KR20150112833A - Neutralization device and transport apparatus having the same - Google Patents

Neutralization device and transport apparatus having the same Download PDF

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Publication number
KR20150112833A
KR20150112833A KR1020150040634A KR20150040634A KR20150112833A KR 20150112833 A KR20150112833 A KR 20150112833A KR 1020150040634 A KR1020150040634 A KR 1020150040634A KR 20150040634 A KR20150040634 A KR 20150040634A KR 20150112833 A KR20150112833 A KR 20150112833A
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South Korea
Prior art keywords
substrate
discharge electrode
conveying
discharge
heating
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KR1020150040634A
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Korean (ko)
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KR101956653B1 (en
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스스무 사이토
아키라 오쿠야마
다쓰오 나카오
다이스케 이케다
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피사 코포레이션
가부시키가이샤 다이후쿠
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01T—SPARK GAPS; OVERVOLTAGE ARRESTERS USING SPARK GAPS; SPARKING PLUGS; CORONA DEVICES; GENERATING IONS TO BE INTRODUCED INTO NON-ENCLOSED GASES
    • H01T23/00—Apparatus for generating ions to be introduced into non-enclosed gases, e.g. into the atmosphere
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor

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  • Elimination Of Static Electricity (AREA)
  • Chemical & Material Sciences (AREA)
  • Resistance Heating (AREA)
  • Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)

Abstract

The present invention realizes a charge eliminating device capable of appropriately suppressing the lowering of the discharge ability of the discharge electrode while making the configuration of the heating part simple, and a conveying device provided with such a charge eliminating device. A discharge electrode D supported on the surface portion of the flat plate type substrate 30 and a heating portion H supported on the substrate 30 to heat the substrate 30, In which the heat transfer member (20) formed of an insulating material and having a thermal conductivity higher than that of the substrate is provided on the entire surface of the substrate (K) in the set range on the surface portion And the setting range is set around the portion corresponding to the discharge electrode D and including the portion corresponding to the heating portion H. [

Description

BACKGROUND OF THE INVENTION Field of the Invention [0001] The present invention relates to a static eliminator,

The present invention relates to a static eliminator for generating an ionized material by discharging from a discharge electrode to discharge static electricity, and a conveying device having the static eliminator.

A foreign substance may adhere to a discharge electrode which generates an ionized substance by discharge, in accordance with a discharge from the discharge electrode. JP-A-5-166578 (Patent Document 1) discloses a plasma display panel in which linear discharge electrodes are provided on the surface of a substrate, and a surface in which a surface- A corona discharge element is disclosed. Patent Document 1 discloses that when a foreign substance is adhered to the discharge electrode, the foreign matter absorbs moisture in the air and the discharge ability of the discharge electrode is lowered. Further, depending on the material of the substrate, the substrate may absorb moisture in the air, thereby possibly lowering the discharge ability of the discharge electrode. It is empirically known that such a foreign matter is liable to adhere when the humidity of the air around the discharge electrode is high. A decrease in the discharging ability of the discharge electrode due to the adhesion of foreign matter leads to a decrease in the discharging ability of the discharging device. On the other hand, Patent Document 1 discloses a technique of disposing a linear heater wire as a heating portion on a back surface portion of a substrate and heating the discharge electrode to decompose and remove foreign matter (crystals). By providing the heating portion, adhesion of foreign matter to the discharge electrode can be suppressed by heating the air around the discharge electrode in addition to decomposition and removal of foreign matter, thereby lowering the humidity of the air.

However, as shown in Fig. 1 of Patent Document 1, this heater wiring (reference numeral "6 ") is disposed on the back surface of the substrate in a meandering manner. When the heating unit is configured in this manner, the heat distribution is such that the heat due to the heater wiring is concentrated at the portion where the heater wiring exists. That is, the portion where the linear heater wiring is present can be heated sufficiently, but there is a possibility that heating can not be sufficiently performed at a portion apart from the heater pattern in the direction along the surface of the substrate. Therefore, in a portion of relatively low temperature in the substrate, sufficient low humidity is not achieved, and the substrate absorbs moisture, adheres foreign matter crystals, and absorbs moisture of the adhered foreign matter crystals, There is a possibility that the degradation can not be appropriately prevented. Here, for example, it is conceivable that the heater wire is meandered so as to exist uniformly over the entire range of the discharge electrode, but there is a possibility that the configuration of the apparatus becomes complicated.

