JP6160926B2 - ゲートバルブ - Google Patents

ゲートバルブ Download PDF

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Publication number
JP6160926B2
JP6160926B2 JP2014117035A JP2014117035A JP6160926B2 JP 6160926 B2 JP6160926 B2 JP 6160926B2 JP 2014117035 A JP2014117035 A JP 2014117035A JP 2014117035 A JP2014117035 A JP 2014117035A JP 6160926 B2 JP6160926 B2 JP 6160926B2
Authority
JP
Japan
Prior art keywords
groove
seal
valve
valve seat
opening
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2014117035A
Other languages
English (en)
Japanese (ja)
Other versions
JP2015230064A (ja
JP2015230064A5 (enExample
Inventor
石垣　恒雄
恒雄 石垣
洋己 下田
洋己 下田
小川　浩司
浩司 小川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SMC Corp
Original Assignee
SMC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SMC Corp filed Critical SMC Corp
Priority to JP2014117035A priority Critical patent/JP6160926B2/ja
Priority to TW104116678A priority patent/TWI646277B/zh
Priority to US14/721,422 priority patent/US9482350B2/en
Priority to KR1020150072753A priority patent/KR102329449B1/ko
Priority to CH00786/15A priority patent/CH709767B1/de
Priority to DE102015108816.9A priority patent/DE102015108816B4/de
Priority to CN201510303570.2A priority patent/CN105276217B/zh
Publication of JP2015230064A publication Critical patent/JP2015230064A/ja
Publication of JP2015230064A5 publication Critical patent/JP2015230064A5/ja
Application granted granted Critical
Publication of JP6160926B2 publication Critical patent/JP6160926B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/16—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together
    • F16K3/18—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members
    • F16K3/184—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members by means of cams
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/16—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together
    • F16K3/20—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the seats
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/0281—Guillotine or blade-type valves, e.g. no passage through the valve member
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/30—Details
    • F16K3/314—Forms or constructions of slides; Attachment of the slide to the spindle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
    • F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Sliding Valves (AREA)
  • Details Of Valves (AREA)
JP2014117035A 2014-06-05 2014-06-05 ゲートバルブ Active JP6160926B2 (ja)

Priority Applications (7)

Application Number Priority Date Filing Date Title
JP2014117035A JP6160926B2 (ja) 2014-06-05 2014-06-05 ゲートバルブ
TW104116678A TWI646277B (zh) 2014-06-05 2015-05-25 閘閥
KR1020150072753A KR102329449B1 (ko) 2014-06-05 2015-05-26 게이트 밸브
US14/721,422 US9482350B2 (en) 2014-06-05 2015-05-26 Radical-resistant gate valve
CH00786/15A CH709767B1 (de) 2014-06-05 2015-06-02 Schieberventil.
DE102015108816.9A DE102015108816B4 (de) 2014-06-05 2015-06-03 Schieberventil
CN201510303570.2A CN105276217B (zh) 2014-06-05 2015-06-05 闸阀

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2014117035A JP6160926B2 (ja) 2014-06-05 2014-06-05 ゲートバルブ

Publications (3)

Publication Number Publication Date
JP2015230064A JP2015230064A (ja) 2015-12-21
JP2015230064A5 JP2015230064A5 (enExample) 2016-06-09
JP6160926B2 true JP6160926B2 (ja) 2017-07-12

Family

ID=54549029

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2014117035A Active JP6160926B2 (ja) 2014-06-05 2014-06-05 ゲートバルブ

Country Status (7)

Country Link
US (1) US9482350B2 (enExample)
JP (1) JP6160926B2 (enExample)
KR (1) KR102329449B1 (enExample)
CN (1) CN105276217B (enExample)
CH (1) CH709767B1 (enExample)
DE (1) DE102015108816B4 (enExample)
TW (1) TWI646277B (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3442712A4 (en) * 2016-04-11 2019-12-11 Spray Nozzle Engineering Pty Ltd HIGH PRESSURE SEALING OF SPRAY NOZZLE ARRANGEMENTS
JP6774302B2 (ja) * 2016-10-28 2020-10-21 株式会社キッツエスシーティー 真空用ゲートバルブ
EP3348885B1 (de) * 2017-01-16 2019-12-11 VAT Holding AG Dichtung eines vakuumventils und diesbezügliches herstellungsverfahren
CN111609159B (zh) * 2019-02-26 2025-08-12 北京航天石化技术装备工程有限公司 一种非对称结构双向密封盘阀
TWI716250B (zh) * 2020-01-02 2021-01-11 新萊應材科技有限公司 具有防塵功能之閘閥

Family Cites Families (31)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2002672A (en) * 1927-12-28 1935-05-28 Charles E Brown Valve for slush pumps
DE1792267U (de) 1958-06-13 1959-07-16 Leybolds Nachfolger E Absperrventil fuer unter unterdruck stehende raeume.
US3362680A (en) * 1962-10-18 1968-01-09 Robert C. Weiss Valve seat
US3558097A (en) 1968-05-16 1971-01-26 Joseph H Defrees Valve
US3631894A (en) * 1969-09-19 1972-01-04 White Sales Corp Graham Air start valve
JPS4633857Y1 (enExample) * 1969-10-08 1971-11-22
US4157169A (en) 1977-10-12 1979-06-05 Torr Vacuum Products Fluid operated gate valve for use with vacuum equipment
JPS55139562A (en) * 1979-04-14 1980-10-31 Hitachi Ltd Valve device
JPS58195158A (ja) * 1982-05-10 1983-11-14 Taisei Kiso Sekkei Kk 流体の流速測定方法およびその装置
JPS58195158U (ja) * 1982-12-27 1983-12-26 株式会社大阪真空機器製作所 ゲ−トバルブ
US5172722A (en) * 1990-09-17 1992-12-22 Motoyama Eng. Works, Ltd. Stop valve for a vacuum apparatus
JPH0530676U (ja) * 1991-09-30 1993-04-23 株式会社本山製作所 高純度ガス用止弁
US5579718A (en) * 1995-03-31 1996-12-03 Applied Materials, Inc. Slit valve door
EP1061301B1 (en) * 1999-06-14 2004-07-28 SMC Kabushiki Kaisha Gate valve
JP3445569B2 (ja) * 2000-09-18 2003-09-08 Ｓｍｃ株式会社 パイロット式２ポート真空バルブ
JP3472765B2 (ja) 2001-01-18 2003-12-02 山形日本電気株式会社 半導体製造装置の弁構造
JP3588637B2 (ja) * 2001-03-28 2004-11-17 株式会社ブイテックス 流量制御バルブ
JP2003166655A (ja) * 2001-09-19 2003-06-13 Smc Corp ポペット形弁シール機構
US6685163B2 (en) 2002-02-26 2004-02-03 Vat Holding Ag Vacuum valve
JP4304365B2 (ja) * 2002-12-16 2009-07-29 Ｓｍｃ株式会社 ゲートバルブ
JP2006005008A (ja) 2004-06-15 2006-01-05 Matsushita Electric Ind Co Ltd プラズマ処理装置
DE102004028968B4 (de) * 2004-06-16 2006-04-27 Karl Dungs Gmbh & Co. Kg Ventil mit sicherer Öffnungsanzeige
US7281700B2 (en) * 2005-04-12 2007-10-16 Tokyo Electron Limited Gate valve apparatus for vacuum processing system
JP4663538B2 (ja) * 2006-01-31 2011-04-06 日本バルカー工業株式会社 あり溝用シール材およびあり溝用シール材が装着された真空用ゲート弁
JP4831334B2 (ja) 2006-09-07 2011-12-07 大日本印刷株式会社 音響信号に対する情報の埋め込み装置および音響信号からの情報の抽出装置
JP5066724B2 (ja) * 2007-01-17 2012-11-07 Ｓｍｃ株式会社 高真空バルブ
US20080315141A1 (en) * 2007-06-25 2008-12-25 Greene, Tweed Of Delaware, Inc. Slit Valve Door
JP5490435B2 (ja) * 2009-03-31 2014-05-14 東京エレクトロン株式会社 ゲートバルブ装置
JP4633857B1 (ja) 2009-04-16 2011-02-16 ニホンハンダ株式会社 有機物被覆金属粒子の加熱焼結性の評価方法、加熱焼結性金属ペーストの製造方法、および金属製部材接合体の製造方法
CN201916518U (zh) * 2010-12-30 2011-08-03 中国原子能科学研究院 全金属密封高真空闸阀
JP5811320B2 (ja) * 2011-04-21 2015-11-11 Smc株式会社 ゲートバルブ

Also Published As

Publication number Publication date
US9482350B2 (en) 2016-11-01
KR102329449B1 (ko) 2021-11-22
TW201616021A (zh) 2016-05-01
KR20150140219A (ko) 2015-12-15
CH709767B1 (de) 2017-01-31
DE102015108816B4 (de) 2025-01-23
CN105276217A (zh) 2016-01-27
CH709767A2 (de) 2015-12-15
JP2015230064A (ja) 2015-12-21
CN105276217B (zh) 2019-01-15
US20150369374A1 (en) 2015-12-24
DE102015108816A1 (de) 2015-12-10
TWI646277B (zh) 2019-01-01

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