TW201516387A - 應變感測元件，壓力感測器，麥克風，血壓感測器，及觸控面板 - Google Patents
應變感測元件，壓力感測器，麥克風，血壓感測器，及觸控面板 Download PDFInfo
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- TW201516387A TW201516387A TW103125503A TW103125503A TW201516387A TW 201516387 A TW201516387 A TW 201516387A TW 103125503 A TW103125503 A TW 103125503A TW 103125503 A TW103125503 A TW 103125503A TW 201516387 A TW201516387 A TW 201516387A
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- Prior art keywords
- magnetic layer
- layer
- sensing element
- strain sensing
- substrate
- Prior art date
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- 230000005291 magnetic effect Effects 0.000 claims abstract description 254
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- JBQYATWDVHIOAR-UHFFFAOYSA-N tellanylidenegermanium Chemical compound [Te]=[Ge] JBQYATWDVHIOAR-UHFFFAOYSA-N 0.000 description 1
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/12—Measuring force or stress, in general by measuring variations in the magnetic properties of materials resulting from the application of stress
- G01L1/125—Measuring force or stress, in general by measuring variations in the magnetic properties of materials resulting from the application of stress by using magnetostrictive means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/12—Measuring force or stress, in general by measuring variations in the magnetic properties of materials resulting from the application of stress
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/16—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in the magnetic properties of material resulting from the application of stress
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Hall/Mr Elements (AREA)
- Measuring Fluid Pressure (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- Measuring Magnetic Variables (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013196081A JP6173855B2 (ja) | 2013-09-20 | 2013-09-20 | 歪検知素子、圧力センサ、マイクロフォン、血圧センサ及びタッチパネル |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| TW201516387A true TW201516387A (zh) | 2015-05-01 |
Family
ID=52689772
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW103125503A TW201516387A (zh) | 2013-09-20 | 2014-07-25 | 應變感測元件，壓力感測器，麥克風，血壓感測器，及觸控面板 |
Country Status (3)
| Country | Link |
|---|---|
| US (3) | US9897494B2 (enExample) |
| JP (1) | JP6173855B2 (enExample) |
| TW (1) | TW201516387A (enExample) |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5951454B2 (ja) | 2012-11-20 | 2016-07-13 | 株式会社東芝 | マイクロフォンパッケージ |
| JP6173855B2 (ja) * | 2013-09-20 | 2017-08-02 | 株式会社東芝 | 歪検知素子、圧力センサ、マイクロフォン、血圧センサ及びタッチパネル |
| JP6212000B2 (ja) | 2014-07-02 | 2017-10-11 | 株式会社東芝 | 圧力センサ、並びに圧力センサを用いたマイクロフォン、血圧センサ、及びタッチパネル |
| JP6523004B2 (ja) | 2015-03-24 | 2019-05-29 | 株式会社東芝 | 歪検知素子および圧力センサ |
| US20170092451A1 (en) * | 2015-09-30 | 2017-03-30 | Kyocera Corporation | Switch and electronic device |
| JP6363271B2 (ja) * | 2017-07-04 | 2018-07-25 | 株式会社東芝 | センサ |
| JP7013346B2 (ja) * | 2018-03-14 | 2022-01-31 | 株式会社東芝 | センサ |
| JP7410935B2 (ja) | 2018-05-24 | 2024-01-10 | ザ リサーチ ファウンデーション フォー ザ ステイト ユニバーシティー オブ ニューヨーク | 容量性センサ |
| JP6889135B2 (ja) * | 2018-09-14 | 2021-06-18 | 株式会社東芝 | センサ |
| CN109883456B (zh) * | 2019-04-02 | 2024-06-28 | 江苏多维科技有限公司 | 一种磁电阻惯性传感器芯片 |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| US5891586A (en) * | 1995-01-27 | 1999-04-06 | Alps Electric Co., Ltd. | Multilayer thin-film for magnetoresistive device |