Japanese Unexamined Patent Publication No. 5-166578

Therefore, it is required to realize a charge eliminating device capable of appropriately suppressing the lowering of the discharging ability at the discharge electrode while making the configuration of the heating portion simple, and a conveying device provided with such a charge eliminating device.

The static eliminator according to the present invention is configured as follows.

That is, a static eliminator for generating an ionized material by discharging from a discharge electrode supported on a surface portion of a flat plate substrate and discharging the static-

A heating unit supported by the substrate to heat the substrate; And

A heat conducting body formed of an insulating material and having a thermal conductivity greater than a thermal conductivity of the substrate;

Lt; / RTI >

The heating element is provided in a state in which the heating element is in contact with the substrate over the entire surface of the setting range of the surface portion of the substrate,

The setting range is set around a portion including a portion corresponding to the heating portion and corresponding to the discharge electrode.

As described above, by heating the substrate supporting the discharge electrode by the heating portion, the air around the discharge electrode can be heated to lower the humidity. Therefore, moisture absorption by the substrate and adhesion of foreign matter to the discharge electrode can be suppressed, and the discharge ability of the discharge electrode can be prevented from lowering. Further, in this configuration, the heat conductor having a thermal conductivity higher than the thermal conductivity of the substrate is provided so as to be in contact with the substrate over the entire range of the setting range at the surface portion of the substrate. Here, the setting range is a range including a portion corresponding to the heating portion and set around the portion corresponding to the discharge electrode.

Therefore, even if a simple configuration is employed, for example, by using a heating unit as a linear heater, the heat generated by the heating unit can be transmitted through the entire surface of the heat transfer member contacting the surface portion of the substrate. Further, the entire set range of the surface portion of the substrate can be uniformly heated to the utmost. Therefore, the humidity of the air around the discharge electrode can be reduced over the widest possible range.

Therefore, it is possible to provide a static eliminator capable of appropriately suppressing a reduction in the discharging ability of the discharge electrode while making the configuration of the heating section simple.

In one aspect of the present invention, it is preferable that in the static eliminator, the discharge electrode is formed in a continuous linear shape, and the heating portion is linearly formed and provided along the discharge electrode.

Since the discharge electrode is linearly formed, an ionizing material is generated along the linear discharge electrode. Therefore, compared with the case where the ionizing material is generated by the locally provided discharge electrode, it is possible to produce a wide and uniformly ionized material. Therefore, even when the portion to be erased in the erasing object has a certain width, the erasing action can be exhibited without shifting. Further, since the heating portion is formed along the linearly formed discharge electrode, the humidity of the ambient atmosphere can be lowered over the entire linear discharge electrode, so that the lowering of the discharge ability at the discharge electrode can be suitably suppressed .

In one aspect of the present invention, a static eliminator includes a metal housing portion, the housing portion having an opening at a position corresponding to the discharge electrode, covering the surface portion of the substrate, .

There is a case where the static elimination object is charged to a single polarity (largely). Therefore, when the electric field generated by the charge of the static eliminating object affects the floating capacitance component parasitic to the circuit including the discharging electrode and causes the offset potential to be generated at the reference potential of the circuit including the discharging electrode . In the configuration in which the ionization material is generated with the potential difference with the reference potential, the generation of the offset potential becomes a factor for destabilizing the generation of the ionization material. That is, the offset potential may affect the ion balance of the static eliminator and the static elimination performance. By covering the surface portion of the substrate with a metal housing portion having an opening formed at a position corresponding to the discharge electrode, the influence of the circuit including the discharge electrode on the electric field generated by the discharge object can be suppressed. In such a configuration, there is a possibility that the foreign matter crystals adhere not only to the discharge electrode but also to a portion near the discharge electrode in the metal housing portion. However, if the heat conductive member is provided in contact with the housing portion, the heat of the heating portion can be well transmitted to the housing portion. Accordingly, the humidity of the atmosphere in the vicinity of the housing portion can be reduced, and the lowering of the discharge ability at the discharge electrode can be suitably suppressed.

