JP6173855B2 - 歪検知素子、圧力センサ、マイクロフォン、血圧センサ及びタッチパネル - Google Patents

歪検知素子、圧力センサ、マイクロフォン、血圧センサ及びタッチパネル Download PDF

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Publication number
JP6173855B2
JP6173855B2 JP2013196081A JP2013196081A JP6173855B2 JP 6173855 B2 JP6173855 B2 JP 6173855B2 JP 2013196081 A JP2013196081 A JP 2013196081A JP 2013196081 A JP2013196081 A JP 2013196081A JP 6173855 B2 JP6173855 B2 JP 6173855B2
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JP
Japan
Prior art keywords
magnetic layer
sensing element
strain sensing
layer
strain
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2013196081A
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English (en)
Japanese (ja)
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JP2015061059A (ja
JP2015061059A5 (enExample
Inventor
志織 加治
志織 加治
福澤　英明
英明 福澤
慶彦 藤
慶彦 藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
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Toshiba Corp
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Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP2013196081A priority Critical patent/JP6173855B2/ja
Priority to US14/333,906 priority patent/US9897494B2/en
Priority to TW103125503A priority patent/TW201516387A/zh
Publication of JP2015061059A publication Critical patent/JP2015061059A/ja
Publication of JP2015061059A5 publication Critical patent/JP2015061059A5/ja
Application granted granted Critical
Publication of JP6173855B2 publication Critical patent/JP6173855B2/ja
Priority to US15/855,668 priority patent/US10190923B2/en
Priority to US16/234,123 priority patent/US10444085B2/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/12—Measuring force or stress, in general by measuring variations in the magnetic properties of materials resulting from the application of stress
    • G01L1/125—Measuring force or stress, in general by measuring variations in the magnetic properties of materials resulting from the application of stress by using magnetostrictive means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/12—Measuring force or stress, in general by measuring variations in the magnetic properties of materials resulting from the application of stress
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/16—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in the magnetic properties of material resulting from the application of stress

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Hall/Mr Elements (AREA)
  • Measuring Fluid Pressure (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Measuring Magnetic Variables (AREA)
JP2013196081A 2013-09-20 2013-09-20 歪検知素子、圧力センサ、マイクロフォン、血圧センサ及びタッチパネル Expired - Fee Related JP6173855B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2013196081A JP6173855B2 (ja) 2013-09-20 2013-09-20 歪検知素子、圧力センサ、マイクロフォン、血圧センサ及びタッチパネル
US14/333,906 US9897494B2 (en) 2013-09-20 2014-07-17 Strain sensing element, pressure sensor, microphone, blood pressure sensor, and touch panel
TW103125503A TW201516387A (zh) 2013-09-20 2014-07-25 應變感測元件，壓力感測器，麥克風，血壓感測器，及觸控面板
US15/855,668 US10190923B2 (en) 2013-09-20 2017-12-27 Strain sensing element, pressure sensor, microphone, blood pressure sensor, and touch panel
US16/234,123 US10444085B2 (en) 2013-09-20 2018-12-27 Strain sensing element, pressure sensor, microphone, blood pressure sensor, and touch panel

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2013196081A JP6173855B2 (ja) 2013-09-20 2013-09-20 歪検知素子、圧力センサ、マイクロフォン、血圧センサ及びタッチパネル

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2017131414A Division JP6363271B2 (ja) 2017-07-04 2017-07-04 センサ

Publications (3)

Publication Number Publication Date
JP2015061059A JP2015061059A (ja) 2015-03-30
JP2015061059A5 JP2015061059A5 (enExample) 2016-05-12
JP6173855B2 true JP6173855B2 (ja) 2017-08-02

Family

ID=52689772

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2013196081A Expired - Fee Related JP6173855B2 (ja) 2013-09-20 2013-09-20 歪検知素子、圧力センサ、マイクロフォン、血圧センサ及びタッチパネル

Country Status (3)

Country Link
US (3) US9897494B2 (enExample)
JP (1) JP6173855B2 (enExample)
TW (1) TW201516387A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017215326A (ja) * 2017-07-04 2017-12-07 株式会社東芝 センサ
JP2022528407A (ja) * 2019-04-02 2022-06-10 江▲蘇▼多▲維▼科技有限公司 磁気抵抗慣性センサ・チップ

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JP5951454B2 (ja) 2012-11-20 2016-07-13 株式会社東芝 マイクロフォンパッケージ
JP6173855B2 (ja) * 2013-09-20 2017-08-02 株式会社東芝 歪検知素子、圧力センサ、マイクロフォン、血圧センサ及びタッチパネル
JP6212000B2 (ja) 2014-07-02 2017-10-11 株式会社東芝 圧力センサ、並びに圧力センサを用いたマイクロフォン、血圧センサ、及びタッチパネル
JP6523004B2 (ja) 2015-03-24 2019-05-29 株式会社東芝 歪検知素子および圧力センサ
US20170092451A1 (en) * 2015-09-30 2017-03-30 Kyocera Corporation Switch and electronic device
JP7013346B2 (ja) * 2018-03-14 2022-01-31 株式会社東芝 センサ
JP7410935B2 (ja) 2018-05-24 2024-01-10 ザ リサーチ ファウンデーション フォー ザ ステイト ユニバーシティー オブ ニューヨーク 容量性センサ
JP6889135B2 (ja) * 2018-09-14 2021-06-18 株式会社東芝 センサ

