 2009-04-02 Toshiba Corp 赤外線検出素子及びそれを用いた赤外線イメージセンサ
JP2011207202A (ja) 2009-11-02 2011-10-20 Seiko Epson Corp 液体噴射ヘッド、液体噴射装置及び圧電素子並びに圧電材料
JP5621964B2 (ja) 2009-11-02 2014-11-12 セイコーエプソン株式会社 液体噴射ヘッド、液体噴射装置及び圧電素子並びに超音波デバイス
JP5577844B2 (ja) 2009-11-02 2014-08-27 セイコーエプソン株式会社 液体噴射装置
JP5736744B2 (ja) * 2010-01-26 2015-06-17 セイコーエプソン株式会社 熱センサーデバイス及び電子機器
JP5534179B2 (ja) 2010-03-09 2014-06-25 セイコーエプソン株式会社 圧電体膜、圧電素子、液体噴射ヘッド及び液体噴射装置
JP5733487B2 (ja) 2010-03-09 2015-06-10 セイコーエプソン株式会社 液体噴射ヘッド、液体噴射装置、超音波デバイス及び圧電素子並びに圧電材料
JP5760406B2 (ja) 2010-11-29 2015-08-12 セイコーエプソン株式会社 検出回路、センサーデバイス及び電子機器

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Publication number Publication date
CN104075810B (zh) 2017-12-26
JP2014186002A (ja) 2014-10-02
CN104075810A (zh) 2014-10-01
US20150129765A1 (en) 2015-05-14
US9182287B2 (en) 2015-11-10
EP2784460A1 (en) 2014-10-01

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