JP6214766B2 - 基材管の除去を伴うプラズマ蒸着工程 - Google Patents

基材管の除去を伴うプラズマ蒸着工程 Download PDF

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Publication number
JP6214766B2
JP6214766B2 JP2016523684A JP2016523684A JP6214766B2 JP 6214766 B2 JP6214766 B2 JP 6214766B2 JP 2016523684 A JP2016523684 A JP 2016523684A JP 2016523684 A JP2016523684 A JP 2016523684A JP 6214766 B2 JP6214766 B2 JP 6214766B2
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Prior art keywords
substrate tube
tube
deposited
silica layer
mbar
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Japanese (ja)
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JP2016527169A (ja
JP2016527169A5 (enExample
Inventor
ミリセビク、イゴール
アントーン ハルトサイカー、ヨハンネス
アントーン ハルトサイカー、ヨハンネス
ストラーレン、マテーウス ヤコブス ニコラース ファン
ストラーレン、マテーウス ヤコブス ニコラース ファン
クラブスハイス、ハーチャン
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ドラカ・コムテツク・ベー・ベー
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Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01—Manufacture of glass fibres or filaments
    • C03B37/012—Manufacture of preforms for drawing fibres or filaments
    • C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
    • C03B37/018—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD] by glass deposition on a glass substrate, e.g. by inside-, modified-, plasma-, or plasma modified- chemical vapour deposition [ICVD, MCVD, PCVD, PMCVD], i.e. by thin layer coating on the inside or outside of a glass tube or on a glass rod
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/01—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes on temporary substrates, e.g. substrates subsequently removed by etching
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01—Manufacture of glass fibres or filaments
    • C03B37/012—Manufacture of preforms for drawing fibres or filaments
    • C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
    • C03B37/018—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD] by glass deposition on a glass substrate, e.g. by inside-, modified-, plasma-, or plasma modified- chemical vapour deposition [ICVD, MCVD, PCVD, PMCVD], i.e. by thin layer coating on the inside or outside of a glass tube or on a glass rod
    • C03B37/01807—Reactant delivery systems, e.g. reactant deposition burners
    • C03B37/01815—Reactant deposition burners or deposition heating means
    • C03B37/01823—Plasma deposition burners or heating means
    • C03B37/0183—Plasma deposition burners or heating means for plasma within a tube substrate
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/40—Oxides
    • C23C16/401—Oxides containing silicon
    • C23C16/402—Silicon dioxide

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Life Sciences & Earth Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Metallurgy (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Inorganic Chemistry (AREA)
  • Manufacture, Treatment Of Glass Fibers (AREA)
  • Chemical Vapour Deposition (AREA)
JP2016523684A 2013-07-01 2014-06-05 基材管の除去を伴うプラズマ蒸着工程 Active JP6214766B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
NL2011075A NL2011075C2 (en) 2013-07-01 2013-07-01 Pcvd process with removal of substrate tube.
NL2011075 2013-07-01
PCT/NL2014/050357 WO2015002530A1 (en) 2013-07-01 2014-06-05 Plasma deposition process with removal of substrate tube

Publications (3)

Publication Number Publication Date
JP2016527169A JP2016527169A (ja) 2016-09-08
JP2016527169A5 JP2016527169A5 (enExample) 2017-02-09
JP6214766B2 true JP6214766B2 (ja) 2017-10-18

Family

ID=50983083

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2016523684A Active JP6214766B2 (ja) 2013-07-01 2014-06-05 基材管の除去を伴うプラズマ蒸着工程

Country Status (11)

Country Link
US (2) US9816178B2 (enExample)
EP (1) EP3016915B1 (enExample)
JP (1) JP6214766B2 (enExample)
KR (1) KR102235333B1 (enExample)
CN (1) CN105358496B (enExample)
BR (1) BR112015032407B1 (enExample)
DK (1) DK3016915T3 (enExample)
ES (1) ES2646945T3 (enExample)
NL (1) NL2011075C2 (enExample)
RU (1) RU2652215C2 (enExample)
WO (1) WO2015002530A1 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015027935A (ja) * 2013-07-01 2015-02-12 ドラカ・コムテツク・ベー・ベー プラズマ蒸着プロセスにより光ファイバ用一次プリフォームの前駆体を製造する方法

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL2011075C2 (en) 2013-07-01 2015-01-05 Draka Comteq Bv Pcvd process with removal of substrate tube.
NL1041529B1 (en) 2015-10-16 2017-05-02 Draka Comteq Bv A method for etching a primary preform and the etched primary preform thus obtained.
CN118908559A (zh) 2016-03-03 2024-11-08 普睿司曼股份公司 光纤用预制件的制造方法

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015027935A (ja) * 2013-07-01 2015-02-12 ドラカ・コムテツク・ベー・ベー プラズマ蒸着プロセスにより光ファイバ用一次プリフォームの前駆体を製造する方法

Also Published As

Publication number Publication date
NL2011075C2 (en) 2015-01-05
US9816179B2 (en) 2017-11-14
CN105358496B (zh) 2018-05-01
ES2646945T3 (es) 2017-12-18
US9816178B2 (en) 2017-11-14
RU2016102888A (ru) 2017-08-07
KR20160025526A (ko) 2016-03-08
JP2016527169A (ja) 2016-09-08
RU2652215C2 (ru) 2018-04-25
KR102235333B1 (ko) 2021-04-05
US20160152509A1 (en) 2016-06-02
CN105358496A (zh) 2016-02-24
WO2015002530A1 (en) 2015-01-08
BR112015032407A2 (pt) 2017-07-25
EP3016915B1 (en) 2017-08-09
BR112015032407B1 (pt) 2022-01-25
EP3016915A1 (en) 2016-05-11
RU2016102888A3 (enExample) 2018-03-29
DK3016915T3 (en) 2017-10-30
US20160186316A1 (en) 2016-06-30

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