JP6158368B2 - センシング試験片の製作方法 - Google Patents
センシング試験片の製作方法 Download PDFInfo
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- JP6158368B2 JP6158368B2 JP2016009358A JP2016009358A JP6158368B2 JP 6158368 B2 JP6158368 B2 JP 6158368B2 JP 2016009358 A JP2016009358 A JP 2016009358A JP 2016009358 A JP2016009358 A JP 2016009358A JP 6158368 B2 JP6158368 B2 JP 6158368B2
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- Prior art keywords
- electrode layer
- layer
- insulating
- substrate
- test piece
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- 238000001514 detection method Methods 0.000 claims description 29
- 238000004519 manufacturing process Methods 0.000 claims description 17
- 238000000034 method Methods 0.000 claims description 15
- 102000004190 Enzymes Human genes 0.000 claims description 13
- 108090000790 Enzymes Proteins 0.000 claims description 13
- 239000000758 substrate Substances 0.000 claims description 13
- 239000000463 material Substances 0.000 claims description 11
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 8
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 claims description 8
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims description 8
- 238000005530 etching Methods 0.000 claims description 7
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 4
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 4
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 4
- 229910052782 aluminium Inorganic materials 0.000 claims description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 4
- 229910052804 chromium Inorganic materials 0.000 claims description 4
- 239000011651 chromium Substances 0.000 claims description 4
- 229910052802 copper Inorganic materials 0.000 claims description 4
- 239000010949 copper Substances 0.000 claims description 4
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 4
- 229910052737 gold Inorganic materials 0.000 claims description 4
- 239000010931 gold Substances 0.000 claims description 4
- 229910052741 iridium Inorganic materials 0.000 claims description 4
- GKOZUEZYRPOHIO-UHFFFAOYSA-N iridium atom Chemical compound [Ir] GKOZUEZYRPOHIO-UHFFFAOYSA-N 0.000 claims description 4
- 229910052759 nickel Inorganic materials 0.000 claims description 4
- 229910052763 palladium Inorganic materials 0.000 claims description 4
- 229910052697 platinum Inorganic materials 0.000 claims description 4
- -1 polyethylene terephthalate Polymers 0.000 claims description 4
- 229910052709 silver Inorganic materials 0.000 claims description 4
- 239000004332 silver Substances 0.000 claims description 4
- 229910052719 titanium Inorganic materials 0.000 claims description 4
- 239000010936 titanium Substances 0.000 claims description 4
- 229920002120 photoresistant polymer Polymers 0.000 claims description 3
- 230000035945 sensitivity Effects 0.000 claims description 3
- 229920002284 Cellulose triacetate Polymers 0.000 claims description 2
- NNLVGZFZQQXQNW-ADJNRHBOSA-N [(2r,3r,4s,5r,6s)-4,5-diacetyloxy-3-[(2s,3r,4s,5r,6r)-3,4,5-triacetyloxy-6-(acetyloxymethyl)oxan-2-yl]oxy-6-[(2r,3r,4s,5r,6s)-4,5,6-triacetyloxy-2-(acetyloxymethyl)oxan-3-yl]oxyoxan-2-yl]methyl acetate Chemical compound O([C@@H]1O[C@@H]([C@H]([C@H](OC(C)=O)[C@H]1OC(C)=O)O[C@H]1[C@@H]([C@@H](OC(C)=O)[C@H](OC(C)=O)[C@@H](COC(C)=O)O1)OC(C)=O)COC(=O)C)[C@@H]1[C@@H](COC(C)=O)O[C@@H](OC(C)=O)[C@H](OC(C)=O)[C@H]1OC(C)=O NNLVGZFZQQXQNW-ADJNRHBOSA-N 0.000 claims description 2
- 238000001459 lithography Methods 0.000 claims description 2
- 229920003207 poly(ethylene-2,6-naphthalate) Polymers 0.000 claims description 2
