JP6141969B2 - 大面積を有する基板のテクスチャ加工方法 - Google Patents
大面積を有する基板のテクスチャ加工方法 Download PDFInfo
- Publication number
- JP6141969B2 JP6141969B2 JP2015512106A JP2015512106A JP6141969B2 JP 6141969 B2 JP6141969 B2 JP 6141969B2 JP 2015512106 A JP2015512106 A JP 2015512106A JP 2015512106 A JP2015512106 A JP 2015512106A JP 6141969 B2 JP6141969 B2 JP 6141969B2
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- minutes
- mold
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
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- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 21
- 229920003229 poly(methyl methacrylate) Polymers 0.000 description 18
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- CXQXSVUQTKDNFP-UHFFFAOYSA-N octamethyltrisiloxane Chemical compound C[Si](C)(C)O[Si](C)(C)O[Si](C)(C)C CXQXSVUQTKDNFP-UHFFFAOYSA-N 0.000 description 9
- 238000004987 plasma desorption mass spectroscopy Methods 0.000 description 9
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- 238000000465 moulding Methods 0.000 description 5
- 238000005498 polishing Methods 0.000 description 5
- RMAQACBXLXPBSY-UHFFFAOYSA-N silicic acid Chemical compound O[Si](O)(O)O RMAQACBXLXPBSY-UHFFFAOYSA-N 0.000 description 5
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 4
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- 229920000139 polyethylene terephthalate Polymers 0.000 description 3
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- 239000004952 Polyamide Substances 0.000 description 2
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- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 1
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 1
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- UHYPYGJEEGLRJD-UHFFFAOYSA-N cadmium(2+);selenium(2-) Chemical compound [Se-2].[Cd+2] UHYPYGJEEGLRJD-UHFFFAOYSA-N 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000003618 dip coating Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000000609 electron-beam lithography Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- ZZRGHKUNLAYDTC-UHFFFAOYSA-N ethoxy(methyl)silane Chemical compound CCO[SiH2]C ZZRGHKUNLAYDTC-UHFFFAOYSA-N 0.000 description 1
- 239000005038 ethylene vinyl acetate Substances 0.000 description 1
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- 238000003760 magnetic stirring Methods 0.000 description 1
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- 239000012528 membrane Substances 0.000 description 1
- 230000005499 meniscus Effects 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 238000001127 nanoimprint lithography Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000001699 photocatalysis Effects 0.000 description 1
- 238000013082 photovoltaic technology Methods 0.000 description 1
- 239000004417 polycarbonate Substances 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- 229920001155 polypropylene Polymers 0.000 description 1
- 229920002223 polystyrene Polymers 0.000 description 1
- 239000004800 polyvinyl chloride Substances 0.000 description 1
- HUAUNKAZQWMVFY-UHFFFAOYSA-M sodium;oxocalcium;hydroxide Chemical compound [OH-].[Na+].[Ca]=O HUAUNKAZQWMVFY-UHFFFAOYSA-M 0.000 description 1
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- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
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Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
- B29C43/02—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles
- B29C43/10—Isostatic pressing, i.e. using non-rigid pressure-exerting members against rigid parts or dies
