JP6228385B2 - Ｃａｄベースのコンテクスト属性を利用した欠陥分類 - Google Patents

Ｃａｄベースのコンテクスト属性を利用した欠陥分類 Download PDF

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JP6228385B2
JP6228385B2 JP2013100672A JP2013100672A JP6228385B2 JP 6228385 B2 JP6228385 B2 JP 6228385B2 JP 2013100672 A JP2013100672 A JP 2013100672A JP 2013100672 A JP2013100672 A JP 2013100672A JP 6228385 B2 JP6228385 B2 JP 6228385B2
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defect
pattern
image
semiconductor wafer
attribute
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JP2013225312A (ja
JP2013225312A5 (enExample
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カイゼルマン イダン
カイゼルマン イダン
シュワルツバンド イシャイ
シュワルツバンド イシャイ
ローゼンマン エフラ
ローゼンマン エフラ
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アプライド マテリアルズ イスラエル リミテッド
アプライド マテリアルズ イスラエル リミテッド
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    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis
    • G06T7/0002—Inspection of images, e.g. flaw detection
    • G06T7/0004—Industrial image inspection
    • G06T7/001—Industrial image inspection using an image reference approach
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00—Indexing scheme for image analysis or image enhancement
    • G06T2207/10—Image acquisition modality
    • G06T2207/10056—Microscopic image
    • G06T2207/10061—Microscopic image from scanning electron microscope
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00—Indexing scheme for image analysis or image enhancement
    • G06T2207/30—Subject of image; Context of image processing
    • G06T2207/30108—Industrial image inspection
    • G06T2207/30148—Semiconductor; IC; Wafer

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  • Engineering & Computer Science (AREA)
  • Quality & Reliability (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Theoretical Computer Science (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Image Processing (AREA)
  • Image Analysis (AREA)
JP2013100672A 2012-04-19 2013-04-19 Ｃａｄベースのコンテクスト属性を利用した欠陥分類 Active JP6228385B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US13/451,486 2012-04-19
US13/451,486 US9858658B2 (en) 2012-04-19 2012-04-19 Defect classification using CAD-based context attributes

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JP2013225312A JP2013225312A (ja) 2013-10-31
JP2013225312A5 JP2013225312A5 (enExample) 2016-06-09
JP6228385B2 true JP6228385B2 (ja) 2017-11-08

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US (1) US9858658B2 (enExample)
JP (1) JP6228385B2 (enExample)
KR (1) KR102132328B1 (enExample)
TW (1) TWI616823B (enExample)

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Also Published As

Publication number Publication date
KR102132328B1 (ko) 2020-07-10
JP2013225312A (ja) 2013-10-31
US9858658B2 (en) 2018-01-02
KR20130118278A (ko) 2013-10-29
TW201351305A (zh) 2013-12-16
TWI616823B (zh) 2018-03-01
US20130279790A1 (en) 2013-10-24

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