CN104204774B - 用于光学评估的方法和系统以及光学检测器 - Google Patents

用于光学评估的方法和系统以及光学检测器 Download PDF

Info

Publication number
CN104204774B
CN104204774B CN201280066613.4A CN201280066613A CN104204774B CN 104204774 B CN104204774 B CN 104204774B CN 201280066613 A CN201280066613 A CN 201280066613A CN 104204774 B CN104204774 B CN 104204774B
Authority
CN
China
Prior art keywords
pixel
pixels
output
intensity
signal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201280066613.4A
Other languages
English (en)
Chinese (zh)
Other versions
CN104204774A (zh
Inventor
史蒂芬·沙普尔斯
罗格·莱特
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
University of Nottingham
Original Assignee
University of Nottingham
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by University of Nottingham filed Critical University of Nottingham
Publication of CN104204774A publication Critical patent/CN104204774A/zh
Application granted granted Critical
Publication of CN104204774B publication Critical patent/CN104204774B/zh
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/10—Photometry, e.g. photographic exposure meter by comparison with reference light or electric value provisionally void
    • G01J1/16—Photometry, e.g. photographic exposure meter by comparison with reference light or electric value provisionally void using electric radiation detectors
    • G01J1/1626—Arrangements with two photodetectors, the signals of which are compared
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/1702—Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
    • G01H9/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by using radiation-sensitive means, e.g. optical means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22—Details, e.g. general constructional or apparatus details
    • G01N29/24—Probes
    • G01N29/2418—Probes using optoacoustic interaction with the material, e.g. laser radiation, photoacoustics
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80—Constructional details of image sensors
    • H10F39/803—Pixels having integrated switching, control, storage or amplification elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/06—Illumination; Optics
    • G01N2201/061—Sources
    • G01N2201/06113—Coherent sources; lasers
    • G01N2201/0612—Laser diodes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/06—Illumination; Optics
    • G01N2201/067—Electro-optic, magneto-optic, acousto-optic elements
    • G01N2201/0675—SLM

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Pathology (AREA)
  • Health & Medical Sciences (AREA)
  • Optics & Photonics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
CN201280066613.4A 2011-12-02 2012-11-30 用于光学评估的方法和系统以及光学检测器 Expired - Fee Related CN104204774B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GB1120774.3A GB2497135A (en) 2011-12-02 2011-12-02 Optical detector with a plurality of pixel pairs for laser ultrasonic surface inspection
GB1120774.3 2011-12-02
PCT/GB2012/052965 WO2013079960A1 (en) 2011-12-02 2012-11-30 Method and system for optical evaluation, and optical detector

Publications (2)

Publication Number Publication Date
CN104204774A CN104204774A (zh) 2014-12-10
CN104204774B true CN104204774B (zh) 2017-06-09

Family

ID=45509079

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201280066613.4A Expired - Fee Related CN104204774B (zh) 2011-12-02 2012-11-30 用于光学评估的方法和系统以及光学检测器

Country Status (6)

Country Link
US (1) US9733177B2 (enExample)
EP (1) EP2786123A1 (enExample)
JP (1) JP6193875B2 (enExample)
CN (1) CN104204774B (enExample)
GB (1) GB2497135A (enExample)
WO (1) WO2013079960A1 (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2497135A (en) * 2011-12-02 2013-06-05 Univ Nottingham Optical detector with a plurality of pixel pairs for laser ultrasonic surface inspection
US20180172644A1 (en) * 2015-06-18 2018-06-21 Socpra Sciences Et Génie S.E.C. Method and system for acoustically scanning a sample
JP6872450B2 (ja) 2017-07-25 2021-05-19 株式会社日立製作所 レーザ変位計と、それを用いたレーザ超音波検査装置
US11169026B2 (en) * 2018-11-30 2021-11-09 Munro Design & Technologies, Llc Optical measurement systems and methods thereof

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5013919A (en) * 1989-10-17 1991-05-07 Grumman Aerospace Corporation Detector element signal comparator system
US6818933B2 (en) * 2001-10-05 2004-11-16 Stmicroelectronics Ltd. CMOS image sensors
CN1631033A (zh) * 2001-12-10 2005-06-22 摩托罗拉公司 时间积分像素传感器中的数字双采样
CN101055265A (zh) * 2007-05-16 2007-10-17 南京大学 功能梯度材料的表面和近表面分层层析方法

