JP6139451B2 - Static eliminator and transport device equipped with the same - Google Patents

Static eliminator and transport device equipped with the same Download PDF

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JP6139451B2
JP6139451B2 JP2014068999A JP2014068999A JP6139451B2 JP 6139451 B2 JP6139451 B2 JP 6139451B2 JP 2014068999 A JP2014068999 A JP 2014068999A JP 2014068999 A JP2014068999 A JP 2014068999A JP 6139451 B2 JP6139451 B2 JP 6139451B2
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substrate
discharge electrode
transport
static eliminator
static elimination
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JP2015191813A (en
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斎藤　進
進 斎藤
奥山　明
明 奥山
多通夫 中尾
多通夫 中尾
大介 池田
大介 池田
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Daifuku Co Ltd
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Priority to CN201810313901.4A priority patent/CN108463043B/en
Priority to CN201510138658.3A priority patent/CN104955254B/en
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Description

本発明は、平板状の基板の表面部に支持された放電極と、前記基板に支持されて前記基板を加熱する加熱部と、を備え、前記放電極からの放電によりイオン化物質を生成して除電対象物を除電する除電装置、及び、それを備えた搬送装置に関する。   The present invention includes a discharge electrode supported on a surface portion of a flat substrate, and a heating unit supported on the substrate to heat the substrate, and generates an ionized substance by discharge from the discharge electrode. The present invention relates to a static eliminator that neutralizes an object to be neutralized, and a transport device including the same.

放電によりイオン化物質を生成する放電極には、当該放電極からの放電に伴って不純物が付着する。特開平５−１６６５７８号公報（特許文献１）には、放電極に不純物が付着すると、その不純物が空気中の水分を吸収して放電極の放電能力が低下することが開示されている。また、基板の材質によっては、基板が空気中の水分を吸収してしまい、これにより放電極の放電能力が低下する虞がある。さらに、上記不純物は、放電極の周囲の空気の湿度が高い場合に付着し易く、放電極の放電能力の低下が発生し易いことが経験的に分かっている。このような放電極の放電能力の低下は、除電装置の除電能力の低下につながるという問題がある。この問題に対し、特許文献１には、基板を加熱する線状の加熱部を平板状の基板の裏面部に取り付けて、放電極を加熱して不純物の結晶を分解除去する技術が開示されている。特許文献１の技術では、不純物の分解除去に加え、加熱部によって放電極の周囲の空気を加熱して空気の湿度を低下させることによって、不純物の放電極への付着を抑制することで、放電極の放電能力の低下を抑制できると考えられる。   Impurities adhere to the discharge electrode that generates the ionized substance by the discharge accompanying the discharge from the discharge electrode. Japanese Patent Application Laid-Open No. 5-166578 (Patent Document 1) discloses that when impurities adhere to the discharge electrode, the impurities absorb moisture in the air and the discharge capacity of the discharge electrode decreases. In addition, depending on the material of the substrate, the substrate absorbs moisture in the air, which may reduce the discharge capacity of the discharge electrode. Furthermore, it has been empirically found that the impurities are likely to adhere when the humidity of the air around the discharge electrode is high, and the discharge capacity of the discharge electrode is likely to decrease. Such a decrease in the discharge capability of the discharge electrode has a problem that it leads to a decrease in the neutralization capability of the static eliminator. In order to solve this problem, Patent Document 1 discloses a technique in which a linear heating unit for heating a substrate is attached to the back surface of a flat substrate and the discharge electrode is heated to decompose and remove impurity crystals. Yes. In the technique of Patent Document 1, in addition to the decomposition and removal of impurities, the heating unit heats the air around the discharge electrode to reduce the humidity of the air, thereby suppressing the adhesion of impurities to the discharge electrode. It is considered that the decrease in the discharge capacity of the electrode can be suppressed.

特開平５−１６６５７８号公報JP-A-5-166578

しかしながら、特許文献１の構成では、基板の裏面に線状のヒーターパターン６を蛇行状に配置して基板を加熱するようにしている。このような構成では、ヒーターパターン６による熱が加熱部の存在部分に集中するような熱分布となり、線状のヒーターパターン６の存在部分は十分な加熱が可能であるものの、基板の面方向でヒーターパターン６から離れた部分では加熱が十分に行えない虞がある。
その為、基板における比較的温度の低い部分で十分な低湿度化が行えず、基板による水分の吸収や不純物結晶の付着、さらには、付着した不純物結晶の水分の吸収が発生し、放電極の放電能力の低下を適切に防止できない虞がある。
そこで、例えば、線状の加熱部を、放電極の存在範囲の全体に満遍なく稠密に存在するように蛇行させることも考えられるが、このような構成とすると、加熱部の構成が複雑になる虞がある。 However, in the configuration of Patent Document 1, linear heater patterns 6 are arranged in a meandering manner on the back surface of the substrate to heat the substrate. In such a configuration, the heat distribution by the heater pattern 6 is concentrated on the existing portion of the heating portion, and the existing portion of the linear heater pattern 6 can be heated sufficiently, but in the surface direction of the substrate. There is a possibility that heating cannot be sufficiently performed in a portion away from the heater pattern 6.
Therefore, sufficient humidity reduction cannot be performed at a relatively low temperature portion of the substrate, moisture absorption by the substrate, impurity crystal adhesion, and moisture absorption of the adhering impurity crystal occur. There is a possibility that a decrease in discharge capacity cannot be prevented appropriately.
Thus, for example, it is conceivable to meander the linear heating section so that it is present evenly and densely over the entire range of the discharge electrodes. However, with such a configuration, the configuration of the heating section may be complicated. There is.

そこで、加熱部の構成を簡素なものとしながら、放電極における放電能力の低下を適切に抑制できる除電装置、及び、そのような除電装置を備えた搬送装置の実現が望まれる。   Therefore, it is desired to realize a static eliminator that can appropriately suppress a decrease in discharge capability of the discharge electrode and a transport device including such a static eliminator while simplifying the configuration of the heating unit.

上記課題を解決するための本発明に係る除電装置は、平板状の基板の表面部に支持された放電極と、前記基板に支持されて前記基板を加熱する加熱部と、を備え、前記放電極からの放電によりイオン化物質を生成して除電対象物を除電するものであって、
絶縁性材料にて形成されて熱伝導率が前記基板の熱伝導率よりも大きい伝熱体が、前記基板の表面部における設定範囲の全面に亘って前記基板に接触する状態で設けられ、前記設定範囲は、前記加熱部に対応する部分を含みかつ前記放電極に対応する部分の周囲に設定されている点を特徴とする。 In order to solve the above problems, a static eliminator according to the present invention includes a discharge electrode supported by a surface portion of a flat substrate and a heating unit supported by the substrate to heat the substrate. An ionization substance is generated by discharging from an electrode to neutralize an object to be neutralized,
A heat transfer body formed of an insulating material and having a thermal conductivity larger than the thermal conductivity of the substrate is provided in contact with the substrate over the entire set range in the surface portion of the substrate, The setting range includes a portion corresponding to the heating portion and is set around a portion corresponding to the discharge electrode.

上記したように、放電極を支持している基板を加熱部にて加熱することで、放電極周辺の空気を加熱し湿度を低下させて、基板による水分吸収や放電極への不純物の付着を抑制し、放電極の放電能力の低下を防止することができる。   As described above, the substrate supporting the discharge electrode is heated by the heating unit to heat the air around the discharge electrode and reduce the humidity, thereby absorbing moisture by the substrate and adhesion of impurities to the discharge electrode. It can suppress and can prevent the discharge capacity of the discharge electrode from decreasing.

しかも、基板の熱伝導率よりも大きい伝熱体が、基板の表面部における、加熱部に対応する部分を含みかつ放電極に対応する部分の周囲に設定された設定範囲の全面に亘って、基板に接触する状態で設けられている。したがって、例えば、加熱部を直線状のヒーターとする等、簡易な構成としても、加熱部が発生する熱を伝熱体の基板表面部との接触面の全体を用いて伝達することができ、基板の表面部における設定範囲の全体を極力均一に加熱することができる。このため、放電極の周囲の空気の湿度を、極力広い範囲に亘って低下させることができる。   In addition, the heat transfer body larger than the thermal conductivity of the substrate covers the entire surface of the set range that includes the portion corresponding to the heating portion and the portion corresponding to the discharge electrode in the surface portion of the substrate. It is provided in contact with the substrate. Therefore, for example, even if the heating unit is a linear heater, the heat generated by the heating unit can be transmitted using the entire contact surface with the substrate surface portion of the heat transfer body, The entire set range in the surface portion of the substrate can be heated as uniformly as possible. For this reason, the humidity of the air around the discharge electrode can be reduced over a wide range as much as possible.

したがって、加熱部の構成を簡素なものとしながら、放電極における放電能力の低下を適切に抑制できる除電装置を提供できる。   Therefore, it is possible to provide a static eliminator that can appropriately suppress a decrease in the discharge capability of the discharge electrode while simplifying the configuration of the heating unit.

本発明に係る除電装置においては、前記放電極が、連続する線状に形成され、前記加熱部が線状に形成されて前記放電極に沿って設けられていることが好ましい。   In the static eliminator according to the present invention, it is preferable that the discharge electrode is formed in a continuous line shape, and the heating portion is formed in a line shape and provided along the discharge electrode.

すなわち、放電極が線状に構成されるので、イオン化物質が、線状の放電極に沿って生成される。したがって、局所的に設けられた放電極によってイオン化物質を生成する場合に比べて、広範囲にて均一にイオン化物質を生成することができ、除電対象物における除電対象箇所が一定の広がりを有する場合においても、偏りなく除電作用を発揮することができる。
そして、加熱部が、線状に形成された放電極に沿って設けられているので、線状の放電極の全体に亘って、その周囲の雰囲気の湿度を低下させることができ、放電極における放電能力の低下を適切に抑制できる。 That is, since the discharge electrode is configured in a linear shape, an ionized substance is generated along the linear discharge electrode. Therefore, compared with the case where the ionized substance is generated by the discharge electrode provided locally, the ionized substance can be generated uniformly in a wide range, and the static elimination target portion in the static elimination target has a certain spread. However, the neutralization effect can be exhibited without any bias.
And since the heating part is provided along the discharge electrode formed linearly, the humidity of the surrounding atmosphere can be reduced over the whole linear discharge electrode. A decrease in discharge capacity can be appropriately suppressed.

本発明に係る除電装置においては、前記基板の表面部を覆い且つ前記放電極に対応する位置に開口を備えた金属製の筐体部が設けられ、前記伝熱体が前記筐体部に接触する状態で設けられていることが好ましい。   In the static eliminator according to the present invention, there is provided a metal housing portion that covers the surface portion of the substrate and has an opening at a position corresponding to the discharge electrode, and the heat transfer body contacts the housing portion. It is preferable that it is provided in a state.

除電対象物は単一極性に大きく帯電している場合があるため、その除電対象物の電荷で生じた電界の影響により、放電極を含めた回路に寄生している浮遊容量成分に電位のオフセットが生じる。回路内が基準電位に対しオフセットすることは、基準電位との電位差をもってイオン化物質を生成している仕組みにおいて、その生成量に不安定な要因が生じることになり、イオンバランスや除電性能に影響を及ぼす虞がある。
そこで、放電極に対応する位置に開口を設けた金属製の筐体部にて基板の表面部を覆うことで、除電対象物から生じる電界により放電極の電位が影響を受ける事象を抑制することができる。
このような構成において、不純物結晶は、放電極だけでなく、金属製の筐体部における放電極に近接する部分にも付着する可能性があるが、伝熱体を筐体部に接触する状態で設ければ、加熱部の熱を筐体部に良好に伝達することができるため、筐体部周辺の雰囲気の湿度を低減することができ、放電極における放電能力の低下を適切に抑制できる。 Since the object to be neutralized may be highly charged to a single polarity, the potential offset to the stray capacitance component parasitic on the circuit including the discharge electrode due to the influence of the electric field generated by the charge of the object to be neutralized. Occurs. The offset in the circuit with respect to the reference potential causes an unstable factor in the amount of ionized material generated in a mechanism that generates an ionized substance with a potential difference from the reference potential, which affects the ion balance and static elimination performance. There is a risk of effect.
Therefore, by covering the surface of the substrate with a metal housing having an opening at a position corresponding to the discharge electrode, it is possible to suppress an event in which the potential of the discharge electrode is affected by the electric field generated from the static elimination object. Can do.
In such a configuration, the impurity crystal may adhere not only to the discharge electrode, but also to a portion in the vicinity of the discharge electrode in the metal casing, but the heat transfer body is in contact with the casing. Since the heat of the heating part can be transferred to the casing part satisfactorily, the humidity of the atmosphere around the casing part can be reduced, and the reduction of the discharge capability in the discharge electrode can be appropriately suppressed. .

本発明に係る除電装置においては、前記筐体部が、ステンレス鋼により構成されていることが好ましい。   In the static eliminator according to the present invention, it is preferable that the casing is made of stainless steel.

すなわち、放電極からの放電に伴って放電極自体や筐体部に付着する不純物は、例えば硝酸アンモニウムや硫酸アンモニウム等が混入した結晶等、金属に対する腐食性を有する物質である可能性がある。
そこで、筐体部を、耐腐食性が比較的高いステンレス鋼により構成することで、仮に不純物が付着したとしても、筐体部が腐食する事態を抑制することができる。 In other words, the impurities attached to the discharge electrode itself and the casing due to the discharge from the discharge electrode may be a substance having corrosiveness to metals, such as crystals mixed with ammonium nitrate, ammonium sulfate, or the like.
Therefore, by forming the casing portion from stainless steel having relatively high corrosion resistance, it is possible to prevent the casing portion from corroding even if impurities are attached.