- 229920000747 poly(lactic acid) Polymers 0.000 claims description 2
- 239000011112 polyethylene naphthalate Substances 0.000 claims description 2
- 229920000139 polyethylene terephthalate Polymers 0.000 claims description 2
- 239000005020 polyethylene terephthalate Substances 0.000 claims description 2
- 239000004626 polylactic acid Substances 0.000 claims description 2
- 238000005259 measurement Methods 0.000 description 13
- 230000008569 process Effects 0.000 description 8
- 238000010586 diagram Methods 0.000 description 6
- 229910052751 metal Inorganic materials 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- 230000006698 induction Effects 0.000 description 3
- 229910021645 metal ion Inorganic materials 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 238000009413 insulation Methods 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 230000007480 spreading Effects 0.000 description 2
- 208000017667 Chronic Disease Diseases 0.000 description 1
- 206010010904 Convulsion Diseases 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000006806 disease prevention Effects 0.000 description 1
- 238000013399 early diagnosis Methods 0.000 description 1
- 238000009713 electroplating Methods 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 230000036541 health Effects 0.000 description 1
- 230000001939 inductive effect Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 229910001092 metal group alloy Inorganic materials 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 230000035790 physiological processes and functions Effects 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70416—2.5D lithography
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
- G01N27/28—Electrolytic cell components
- G01N27/30—Electrodes, e.g. test electrodes; Half-cells
- G01N27/327—Biochemical electrodes, e.g. electrical or mechanical details for in vitro measurements
- G01N27/3271—Amperometric enzyme electrodes for analytes in body fluids, e.g. glucose in blood
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N60/00—Superconducting devices
- H10N60/01—Manufacture or treatment
- H10N60/0268—Manufacture or treatment of devices comprising copper oxide
- H10N60/0661—Processes performed after copper oxide formation, e.g. patterning
- H10N60/0688—Etching
Landscapes
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Analytical Chemistry (AREA)
- Electrochemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Molecular Biology (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Hematology (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Apparatus Associated With Microorganisms And Enzymes (AREA)
Description
20 電極層
21 検知部
22 読取り部
23 第一電極層
24 第二電極層
30 絶縁部
40 酵素層
50 絶縁層
51 開口
S1 工程
S2 工程
S3 工程
S4 工程
S5 工程
S1A 工程
S1B 工程
Claims (6)
- 電極層を基板上に形成する工程S1と、
検知部及び前記検知部に隣接する読取り部を有する前記電極層に対してエッチングを行うことで、前記電極層の面積を前記基板の面積より小さくする工程S2と、
前記検知部の周縁を被覆するための絶縁部を前記検知部の周囲に形成し、前記絶縁部の材質は、絶縁インク、フォトレジスト、ドライ式レジストフィルム或いは紫外光硬化インクからなる群のいずれかである工程S3と、
酵素層を前記検知部の上方に形成する工程S4と、
絶縁層を前記酵素層の上方及び前記読取り部の周囲に形成し、且つ前記絶縁層は開口を有することで、前記酵素層に、前記絶縁層に遮蔽される遮蔽部と、前記遮蔽部に接続し且つ前記開口に対応して前記絶縁層に遮蔽されていない未遮蔽部とを備えさせる工程S5と、を包括することを特徴とするセンシング試験片の製作方法。 - 前記工程S1において、前記基板の材質は、ポリエチレンテレフタレート、ポリエチレンナフタレート、三酢酸セルロース、ポリ乳酸或いはこれ等の組合せからなる群のいずれかであることを特徴とする請求項1に記載のセンシング試験片の製作方法。
- 前記工程S1は、第一電極層を前記基板上に形成する工程S1Aと、第二電極層を前記基板から離れた前記第一電極層の一方に形成することで、前記第一電極層と前記第二電極層とが積層して前記電極層を形成する工程S1Bと、をさらに包括することを特徴とする請求項1に記載のセンシング試験片の製作方法。
- 前記工程S1Aにおいて、前記第一電極層の材質は、チタン、銅、ニッケル、銀、アルミニウム、クロム或いはこれ等の組合せからなる群のいずれかとし、その厚さは、20ナノメートルから3000ナノメートルの間であり、また、前記工程S1Bにおいて、前記第二電極層の材質は、金、白金、イリジウム、パラジウム或いはこれ等の組合せからなる群のいずれかとし、その厚さは、10ナノメートルから1000ナノメートルの間であり、且つ前記第二電極層の生物学的感度は前記第一電極層より高いことを特徴とする請求項3に記載のセンシング試験片の製作方法。
