CN104075810B - 红外线传感器、热检测元件及使用了它的热检测方法 - Google Patents
红外线传感器、热检测元件及使用了它的热检测方法 Download PDFInfo
- Publication number
- CN104075810B CN104075810B CN201410105432.9A CN201410105432A CN104075810B CN 104075810 B CN104075810 B CN 104075810B CN 201410105432 A CN201410105432 A CN 201410105432A CN 104075810 B CN104075810 B CN 104075810B
- Authority
- CN
- China
- Prior art keywords
- detection element
- dielectric film
- thermal detection
- amount
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
- G01J5/20—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using resistors, thermistors or semiconductors sensitive to radiation, e.g. photoconductive devices
- G01J5/22—Electrical features thereof
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
- G01J5/34—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using capacitors, e.g. pyroelectric capacitors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K7/00—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
- Radiation Pyrometers (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013-062664 | 2013-03-25 | ||
| JP2013062664A JP6264525B2 (ja) | 2013-03-25 | 2013-03-25 | 赤外線センサー、熱検知素子及びそれを用いた熱検知方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104075810A CN104075810A (zh) | 2014-10-01 |
| CN104075810B true CN104075810B (zh) | 2017-12-26 |
Family
ID=50336213
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410105432.9A Expired - Fee Related CN104075810B (zh) | 2013-03-25 | 2014-03-20 | 红外线传感器、热检测元件及使用了它的热检测方法 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US9182287B2 (enExample) |
| EP (1) | EP2784460A1 (enExample) |
| JP (1) | JP6264525B2 (enExample) |
| CN (1) | CN104075810B (enExample) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109802033B (zh) * | 2018-12-19 | 2023-04-28 | 华南师范大学 | 一种利用离子注入诱导BiFeO3薄膜可逆相变的方法 |
| CN111297336B (zh) * | 2020-02-24 | 2021-08-06 | 清华大学 | 一种基于红外和太赫兹的体温测量方法、装置及安检设备 |
| US11933524B2 (en) * | 2020-09-10 | 2024-03-19 | The Regents Of The University Of California | Tandem-structured cooling device driven by electrostatic force |
| WO2024206081A1 (en) * | 2023-03-24 | 2024-10-03 | Sri International | Materials for temperature-actuated optical switching at infrared wavelengths |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1121999A (zh) * | 1994-02-07 | 1996-05-08 | 松下电器产业株式会社 | 薄膜传感元件及其制造方法 |
| US6211520B1 (en) * | 1998-10-19 | 2001-04-03 | Mitsubishi Denki Kabushiki Kaisha | Infrared sensor and infrared sensor array using the same |
| CN1990418A (zh) * | 2005-12-29 | 2007-07-04 | 同济大学 | 作为热释电材料的反铁电薄膜及其制备方法和应用 |
| CN101670691A (zh) * | 2005-12-29 | 2010-03-17 | 同济大学 | 工作温区可调且热释电系数较大的反铁电薄膜及其制备 |
Family Cites Families (24)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4923898Y1 (enExample) * | 1968-07-29 | 1974-06-27 | ||
| FR2223868A1 (en) | 1973-03-26 | 1974-10-25 | Licentia Gmbh | Infra red detectors with improved sensitivity - using phase change in mixed crystal of lead and barium zirconates |
| JPS5721802B2 (enExample) * | 1974-07-20 | 1982-05-10 | ||
| JPS60131703A (ja) * | 1983-12-20 | 1985-07-13 | 松下電器産業株式会社 | 焦電形熱検出素子 |
| GB2217442B (en) | 1988-04-22 | 1992-04-15 | Philips Electronic Associated | Temperature compensated thermal radiation detectors |
| US5141903A (en) * | 1989-03-31 | 1992-08-25 | Mitsubishi Mining And Cement Co. Ltd. | Pyroelectric ceramic composition |