Family Cites Families (30)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3700903A (en) * 1970-12-09 1972-10-24 Zenith Radio Corp Optical detecting systems for sensing variations in the lateral motion of light rays
US4032801A (en) * 1975-10-10 1977-06-28 Honeywell Inc. Electromagnetic radiation intensity comparator apparatus
JPS6036922A (ja) 1983-08-10 1985-02-26 Hitachi Ltd 遠隔振動測定装置
US4567769A (en) * 1984-03-08 1986-02-04 Rockwell International Corporation Contact-free ultrasonic transduction for flaw and acoustic discontinuity detection
FR2620823B1 (fr) * 1987-09-17 1990-08-17 Centre Tech Ind Papier Dispositif pour determiner en continu un indice d'etat de surface d'un materiau en feuille en mouvement
JP3371526B2 (ja) * 1994-03-31 2003-01-27 日産自動車株式会社 塗装面状態検出装置および塗装面状態検出方法
US6097477A (en) * 1994-05-27 2000-08-01 American Research Corporation Of Virginia Laser speckle strain and deformation sensor using linear array image cross-correlation method for specifically arranged triple-beam triple-camera configuration
US5585921A (en) * 1995-03-15 1996-12-17 Hughes Aircraft Company Laser-ultrasonic non-destructive, non-contacting inspection system
US6144685A (en) * 1996-01-23 2000-11-07 Fuji Xerox Co., Ltd. Two-dimensional surface emitting laser array, two-dimensional surface emitting laser beam scanner, two-dimensional surface emitting laser beam recorder, and two-dimensional surface emitting laser beam recording method
US5760904A (en) * 1996-07-26 1998-06-02 General Electric Company Method and system for inspecting a surface of an object with laser ultrasound
US6075603A (en) * 1997-05-01 2000-06-13 Hughes Electronics Corporation Contactless acoustic sensing system with detector array scanning and self-calibrating
US6115127A (en) * 1997-11-17 2000-09-05 Institute Of Paper Science And Technology Non-contact measurements of ultrasonic waves on paper webs using a photorefractive interferometer
TWI263942B (en) * 2001-12-05 2006-10-11 Em Microelectronic Marin Sa Method and sensing device for motion detection in an optical pointing device, such as an optical mouse
US7088455B1 (en) * 2002-04-08 2006-08-08 Providence Health Systems —Oregon Methods and apparatus for material evaluation using laser speckle
US7324665B2 (en) * 2002-09-16 2008-01-29 Massachusetts Institute Of Technology Method of multi-resolution adaptive correlation processing
US7738014B2 (en) * 2002-12-05 2010-06-15 Atlab Inc. Image sensor and optical pointing system
US7089796B2 (en) * 2004-03-24 2006-08-15 Hrl Laboratories, Llc Time-reversed photoacoustic system and uses thereof
JP3908751B2 (ja) * 2004-04-30 2007-04-25 株式会社東芝 音響電気変換素子
US7397596B2 (en) * 2004-07-28 2008-07-08 Ler Technologies, Inc. Surface and subsurface detection sensor
US7477298B2 (en) * 2004-08-30 2009-01-13 Micron Technology, Inc. Anti-eclipsing circuit for image sensors
US7078673B1 (en) * 2004-12-27 2006-07-18 Em Microelectronic-Marin Sa Method and sensing device for motion detection in an optical pointing device, such as an optical mouse
JP5334413B2 (ja) * 2005-03-30 2013-11-06 株式会社日立メディコ 超音波診断装置
GB0513756D0 (en) * 2005-07-06 2005-08-10 Univ Nottingham Spatially resolved acoustic spectroscopy imaging
IL174713A0 (en) * 2006-04-02 2007-05-15 Abraham Aharoni System and method for optical sensing of surface motions
IL176694A0 (en) * 2006-07-04 2006-10-31 Univ Ramot Method and device for low light level imaging
US8042397B2 (en) * 2007-05-16 2011-10-25 The Boeing Company Damage volume and depth estimation
WO2009008010A2 (en) * 2007-07-12 2009-01-15 Defence Research And Development Organisation Method and apparatus for the simultaneous generation and detection of optical diffraction interference pattern on a detector
JP5058109B2 (ja) * 2008-09-19 2012-10-24 新日本製鐵株式会社 レーザ超音波法による材料中の縦波と横波の音速の計測方法及び装置
US8616062B2 (en) * 2010-02-16 2013-12-31 Hitachi-Ge Nuclear Energy, Ltd. Ultrasonic inspection system and ultrasonic inspection method
GB2497135A (en) * 2011-12-02 2013-06-05 Univ Nottingham Optical detector with a plurality of pixel pairs for laser ultrasonic surface inspection