- 前記工程S1において、前記電極層の材質は、チタン、銅、ニッケル、銀、アルミニウム、クロム、金、白金、イリジウム、パラジウム或いはこれ等の組合せからなる群のいずれかとすることを特徴とする請求項1に記載のセンシング試験片の製作方法。
- 工程S3において、前記絶縁部は、リソグラフィエッチングを利用して形成することを特徴とする請求項1に記載のセンシング試験片の製作方法。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW104137252A TWI579562B (zh) | 2015-11-11 | 2015-11-11 | Method of Making Electrochemistry Test Specimen |
TW104137252 | 2015-11-11 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2017090429A JP2017090429A (ja) | 2017-05-25 |
JP6158368B2 true JP6158368B2 (ja) | 2017-07-05 |
Family
ID=58663346
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2016009358A Expired - Fee Related JP6158368B2 (ja) | 2015-11-11 | 2016-01-21 | センシング試験片の製作方法 |
Country Status (4)
Country | Link |
---|---|
US (1) | US9823584B2 (ja) |
JP (1) | JP6158368B2 (ja) |
CN (1) | CN106680335A (ja) |
TW (1) | TWI579562B (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR102289671B1 (ko) * | 2019-10-23 | 2021-08-13 | 동우 화인켐 주식회사 | 바이오 센서 |
Family Cites Families (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01284748A (ja) * | 1988-05-11 | 1989-11-16 | Omron Tateisi Electron Co | センサ接続用コネクタ |
JP3465370B2 (ja) * | 1994-09-20 | 2003-11-10 | 凸版印刷株式会社 | 酵素電極 |
JP2002189012A (ja) * | 2000-12-20 | 2002-07-05 | Sankyo Co Ltd | 酵素電極用白金電極及びその製造方法 |
JP2003315302A (ja) * | 2002-04-24 | 2003-11-06 | Tama Electric Co Ltd | バイオセンサ及びその製造方法 |
ATE475085T1 (de) * | 2003-10-30 | 2010-08-15 | Arkray Inc | Biosensor und verfahren zu dessen herstellung |
CN1563970A (zh) * | 2004-03-22 | 2005-01-12 | 中国科学院电子学研究所 | 电化学传感器胆固醇试条和所用试剂的制备方法 |
JP4143046B2 (ja) * | 2004-06-02 | 2008-09-03 | 株式会社東芝 | 核酸検出基板および該装置を使用する核酸検出方法 |
JP2006308458A (ja) * | 2005-04-28 | 2006-11-09 | Matsushita Electric Ind Co Ltd | バイオセンサ |
US20080020452A1 (en) * | 2006-07-18 | 2008-01-24 | Natasha Popovich | Diagnostic strip coding system with conductive layers |
WO2008040997A1 (en) * | 2006-10-05 | 2008-04-10 | Lifescan Scotland Limited | A test strip comprising patterned electrodes |
US8163146B2 (en) * | 2007-10-12 | 2012-04-24 | Abbott Diabetes Care Inc. | Mediator stabilized reagent compositions for use in biosensor electrodes |
US8696917B2 (en) * | 2009-02-09 | 2014-04-15 | Edwards Lifesciences Corporation | Analyte sensor and fabrication methods |
KR20120049723A (ko) * | 2010-11-09 | 2012-05-17 | 쓰리엠 이노베이티브 프로퍼티즈 캄파니 | 전기화학적 바이오 센서용 전극 스트립 및 그 제조방법 |
KR101466222B1 (ko) * | 2012-06-01 | 2014-12-01 | 주식회사 아이센스 | 정확도가 향상된 전기화학적 바이오센서 |
WO2014070383A1 (en) * | 2012-10-30 | 2014-05-08 | Edwards Lifesciences Corporation | Analyte sensor and fabrication methods |
JP2014153279A (ja) * | 2013-02-12 | 2014-08-25 | Dainippon Printing Co Ltd | バイオセンサ用電極の製造方法、バイオセンサの製造方法およびバイオセンサ用転写箔 |
TW201437636A (zh) | 2013-03-22 | 2014-10-01 | Ichia Tech Inc | 生物液體的測試片製作方法及其結構 |
KR101489154B1 (ko) * | 2014-06-26 | 2015-02-03 | 국민대학교산학협력단 | 잔류응력을 이용한 나노갭 센서의 제조방법 및 이에 의해 제조되는 나노갭 센서 |
US10473611B2 (en) * | 2014-10-22 | 2019-11-12 | Arkray, Inc. | Electrochemical sensor and method for producing electrochemical sensor |
-
2015
- 2015-11-11 TW TW104137252A patent/TWI579562B/zh not_active IP Right Cessation
- 2015-12-17 CN CN201510953094.9A patent/CN106680335A/zh active Pending
-
2016
- 2016-01-21 JP JP2016009358A patent/JP6158368B2/ja not_active Expired - Fee Related
- 2016-01-27 US US15/007,577 patent/US9823584B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
US9823584B2 (en) | 2017-11-21 |
CN106680335A (zh) | 2017-05-17 |
TW201716775A (zh) | 2017-05-16 |
US20170131639A1 (en) | 2017-05-11 |
TWI579562B (zh) | 2017-04-21 |
JP2017090429A (ja) | 2017-05-25 |
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