JP6252248B2 - 超音波デバイスおよびその製造方法並びにプローブ、電子機器および超音波画像装置 - Google Patents
超音波デバイスおよびその製造方法並びにプローブ、電子機器および超音波画像装置 Download PDFInfo
- Publication number
- JP6252248B2 JP6252248B2 JP2014037269A JP2014037269A JP6252248B2 JP 6252248 B2 JP6252248 B2 JP 6252248B2 JP 2014037269 A JP2014037269 A JP 2014037269A JP 2014037269 A JP2014037269 A JP 2014037269A JP 6252248 B2 JP6252248 B2 JP 6252248B2
- Authority
- JP
- Japan
- Prior art keywords
- ultrasonic
- ultrasonic transducer
- filler
- transducer elements
- ultrasonic device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000000523 sample Substances 0.000 title claims description 21
- 238000004519 manufacturing process Methods 0.000 title claims description 15
- 238000003384 imaging method Methods 0.000 title claims description 7
- 239000000463 material Substances 0.000 claims description 89
- 239000000945 filler Substances 0.000 claims description 74
- 239000000758 substrate Substances 0.000 claims description 47
- 239000002245 particle Substances 0.000 claims description 18
- 238000000034 method Methods 0.000 claims description 9
- 230000008569 process Effects 0.000 claims description 3
- 230000009969 flowable effect Effects 0.000 claims description 2
- 239000010408 film Substances 0.000 description 49
- 239000004020 conductor Substances 0.000 description 27
- 239000000843 powder Substances 0.000 description 14
- 230000001681 protective effect Effects 0.000 description 8
- 239000002994 raw material Substances 0.000 description 8
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 7
- 230000001788 irregular Effects 0.000 description 7
- 238000005192 partition Methods 0.000 description 6
- 229920002050 silicone resin Polymers 0.000 description 6
- 239000011248 coating agent Substances 0.000 description 5
- 238000000576 coating method Methods 0.000 description 5
- 238000005259 measurement Methods 0.000 description 5
- 230000004048 modification Effects 0.000 description 5
- 238000012986 modification Methods 0.000 description 5
- 239000012530 fluid Substances 0.000 description 4
- 239000010936 titanium Substances 0.000 description 4
- 230000002238 attenuated effect Effects 0.000 description 3
- 239000011159 matrix material Substances 0.000 description 3
- 239000012528 membrane Substances 0.000 description 3
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 3
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 3
- 229910052814 silicon oxide Inorganic materials 0.000 description 3
- 229910001928 zirconium oxide Inorganic materials 0.000 description 3
- 229910052582 BN Inorganic materials 0.000 description 2
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 2
- 230000009471 action Effects 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 229910052741 iridium Inorganic materials 0.000 description 2
- GKOZUEZYRPOHIO-UHFFFAOYSA-N iridium atom Chemical compound [Ir] GKOZUEZYRPOHIO-UHFFFAOYSA-N 0.000 description 2
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 2
- 230000001902 propagating effect Effects 0.000 description 2
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 2
- 239000000377 silicon dioxide Substances 0.000 description 2
- 230000007480 spreading Effects 0.000 description 2
- 238000003892 spreading Methods 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000011343 solid material Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 238000002604 ultrasonography Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Images
Landscapes
- Ultra Sonic Daignosis Equipment (AREA)