As one aspect, in the static eliminator, the housing portion is made of stainless steel.

The foreign matter adhering to the discharge electrode itself or the housing portion due to the discharge from the discharge electrode may be a substance having corrosion resistance to metals such as a crystal mixed with, for example, ammonium nitrate or ammonium sulfate. By constituting the housing part with stainless steel having relatively high corrosion resistance, it is possible to suppress the situation where the housing part is corroded even if foreign matter adheres.

In one aspect, the static eliminator is a resin in which the insulating material has a thermal conductivity of 1.0 W / m · K or more and 2.0 W / m · K or less in a direction in which the insulating material is vertically spaced from the surface portion of the substrate, Is preferably made of a material having a thermal conductivity of 0.1 W / m · K or more and 0.9 W / m · K or less.

If the heating element is made of an insulating material having a higher thermal conductivity than the substrate, heat generated from the heating element is liable to move from the substrate to the heating element having a high thermal conductivity. Therefore, the substrate can be easily heated by the heat transfer member while suppressing the state of directly heating the substrate by the heating unit.

In one aspect of the present invention, it is preferable that the static eliminator includes a static eliminator unit in which the substrate, the heat conductor, and the heating section are integrally assembled.

According to this configuration, since the static eliminator can be installed by mounting the static eliminator unit integrated in the installation target site, the mounting work can be facilitated. Further, for example, when the static eliminator is detached from the object to be mounted in maintenance or the like, the static eliminator can be easily separated from the object to be mounted by separating the static eliminator from each other. According to this configuration, mounting and separation can be easily performed.

The transport apparatus according to the present invention is configured as follows. In other words, the conveying apparatus is provided with the above-described de-icing apparatus as a conveying apparatus for conveying the conveyed articles in a state in which a plurality of conveying rollers for supporting the plate-shaped conveyed articles (conveyed articles) from below in the conveying direction. The static eliminator is mounted between a plurality of the conveying rollers in the conveying direction and mounted at a position near the lower side of the conveying member supported by the conveying roller.

If the plate-like transported article is transported by the transport roller supporting the plate-shaped transported article from below, there is a fear that the transported article (particularly the lower surface side thereof) will be charged by the friction between the transport roller and the lower surface of the transported article have. According to the above arrangement, since the static eliminator is provided at a position close to the bottom of the transported article, even if the lower surface of the transported article is charged, the transported article can be properly discharged.

1 is a side view of a main part of a transfer device
Fig. 2 is a plan view
3 is an overall perspective view of the deionization unit.
Fig. 4 is a perspective view showing the whole of the discharge electrode substrate and the connection substrate.
Fig. 5 is a cross-sectional view taken along the line V-V in Fig.
Fig. 6 is a plan view taken along the line VI-VI in Fig.
7 is a view showing an arrangement pattern of the heating part
8 is a perspective view of the entire heat conductor
9 is a perspective view of the entire housing portion
10 is an assembled configuration diagram of the de-
11 is a cross-sectional view of the deionization unit viewed in the longitudinal direction;

DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, embodiments of a transfer device equipped with a static eliminator according to the present invention will be described with reference to the drawings. In the present embodiment, the transport apparatus 1 supports and transports a plate-shaped transported article such as a liquid crystal glass substrate from below. As shown in Figs. 1 and 2, the conveying apparatus 1 is configured to include a plurality of conveying rollers 1R for supporting the conveyed articles from below in a state of being arranged in the conveying direction. These conveying rollers 1R are integrally formed with the rotating shaft 1J and are rotatably supported by the supporting frame 1W so as to be rotatable.