| JPH04357888A (ja) * | 1991-06-04 | 1992-12-10 | Ube Ind Ltd | 焦電型赤外線検出素子 |
| US5293261A (en) * | 1992-12-31 | 1994-03-08 | The United States Of America As Represented By The Secretary Of The Navy | Device for low electric-field induced switching of Langmuir-Blodgett ferroelecric liquid crystal polymer films |
| JPH07106658A (ja) * | 1993-10-04 | 1995-04-21 | Matsushita Electric Ind Co Ltd | 薄膜材料 |
| JPH09126895A (ja) | 1995-11-07 | 1997-05-16 | Matsushita Electric Ind Co Ltd | 焦電型赤外線検出器 |
| DE19547934A1 (de) * | 1995-12-22 | 1997-06-26 | Deutsche Telekom Ag | Verfahren zur Herstellung einer pyroelektrischen Mischung |
| US5949071A (en) | 1997-08-14 | 1999-09-07 | Sandia Corporation | Uncooled thin film pyroelectric IR detector with aerogel thermal isolation |
| JP3975518B2 (ja) * | 1997-08-21 | 2007-09-12 | 株式会社豊田中央研究所 | 圧電セラミックス |
| JP2000019013A (ja) * | 1998-04-30 | 2000-01-21 | Nissan Motor Co Ltd | 赤外線検出装置 |
| EP1250620A2 (en) | 2000-01-03 | 2002-10-23 | Mems Optical, Inc. | An optical router including bistable optical switch and method thereof |
| WO2004079311A1 (ja) * | 2003-03-07 | 2004-09-16 | Fujitsu Limited | 電磁放射線センサ及びその製造方法 |
| JP2009068863A (ja) | 2007-09-10 | 2009-04-02 | Toshiba Corp | 赤外線検出素子及びそれを用いた赤外線イメージセンサ |
| JP2011207202A (ja) | 2009-11-02 | 2011-10-20 | Seiko Epson Corp | 液体噴射ヘッド、液体噴射装置及び圧電素子並びに圧電材料 |
| JP5621964B2 (ja) | 2009-11-02 | 2014-11-12 | セイコーエプソン株式会社 | 液体噴射ヘッド、液体噴射装置及び圧電素子並びに超音波デバイス |
| JP5577844B2 (ja) | 2009-11-02 | 2014-08-27 | セイコーエプソン株式会社 | 液体噴射装置 |
| JP5736744B2 (ja) * | 2010-01-26 | 2015-06-17 | セイコーエプソン株式会社 | 熱センサーデバイス及び電子機器 |
| JP5534179B2 (ja) | 2010-03-09 | 2014-06-25 | セイコーエプソン株式会社 | 圧電体膜、圧電素子、液体噴射ヘッド及び液体噴射装置 |
| JP5733487B2 (ja) | 2010-03-09 | 2015-06-10 | セイコーエプソン株式会社 | 液体噴射ヘッド、液体噴射装置、超音波デバイス及び圧電素子並びに圧電材料 |
| JP5760406B2 (ja) | 2010-11-29 | 2015-08-12 | セイコーエプソン株式会社 | 検出回路、センサーデバイス及び電子機器 |
-
2013
- 2013-03-25 JP JP2013062664A patent/JP6264525B2/ja not_active Expired - Fee Related
-
2014
- 2014-03-20 CN CN201410105432.9A patent/CN104075810B/zh not_active Expired - Fee Related
- 2014-03-21 EP EP20140161094 patent/EP2784460A1/en not_active Withdrawn
- 2014-03-21 US US14/221,951 patent/US9182287B2/en not_active Expired - Fee Related
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1121999A (zh) * | 1994-02-07 | 1996-05-08 | 松下电器产业株式会社 | 薄膜传感元件及其制造方法 |
| US6211520B1 (en) * | 1998-10-19 | 2001-04-03 | Mitsubishi Denki Kabushiki Kaisha | Infrared sensor and infrared sensor array using the same |
| CN1990418A (zh) * | 2005-12-29 | 2007-07-04 | 同济大学 | 作为热释电材料的反铁电薄膜及其制备方法和应用 |
| CN101670691A (zh) * | 2005-12-29 | 2010-03-17 | 同济大学 | 工作温区可调且热释电系数较大的反铁电薄膜及其制备 |
Non-Patent Citations (1)
| Title |
|---|
| 铁电陶瓷在铁电-反铁电相变附近存在可逆热释电响应;董显林;《中国基础科学》;20100331;第12卷(第3期);正文摘要,第1段 * |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2014186002A (ja) | 2014-10-02 |
| CN104075810A (zh) | 2014-10-01 |
| JP6264525B2 (ja) | 2018-01-24 |
| US20150129765A1 (en) | 2015-05-14 |
| US9182287B2 (en) | 2015-11-10 |
| EP2784460A1 (en) | 2014-10-01 |
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| PB01 | Publication | ||
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| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20171226 |
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| CF01 | Termination of patent right due to non-payment of annual fee |