JP6193875B2 - 光学評価のための方法およびシステム、ならびに光学検出器 - Google Patents

光学評価のための方法およびシステム、ならびに光学検出器 Download PDF

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Publication number
JP6193875B2
JP6193875B2 JP2014543976A JP2014543976A JP6193875B2 JP 6193875 B2 JP6193875 B2 JP 6193875B2 JP 2014543976 A JP2014543976 A JP 2014543976A JP 2014543976 A JP2014543976 A JP 2014543976A JP 6193875 B2 JP6193875 B2 JP 6193875B2
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JP
Japan
Prior art keywords
pixel
intensity
optical detector
pair
signal
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Expired - Fee Related
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JP2014543976A
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English (en)
Japanese (ja)
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JP2015505362A (ja
JP2015505362A5 (enExample
Inventor
ステフン シャープレス
ステフン シャープレス
ローガー ライト
ローガー ライト
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University of Nottingham
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University of Nottingham
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Publication of JP2015505362A5 publication Critical patent/JP2015505362A5/ja
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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/10—Photometry, e.g. photographic exposure meter by comparison with reference light or electric value provisionally void
    • G01J1/16—Photometry, e.g. photographic exposure meter by comparison with reference light or electric value provisionally void using electric radiation detectors
    • G01J1/1626—Arrangements with two photodetectors, the signals of which are compared
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/1702—Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
    • G01H9/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by using radiation-sensitive means, e.g. optical means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22—Details, e.g. general constructional or apparatus details
    • G01N29/24—Probes
    • G01N29/2418—Probes using optoacoustic interaction with the material, e.g. laser radiation, photoacoustics
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80—Constructional details of image sensors
    • H10F39/803—Pixels having integrated switching, control, storage or amplification elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/06—Illumination; Optics
    • G01N2201/061—Sources
    • G01N2201/06113—Coherent sources; lasers
    • G01N2201/0612—Laser diodes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/06—Illumination; Optics
    • G01N2201/067—Electro-optic, magneto-optic, acousto-optic elements
    • G01N2201/0675—SLM

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Pathology (AREA)
  • Health & Medical Sciences (AREA)
  • Optics & Photonics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
JP2014543976A 2011-12-02 2012-11-30 光学評価のための方法およびシステム、ならびに光学検出器 Expired - Fee Related JP6193875B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GB1120774.3A GB2497135A (en) 2011-12-02 2011-12-02 Optical detector with a plurality of pixel pairs for laser ultrasonic surface inspection
GB1120774.3 2011-12-02
PCT/GB2012/052965 WO2013079960A1 (en) 2011-12-02 2012-11-30 Method and system for optical evaluation, and optical detector

Publications (3)

Publication Number Publication Date
JP2015505362A JP2015505362A (ja) 2015-02-19
JP2015505362A5 JP2015505362A5 (enExample) 2016-01-28
JP6193875B2 true JP6193875B2 (ja) 2017-09-06

Family

ID=45509079

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2014543976A Expired - Fee Related JP6193875B2 (ja) 2011-12-02 2012-11-30 光学評価のための方法およびシステム、ならびに光学検出器

Country Status (6)

Country Link
US (1) US9733177B2 (enExample)
EP (1) EP2786123A1 (enExample)
JP (1) JP6193875B2 (enExample)
CN (1) CN104204774B (enExample)
GB (1) GB2497135A (enExample)
WO (1) WO2013079960A1 (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2497135A (en) * 2011-12-02 2013-06-05 Univ Nottingham Optical detector with a plurality of pixel pairs for laser ultrasonic surface inspection
US20180172644A1 (en) * 2015-06-18 2018-06-21 Socpra Sciences Et Génie S.E.C. Method and system for acoustically scanning a sample
JP6872450B2 (ja) 2017-07-25 2021-05-19 株式会社日立製作所 レーザ変位計と、それを用いたレーザ超音波検査装置
US11169026B2 (en) * 2018-11-30 2021-11-09 Munro Design & Technologies, Llc Optical measurement systems and methods thereof

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FR2620823B1 (fr) * 1987-09-17 1990-08-17 Centre Tech Ind Papier Dispositif pour determiner en continu un indice d'etat de surface d'un materiau en feuille en mouvement
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Also Published As

Publication number Publication date
JP2015505362A (ja) 2015-02-19
CN104204774A (zh) 2014-12-10
US9733177B2 (en) 2017-08-15
US20150260640A1 (en) 2015-09-17
WO2013079960A1 (en) 2013-06-06
GB201120774D0 (en) 2012-01-11
GB2497135A (en) 2013-06-05
CN104204774B (zh) 2017-06-09
EP2786123A1 (en) 2014-10-08

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