A sprocket 1S is integrally rotatably mounted on each rotary shaft 1J. The adjacent rotary shafts 1J are configured to rotate in cooperation with each other by a belt (not shown) wound over a plurality of sprockets 1S. Further, the output of the driving motor is connected to the rotary shaft 1J through one or more of the rotary shafts 1J. That is, the output shaft of the speed reducer is connected by one or more of the rotary shafts 1J. The outer peripheral portion of the conveying roller 1R is formed of a material having a large coefficient of friction such as rubber or urethane. By driving the driving motor to rotate the conveying roller 1R, the plate-like conveyed matter can be conveyed by friction between the conveying roller 1R and the lower surface of the plate-like conveyed object.

The support frame 1W is provided with a discharge unit U at a predetermined interval. The electric discharge unit U has an electric discharge device for generating an ionized material by discharge from a discharge electrode to be described later and discharging the electric discharge object and is formed into a bar shape as shown in Fig.3 . The support frame 1W is provided with a mounting groove 1M for mounting the discharge unit U thereon. The mounting groove 1M is formed at a position between the plurality of conveying rollers 1R along the conveying direction. The static elimination unit U is provided so as to fit into the mounting groove 1M.

Here, the configuration of the erasing unit U will be described. 10, the discharge unit U includes a discharge electrode substrate 30 and a connection substrate 40, a heat transfer body 20, and an upper cover portion 10. [ As shown in Fig. 4, the discharge electrode substrate 30 is formed into a flat plate shape and a long shape, and on its surface portion, a discharge electrode D made of metal along the longitudinal direction thereof, And an electrothermal heater H for heating the electrode substrate 30.

The discharge electrodes D are formed continuously in a linear shape. As shown in Figs. 4 and 7A, the electrothermal heater H includes a portion extending along a linear discharge electrode D (referred to as a non-traverse portion Ha), a linear discharge electrode D, (Referred to as a transverse portion Hx) across the discharge electrode D at both ends of the discharge electrode D, and is formed into a curved linear shape. In other words, the electrothermal heater H has a non-transverse portion Ha along both side portions of the linear discharge electrode D in a direction perpendicular to the longitudinal direction of the discharge electrode substrate 30 as viewed in plan view, D at both ends in the longitudinal direction and a transverse portion Hx across the discharge electrode D in a direction orthogonal to the longitudinal direction of the discharge electrode substrate 30 when viewed in plan view. A high-voltage side electrode HC1 and a low-voltage side electrode HC2 of the electrothermal heater H are formed in the longitudinal center portion of one of the non-transverse portions Ha.

5 and 6 are sectional views taken along the longitudinal direction of the discharge electrode substrate 30, and FIG. 5 is a sectional view taken along the line V-V in FIG. 4 which is a non- Sectional view taken along line VI-VI of Fig. 4, which is a non-transverse portion Ha.

The discharge electrode substrate 30 is provided with a glass epoxy substrate layer 33 (glass epoxy substrate 33B), a heater layer 32 and a discharge electrode layer 31 as shown in Figs. 5 and 6 have. As shown in Figs. 5 and 6, the discharge electrode layer 31 includes a mica base layer 31B, an upper coating layer 31A, and a lower coating layer 31C. The mica base layer 31B is a base layer on which a discharge electrode D is mounted on an upper surface and an induction electrode Y serving as a target electrode of a corona discharge is formed on the back surface from a discharge electrode D. The upper coating layer 31A is a coating layer covering the upper surface of the mica base layer 31B in such a manner that the upper end of the discharge electrode D is exposed. The lower coating layer 31C is a coating layer covering the lower surface of the mica base layer 31B entirely including the induction electrode Y. [

The heater layer 32 includes a heater base material layer (base material layer) 32B and a cover layer 32C as shown in Fig. 5 (a) in the non-transverse portion Ha. The heater base material layer 32B is made of PET, and the electrothermal heater H is mounted on the bottom surface thereof. The cover layer 32C covers the bottom surface of the heater base material layer 32B entirely including the electrothermal heater H. 6A, the polyimide insulating tape 32A is adhered to the upper surface side of the heater base material layer 32B at the transverse portion Hx in the heater layer 32. As shown in Fig. In the transverse section Hx, the electrothermal heater H not only crosses the discharge electrode D but also the induction electrode Y. The polyimide insulating tape 32A is provided to prevent a short circuit between the electrothermal heater H and the induction electrode Y in the discharge electrode layer 31. [ The polyimide insulating tape 32A includes a lower coating layer 31C including the heater base material layer 32B and the induction electrode Y and covering the entire lower surface of the mica base layer 31B including the induction electrode Y, .