- Transducers For Ultrasonic Waves (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2014037269A JP6252248B2 (ja) | 2014-02-27 | 2014-02-27 | 超音波デバイスおよびその製造方法並びにプローブ、電子機器および超音波画像装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2014037269A JP6252248B2 (ja) | 2014-02-27 | 2014-02-27 | 超音波デバイスおよびその製造方法並びにプローブ、電子機器および超音波画像装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2015162813A JP2015162813A (ja) | 2015-09-07 |
| JP2015162813A5 JP2015162813A5 (enrdf_load_stackoverflow) | 2017-03-23 |
| JP6252248B2 true JP6252248B2 (ja) | 2017-12-27 |
Family
ID=54185633
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2014037269A Active JP6252248B2 (ja) | 2014-02-27 | 2014-02-27 | 超音波デバイスおよびその製造方法並びにプローブ、電子機器および超音波画像装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP6252248B2 (enrdf_load_stackoverflow) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6468426B2 (ja) * | 2014-03-10 | 2019-02-13 | セイコーエプソン株式会社 | 超音波センサー |
| JP2017092097A (ja) * | 2015-11-04 | 2017-05-25 | セイコーエプソン株式会社 | 圧電素子、超音波プローブ、超音波測定装置及び圧電素子の製造方法 |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4787630B2 (ja) * | 2006-03-03 | 2011-10-05 | 日立アロカメディカル株式会社 | 超音波探触子 |
| US20080021328A1 (en) * | 2006-07-20 | 2008-01-24 | Konica Minolta Medical & Graphic, Inc. | Ultrasound probe and method of manufacturing ultrasound probe |
| JP5261152B2 (ja) * | 2008-11-27 | 2013-08-14 | 日立アロカメディカル株式会社 | 超音波振動子 |
-
2014
- 2014-02-27 JP JP2014037269A patent/JP6252248B2/ja active Active
Also Published As
| Publication number | Publication date |
|---|---|
| JP2015162813A (ja) | 2015-09-07 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US10707407B2 (en) | Ultrasonic device, method for manufacturing the same, electronic device and ultrasonic imaging device | |
| US9184370B2 (en) | Ultrasonic transducer device, ultrasonic measurement apparatus, head unit, probe, and ultrasonic imaging apparatus | |
| CN106964531B (zh) | 超声波换能器元件芯片、探测器以及电子设备 | |
| US10086405B2 (en) | Piezoelectric element, piezoelectric device, probe, electronic machine, and ultrasonic image apparatus | |
| JP6299509B2 (ja) | 超音波デバイスおよびプローブ並びに電子機器および超音波画像装置 | |
| JP6326833B2 (ja) | 超音波デバイス、超音波デバイスの製造方法、プローブ、電子機器、超音波画像装置 | |
| JP6252130B2 (ja) | 超音波デバイスおよびその製造方法並びに電子機器および超音波画像装置 | |
| JP6314777B2 (ja) | 超音波センサー並びにプローブおよび電子機器 | |
| JP6299511B2 (ja) | 超音波デバイス並びにプローブおよび電子機器 | |
| JP6273743B2 (ja) | 超音波デバイスおよびプローブ並びに電子機器および超音波画像装置 | |
| CN105310721B (zh) | 超声波器件及其制造方法、探测器及电子设备 | |
| JP6221582B2 (ja) | 超音波デバイスおよびプローブ並びに電子機器および超音波画像装置 | |
| JP6252279B2 (ja) | 超音波トランスデューサー装置およびプローブ並びに電子機器および超音波画像装置 | |
| JP2014195494A (ja) | 超音波トランスデューサー装置およびプローブ並びに電子機器および超音波画像装置 | |
| JP6252248B2 (ja) | 超音波デバイスおよびその製造方法並びにプローブ、電子機器および超音波画像装置 | |
| JP2015160104A (ja) | 超音波デバイスユニットおよびプローブ並びに電子機器および超音波画像装置 | |
| JP2017029571A (ja) | 圧電デバイスおよびプローブ並びに電子機器および超音波画像装置 | |
| JP2017000792A (ja) | 超音波トランスデューサー素子チップおよびプローブ並びに電子機器および超音波診断装置 | |
| JP2014197735A (ja) | 超音波トランスデューサー装置およびプローブ並びに電子機器および超音波画像装置 | |
| JP2016092591A (ja) | 超音波デバイスユニット並びにプローブおよび電子機器 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20170220 |
|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20170220 |
|
| A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20171023 |
|
| TRDD | Decision of grant or rejection written | ||
| A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20171031 |
|
| A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20171113 |
|
| R150 | Certificate of patent or registration of utility model |
Ref document number: 6252248 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |