JP6208169B2 - ゼロ次元電子デバイス及びその製造方法 - Google Patents
ゼロ次元電子デバイス及びその製造方法 Download PDFInfo
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- JP6208169B2 JP6208169B2 JP2015103847A JP2015103847A JP6208169B2 JP 6208169 B2 JP6208169 B2 JP 6208169B2 JP 2015103847 A JP2015103847 A JP 2015103847A JP 2015103847 A JP2015103847 A JP 2015103847A JP 6208169 B2 JP6208169 B2 JP 6208169B2
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Description
本発明は、一般的にはゼロ次元電子デバイス及びこれを製造する方法に関する。本発明は、高均一量子ドット及び半導体デバイスに量子ドットを成長させる方法にも関する。
本明細書に組み込まれ、本明細書の一部をなす添付図面はいくつかの実施形態を示す。
図9Bは、GaAs/AlAs超格子構造体内のAlGaAs層内に埋め込まれた例示的な炭素ドープGaAs/AlGaAs QD内の伝導帯と価電子帯との間の遷移エネルギーを示す概略図950である。ここに示されるように、この炭素ドープQD構造体には、伝導帯に閉じ込められた電子に4つの結合状態E4e、E3e、E2e、及びE1eと、重ホールに1つの結合状態(E1h)がある。ピーク1の遷移エネルギー(図9A参照)は、閉じ込められた電子(E4eでのエネルギー準位)と重ホール状態(E1hでのエネルギー準位)との間の帯間遷移に主に起因する。
表1:計算で使用するバンドパラメータ
光学用途に関しては、本発明によれば、QDは、発光の色の精密な制御が重要な用途として使用し得る。一例として、QDで作られた薄膜フィルタを蛍光灯又はLED灯のトップ部上に装着して、入射光を青みがかった色から、昔の様式の白熱灯によって生成される光に似たより赤みを帯びた色合いに変換し得る。QDは、顔料及び染料の代わりに使用することもできる。他の材料に埋め込まれて、QDはある色の入射光を吸収し、全く異なる色の光を生成する。QDの発光の色はまた、合成有機化学染料の発光の色よりも明るく、且つ制御し易い。
例えば、本発明に記載された実施形態は、周期表III族材料としてGaを使用するが、本発明によれば、Al、In、又はTl等の周期表III族の他の材料を使用してもよいことを当業者は想到できる。同様に、本発明に記載された実施形態は、周期表V族材料としてAsを使用するが、本発明により、N、P、Sb、又はBi等の周期表V族の他の材料を使用してもよいことを当業者は想到できる。
Claims (18)
- 基板と、
量子ドットと、
を備える半導体デバイスであって、前記量子ドットのフォトルミネッセンススペクトルは、赤色光範囲内に2つより多いピークを有し、かつ前記量子ドットのフォトルミネッセンススペクトルのピーク放射は20meV未満のFWHMを有する、半導体デバイス。 - 前記量子ドットのフォトルミネッセンススペクトルは、前記半導体デバイスが温度4.65ケルビンで測定される場合、少なくとも5つのピークを有する、請求項1に記載の半導体デバイス。
- 緩衝層を更に備え、前記緩衝層は周期表III族材料及び周期表V族材料からなる周期表III族−V族材料を含み、前記量子ドットは周期表III族材料及び周期表V族材料を含む、請求項2に記載の半導体デバイス。
- 前記緩衝層はGaAs緩衝層であり、前記量子ドットはGaAsを含む、請求項3に記載の半導体デバイス。
- 前記量子ドットは周期表II族材料又は周期表IV族材料でドープされる、請求項4に記載の半導体デバイス。
- 前記量子ドットは炭素ドープされる、請求項5に記載の半導体デバイス。
- 半導体デバイスに量子ドットを成長させる方法であって、前記方法は、
(a)基板を提供することと、
(b)周期表V族材料を供給することと、
(c)500℃を超える成長温度で前記基板の上に周期表III族−V族材料の緩衝層を成長させることと、
(d)周期表V族材料の供給を停止させることと、
(e)周期表II族材料又は周期表IV族材料を供給することと、
(f)前記成長温度を200℃未満に低下させることと、
(g)周期表II族材料又は周期表IV族材料の供給を停止させることと、
(h)周期表II族材料又は周期表IV族材料を有する周期表III族材料の液滴を成長させることと、
を含む、方法。 - ステップ(b)及びステップ(d)での前記周期表V族材料はAsであり、
ステップ(c)での前記周期表III族−V族材料はGaAsであり、
ステップ(h)での前記周期表III族材料はGaであり、
ステップ(e)、ステップ(g)及びステップ(h)において、前記周期表II族材料又は周期表IV族材料は炭素である、請求項7に記載の方法。 - ステップ(e)とステップ(f)の間における、
GaAs及びAlAs超格子を成長させることと、
前記GaAs及びAlAs超格子の上にAlGaAs層を成長させることと、
を更に含む、請求項8に記載の方法。 - ステップ(h)の後における、
(i)前記As用のシャッタを開くことと、
(j)前記Gaの液滴を結晶化して、炭素ドープされるGaAs量子ドットにすることと、
を更に含む、請求項9に記載の方法。 - ステップ(j)の後における、AlGaAsキャッピング層を成長させることを更に含む、請求項10に記載の方法。
- 前記AlGaAsキャッピング層を成長させることは、10ナノメートル厚の一方のAlGaAsキャッピング層を成長させることと、
温度を580℃に増大させることと、
40ナノメートル厚の他方のAlGaAsキャッピング層を成長させることとを含む、請求項11に記載の方法。 - 半導体デバイスに量子ドットを成長させる方法であって、前記方法は、
(a)基板を提供することと、
(b)周期表V族材料を供給することと、
(c)500℃を超える成長温度で前記基板の上に周期表III族−V族材料の緩衝層を成長させることと、
(d)前記成長温度を500℃に低下させることと、
(e)周期表V族材料の供給を停止させることと、
(f)周期表III族材料の液滴を成長させることと、
(g)前記成長温度を400℃未満に低下させることと、
(h)周期表III族材料のより多い液滴を成長させることと、
(i)前記成長温度を360℃と450℃の間に増大させることと、
を含む、方法。 - ステップ(b)及びステップ(e)での前記周期表V族材料はAsであり、
ステップ(c)での前記周期表III族−V族材料はGaAsであり、
ステップ(f)及びステップ(h)での前記周期表III族材料はGaである、
請求項13に記載の方法。 - ステップ(c)とステップ(d)の間における、
GaAs及びAlAs超格子を成長させることと、
前記GaAs及びAlAs超格子の上にAlGaAs層を成長させることと、
を更に含む、請求項14に記載の方法。 - ステップ(i)の後における、
(j)前記As用のシャッタを開くことと、
(k)前記Gaの液滴を結晶化させて、GaAs量子ドットにすることと、
を更に含む、請求項15に記載の方法。 - ステップ(k)の後における、AlGaAsキャッピング層を成長させることを更に含む、請求項16に記載の方法。
- 前記AlGaAsキャッピング層を成長させることは、10ナノメートル厚の一方のAlGaAsキャッピング層を成長させることと、
温度を580℃に増大させることと、
40ナノメートル厚の他方のAlGaAsキャッピング層を成長させることとを含む、請求項17に記載の方法。
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