The discharge electrode substrate 30 is formed by laminating the discharge electrode layer 31, the heater layer 32 and the glass epoxy substrate layer 33 on the surface of the discharge electrode substrate 30, as shown in Figs. 5B and 6B, And they are integrally joined by an adhesive or the like in this order. In this embodiment, the discharge electrode substrate 30 corresponds to the substrate in the present invention, the discharge electrode D corresponds to the discharge electrode in the present invention, the electrothermal heater H corresponds to the discharge electrode in the present invention, . A discharge electrode D supported on the surface portion of the flat plate type discharge electrode substrate 30 and an electrothermal heater H supported on the discharge electrode substrate 30 to heat the discharge electrode substrate 30 A static eliminator is constituted. The discharge electrode layer 31 can be more uniformly and stably heated by bonding an insulating film or the like having excellent thermal conductivity between the discharge electrode layer 31 and the heater layer 32.

As shown in Fig. 4, the connection substrate 40 is formed to have approximately the same dimensions as the discharge electrode substrate 30. Although not shown, on the back surface of the discharge electrode substrate 30, a to-be-supplied side contact point serving as an inlet / outlet of electric power to be supplied to the discharge electrode D or the electrothermal heater H is formed. The connection board 40 is provided with a supply side contact 40S that contacts the supply side contact. Further, at both ends of the connecting board 40, there is provided a flat connector 40C for electrically connecting adjacent connecting boards 40 to each other. And the connectors 40C are connected to each other by a flat cable.

The heat conductor (20) is made of an insulating material. As shown in Fig. 8, the heat transfer element 20 is formed in a flat, long rod-shaped body, and an opening 20H penetrating the upper and lower portions is formed. The heat transfer member 20 is in contact with the discharge electrode substrate 30 over the entire surface of the portion where the electrothermal heater H is provided in a state of being superimposed on the upper surface side of the discharge electrode substrate 30, The shape of the opening 20H is defined so as to be located at a position corresponding to the opening D in the drawing. 8 illustrates a configuration in which the heat conductor 20 is formed so as to cover the discharge electrode substrate 30 having two lengths of the discharge electrode substrate 30 and two arranged in the longitudinal direction . However, the heat conductor 20 is not limited to this embodiment, and it may be a form covering the single discharge electrode substrate 30 or a form covering three or more discharge electrode substrates 30. [ 11, the opening 20H of the heat transfer member 20 is formed such that the curved bent portion 22R is continuous to the upper end of the vertical portion 22H in the sectional shape when viewed in the longitudinal direction Respectively.

The thermal conductivity of the insulating material constituting the heat conductor 20 is such that the thermal conductivity in the direction perpendicular to the surface of the discharge electrode substrate 30 is smaller than the thermal conductivity of the glass epoxy substrate 33B of the discharge electrode substrate 30 (1.0 W / m · K or more and 2.0 W / m · K or less) larger than W / m · K and 0.8 W / m · K or less. In the present embodiment, a thermally conductive resin is used, and the thermal conductivity of the insulating material constituting the heat conductor 20 is set to be at least two times, preferably at least ten times, the thermal conductivity of the glass epoxy substrate 33B, And the material of the insulating material is selected.