本発明に係る除電装置においては、前記絶縁性材料が、前記基板の表面部から垂直方向に離れる方向での熱伝導率が１．０Ｗ／ｍ・Ｋ以上２．０Ｗ／ｍ・Ｋ以下の樹脂であり、 前記基板が、熱伝導率が０．１Ｗ／ｍ・Ｋ以上０．９Ｗ／ｍ・Ｋ以下の材質にて構成されていることが好ましい。   In the static eliminator according to the present invention, the insulating material is a resin having a thermal conductivity of 1.0 W / m · K or more and 2.0 W / m · K or less in a direction away from the surface portion of the substrate in the vertical direction. The substrate is preferably made of a material having a thermal conductivity of 0.1 W / m · K or more and 0.9 W / m · K or less.

すなわち、伝熱体が、基板よりも熱伝導率の大きい絶縁性材料で構成されているから、加熱部から生じた熱が基板から熱伝導率の大きな伝熱体に移動し易い。この為、基板を加熱部によって直接加熱する状態を抑制しつつ、当該基板を伝熱体にて加熱し易いものとなる。   That is, since the heat transfer body is made of an insulating material having a thermal conductivity higher than that of the substrate, the heat generated from the heating unit easily moves from the substrate to the heat transfer body having a higher thermal conductivity. For this reason, it becomes easy to heat the said board | substrate with a heat exchanger, suppressing the state which heats a board | substrate directly with a heating part.

本発明に係る除電装置においては、前記基板、前記伝熱体、及び前記加熱部が一体に組み付けられた除電ユニットを備えていることが好ましい。   In the static elimination apparatus which concerns on this invention, it is preferable to provide the static elimination unit with which the said board | substrate, the said heat exchanger, and the said heating part were assembled | attached integrally.

すなわち、基板、伝熱体、及び加熱部が一体に組み付けられた除電ユニットを取り付けることで、取付対象箇所への除電装置の取付け作業の容易化を図ることができる。
また、例えばメンテナンス時等において、取付対象箇所から除電装置を取外したい場合は、当該除電ユニットごと取外すことで、簡単に除電装置を取付対象箇所から取外すことができる。このように、取付け及び取外しが簡単に行える除電装置となる。 That is, by attaching the static elimination unit in which the substrate, the heat transfer body, and the heating unit are integrally assembled, it is possible to facilitate the operation of attaching the static elimination device to the attachment target location.
For example, when it is desired to remove the static eliminator from the attachment target part during maintenance, the static eliminator can be easily detached from the attachment target part by detaching the static elimination unit. Thus, the static eliminator can be easily attached and detached.

本発明に係る搬送装置は、板状の搬送物を下方から支持する搬送ローラを搬送方向に複数並ぶ状態で備えて前記搬送物を搬送するものであって、
前記除電装置が、搬送方向で複数の前記搬送ローラの間に取付けられ、前記除電装置は、前記搬送ローラに支持されている前記搬送物の下方において近接する位置に取り付けられていることが好ましい。 The transport device according to the present invention transports the transported object with a plurality of transport rollers that support a plate-shaped transported object from below in a state of being aligned in the transport direction,
It is preferable that the static eliminator is attached between the plurality of conveyance rollers in the conveyance direction, and the static eliminator is attached at a position close to the lower side of the conveyance object supported by the conveyance rollers.

すなわち、板状の搬送物を下方から支持する搬送ローラにて当該板状の搬送物を搬送するように構成した場合、搬送ローラと搬送物の下面との摩擦により、搬送物（特にその下面側）が帯電する虞がある。
上記構成によれば、搬送物の下方において近接する位置に除電装置が備えられているので、搬送物の下面側が帯電したとしても、当該搬送物を適切に除電することができる。 That is, when the plate-shaped transported object is transported by a transport roller that supports the plate-shaped transported object from below, the transported object (particularly the lower surface side thereof) is caused by friction between the transport roller and the lower surface of the transported object. ) May be charged.
According to the above configuration, since the static eliminating device is provided at a position close to the lower side of the conveyed product, even if the lower surface side of the conveyed product is charged, the conveyed product can be appropriately neutralized.

搬送装置の要部側面図Side view of main parts of transport device 搬送装置の要部平面図Plan view of main parts of transport device 除電ユニットの全体斜視図Overall perspective view of static elimination unit 放電極基板及び接続用基板の全体斜視図Overall perspective view of discharge electrode substrate and connection substrate 図４におけるＶ−Ｖ方向矢視図VV direction arrow view in FIG. 図４におけるＶＩ−ＶＩ方向矢視図VI-VI direction arrow view in FIG. 加熱部の配置パターンを示す図The figure which shows the arrangement pattern of a heating part 伝熱体の全体斜視図Overall perspective view of heat transfer body 筐体部の全体斜視図Overall perspective view of the housing 除電ユニットの組立て構成図Assembly diagram of static elimination unit 除電ユニットの長手方向視断面図Longitudinal sectional view of the static elimination unit

以下、本発明に係る除電装置を装備した搬送装置の実施形態を、図面に基づいて説明する。
図１及び図２に示すように、搬送装置１は、回転軸１Ｊと一体に回転自在に支持枠体１Ｗに支持されて、液晶用のガラス基板等の板状の搬送物を下方から支持する搬送ローラ１Ｒを、搬送方向に複数並ぶ状態で備えて構成されている。
夫々の回転軸１Ｊには、スプロケット１Ｓが一体回転自在に取り付けられ、隣接する回転軸１Ｊ同士は、複数のスプロケット１Ｓに亘って巻き掛けられたベルト（図示省略）にて、連動して回転するように構成されている。また、回転軸１Ｊのうちの１つ又は複数に駆動用モータの減速機の出力軸が連結されている。搬送ローラ１Ｒは、外周部がゴムやウレタン等摩擦係数の大きな素材にて形成されており、駆動用モータを作動させて搬送ローラ１Ｒを回転させることで、当該搬送ローラ１Ｒと板状の搬送物の下面との摩擦により板状の搬送物を搬送することができる。 Hereinafter, an embodiment of a conveyance device equipped with a static eliminator according to the present invention will be described based on the drawings.
As shown in FIGS. 1 and 2, the transport device 1 is supported by a support frame 1 </ b> W so as to be rotatable integrally with a rotating shaft 1 </ b> J, and supports a plate-shaped transported object such as a glass substrate for liquid crystal from below. A plurality of conveyance rollers 1 </ b> R are arranged in the conveyance direction.
Sprockets 1S are attached to the respective rotary shafts 1J so as to be integrally rotatable, and the adjacent rotary shafts 1J rotate in conjunction with belts (not shown) wound around the plurality of sprockets 1S. It is configured as follows. In addition, the output shaft of the reduction gear of the drive motor is connected to one or more of the rotating shafts 1J. The conveying roller 1R is formed of a material having a large friction coefficient such as rubber or urethane, and rotates the conveying roller 1R by operating a driving motor, so that the conveying roller 1R and a plate-shaped conveyed object are rotated. A plate-like conveyed product can be conveyed by friction with the lower surface of the sheet.

支持枠体１Ｗには、所定の間隔を開けて除電ユニットＵが装備されている。除電ユニットＵは、後述する放電極からの放電によりイオン化物質を生成して、除電対象物を除電する除電装置を備えており、図３に示すように棒状に形成されている。この除電ユニットＵは、支持枠体１Ｗにおいて搬送方向で複数の搬送ローラ１Ｒの間の位置に形成された取付用溝１Ｍに嵌合させる形態で備えられる。   The support frame 1W is equipped with a static elimination unit U at a predetermined interval. The charge removal unit U includes a charge removal device that generates an ionized substance by discharge from a discharge electrode, which will be described later, and removes a charge removal object, and is formed in a rod shape as shown in FIG. The static eliminator unit U is provided in a form that fits into a mounting groove 1M formed at a position between the plurality of transport rollers 1R in the transport direction in the support frame 1W.

次に、除電ユニットＵの構成を説明する。除電ユニットＵは、図１０に示すように、放電極基板３０及び接続基板４０、伝熱体２０、並びに、上部カバー部１０、を備えている。放電極基板３０は、図４に示すように、平板状でかつ長尺状に形成され、その表面部に、その長手方向に沿う金属製の放電極Ｄと、放電極基板３０を加熱する電熱ヒーターＨを備えている。   Next, the structure of the static elimination unit U is demonstrated. As shown in FIG. 10, the static elimination unit U includes a discharge electrode substrate 30, a connection substrate 40, a heat transfer body 20, and an upper cover portion 10. As shown in FIG. 4, the discharge electrode substrate 30 is formed in a flat plate shape and a long shape, and a metal discharge electrode D along the longitudinal direction is formed on the surface portion of the discharge electrode substrate 30 and electric heating for heating the discharge electrode substrate 30. A heater H is provided.

放電極Ｄは直線状に連続して形成されており、電熱ヒーターＨは、図４及び図７（ａ）に示すように、平面視で放電極基板３０の長手方向に直交する方向において線状の放電極Ｄの両側部に沿う部分（非横断部分と称する）と、放電極Ｄの長手方向両端部において平面視で放電極基板３０の長手方向に直交する方向で放電極Ｄを横切る部分（横断部分と称する）と、を備える線状に形成されている。電熱ヒーターＨにおける放電極Ｄの側部に沿う部分の一方側の長手方向中央部には、当該電熱ヒーターＨの高圧側極ＨＣ１と低圧側極ＨＣ２とが形成されている。   The discharge electrode D is formed continuously in a straight line, and the electric heater H is linear in a direction orthogonal to the longitudinal direction of the discharge electrode substrate 30 in plan view, as shown in FIGS. 4 and 7A. A portion (referred to as a non-crossing portion) along both sides of the discharge electrode D and a portion that crosses the discharge electrode D in a direction perpendicular to the longitudinal direction of the discharge electrode substrate 30 in plan view at both longitudinal ends of the discharge electrode D ( It is formed in the shape of a line comprising: A high-pressure side electrode HC1 and a low-pressure side electrode HC2 of the electric heater H are formed in one longitudinal central portion of the portion along the side of the discharge electrode D in the electric heater H.

図５及び図６は、放電極基板３０の長手方向視断面図であり、図５は、非横断部分である図４のＶ−Ｖ矢視断面を、また、図６は、非横断部分である図４のＶＩ−ＶＩ矢視断面を示している。   5 and 6 are longitudinal cross-sectional views of the discharge electrode substrate 30, FIG. 5 is a cross-sectional view taken along line VV in FIG. 4, and FIG. 6 is a non-crossing portion. FIG. 6 shows a cross section taken along arrow VI-VI in FIG. 4.

放電極基板３０は、図５、６に示すように、ガラスエポキシ基板層３３（ガラスエポキシ基板３３Ｂ）と、ヒーター層３２と、放電極層３１とを備えている。
放電極層３１は、図５及び６に示すように、上面に放電極Ｄが取り付けられ、裏面に放電極Ｄからコロナ放電の対象電極となる誘導極Ｙが取り付けられたマイカ基層３１Ｂと、マイカ基層３１Ｂの上面を放電極Ｄの上端が露出する形態で覆う上部コーティング層３１Ａと、マイカ基層３１Ｂの下面を誘導極Ｙを含め全面的に覆う下部コーティング層３１Ｃとを備えている。 As shown in FIGS. 5 and 6, the discharge electrode substrate 30 includes a glass epoxy substrate layer 33 (glass epoxy substrate 33 </ b> B), a heater layer 32, and a discharge electrode layer 31.
As shown in FIGS. 5 and 6, the discharge electrode layer 31 includes a mica base layer 31B having a discharge electrode D attached to the upper surface and an induction electrode Y to be a target electrode for corona discharge from the discharge electrode D to the back surface. An upper coating layer 31A that covers the upper surface of the base layer 31B in a form in which the upper end of the discharge electrode D is exposed, and a lower coating layer 31C that covers the entire lower surface of the mica base layer 31B including the induction electrode Y are provided.

ヒーター層３２は、非横断部分においては、図５（ａ）に示すように、下面に電熱ヒーターＨが取り付けられたＰＥＴ製のヒーター母材層３２Ｂと、ヒーター母材層３２Ｂの下面を電熱ヒーターＨを含め全面的に覆うカバー層３２Ｃとを備えている。
なお、ヒーター層３２における横断部分においては、図６（ａ）に示すように、ヒーター母材層３２Ｂの上面側に、放電極層３１における誘導極Ｙとの間での短絡を防止するポリイミド絶縁テープ３２Ａが貼り付けられる。 As shown in FIG. 5 (a), the heater layer 32 includes a PET heater base layer 32B having an electric heater H attached to the lower surface, and the lower surface of the heater base layer 32B at the non-crossing portion. And a cover layer 32C covering the entire surface including H.
In addition, in the crossing part in the heater layer 32, as shown to Fig.6 (a), the polyimide insulation which prevents the short circuit between the induction pole Y in the discharge electrode layer 31 on the upper surface side of the heater base material layer 32B. Tape 32A is affixed.

そして、放電極基板３０は、図５（ｂ）、図６（ｂ）に示すように、上記のように構成された放電極層３１と、ヒーター層３２と、ガラスエポキシ基板層３３とを、上から放電極層３１、ヒーター層３２、ガラスエポキシ基板層３３の順に接着剤等にて貼り合せて一体的に構成されている。
本実施形態においては、放電極基板３０が本発明における基板に相当し、放電極Ｄが本発明における放電極に相当し、電熱ヒーターＨが本発明における加熱部に相当する。
すなわち、除電装置が、平板状の放電極基板３０の表面部に支持された放電極Ｄと、放電極基板３０に支持されて放電極基板３０を加熱する電熱ヒーターＨと、を備えている。なお、放電極層３１と、ヒータ層３２の間に、熱伝導性の優れた絶縁フィルムなどを貼り合わせることで、より均一に安定して放電極層３１を加熱することができる構成を取ることもできる。 And, as shown in FIGS. 5 (b) and 6 (b), the discharge electrode substrate 30 includes the discharge electrode layer 31, the heater layer 32, and the glass epoxy substrate layer 33 configured as described above. The discharge electrode layer 31, the heater layer 32, and the glass epoxy substrate layer 33 are laminated in order from the top with an adhesive or the like, and are integrally formed.
In the present embodiment, the discharge electrode substrate 30 corresponds to the substrate in the present invention, the discharge electrode D corresponds to the discharge electrode in the present invention, and the electric heater H corresponds to the heating unit in the present invention.
That is, the static eliminator includes a discharge electrode D supported on the surface portion of the flat discharge electrode substrate 30 and an electric heater H supported by the discharge electrode substrate 30 to heat the discharge electrode substrate 30. In addition, the structure which can heat the discharge electrode layer 31 more uniformly and stably by bonding together the insulating film etc. which was excellent in heat conductivity between the discharge electrode layer 31 and the heater layer 32 is taken. You can also.

接続基板４０は、放電極基板３０とほぼ同じ寸法に形成されており、放電極Ｄ又は電熱ヒーターＨに供給する電力の入出口として放電極基板３０の裏面に形成される被供給側接点（図示省略）に当接自在な供給側接点４０Ｓを備えている。また、接続基板４０の両端部には、隣接する接続基板４０同士を電気的に接続するフラット型のコネクタ４０Ｃが備えられている。コネクタ４０Ｃ同士はフラットケーブルで相互に接続可能に構成されている。   The connection substrate 40 is formed to have substantially the same dimensions as the discharge electrode substrate 30, and a supply-side contact (illustrated) formed on the back surface of the discharge electrode substrate 30 as an inlet / outlet of electric power supplied to the discharge electrode D or the electric heater H. A supply-side contact 40S that can freely come into contact is provided. Further, at both ends of the connection board 40, flat type connectors 40C for electrically connecting adjacent connection boards 40 are provided. The connectors 40C are configured to be connected to each other with a flat cable.

伝熱体２０は、絶縁性材料にて、図８に示すように、偏平且つ長尺の棒状体に形成され、上下に貫通する開口２０Ｈが形成されている。伝熱体２０の形状は、放電極基板３０の上面側に重ねた状態において、電熱ヒーターＨが設けられる部分の全面に亘って放電極基板３０に接触し、かつ、放電極Ｄに対応する位置に開口２０Ｈが位置する形状としている。なお、図８の伝熱体２０は、放電極基板３０の２つ分の長さを有し、長手方向に２つ並べた放電極基板３０を覆うように形成されているが、単一の放電極基板３０を覆うもの、又は３つ以上の放電極基板３０を覆うものとしてもよい。また、伝熱体２０の開口２０Ｈは、長手方向視での断面形状において、鉛直部２２Ｈの上端に湾曲形状のアール部２２Ｒが連続して形成されている。   As shown in FIG. 8, the heat transfer body 20 is formed in a flat and long rod-shaped body and is formed with an opening 20 </ b> H penetrating vertically. The shape of the heat transfer body 20 is a position in contact with the discharge electrode substrate 30 over the entire surface of the portion where the electric heater H is provided in a state of being superimposed on the upper surface side of the discharge electrode substrate 30 and corresponding to the discharge electrode D. It is set as the shape where the opening 20H is located. 8 has a length corresponding to two discharge electrode substrates 30 and is formed so as to cover two discharge electrode substrates 30 arranged in the longitudinal direction. It is good also as what covers the discharge electrode board | substrate 30, or covers the 3 or more discharge electrode board | substrates 30. FIG. In addition, the opening 20H of the heat transfer body 20 has a curved round portion 22R formed continuously at the upper end of the vertical portion 22H in the cross-sectional shape as viewed in the longitudinal direction.

伝熱体２０を構成する絶縁性材料は、放電極基板３０の表面部から垂直方向に離れる方向での熱伝導率が、放電極基板３０のガラスエポキシ基板３３Ｂの熱伝導率（０．１Ｗ／ｍ・Ｋ以上０．８Ｗ／ｍ・Ｋ以下）よりも大きい絶縁性材料（１．０Ｗ／ｍ・Ｋ以上２．０Ｗ／ｍ・Ｋ以下）とする。本実施形態においては、熱伝導性樹脂を用いており、伝熱体２０を構成する絶縁性材料の熱伝導率が、ガラスエポキシ基板３３Ｂの熱伝導率の２倍以上、好ましくは１０倍以上とするように、絶縁性材料の材質を選択している。   The insulating material constituting the heat transfer body 20 has a thermal conductivity in the direction away from the surface portion of the discharge electrode substrate 30 in the vertical direction, and the thermal conductivity of the glass epoxy substrate 33B of the discharge electrode substrate 30 (0.1 W / Insulating material (1.0 W / m · K or more and 2.0 W / m · K or less) larger than m · K or more and 0.8 W / m · K or less). In the present embodiment, a heat conductive resin is used, and the thermal conductivity of the insulating material constituting the heat transfer body 20 is twice or more, preferably 10 times or more, that of the glass epoxy substrate 33B. Thus, the material of the insulating material is selected.

すなわち、絶縁性材料にて形成されて熱伝導率が放電極基板３０の熱伝導率よりも大きい伝熱体２０が、放電極基板３０の表面部における設定範囲の全面に亘って放電極基板３０に接触する状態で設けられ、設定範囲は、電熱ヒーターＨに対応する部分を含みかつ放電極Ｄに対応する部分の周囲に設定されている。   That is, the heat transfer body 20 formed of an insulating material and having a thermal conductivity larger than the thermal conductivity of the discharge electrode substrate 30 extends over the entire set range in the surface portion of the discharge electrode substrate 30. The setting range includes a portion corresponding to the electric heater H and is set around the portion corresponding to the discharge electrode D.

上部カバー部１０は、図９に示すように、ステンレス鋼板（本実施形態においては、ＳＵＳ３０４を使用）をコ字状に折り曲げ加工して形成され、上面部に長手方向に沿う長孔部１１Ｈが形成されている。この長孔部１１Ｈは、放電極Ｄに対応する位置に形成されており、かつ、伝熱体２０の開口２０Ｈの周囲の出隅部が嵌まり込むように構成されている。また、上部カバー部１０の側面部には、長手方向に離間してボルト孔１２Ｈが形成されている。本実施形態においては、上部カバー部１０が本発明の筐体部に相当する。   As shown in FIG. 9, the upper cover portion 10 is formed by bending a stainless steel plate (SUS304 is used in the present embodiment) into a U shape, and a long hole portion 11H along the longitudinal direction is formed on the upper surface portion. Is formed. The long hole portion 11H is formed at a position corresponding to the discharge electrode D, and is configured such that a protruding corner portion around the opening 20H of the heat transfer body 20 is fitted. Further, bolt holes 12H are formed in the side surface portion of the upper cover portion 10 so as to be separated in the longitudinal direction. In the present embodiment, the upper cover portion 10 corresponds to the housing portion of the present invention.

図１０及び図１１に、除電ユニットＵの組み立て構成を示す。除電ユニットＵを支持する下部カバー部５１に支持体５０を固定し、支持体５０に接続基板４０を支持させる。支持体５０においてボルト孔１２Ｈに対応する位置には、ボルトＵＢが螺合される雌ねじ部が設けられる。次に、接続基板４０の上部に放電極基板３０を取り付ける。接続基板４０には、図示はしていないが、放電極Ｄに高周波交流電圧を供給する放電極用電源制御部、及び、ヒーター用電源制御部からの電源線が接続されるようになっている。そして、接続基板４０の上部に放電極基板３０を取り付けることで接続基板４０の供給側接点４０Ｓに放電極基板３０の被供給側接点が当接することによって、放電極基板３０における放電極Ｄ、及び電熱ヒーターＨに電力が供給されるようになっている。   10 and 11 show an assembly configuration of the static elimination unit U. FIG. The support body 50 is fixed to the lower cover portion 51 that supports the static elimination unit U, and the connection board 40 is supported by the support body 50. An internal thread portion into which the bolt UB is screwed is provided at a position corresponding to the bolt hole 12H in the support 50. Next, the discharge electrode substrate 30 is attached to the upper part of the connection substrate 40. Although not shown, the connection substrate 40 is connected to a power supply control unit for the discharge electrode that supplies a high-frequency AC voltage to the discharge electrode D and a power supply line from the power supply control unit for the heater. . Then, by attaching the discharge electrode substrate 30 to the upper part of the connection substrate 40, the supply-side contact of the discharge electrode substrate 30 comes into contact with the supply-side contact 40 </ b> S of the connection substrate 40. Electric power is supplied to the electric heater H.

さらに、放電極基板３０の上面側に伝熱体２０を重ねて取付け、その上部を上部カバー部１０で覆う形態で、上部カバー部１０のボルト孔１２ＨにボルトＵＢを螺合させる。これによって、支持体５０と上部カバー部１０とが固定される。このとき、伝熱体２０の外面２２が、上部カバー部１０の内面１２の少なくとも上面部１２Ｎに接触する状態となる。すなわち、伝熱体２０が上部カバー部１０に接触する状態で設けられている。
このようにして、放電極基板３０、伝熱体２０、及び電熱ヒーターＨが一体に組み付けられた除電ユニットＵが形成される。なお、除電ユニットＵは、複数のユニット部分Ｕ１、Ｕ２を長手方向に連結して形成することができる。 Further, the heat transfer body 20 is attached to the upper surface side of the discharge electrode substrate 30 so that the upper portion is covered with the upper cover portion 10, and the bolt UB is screwed into the bolt hole 12 </ b> H of the upper cover portion 10. Thereby, the support body 50 and the upper cover part 10 are fixed. At this time, the outer surface 22 of the heat transfer body 20 comes into contact with at least the upper surface portion 12N of the inner surface 12 of the upper cover portion 10. That is, the heat transfer body 20 is provided in contact with the upper cover portion 10.
In this way, the static elimination unit U in which the discharge electrode substrate 30, the heat transfer body 20, and the electric heater H are assembled together is formed. The static elimination unit U can be formed by connecting a plurality of unit portions U1 and U2 in the longitudinal direction.

したがって、電熱ヒーターＨに電力が供給されて電熱ヒーターＨが発熱すると、放電極Ｄに対応する部分の周囲において放電極基板３０に面接触する状態で設けられた伝熱体２０が全熱せられて、放電極基板３０における放電極Ｄ周囲の空気を極力広い範囲で加熱し、湿度を低下させることができる。それとともに、伝熱体２０は、上部カバー部１０に接触しているので、上部カバー部１０の放電極Ｄに近接する部分も加熱されることとなり、上部カバー部１０の放電極Ｄに近接する部分に近接する空気を加熱してその湿度を低下させることができる。これらの作用により、放電極Ｄ、及び、上部カバー部１０への不純物の付着を抑制でき、放電極Ｄの放電能力の低下を抑制できる。   Therefore, when electric power is supplied to the electric heater H and the electric heater H generates heat, the heat transfer body 20 provided in surface contact with the discharge electrode substrate 30 around the portion corresponding to the discharge electrode D is fully heated. The air around the discharge electrode D in the discharge electrode substrate 30 can be heated in a wide range as much as possible to reduce the humidity. At the same time, since the heat transfer body 20 is in contact with the upper cover portion 10, the portion close to the discharge electrode D of the upper cover portion 10 is also heated, and close to the discharge electrode D of the upper cover portion 10. The air close to the part can be heated to reduce its humidity. By these actions, the adhesion of impurities to the discharge electrode D and the upper cover part 10 can be suppressed, and the discharge capacity of the discharge electrode D can be suppressed from decreasing.

〔別実施形態〕
（１）上記実施形態では、除電装置を板状の搬送物を搬送する搬送装置１に取り付けて使用する構成を例示したが、本発明の除電装置は、板状の搬送物以外の種々の搬送物を搬送する搬送装置に取り付ける構成としてもよい。また、搬送装置ではなく移動体に取付け、除電対象物に対して移動しながら除電を行う装置に用いる等、その設置対象は種々変更可能である。 [Another embodiment]
(1) In the above embodiment, the configuration in which the static eliminator is attached to and used on the conveyance device 1 that conveys the plate-shaped conveyance object is exemplified. However, the static elimination device of the present invention is various conveyances other than the plate-shaped conveyance object. It is good also as a structure attached to the conveying apparatus which conveys an object. Further, the installation target can be variously changed, such as being attached to a moving body instead of the transfer device and used for a device that performs static elimination while moving relative to the static elimination object.

（２）上記実施形態では、放電極基板３０、伝熱体２０、及び電熱ヒーターＨが一体に組み付けられた除電ユニットＵを備える構成を説明したが、放電極基板３０、伝熱体２０、及び電熱ヒーターＨをユニット化せず、各別に搬送装置に取り付ける構成としてもよい。 (2) In the above embodiment, the configuration including the static elimination unit U in which the discharge electrode substrate 30, the heat transfer body 20, and the electric heater H are integrally assembled has been described. However, the discharge electrode substrate 30, the heat transfer body 20, and It is good also as a structure which does not unitize the electric heater H but attaches to a conveyance apparatus separately.

（３）上記実施形態では、伝熱体２０を構成する絶縁性材料を、放電極基板３０の表面部から垂直方向に離れる方向での熱伝導率がガラスエポキシ基板３３Ｂの熱伝導率（０．１Ｗ／ｍ・Ｋ以上０．９Ｗ／ｍ・Ｋ以下）よりも大きい絶縁性材料（１．０Ｗ／ｍ・Ｋ以上２．０Ｗ／ｍ・Ｋ以下）とする構成を説明したが、絶縁性材料は、放電極基板３０のガラスエポキシ基板３３Ｂの熱伝導率よりも大きいものであれば、上記以外のものを採用してもよい。また、上記実施形態では、伝熱体２０を構成する絶縁性材料の熱伝導率が、ガラスエポキシ基板３３Ｂの熱伝導率の２倍以上、好ましくは１０倍以上となるように絶縁性材料の材質を選択したが、このような構成に限定されるものではなく、例えば、絶縁性材料の材質を、当該絶縁性材料の熱伝導率がガラスエポキシ基板３３Ｂの熱伝導率の１倍を超え２倍未満となるものとすることもでき、また、絶縁性材料の熱伝導率がガラスエポキシ基板３３Ｂの熱伝導率の１０倍を超えるものとすることもできる。 (3) In the above embodiment, the insulating material constituting the heat transfer body 20 has a thermal conductivity in the direction away from the surface portion of the discharge electrode substrate 30 in the vertical direction (0. The structure of an insulating material (1.0 W / m · K to 2.0 W / m · K or less) larger than 1 W / m · K to 0.9 W / m · K) has been described. As long as it is larger than the thermal conductivity of the glass epoxy substrate 33B of the discharge electrode substrate 30, a material other than the above may be adopted. Moreover, in the said embodiment, the material of an insulating material is set so that the heat conductivity of the insulating material which comprises the heat exchanger 20 may be 2 times or more of the heat conductivity of the glass epoxy board | substrate 33B, Preferably it is 10 times or more. However, the present invention is not limited to such a configuration. For example, the insulating material is made of a material whose thermal conductivity is more than 1 times and twice that of the glass epoxy substrate 33B. It is also possible that the thermal conductivity of the insulating material exceeds 10 times the thermal conductivity of the glass epoxy substrate 33B.

（４）上記実施形態では、放電極Ｄを、連続する線状に形成する例を示したが、このような構成に限定されるものではなく、例えば、複数の放電極を離間状態で並べて備える形態としてもよい。この場合、電熱ヒーターＨは、複数の放電極の夫々又は全体を包囲する状態で形成し、伝熱体は、基板の表面部におけるその電熱ヒーターＨに対応する部分を含みかつ放電極に対応する部分の周囲において、放電極基板３０に面接触する状態で備えることとなる。 (4) In the above embodiment, the discharge electrode D is formed in a continuous linear shape. However, the present invention is not limited to such a configuration. For example, a plurality of discharge electrodes are arranged in a separated state. It is good also as a form. In this case, the electric heater H is formed so as to surround each or all of the plurality of discharge electrodes, and the heat transfer body includes a portion corresponding to the electric heater H in the surface portion of the substrate and corresponds to the discharge electrode. In the periphery of the portion, it is provided in a state of surface contact with the discharge electrode substrate 30.

（５）上記実施形態では、電熱ヒーターＨを、図７（ａ）に示すように、電熱ヒーターＨにおける放電極Ｄの側部に沿う部分の一方側の長手方向中央部に、高圧側極ＨＣ１及び低圧側極ＨＣ２を形成する例を示したが、電熱ヒーターＨの引き回しパターンは上記に限定されるものではなく、例えば、図７（ｂ）に示すように、放電極Ｄの両側部に沿う部分は双方とも連続する線状に形成し、放電極Ｄの一方側の端部において、放電極Ｄの両側部に沿う一対の部分の夫々に対応して高圧側極ＨＣ１及び低圧側極ＨＣ２を形成してもよい。また、図７（ｃ）に示すように、電熱ヒーターＨを環状に形成し、その両端に高圧側極ＨＣ１、及び低圧側極ＨＣ２を形成する形態でもよい。 (5) In the above embodiment, as shown in FIG. 7A, the electric heater H is arranged at the central portion in the longitudinal direction on one side of the portion along the side of the discharge electrode D in the electric heater H. Although the example in which the low-pressure side electrode HC2 is formed has been shown, the routing pattern of the electric heater H is not limited to the above, for example, along both sides of the discharge electrode D as shown in FIG. Both portions are formed in a continuous linear shape, and at one end of the discharge electrode D, a high-voltage side electrode HC1 and a low-voltage side electrode HC2 are formed corresponding to each of the pair of portions along both sides of the discharge electrode D. It may be formed. Moreover, as shown in FIG.7 (c), the form which forms the electric heater H cyclically | annularly and forms the high voltage | pressure side electrode HC1 and the low voltage | pressure side electrode HC2 in the both ends may be sufficient.

（６）上記実施形態では、上部カバー部１０を、ステンレス鋼板（ＳＵＳ３０４）にて構成する例を示したが、上部カバー部１０はＳＵＳ３０４以外のステンレス鋼板、又はステンレス以外の耐腐食性金属板を材料として構成してもよい。また、腐食性材料に耐腐食性表面加工を施したものにて形成してもよい。 (6) In the above embodiment, the upper cover portion 10 is made of a stainless steel plate (SUS304). However, the upper cover portion 10 is made of a stainless steel plate other than SUS304 or a corrosion-resistant metal plate other than stainless steel. You may comprise as a material. Moreover, you may form with what gave the corrosion-resistant surface processing to the corrosive material.

１ 搬送装置
１Ｒ 搬送ローラ
１０ 筐体部
１１Ｈ 筐体部の開口
２０ 伝熱体
３０ 基板
Ｄ 放電極
Ｈ 加熱部
Ｕ 除電ユニット DESCRIPTION OF SYMBOLS 1 Conveyance apparatus 1R Conveyance roller 10 Housing | casing part 11H Opening 20 of a housing | casing part Heat exchanger 30 Board | substrate D Discharge electrode H Heating part U Static elimination unit

Claims (7)

