JP6256000B2 - 蒸着マスク装置の製造方法 - Google Patents
蒸着マスク装置の製造方法 Download PDFInfo
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- JP6256000B2 JP6256000B2 JP2013273144A JP2013273144A JP6256000B2 JP 6256000 B2 JP6256000 B2 JP 6256000B2 JP 2013273144 A JP2013273144 A JP 2013273144A JP 2013273144 A JP2013273144 A JP 2013273144A JP 6256000 B2 JP6256000 B2 JP 6256000B2
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- vapor deposition
- deposition mask
- protective film
- metal plate
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- 238000007740 vapor deposition Methods 0.000 title claims description 296
- 238000004519 manufacturing process Methods 0.000 title claims description 47
- 238000000034 method Methods 0.000 title claims description 39
- 229910052751 metal Inorganic materials 0.000 claims description 147
- 239000002184 metal Substances 0.000 claims description 147
- 230000001681 protective effect Effects 0.000 claims description 130
- 239000000758 substrate Substances 0.000 claims description 61
- 238000000151 deposition Methods 0.000 claims description 18
- 230000008021 deposition Effects 0.000 claims description 17
- 230000001678 irradiating effect Effects 0.000 claims description 13
- 238000003466 welding Methods 0.000 claims description 11
- 239000012790 adhesive layer Substances 0.000 claims description 7
- 230000007423 decrease Effects 0.000 claims description 7
- 239000000853 adhesive Substances 0.000 claims description 6
- 230000001070 adhesive effect Effects 0.000 claims description 6
- 239000010408 film Substances 0.000 description 129
- 239000000463 material Substances 0.000 description 110
- 239000010410 layer Substances 0.000 description 63
- 238000005530 etching Methods 0.000 description 46
- 238000010586 diagram Methods 0.000 description 26
- 239000011521 glass Substances 0.000 description 25
- 230000008569 process Effects 0.000 description 18
- 239000000243 solution Substances 0.000 description 10
- 238000000059 patterning Methods 0.000 description 6
- 238000005520 cutting process Methods 0.000 description 5
- 230000003628 erosive effect Effects 0.000 description 5
- 230000008020 evaporation Effects 0.000 description 5
- 238000001704 evaporation Methods 0.000 description 5
- 230000004048 modification Effects 0.000 description 5
- 238000012986 modification Methods 0.000 description 5
- 238000005304 joining Methods 0.000 description 4
- 230000009466 transformation Effects 0.000 description 4
- 229910001374 Invar Inorganic materials 0.000 description 3
- 229910021578 Iron(III) chloride Inorganic materials 0.000 description 3
- RBTARNINKXHZNM-UHFFFAOYSA-K iron trichloride Chemical compound Cl[Fe](Cl)Cl RBTARNINKXHZNM-UHFFFAOYSA-K 0.000 description 3
- 239000007788 liquid Substances 0.000 description 3
- 229910052759 nickel Inorganic materials 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 2
- 239000007864 aqueous solution Substances 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 239000003795 chemical substances by application Substances 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 230000001771 impaired effect Effects 0.000 description 2
- 239000011295 pitch Substances 0.000 description 2
- 229920000139 polyethylene terephthalate Polymers 0.000 description 2
- 239000005020 polyethylene terephthalate Substances 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 239000012298 atmosphere Substances 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 239000011368 organic material Substances 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 230000035699 permeability Effects 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- -1 polyethylene terephthalate Polymers 0.000 description 1
- 229910000029 sodium carbonate Inorganic materials 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 230000008646 thermal stress Effects 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
- 238000009966 trimming Methods 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- C23F1/00—Etching metallic material by chemical means
- C23F1/02—Local etching
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/04—Coating on selected surface areas, e.g. using masks