That is, the heat conductor 20, which is formed of an insulating material and whose thermal conductivity is larger than the thermal conductivity of the discharge electrode substrate 30, is formed on the entire surface of the discharge electrode substrate 30 As shown in Fig. The setting range is set around the portion corresponding to the discharge electrode D including the portion corresponding to the electrothermal heater H. [

As shown in Fig. 9, the upper cover portion 10 is formed by bending a stainless steel plate (SUS304 is used in the present embodiment) in a U-shape and has an elongated hole portion 11H Is formed. The long hole portion 11H is formed at a position corresponding to the discharge electrode D and the corner portion around the opening 20H of the heat transfer body 20 is fitted. A bolt hole 12H is formed in the side surface portion of the upper cover portion 10 in the longitudinal direction. In the present embodiment, the upper cover portion 10 corresponds to the housing portion of the present invention.

Fig. 10 and Fig. 11 show an assembling structure of the erasing unit U. Fig. The support body 50 is fixed to the lower cover portion 51 which supports the static elimination unit U and the connection substrate 40 is supported by the support body 50. [ At the position corresponding to the bolt hole 12H in the support body 50, a female screw portion to which a bolt UB is screwed is provided. A discharge electrode substrate 30 is mounted on the connection substrate 40. Although not shown, a power supply line for a discharge electrode for supplying a high-frequency AC voltage to the discharge electrode D and a power supply line from a power supply control unit for a heater are connected to the connection substrate 40. Side contact of the discharge electrode substrate 30 is brought into contact with the supply side contact 40S of the connection substrate 40 and the discharge electrode substrate 30 is brought into contact with the discharge electrode substrate 30, And the electric power is supplied to the discharge electrode D and the electrothermal heater H in Fig.

The heat conductive member 20 is mounted on the upper surface of the discharge electrode substrate 30 in a superposed manner and the upper surface of the heat conductive member 20 is covered with the upper cover member 10, The bolt UB is screwed. Thereby, the support body 50 and the upper cover portion 10 are fixed. At this time, the outer surface 22 of the heat conductor 20 comes into contact with at least the upper surface portion 12N of the inner surface 12 of the upper cover portion 10. [ That is, it is preferable that the heat transfer element 20 is provided in a state of being in contact with the upper cover portion 10. In this way, the discharge unit U in which the discharge electrode substrate 30, the heat transfer body 20, and the electrothermal heater H are integrally assembled is formed. The electricity removing unit U can be formed by connecting a plurality of unit parts U1 and U2 in the longitudinal direction.

Therefore, when power is supplied to the electrothermal heater H to generate heat in the electrothermal heater H, the electrothermal transducer (not shown) provided in a state of being in surface contact with the discharge electrode substrate 30 around the portion corresponding to the discharge electrode D 20 are all heated. Then, the air around the discharge electrode (D) in the discharge electrode substrate (30) is heated in a wide range to lower the humidity. At the same time, since the heat conductive member 20 is in contact with the upper cover portion 10, the portion of the upper cover portion 10 close to the discharge electrode D is also heated. Thus, the air near the discharge electrode (D) of the upper cover portion (10) can be heated to lower the humidity. By these actions, adhesion of foreign matter to the discharge electrode (D) and the upper cover portion (10) can be suppressed, and the lowering of the discharge ability of the discharge electrode (D) can be suppressed.

[Other Embodiments]

(1) In the above description, a configuration has been described in which the static eliminator is mounted on a conveying device 1 for conveying a plate-like transported article. However, the static eliminator of the present invention may be used by being mounted on a transporting device for transporting various kinds of transported goods other than the plate-like transported goods. The object to be installed can be changed in various ways, for example, in a device that is mounted on a mobile body instead of a transfer device, and is used in a device that performs static electricity while moving relative to the static-eliminating object.

(2) In the above description, the configuration including the discharge electrode substrate 30, the heat transfer member 20, and the discharge unit U in which the electrothermal heater H is integrally assembled is exemplified. However, the discharge electrode substrate 30, the heat transfer member 20, and the electrothermal heater H may be separately mounted on the transfer device without being unitized.