平板状の基板の表面部に支持された放電極と、前記基板に支持されて前記基板を加熱する加熱部と、を備え、
前記放電極からの放電によりイオン化物質を生成して除電対象物を除電する除電装置であって、
絶縁性材料にて形成されて熱伝導率が前記基板の熱伝導率よりも大きい伝熱体が、前記基板の表面部における設定範囲の全面に亘って前記基板に接触する状態で設けられ、
前記設定範囲は、前記加熱部に対応する部分を含みかつ前記放電極に対応する部分の周囲に設定されている除電装置。 A discharge electrode supported by a surface portion of a flat substrate, and a heating unit supported by the substrate to heat the substrate,
A static eliminator that neutralizes a static elimination object by generating an ionized substance by discharge from the discharge electrode,
A heat transfer body formed of an insulating material and having a thermal conductivity larger than the thermal conductivity of the substrate is provided in contact with the substrate over the entire set range in the surface portion of the substrate,
The neutralizing device, wherein the setting range includes a portion corresponding to the heating unit and is set around a portion corresponding to the discharge electrode. 前記放電極が、連続する線状に形成され、前記加熱部が線状に形成されて前記放電極に沿って設けられている請求項１に記載の除電装置。   The static eliminator according to claim 1, wherein the discharge electrode is formed in a continuous line shape, and the heating unit is formed in a line shape and provided along the discharge electrode. 前記基板の表面部を覆い且つ前記放電極に対応する位置に開口を備えた金属製の筐体部が設けられ、
前記伝熱体が前記筐体部に接触する状態で設けられている請求項１又は２に記載の除電装置。 A metal housing portion that covers the surface of the substrate and has an opening at a position corresponding to the discharge electrode;
The static elimination apparatus of Claim 1 or 2 provided with the said heat exchanger in the state which contacts the said housing | casing part. 前記筐体部が、ステンレス鋼により構成されている請求項３に記載の除電装置。   The static eliminator according to claim 3, wherein the casing is made of stainless steel. 前記絶縁性材料が、前記基板の表面部から垂直方向に離れる方向での熱伝導率が１．０Ｗ／ｍ・Ｋ以上２．０Ｗ／ｍ・Ｋ以下の樹脂であり、
前記基板が、熱伝導率が０．１Ｗ／ｍ・Ｋ以上０．９Ｗ／ｍ・Ｋ以下の材質にて構成されている請求項１〜４のいずれか１項に記載の除電装置。 The insulating material is a resin having a thermal conductivity of 1.0 W / m · K or more and 2.0 W / m · K or less in a direction away from the surface portion of the substrate in a vertical direction;
The static elimination apparatus of any one of Claims 1-4 with which the said board | substrate is comprised with the material whose heat conductivity is 0.1 W / m * K or more and 0.9 W / m * K or less. 前記基板、前記伝熱体、及び前記加熱部が一体に組み付けられた除電ユニットを備えている請求項１〜５の何れか１項に記載の除電装置。   The static elimination apparatus of any one of Claims 1-5 provided with the static elimination unit with which the said board | substrate, the said heat exchanger, and the said heating part were assembled | attached integrally. 板状の搬送物を下方から支持する搬送ローラを搬送方向に複数並ぶ状態で備えて前記搬送物を搬送する搬送装置であって、
請求項１〜請求項６の何れか１項に記載の除電装置が、搬送方向で複数の前記搬送ローラの間に取付けられ、
前記除電装置は、前記搬送ローラに支持されている前記搬送物の下方において近接する位置に取り付けられている搬送装置。 A transport device that transports the transport object with a plurality of transport rollers that support a plate-shaped transport object from below in a transport direction,
The static eliminator according to any one of claims 1 to 6, is attached between the plurality of transport rollers in a transport direction,
The static eliminator is a transport device attached at a position close to the lower side of the transported object supported by the transport roller.
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KR1020150040634A KR101956653B1 (en) 2014-03-28 2015-03-24 Neutralization device and transport apparatus having the same
CN201810313901.4A CN108463043B (en) 2014-03-28 2015-03-27 Static electricity removing device and conveying device with same
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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6139451B2 (en) * 2014-03-28 2017-05-31 フィーサ株式会社 Static eliminator and transport device equipped with the same
JP6658459B2 (en) * 2016-11-02 2020-03-04 株式会社ダイフク Ionizer unit
CN107572288A (en) * 2017-09-22 2018-01-12 江苏绿源健康铝箔科技有限公司 A kind of rewinding machine that electrostatic function is removed with removal of impurities
CN109987414A (en) * 2019-05-08 2019-07-09 广州林恩静电科学技术应用有限公司 A kind of flat panel display product roller transmissioning device with static safety technology scheme

Family Cites Families (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61231573A (en) * 1985-04-05 1986-10-15 Senichi Masuda Corona discharger
JPS62153972A (en) * 1985-12-27 1987-07-08 Matsushita Electric Ind Co Ltd Electrifier
JPS63132270A (en) * 1986-11-25 1988-06-04 Canon Inc Discharging device
JP2794117B2 (en) * 1989-04-25 1998-09-03 増田 佳子 Static eliminator
JPH05166578A (en) * 1991-12-12 1993-07-02 Ngk Spark Plug Co Ltd Surface corona discharge element and method for removing product on discharge surface thereof
JPH09213450A (en) * 1996-01-31 1997-08-15 Aiwa Co Ltd Creeping corona discharge element
JP4421874B2 (en) * 2003-10-31 2010-02-24 東京エレクトロン株式会社 Plasma processing apparatus and plasma processing method
JP4339133B2 (en) * 2004-01-07 2009-10-07 高砂熱学工業株式会社 Discharge element and ion generator
JP2007188852A (en) * 2006-01-11 2007-07-26 Toshio Wakamatsu Ionic wind generator using semiconductor ceramics
WO2007135747A1 (en) * 2006-05-24 2007-11-29 Fukuoka Technoken Kogyo, Co., Ltd. Head substrate and discharge control apparatus using such head substrate, heating discharging type print head equipped with such discharge control apparatus, and thermal head
JP4874771B2 (en) * 2006-11-30 2012-02-15 株式会社キーエンス Ionizer
JP2009009862A (en) * 2007-06-28 2009-01-15 Sharp Corp Ion generating element, charging device, and image forming device
JP5240706B2 (en) * 2008-01-15 2013-07-17 独立行政法人産業技術総合研究所 Bar-type ion generator and static eliminator
JP2010145970A (en) * 2008-12-22 2010-07-01 Sharp Corp Ion generating device, charging device and image forming apparatus
JP5340857B2 (en) * 2009-08-31 2013-11-13 ユーテック株式会社 Ion generator
JP5661542B2 (en) * 2011-04-08 2015-01-28 株式会社キーエンス Static eliminator
CN202290659U (en) * 2011-08-09 2012-07-04 京东方科技集团股份有限公司 Glass substrate cleaning system and ionic wind device thereof
CN103187235B (en) * 2011-12-31 2016-04-20 北京北方微电子基地设备工艺研究中心有限责任公司 The discharge assembly of substrate processing apparatus, chamber device and PECVD device
CN202565560U (en) * 2012-04-16 2012-11-28 深圳市白光电子科技有限公司 Heating device of intelligent direct current ion fan
JP6139451B2 (en) * 2014-03-28 2017-05-31 フィーサ株式会社 Static eliminator and transport device equipped with the same
CN203884063U (en) * 2014-05-21 2014-10-15 宁波金富亮塑料科技有限公司 Static electricity eliminating device for plastic wires

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