| JP2001237473A (ja) * | 1999-12-14 | 2001-08-31 | Tdk Corp | 複合磁性薄膜 |
| JP4355439B2 (ja) * | 2000-11-09 | 2009-11-04 | 東北リコー株式会社 | 微小圧力検知素子、この素子を用いた装置及び健康監視システム |
| JP2003298139A (ja) * | 2002-03-29 | 2003-10-17 | Alps Electric Co Ltd | 磁気検出素子 |
| DE10319319A1 (de) * | 2003-04-29 | 2005-01-27 | Infineon Technologies Ag | Sensoreinrichtung mit magnetostriktivem Kraftsensor |
| US7270896B2 (en) * | 2004-07-02 | 2007-09-18 | International Business Machines Corporation | High performance magnetic tunnel barriers with amorphous materials |
| JP2006295000A (ja) * | 2005-04-13 | 2006-10-26 | Sony Corp | 記憶素子及びメモリ |
| JP4768488B2 (ja) * | 2006-03-27 | 2011-09-07 | 株式会社東芝 | 磁気抵抗効果素子，磁気ヘッド，および磁気ディスク装置 |
| JP2009094104A (ja) * | 2007-10-03 | 2009-04-30 | Toshiba Corp | 磁気抵抗素子 |
| US8372661B2 (en) * | 2007-10-31 | 2013-02-12 | Magic Technologies, Inc. | High performance MTJ element for conventional MRAM and for STT-RAM and a method for making the same |
| US20090122450A1 (en) | 2007-11-08 | 2009-05-14 | Headway Technologies, Inc. | TMR device with low magnetostriction free layer |
| JP5361201B2 (ja) * | 2008-01-30 | 2013-12-04 | 株式会社東芝 | 磁気抵抗効果素子の製造方法 |
| JP2010080806A (ja) * | 2008-09-29 | 2010-04-08 | Canon Anelva Corp | 磁気抵抗素子の製造法及びその記憶媒体 |
| KR101683135B1 (ko) * | 2009-03-13 | 2016-12-06 | 시게이트 테크놀로지 엘엘씨 | 수직자기기록매체 |
| US8259420B2 (en) | 2010-02-01 | 2012-09-04 | Headway Technologies, Inc. | TMR device with novel free layer structure |
| JP5101659B2 (ja) | 2010-05-25 | 2012-12-19 | 株式会社東芝 | 血圧センサ |
| JP5235964B2 (ja) | 2010-09-30 | 2013-07-10 | 株式会社東芝 | 歪検知素子、歪検知素子装置、および血圧センサ |
| JP2012160681A (ja) * | 2011-02-03 | 2012-08-23 | Sony Corp | 記憶素子、メモリ装置 |
| JP5443421B2 (ja) | 2011-03-24 | 2014-03-19 | 株式会社東芝 | 磁気抵抗効果素子、磁気ヘッドジンバルアッセンブリ、及び、磁気記録再生装置 |
| JP2013033881A (ja) * | 2011-08-03 | 2013-02-14 | Sony Corp | 記憶素子及び記憶装置 |
| JP5665707B2 (ja) | 2011-09-21 | 2015-02-04 | 株式会社東芝 | 磁気抵抗効果素子、磁気メモリ及び磁気抵抗効果素子の製造方法 |
| JP5677258B2 (ja) * | 2011-09-27 | 2015-02-25 | 株式会社東芝 | 歪検知装置及びその製造方法 |
| JP5701807B2 (ja) | 2012-03-29 | 2015-04-15 | 株式会社東芝 | 圧力センサ及びマイクロフォン |
| JP5367877B2 (ja) | 2012-06-19 | 2013-12-11 | 株式会社東芝 | Ｍｅｍｓ圧力センサ |
| JP6113581B2 (ja) * | 2013-06-12 | 2017-04-12 | 株式会社東芝 | 圧力センサ、音響マイク、血圧センサ及びタッチパネル |
| JP6173854B2 (ja) | 2013-09-20 | 2017-08-02 | 株式会社東芝 | 歪検知素子、圧力センサ、マイクロフォン、血圧センサ及びタッチパネル |
| JP6223761B2 (ja) * | 2013-09-20 | 2017-11-01 | 株式会社東芝 | 歪検知素子、圧力センサ、マイクロフォン、血圧センサおよびタッチパネル |
| JP6173855B2 (ja) * | 2013-09-20 | 2017-08-02 | 株式会社東芝 | 歪検知素子、圧力センサ、マイクロフォン、血圧センサ及びタッチパネル |
| JP6200358B2 (ja) * | 2014-03-20 | 2017-09-20 | 株式会社東芝 | 圧力センサ、マイクロフォン、血圧センサおよびタッチパネル |
-
2013
- 2013-09-20 JP JP2013196081A patent/JP6173855B2/ja not_active Expired - Fee Related
-
2014
- 2014-07-17 US US14/333,906 patent/US9897494B2/en active Active
- 2014-07-25 TW TW103125503A patent/TW201516387A/zh unknown
-
2017
- 2017-12-27 US US15/855,668 patent/US10190923B2/en active Active
-
2018
- 2018-12-27 US US16/234,123 patent/US10444085B2/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| US20150082899A1 (en) | 2015-03-26 |
| US20180120172A1 (en) | 2018-05-03 |
| US20190128752A1 (en) | 2019-05-02 |
| JP2015061059A (ja) | 2015-03-30 |
| JP6173855B2 (ja) | 2017-08-02 |
| US10444085B2 (en) | 2019-10-15 |
| US10190923B2 (en) | 2019-01-29 |
| US9897494B2 (en) | 2018-02-20 |
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