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JP2001237473A (ja) * 1999-12-14 2001-08-31 Tdk Corp 複合磁性薄膜
JP4355439B2 (ja) * 2000-11-09 2009-11-04 東北リコー株式会社 微小圧力検知素子、この素子を用いた装置及び健康監視システム
JP2003298139A (ja) * 2002-03-29 2003-10-17 Alps Electric Co Ltd 磁気検出素子
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US7270896B2 (en) * 2004-07-02 2007-09-18 International Business Machines Corporation High performance magnetic tunnel barriers with amorphous materials
JP2006295000A (ja) * 2005-04-13 2006-10-26 Sony Corp 記憶素子及びメモリ
JP4768488B2 (ja) * 2006-03-27 2011-09-07 株式会社東芝 磁気抵抗効果素子，磁気ヘッド，および磁気ディスク装置
JP2009094104A (ja) * 2007-10-03 2009-04-30 Toshiba Corp 磁気抵抗素子
US8372661B2 (en) * 2007-10-31 2013-02-12 Magic Technologies, Inc. High performance MTJ element for conventional MRAM and for STT-RAM and a method for making the same
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JP2010080806A (ja) * 2008-09-29 2010-04-08 Canon Anelva Corp 磁気抵抗素子の製造法及びその記憶媒体
KR101683135B1 (ko) * 2009-03-13 2016-12-06 시게이트 테크놀로지 엘엘씨 수직자기기록매체
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JP5101659B2 (ja) 2010-05-25 2012-12-19 株式会社東芝 血圧センサ
JP5235964B2 (ja) 2010-09-30 2013-07-10 株式会社東芝 歪検知素子、歪検知素子装置、および血圧センサ
JP2012160681A (ja) * 2011-02-03 2012-08-23 Sony Corp 記憶素子、メモリ装置
JP5443421B2 (ja) 2011-03-24 2014-03-19 株式会社東芝 磁気抵抗効果素子、磁気ヘッドジンバルアッセンブリ、及び、磁気記録再生装置
JP2013033881A (ja) * 2011-08-03 2013-02-14 Sony Corp 記憶素子及び記憶装置
JP5665707B2 (ja) 2011-09-21 2015-02-04 株式会社東芝 磁気抵抗効果素子、磁気メモリ及び磁気抵抗効果素子の製造方法
JP5677258B2 (ja) * 2011-09-27 2015-02-25 株式会社東芝 歪検知装置及びその製造方法
JP5701807B2 (ja) 2012-03-29 2015-04-15 株式会社東芝 圧力センサ及びマイクロフォン
JP5367877B2 (ja) 2012-06-19 2013-12-11 株式会社東芝 Ｍｅｍｓ圧力センサ
JP6113581B2 (ja) * 2013-06-12 2017-04-12 株式会社東芝 圧力センサ、音響マイク、血圧センサ及びタッチパネル
JP6173854B2 (ja) 2013-09-20 2017-08-02 株式会社東芝 歪検知素子、圧力センサ、マイクロフォン、血圧センサ及びタッチパネル
JP6223761B2 (ja) * 2013-09-20 2017-11-01 株式会社東芝 歪検知素子、圧力センサ、マイクロフォン、血圧センサおよびタッチパネル
JP6173855B2 (ja) * 2013-09-20 2017-08-02 株式会社東芝 歪検知素子、圧力センサ、マイクロフォン、血圧センサ及びタッチパネル
JP6200358B2 (ja) * 2014-03-20 2017-09-20 株式会社東芝 圧力センサ、マイクロフォン、血圧センサおよびタッチパネル

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017215326A (ja) * 2017-07-04 2017-12-07 株式会社東芝 センサ
JP2022528407A (ja) * 2019-04-02 2022-06-10 江▲蘇▼多▲維▼科技有限公司 磁気抵抗慣性センサ・チップ
JP7188824B2 (ja) 2019-04-02 2022-12-13 江▲蘇▼多▲維▼科技有限公司 磁気抵抗慣性センサ・チップ

Also Published As

Publication number Publication date
US20150082899A1 (en) 2015-03-26
US20180120172A1 (en) 2018-05-03
US20190128752A1 (en) 2019-05-02
TW201516387A (zh) 2015-05-01
JP2015061059A (ja) 2015-03-30
US10444085B2 (en) 2019-10-15
US10190923B2 (en) 2019-01-29
US9897494B2 (en) 2018-02-20

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