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5013919A (en) * 1989-10-17 1991-05-07 Grumman Aerospace Corporation Detector element signal comparator system
US6818933B2 (en) * 2001-10-05 2004-11-16 Stmicroelectronics Ltd. CMOS image sensors
CN1631033A (zh) * 2001-12-10 2005-06-22 摩托罗拉公司 时间积分像素传感器中的数字双采样
CN101055265A (zh) * 2007-05-16 2007-10-17 南京大学 功能梯度材料的表面和近表面分层层析方法

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
A CMOS Motion Detector System for Pointing Devices;Xavier Arreguit;《JOURNAL OF SOLID-STATE CIRCUITS》;19961231;第31卷(第12期);1916-1921 *
VLSI Implementation of a Focal Plane Image Processor-A Realization of the Near-Sensor Image Proclessing Concept;Jan-Erik Eklund;《Transactions on very large scale integration system》;19960930;第4卷(第3期);322-335 *

Also Published As

Publication number Publication date
JP2015505362A (ja) 2015-02-19
CN104204774A (zh) 2014-12-10
US9733177B2 (en) 2017-08-15
US20150260640A1 (en) 2015-09-17
WO2013079960A1 (en) 2013-06-06
GB201120774D0 (en) 2012-01-11
JP6193875B2 (ja) 2017-09-06
GB2497135A (en) 2013-06-05
EP2786123A1 (en) 2014-10-08

Similar Documents

Publication Publication Date Title
KR102179984B1 (ko) 저-잡음 센서 및 저-잡음 센서를 이용한 검사 시스템
JP4067602B2 (ja) 高さ検査方法、それを実施する高さ検査装置
US6168311B1 (en) System and method for optically determining the temperature of a test object
US6617603B2 (en) Surface defect tester
KR101496603B1 (ko) 검사 장치
WO1999000643A1 (en) Apparatus and method for high-speed characterization of surfaces
CN101542707A (zh) 半导体器件的检查方法与半导体器件的检查装置
CN104204774A (zh) 用于光学评估的方法和系统以及光学检测器
US7681453B2 (en) System and method to calibrate multiple sensors
JP2023026334A (ja) Ｌｉｄａｒモジュールおよびその方法
KR100952522B1 (ko) 웨이퍼 결함 검출 장치 및 이의 방법
JPS61225831A (ja) 集積回路の非接触全ライン動的テスト装置
US6541299B2 (en) Semiconductor device having thin film resistors made of bolometer materials
JP2005106831A (ja) 光ビーム診断デバイス及び方法
KR101881752B1 (ko) 라인빔을 사용하는 결함검출모듈 및 상기 결함검출모듈 어레이를 이용한 결함검출장치
JPH07225195A (ja) 微細パターンの欠陥測定方法
TWI758088B (zh) 陣列式發光效率檢測方法
JPH01173172A (ja) パターン欠陥検査方法
JP4751298B2 (ja) 高さ検査方法及びそれを実施する高さ検査装置
JP2913409B2 (ja) 面板欠陥検出装置の検出感度補正方法
JPH04282438A (ja) 貫通孔検査装置
JP2004219262A (ja) ウェーハ欠陥の高速オンライン電気光学的検出のための方法及びシステム
JP2001311608A (ja) 微小突起物検査装置
JP2005077158A (ja) 表面検査装置および方法
JPH08136212A (ja) 位置検出方法及び位置決め装置

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20170609

Termination date: 20171130