DE102015108816B4 - Schieberventil - Google Patents

Schieberventil Download PDF

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Publication number
DE102015108816B4
DE102015108816B4 DE102015108816.9A DE102015108816A DE102015108816B4 DE 102015108816 B4 DE102015108816 B4 DE 102015108816B4 DE 102015108816 A DE102015108816 A DE 102015108816A DE 102015108816 B4 DE102015108816 B4 DE 102015108816B4
Authority
DE
Germany
Prior art keywords
sealing
groove
valve
valve seat
opening
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE102015108816.9A
Other languages
German (de)
English (en)
Other versions
DE102015108816A1 (de
Inventor
c/o SMC Corporation Ishigaki Tsuneo
c/o SMC Corporation Shimoda Hiromi
c/o SMC Corporation Ogawa Hiroshi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SMC Corp
Original Assignee
SMC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SMC Corp filed Critical SMC Corp
Publication of DE102015108816A1 publication Critical patent/DE102015108816A1/de
Application granted granted Critical
Publication of DE102015108816B4 publication Critical patent/DE102015108816B4/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/16—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together
    • F16K3/20—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the seats
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/16—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together
    • F16K3/18—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members
    • F16K3/184—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members by means of cams
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/0281—Guillotine or blade-type valves, e.g. no passage through the valve member
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/30—Details
    • F16K3/314—Forms or constructions of slides; Attachment of the slide to the spindle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
    • F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Sliding Valves (AREA)
  • Details Of Valves (AREA)
DE102015108816.9A 2014-06-05 2015-06-03 Schieberventil Active DE102015108816B4 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2014-117035 2014-06-05
JP2014117035A JP6160926B2 (ja) 2014-06-05 2014-06-05 ゲートバルブ

Publications (2)

Publication Number Publication Date
DE102015108816A1 DE102015108816A1 (de) 2015-12-10
DE102015108816B4 true DE102015108816B4 (de) 2025-01-23

Family

ID=54549029

Family Applications (1)

Application Number Title Priority Date Filing Date
DE102015108816.9A Active DE102015108816B4 (de) 2014-06-05 2015-06-03 Schieberventil

Country Status (7)

Country Link
US (1) US9482350B2 (enExample)
JP (1) JP6160926B2 (enExample)
KR (1) KR102329449B1 (enExample)
CN (1) CN105276217B (enExample)
CH (1) CH709767B1 (enExample)
DE (1) DE102015108816B4 (enExample)
TW (1) TWI646277B (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10875046B2 (en) * 2016-04-11 2020-12-29 Spray Nozzle Engineering Pty Limited High-pressure sealing of spray nozzle assemblies
JP6774302B2 (ja) * 2016-10-28 2020-10-21 株式会社キッツエスシーティー 真空用ゲートバルブ
EP3348885B1 (de) * 2017-01-16 2019-12-11 VAT Holding AG Dichtung eines vakuumventils und diesbezügliches herstellungsverfahren
CN111609159B (zh) * 2019-02-26 2025-08-12 北京航天石化技术装备工程有限公司 一种非对称结构双向密封盘阀
TWI716250B (zh) * 2020-01-02 2021-01-11 新萊應材科技有限公司 具有防塵功能之閘閥

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1792267U (de) 1958-06-13 1959-07-16 Leybolds Nachfolger E Absperrventil fuer unter unterdruck stehende raeume.
US3558097A (en) 1968-05-16 1971-01-26 Joseph H Defrees Valve
US4157169A (en) 1977-10-12 1979-06-05 Torr Vacuum Products Fluid operated gate valve for use with vacuum equipment
JPH0530676U (ja) 1991-09-30 1993-04-23 株式会社本山製作所 高純度ガス用止弁
JP2002217137A (ja) 2001-01-18 2002-08-02 Nec Yamagata Ltd 半導体製造装置の弁構造
US6685163B2 (en) 2002-02-26 2004-02-03 Vat Holding Ag Vacuum valve
JP2008065008A (ja) 2006-09-07 2008-03-21 Dainippon Printing Co Ltd 音響信号に対する情報の埋め込み装置および音響信号からの情報の抽出装置

Family Cites Families (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2002672A (en) * 1927-12-28 1935-05-28 Charles E Brown Valve for slush pumps
US3362680A (en) * 1962-10-18 1968-01-09 Robert C. Weiss Valve seat
US3631894A (en) * 1969-09-19 1972-01-04 White Sales Corp Graham Air start valve
JPS4633857Y1 (enExample) * 1969-10-08 1971-11-22
JPS55139562A (en) * 1979-04-14 1980-10-31 Hitachi Ltd Valve device
JPS58195158A (ja) * 1982-05-10 1983-11-14 Taisei Kiso Sekkei Kk 流体の流速測定方法およびその装置
JPS58195158U (ja) * 1982-12-27 1983-12-26 株式会社大阪真空機器製作所 ゲ−トバルブ
US5172722A (en) * 1990-09-17 1992-12-22 Motoyama Eng. Works, Ltd. Stop valve for a vacuum apparatus
US5579718A (en) * 1995-03-31 1996-12-03 Applied Materials, Inc. Slit valve door
EP1061301B1 (en) * 1999-06-14 2004-07-28 SMC Kabushiki Kaisha Gate valve
JP3445569B2 (ja) * 2000-09-18 2003-09-08 Ｓｍｃ株式会社 パイロット式２ポート真空バルブ
JP3588637B2 (ja) * 2001-03-28 2004-11-17 株式会社ブイテックス 流量制御バルブ
JP2003166655A (ja) * 2001-09-19 2003-06-13 Smc Corp ポペット形弁シール機構
JP4304365B2 (ja) * 2002-12-16 2009-07-29 Ｓｍｃ株式会社 ゲートバルブ
JP2006005008A (ja) 2004-06-15 2006-01-05 Matsushita Electric Ind Co Ltd プラズマ処理装置
DE102004028968B4 (de) * 2004-06-16 2006-04-27 Karl Dungs Gmbh & Co. Kg Ventil mit sicherer Öffnungsanzeige
US7281700B2 (en) * 2005-04-12 2007-10-16 Tokyo Electron Limited Gate valve apparatus for vacuum processing system
JP4663538B2 (ja) * 2006-01-31 2011-04-06 日本バルカー工業株式会社 あり溝用シール材およびあり溝用シール材が装着された真空用ゲート弁
JP5066724B2 (ja) * 2007-01-17 2012-11-07 Ｓｍｃ株式会社 高真空バルブ
US20080315141A1 (en) * 2007-06-25 2008-12-25 Greene, Tweed Of Delaware, Inc. Slit Valve Door
JP5490435B2 (ja) * 2009-03-31 2014-05-14 東京エレクトロン株式会社 ゲートバルブ装置
JP4633857B1 (ja) 2009-04-16 2011-02-16 ニホンハンダ株式会社 有機物被覆金属粒子の加熱焼結性の評価方法、加熱焼結性金属ペーストの製造方法、および金属製部材接合体の製造方法
CN201916518U (zh) * 2010-12-30 2011-08-03 中国原子能科学研究院 全金属密封高真空闸阀
JP5811320B2 (ja) * 2011-04-21 2015-11-11 Smc株式会社 ゲートバルブ

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1792267U (de) 1958-06-13 1959-07-16 Leybolds Nachfolger E Absperrventil fuer unter unterdruck stehende raeume.
US3558097A (en) 1968-05-16 1971-01-26 Joseph H Defrees Valve
US4157169A (en) 1977-10-12 1979-06-05 Torr Vacuum Products Fluid operated gate valve for use with vacuum equipment
JPH0530676U (ja) 1991-09-30 1993-04-23 株式会社本山製作所 高純度ガス用止弁
JP2002217137A (ja) 2001-01-18 2002-08-02 Nec Yamagata Ltd 半導体製造装置の弁構造
US6685163B2 (en) 2002-02-26 2004-02-03 Vat Holding Ag Vacuum valve
JP2008065008A (ja) 2006-09-07 2008-03-21 Dainippon Printing Co Ltd 音響信号に対する情報の埋め込み装置および音響信号からの情報の抽出装置

Also Published As

Publication number Publication date
CN105276217A (zh) 2016-01-27
KR20150140219A (ko) 2015-12-15
CH709767A2 (de) 2015-12-15
KR102329449B1 (ko) 2021-11-22
CH709767B1 (de) 2017-01-31
US9482350B2 (en) 2016-11-01
TW201616021A (zh) 2016-05-01
DE102015108816A1 (de) 2015-12-10
US20150369374A1 (en) 2015-12-24
TWI646277B (zh) 2019-01-01
CN105276217B (zh) 2019-01-15
JP6160926B2 (ja) 2017-07-12
JP2015230064A (ja) 2015-12-21

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R018 Grant decision by examination section/examining division
R020 Patent grant now final