JP6253748B2 - 成膜方法及び成膜装置 - Google Patents
成膜方法及び成膜装置 Download PDFInfo
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- JP6253748B2 JP6253748B2 JP2016218913A JP2016218913A JP6253748B2 JP 6253748 B2 JP6253748 B2 JP 6253748B2 JP 2016218913 A JP2016218913 A JP 2016218913A JP 2016218913 A JP2016218913 A JP 2016218913A JP 6253748 B2 JP6253748 B2 JP 6253748B2
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- film
- aln
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- alon
- tma
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- 238000000034 method Methods 0.000 title claims description 94
- JLTRXTDYQLMHGR-UHFFFAOYSA-N trimethylaluminium Chemical compound C[Al](C)C JLTRXTDYQLMHGR-UHFFFAOYSA-N 0.000 claims description 105
- 239000000758 substrate Substances 0.000 claims description 89
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims description 87
- 229910010271 silicon carbide Inorganic materials 0.000 claims description 86
- 238000010438 heat treatment Methods 0.000 claims description 42
- 230000015572 biosynthetic process Effects 0.000 claims description 33
- 230000003647 oxidation Effects 0.000 claims description 30
- 238000007254 oxidation reaction Methods 0.000 claims description 30
- 229910052782 aluminium Inorganic materials 0.000 claims description 11
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 11
- 238000000151 deposition Methods 0.000 claims description 10
- 230000008021 deposition Effects 0.000 claims description 7
- 230000001590 oxidative effect Effects 0.000 claims description 6
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 claims description 3
- 229910003460 diamond Inorganic materials 0.000 claims description 3
- 239000010432 diamond Substances 0.000 claims description 3
- VOITXYVAKOUIBA-UHFFFAOYSA-N triethylaluminium Chemical compound CC[Al](CC)CC VOITXYVAKOUIBA-UHFFFAOYSA-N 0.000 claims description 2
- 229910017109 AlON Inorganic materials 0.000 claims 4
- 229910002601 GaN Inorganic materials 0.000 claims 1
- 239000007789 gas Substances 0.000 description 79
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 60
- 235000012431 wafers Nutrition 0.000 description 52
- 230000008569 process Effects 0.000 description 32
- 229910052757 nitrogen Inorganic materials 0.000 description 30
- 238000005229 chemical vapour deposition Methods 0.000 description 29
- 229910004298 SiO 2 Inorganic materials 0.000 description 26
- 239000002052 molecular layer Substances 0.000 description 24
- 238000000231 atomic layer deposition Methods 0.000 description 22
- 238000000137 annealing Methods 0.000 description 18
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 16
- 238000006243 chemical reaction Methods 0.000 description 12
- 238000001312 dry etching Methods 0.000 description 10
- 230000006870 function Effects 0.000 description 9
- 239000012528 membrane Substances 0.000 description 8
- 238000005121 nitriding Methods 0.000 description 8
- 238000001179 sorption measurement Methods 0.000 description 8
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 7
- 229910052760 oxygen Inorganic materials 0.000 description 7
- 239000001301 oxygen Substances 0.000 description 7
- 238000007599 discharging Methods 0.000 description 6
- 238000003860 storage Methods 0.000 description 6
- 239000006227 byproduct Substances 0.000 description 5
- 238000009792 diffusion process Methods 0.000 description 5
- MWUXSHHQAYIFBG-UHFFFAOYSA-N nitrogen oxide Inorganic materials O=[N] MWUXSHHQAYIFBG-UHFFFAOYSA-N 0.000 description 5