- C23C14/042—Coating on selected surface areas, e.g. using masks using masks
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/12—Organic material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- C23F1/00—Etching metallic material by chemical means
- C23F1/10—Etching compositions
- C23F1/14—Aqueous compositions
- C23F1/16—Acidic compositions
- C23F1/28—Acidic compositions for etching iron group metals
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/12—Production of screen printing forms or similar printing forms, e.g. stencils
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Electroluminescent Light Sources (AREA)
- Physical Vapour Deposition (AREA)
Description
金属枠体と、前記金属枠体上に設けられた蒸着マスクと、を有する蒸着マスク装置の製造方法において、
金属基材を含むシート状の前記蒸着マスクと、前記蒸着マスクの一方の面に設けられ、レーザ光に対して透過性を有する保護フィルムと、を有する保護フィルム付き蒸着マスクを準備する工程と、
前記保護フィルム付き蒸着マスクを、前記金属基材が前記金属枠体側に配置されるように当該金属枠体上に載置する工程と、
前記保護フィルム側からレーザ光を照射して、前記金属基材を前記金属枠体に溶接する工程と、
前記金属基材を前記金属枠体に溶接する工程の後、前記保護フィルムを前記蒸着マスクから除去する工程と、を備えたことを特徴とする蒸着マスク装置の製造方法、
を提供する。
蒸着マスク装置の金属枠体に溶接される保護フィルム付き蒸着マスクにおいて、
金属基材を含むシート状の蒸着マスクと、
前記蒸着マスクの一方の面に設けられた保護フィルムと、を備え、
前記保護フィルムは、レーザ光に対して透過性を有し、
当該保護フィルム付き蒸着マスクを前記金属枠体に溶接する際、前記金属基材が前記金属枠体側に配置されて前記保護フィルム側からレーザ光が照射され、前記金属基材が前記金属枠体に溶接されることを特徴とする保護フィルム付き蒸着マスク、
を提供する。
20a 第1面
20b 第2面
21 金属板
21a 第1面
21b 第2面
25 貫通孔
30 基材穴
31 壁面
35 基材凹部
36 壁面
50 保護フィルム付き蒸着マスク
71 長尺金属板
71a 第1面
71b 第2面
81 第1レジスト層
81a 第1レジスト層開口部
82 第2レジスト層
82a 第2レジスト層開口部
83 第1面側保護フィルム
84 第2面側保護フィルム
85 レーザ光照射部
86 溶接部
87 張力負荷部
88 UV光照射部
Claims (3)
- 金属枠体と、前記金属枠体上に設けられた蒸着マスクと、を有する蒸着マスク装置の製造方法において、
金属基材を含むシート状の前記蒸着マスクと、前記蒸着マスクの一方の面に設けられ、レーザ光に対して透過性を有する保護フィルムと、を有する保護フィルム付き蒸着マスクを準備する工程と、
前記保護フィルム付き蒸着マスクを、前記金属基材が前記金属枠体側に配置されるように当該金属枠体上に載置する工程と、
前記保護フィルム側からレーザ光を照射して、前記金属基材を前記金属枠体に溶接する工程と、
前記金属基材を前記金属枠体に溶接する工程の後、前記保護フィルムを前記蒸着マスクから除去する工程と、を備えたことを特徴とする蒸着マスク装置の製造方法。 - 前記保護フィルムは、UV光を照射することにより前記蒸着マスクから剥離可能であり、
前記金属基材を前記金属枠体に溶接する工程の後、前記保護フィルムを前記蒸着マスクから除去する工程の前に、前記保護フィルムにUV光が照射されることを特徴とする請求項1に記載の蒸着マスク装置の製造方法。 - 前記保護フィルムは、保護フィルム基材と、前記保護フィルム基材の一方の面に設けられた粘着層と、を有し、
前記粘着層は、UV光を照射することにより粘着力が低下することを特徴とする請求項2に記載の蒸着マスク装置の製造方法。
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JP2013273144A JP6256000B2 (ja) | 2013-12-27 | 2013-12-27 | 蒸着マスク装置の製造方法 |
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JP2017177002A Division JP6497596B2 (ja) | 2017-09-14 | 2017-09-14 | 蒸着マスク装置の中間体 |
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JP2015127446A JP2015127446A (ja) | 2015-07-09 |
JP6256000B2 true JP6256000B2 (ja) | 2018-01-10 |
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Cited By (1)
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CN110184582A (zh) * | 2018-02-23 | 2019-08-30 | 京东方科技集团股份有限公司 | 掩膜版及其制作方法和显示装置 |
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KR102071840B1 (ko) | 2015-07-17 | 2020-01-31 | 도판 인사츠 가부시키가이샤 | 메탈 마스크 기재, 메탈 마스크, 및 메탈 마스크의 제조 방법 |
WO2017014016A1 (ja) | 2015-07-17 | 2017-01-26 | 凸版印刷株式会社 | メタルマスク用基材の製造方法、蒸着用メタルマスクの製造方法、メタルマスク用基材、および、蒸着用メタルマスク |
WO2017014172A1 (ja) | 2015-07-17 | 2017-01-26 | 凸版印刷株式会社 | 蒸着用メタルマスク基材、蒸着用メタルマスク、蒸着用メタルマスク基材の製造方法、および、蒸着用メタルマスクの製造方法 |
JP6686549B2 (ja) * | 2016-03-07 | 2020-04-22 | 大日本印刷株式会社 | 蒸着マスク装置の製造方法及び蒸着マスク装置 |
WO2018051444A1 (ja) * | 2016-09-14 | 2018-03-22 | シャープ株式会社 | マスクシート、蒸着マスク、表示パネルの製造方法 |
KR102314854B1 (ko) * | 2017-05-02 | 2021-10-18 | 주식회사 오럼머티리얼 | 프레임 일체형 마스크의 제조 방법 |
KR102266250B1 (ko) * | 2017-05-02 | 2021-06-17 | 주식회사 오럼머티리얼 | 프레임 일체형 마스크의 제조 방법 |
KR102028639B1 (ko) * | 2018-03-30 | 2019-10-04 | 주식회사 티지오테크 | 마스크의 제조 방법, 마스크 지지 버퍼기판과 그의 제조 방법 |
WO2019190121A1 (ko) * | 2018-03-30 | 2019-10-03 | 주식회사 티지오테크 | 마스크의 제조 방법, 마스크 지지 버퍼기판과 그의 제조 방법 |
KR102202529B1 (ko) * | 2018-11-27 | 2021-01-13 | 주식회사 오럼머티리얼 | 프레임 일체형 마스크의 제조 방법 및 프레임 일체형 마스크의 마스크 분리/교체 방법 |
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JP4985227B2 (ja) * | 2007-08-24 | 2012-07-25 | 大日本印刷株式会社 | 蒸着マスク、蒸着マスク装置、蒸着マスクの製造方法、蒸着マスク装置の製造方法、および、蒸着マスク用シート状部材の製造方法 |
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CN110184582A (zh) * | 2018-02-23 | 2019-08-30 | 京东方科技集团股份有限公司 | 掩膜版及其制作方法和显示装置 |
CN110184582B (zh) * | 2018-02-23 | 2021-09-14 | 京东方科技集团股份有限公司 | 掩膜版及其制作方法和显示装置 |
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