- B29C43/12—Isostatic pressing, i.e. using non-rigid pressure-exerting members against rigid parts or dies using bags surrounding the moulding material or using membranes contacting the moulding material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C35/00—Heating, cooling or curing, e.g. crosslinking or vulcanising; Apparatus therefor
- B29C35/02—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould
- B29C35/0227—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould using pressure vessels, e.g. autoclaves, vulcanising pans
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
- B29C59/02—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing
- B29C59/026—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing of layered or coated substantially flat surfaces
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y40/00—Manufacture or treatment of nanostructures
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/0002—Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
- B29C43/32—Component parts, details or accessories; Auxiliary operations
- B29C43/36—Moulds for making articles of definite length, i.e. discrete articles
- B29C43/3642—Bags, bleeder sheets or cauls for isostatic pressing
- B29C2043/3644—Vacuum bags; Details thereof, e.g. fixing or clamping
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
- B29C59/02—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing
- B29C59/022—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing characterised by the disposition or the configuration, e.g. dimensions, of the embossments or the shaping tools therefor
- B29C2059/023—Microembossing
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Nanotechnology (AREA)
- General Physics & Mathematics (AREA)
- Crystallography & Structural Chemistry (AREA)
- Mechanical Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Oral & Maxillofacial Surgery (AREA)
- Thermal Sciences (AREA)
- Theoretical Computer Science (AREA)
- Mathematical Physics (AREA)
- Health & Medical Sciences (AREA)
- Shaping Of Tube Ends By Bending Or Straightening (AREA)
- Casting Or Compression Moulding Of Plastics Or The Like (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Laminated Bodies (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
- Surface Treatment Of Glass (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR1254373A FR2990384B1 (fr) | 2012-05-14 | 2012-05-14 | Procede de texturation sur un substrat de grande surface |
| FR1254373 | 2012-05-14 | ||
| PCT/FR2013/051048 WO2013171420A1 (fr) | 2012-05-14 | 2013-05-14 | Procede de texturation sur un substrat de grande surface |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2015522443A JP2015522443A (ja) | 2015-08-06 |
| JP6141969B2 true JP6141969B2 (ja) | 2017-06-07 |
Family
ID=48577122
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2015512106A Expired - Fee Related JP6141969B2 (ja) | 2012-05-14 | 2013-05-14 | 大面積を有する基板のテクスチャ加工方法 |
Country Status (9)
| Country | Link |
|---|---|
| US (1) | US9296132B2 (OSRAM) |
| EP (1) | EP2850493A1 (OSRAM) |
| JP (1) | JP6141969B2 (OSRAM) |
| KR (1) | KR20150010726A (OSRAM) |
| CN (1) | CN104272187A (OSRAM) |
| EA (1) | EA201492087A1 (OSRAM) |
| FR (1) | FR2990384B1 (OSRAM) |
| IN (1) | IN2014MN02198A (OSRAM) |
| WO (1) | WO2013171420A1 (OSRAM) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11133118B2 (en) | 2012-05-22 | 2021-09-28 | University Of Massachusetts | Patterned nanoparticle structures |
| US10088110B2 (en) * | 2016-05-17 | 2018-10-02 | Hexagon Technology As | Pressure vessel liner venting via nanotextured surface |
| EP3481562A4 (en) * | 2016-07-08 | 2019-06-26 | University of Massachusetts | STRUCTURING OF NANOSTRUCTURES WITH IMPRINT LITHOGRAPHY |
| FR3065723B1 (fr) * | 2017-04-28 | 2021-09-03 | Saint Gobain | Article protege par une couche de protection temporaire rugueuse |
| KR102870782B1 (ko) * | 2019-08-06 | 2025-10-13 | 엘지전자 주식회사 | 디스플레이 장치의 제조 방법 및 디스플레이 장치 제조를 위한 전사 기판 |
| US12044963B2 (en) | 2020-01-22 | 2024-07-23 | Applied Materials, Inc. | High refractive index imprint compositions and materials and processes for making the same |
| US20210325777A1 (en) | 2020-04-20 | 2021-10-21 | Applied Materials, Inc. | Methods for increasing the refractive index of high-index nanoimprint lithography films |
| FR3122523B1 (fr) * | 2021-04-30 | 2023-06-09 | Commissariat Energie Atomique | Procede de structuration de surface hybride par gravure plasma |
| CN116875091B (zh) * | 2023-07-12 | 2024-08-30 | 东方绿色能源(河北)有限公司华中分公司 | 一种不锈钢基体表面超疏水薄膜及其制备方法 |
Family Cites Families (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1493348A (en) * | 1973-10-30 | 1977-11-30 | Ft Projects Ltd | Thermal treatment of heat fusible materials |
| US4360266A (en) | 1979-08-24 | 1982-11-23 | Dai Nippon Insatsu Kabushiki Kaisha | Contact printing method and apparatus |
| JPS6172529A (ja) * | 1984-09-17 | 1986-04-14 | Mitsui Toatsu Chem Inc | 複合材料の製法 |
| US5393365A (en) * | 1993-11-19 | 1995-02-28 | E. I. Du Pont De Nemours And Company | Embossed glass/plastic laminate and process for preparing the same |
| US6482742B1 (en) * | 2000-07-18 | 2002-11-19 | Stephen Y. Chou | Fluid pressure imprint lithography |
| SE515607C2 (sv) * | 1999-12-10 | 2001-09-10 | Obducat Ab | Anordning och metod vid tillverkning av strukturer |
| US7635262B2 (en) * | 2000-07-18 | 2009-12-22 | Princeton University | Lithographic apparatus for fluid pressure imprint lithography |
| US7211214B2 (en) * | 2000-07-18 | 2007-05-01 | Princeton University | Laser assisted direct imprint lithography |
| US20050084613A1 (en) * | 2003-08-19 | 2005-04-21 | Jian Wang | Sub-micron-scale patterning method and system |
| US7682545B2 (en) | 2003-11-17 | 2010-03-23 | Dow Corning Corporation | Embossing toughened silicone resin substrates |
| JP4146817B2 (ja) * | 2004-04-16 | 2008-09-10 | サカイオーベックス株式会社 | 繊維強化積層材の製造方法 |
| JP2008507114A (ja) * | 2004-04-27 | 2008-03-06 | ザ ボード オブ トラスティーズ オブ ザ ユニヴァーシティー オブ イリノイ | ソフトリソグラフィ用複合パターニングデバイス |
| US7186367B2 (en) * | 2004-05-13 | 2007-03-06 | The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration | Double vacuum bag process for resin matrix composite manufacturing |
| FR2893610B1 (fr) * | 2005-11-23 | 2008-07-18 | Saint Gobain | Procede de structuration de surface d'un produit verrier, produit verrier a surface structuree et utilisations |
| JP2012061820A (ja) * | 2010-09-17 | 2012-03-29 | Dainippon Printing Co Ltd | 繊維強化複合材料の賦型方法 |
-
2012
- 2012-05-14 FR FR1254373A patent/FR2990384B1/fr active Active
-
2013
- 2013-05-14 IN IN2198MUN2014 patent/IN2014MN02198A/en unknown
- 2013-05-14 WO PCT/FR2013/051048 patent/WO2013171420A1/fr not_active Ceased
- 2013-05-14 JP JP2015512106A patent/JP6141969B2/ja not_active Expired - Fee Related
- 2013-05-14 CN CN201380024814.2A patent/CN104272187A/zh active Pending
- 2013-05-14 US US14/401,363 patent/US9296132B2/en not_active Expired - Fee Related
- 2013-05-14 EA EA201492087A patent/EA201492087A1/ru unknown
- 2013-05-14 EP EP13727285.2A patent/EP2850493A1/fr not_active Withdrawn
- 2013-05-14 KR KR20147031601A patent/KR20150010726A/ko not_active Withdrawn
Also Published As
| Publication number | Publication date |
|---|---|
| EA201492087A1 (ru) | 2015-02-27 |
| US20150140837A1 (en) | 2015-05-21 |
| CN104272187A (zh) | 2015-01-07 |
| US9296132B2 (en) | 2016-03-29 |
| JP2015522443A (ja) | 2015-08-06 |
| IN2014MN02198A (OSRAM) | 2015-09-11 |
| WO2013171420A1 (fr) | 2013-11-21 |
| EP2850493A1 (fr) | 2015-03-25 |
| FR2990384A1 (fr) | 2013-11-15 |
| KR20150010726A (ko) | 2015-01-28 |
| FR2990384B1 (fr) | 2015-05-15 |
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