- GQPLMRYTRLFLPF-UHFFFAOYSA-N Nitrous Oxide Chemical compound [O-][N+]#N GQPLMRYTRLFLPF-UHFFFAOYSA-N 0.000 description 4
- 230000009471 action Effects 0.000 description 4
- 239000013078 crystal Substances 0.000 description 4
- 238000005240 physical vapour deposition Methods 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 230000000052 comparative effect Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000010893 electron trap Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000001020 plasma etching Methods 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 229910052814 silicon oxide Inorganic materials 0.000 description 3
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 238000010030 laminating Methods 0.000 description 2
- 239000001272 nitrous oxide Substances 0.000 description 2
- 125000004430 oxygen atom Chemical group O* 0.000 description 2
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 description 1
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 229910021529 ammonia Inorganic materials 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 229910002092 carbon dioxide Inorganic materials 0.000 description 1
- 239000001569 carbon dioxide Substances 0.000 description 1
- 229910002091 carbon monoxide Inorganic materials 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 238000010926 purge Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000001629 suppression Effects 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 229910001868 water Inorganic materials 0.000 description 1
Landscapes
- Formation Of Insulating Films (AREA)
Description
10、26、31 成膜装置
13、36 ガス導入部
13a〜13c、30a〜30c、36a〜36c ガス導入管
15 ヒータ
16 MOSFET
17 SiC基板
21 ゲート絶縁膜
23 AlN膜
24 AlO膜
25 AlON膜
Claims (6)
- チャンバ内において、膜厚が50nm以上のAlON膜からなるゲート絶縁膜を成膜する成膜方法であって、
AlN膜を成膜する成膜ステップと、
前記成膜されたAlN膜を酸化する酸化ステップとを有し、
前記成膜ステップでは、前記チャンバ内にアルミニウム源ガスを導入した後、前記チャンバ内を排気しながらも余分なアルミニウム源ガスの分子を全て排出する前にNH 3 ガスを導入し、且つ前記AlN膜が成膜される基板を加熱してNH 3 をアルミニウムと化学反応させ、
前記酸化ステップでは、前記チャンバ内にO 3 ガスを導入し、且つ前記AlN膜が成膜された基板を加熱してO 3 をAlNと化学反応させ、
前記成膜ステップ及び前記酸化ステップを交互に繰り返して前記酸化されたAlN膜が積層された積層構造を有するAlON膜を形成することを特徴とする成膜方法。 - 前記AlON膜は基板上に形成され、前記基板は、炭化珪素、窒化ガリウム及びダイヤモンドのいずれかを含むことを特徴とする請求項1記載の成膜方法。
- 前記積層構造を有するAlON膜に熱処理を施すことを特徴とする請求項1又は2記載の成膜方法。
- 前記AlN膜の成膜はALD又はCVDによって実行されることを特徴とする請求項1乃至3のいずれか1項に記載の成膜方法。
- 前記アルミニウム源ガスは、TMA(Trimethylaluminum)又はトリエチルアルミニウムであることを特徴とする請求項1乃至4のいずれか1項に記載の成膜方法。
- AlN膜の成膜を行う成膜手段と、前記成膜されたAlN膜の酸化を行う酸化手段とを備える成膜装置において、
前記成膜手段及び前記酸化手段は、前記成膜ステップ及び前記酸化ステップを交互に繰り返して請求項1乃至5のいずれか1項に記載の成膜方法を実行することを特徴とする成膜装置。
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CN116913984B (zh) * | 2023-09-12 | 2024-01-30 | 通威太阳能(眉山)有限公司 | 电介质层及制备方法、太阳电池、光伏组件 |
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JP4099092B2 (ja) * | 2002-03-26 | 2008-06-11 | 東京エレクトロン株式会社 | 基板処理装置および基板処理方法、高速ロータリバルブ |
US6849464B2 (en) * | 2002-06-10 | 2005-02-01 | Micron Technology, Inc. | Method of fabricating a multilayer dielectric tunnel barrier structure |
KR100460841B1 (ko) * | 2002-10-22 | 2004-12-09 | 한국전자통신연구원 | 플라즈마 인가 원자층 증착법을 통한 질소첨가 산화물박막의 형성방법 |
JP4748927B2 (ja) * | 2003-03-25 | 2011-08-17 | ローム株式会社 | 半導体装置 |
JP2005064317A (ja) * | 2003-08-18 | 2005-03-10 | Semiconductor Leading Edge Technologies Inc | 半導体装置 |
US8653533B2 (en) * | 2009-09-07 | 2014-02-18 | Rohm Co., Ltd. | Semiconductor device and method of manufacturing the same |
JP5572447B2 (ja) * | 2010-05-25 | 2014-08-13 | 株式会社日立国際電気 | 半導体装置の製造方法、基板処理方法及び基板処理装置 |
WO2012105611A1 (ja) * | 2011-02-02 | 2012-08-09 | ローム株式会社 | 半導体パワーデバイスおよびその製造方法 |
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