(3) In the above description, it is assumed that the thermal conductivity of the insulating material constituting the thermal conductive member 20 in the direction perpendicular to the surface of the discharge electrode substrate 30 is less than the thermal conductivity of the glass epoxy substrate 33B (Not less than 1.0 W / m · K and not more than 2.0 W / m · K) than that of the substrate (W / m · K and not more than 0.9 W / m · K). However, the insulating material may be other than the above, provided that the insulating material is larger than the thermal conductivity of the glass epoxy substrate 33B of the discharge electrode substrate 30. [ In the above description, the material of the insulating material is selected so that the thermal conductivity of the insulating material constituting the heat conductor 20 is at least two times, preferably at least ten times, the thermal conductivity of the glass epoxy substrate 33B. However, the present invention is not limited to this configuration. For example, the material of the insulating material may be such that the thermal conductivity of the insulating material is more than 1 time and less than 2 times the thermal conductivity of the glass epoxy substrate 33B. It is also possible that the thermal conductivity of the insulating material exceeds 10 times the thermal conductivity of the glass epoxy substrate 33B.

(4) In the above description, the discharge electrodes D are formed in a continuous linear shape, but the present invention is not limited to such a configuration. For example, a plurality of discharge electrodes may be arranged in a spaced-apart relationship. In this case, the electrothermal heater H is provided so as to surround each or all of the plurality of discharge electrodes, and the electrothermal material includes a portion corresponding to the electrothermal heater H on the surface portion of the substrate, It is preferable that it is provided in a state of being in surface contact with the discharge electrode substrate 30 around the portion corresponding to the discharge electrode.

(5) In the above description, the electrothermal heater H is disposed at the longitudinal center portion of one side of the portion of the electrothermal heater H along the side of the discharge electrode D , The high-voltage side electrode HC1 and the low-voltage side electrode HC2 are formed. However, the layout pattern of the electrothermal heater H is not limited to the above. For example, the layout pattern of the electrothermal heater H may be formed as shown in Fig. 7 (b). Concretely, in the portion along the both side portions (non-traverse portion Ha) of the discharge electrode D, it is formed in a linear shape continuous with both sides. A portion (transverse portion Hx) across the discharge electrode D is formed at one end of the discharge electrode D and a portion corresponding to each of the non-transverse portions Ha at the other end of the discharge electrode D So that the high-voltage side electrode HC1 and the low-voltage side electrode HC2 are formed. 7 (c), the layout pattern of the electrothermal heater H may be formed in an annular shape. That is, the non-traverse portion Ha and the traverse portion Hx may be formed in an annular shape that surrounds the discharge electrode D continuously. In this case, the high-voltage side electrode HC1 and the low-voltage side electrode HC2 may be formed at both ends of the discharge electrode D, that is, at the respective transverse portions Hx.

(6) In the above description, an example is shown in which the upper cover portion 10 is constituted by a stainless steel plate (SUS304). However, the upper cover 10 may be made of a stainless steel plate other than SUS304, or a corrosion-resistant metal plate other than stainless steel. The upper cover portion 10 may be formed by subjecting a corrosive material to corrosion resistant surface processing.

One; Conveying device
1R; Conveying roller
10; The housing part
11H; The opening of the housing part
20; Electric heater
30; Board
D; Discharge electrode
H; Heating section
U; Electrostatic discharge unit

Claims (7)

A static eliminator for generating an ionized material by discharging from a discharge electrode supported on a surface portion of a flat plate type substrate and discharging the static elimination object,
A heating unit supported by the substrate to heat the substrate; And
A heat conducting body formed of an insulating material and having a thermal conductivity greater than a thermal conductivity of the substrate;
Lt; / RTI >
The heating element is provided in a state in which the heating element is in contact with the substrate over the entire surface of the setting range of the surface portion of the substrate,
Wherein the setting range is set around a portion corresponding to the heating portion and corresponding to the discharge electrode,
Static eliminator. The method according to claim 1,
Wherein the discharge electrodes are formed in a continuous linear shape,
Wherein the heating portion is linearly formed and is provided along the discharge electrode. The method according to claim 1,
Further comprising a metal housing portion,
Wherein the metal housing part has an opening at a position corresponding to the discharge electrode covering the surface portion of the substrate,
Wherein the electric heater is provided in a state of being in contact with the housing portion. The method of claim 3,
Wherein the housing portion is made of stainless steel. The method according to claim 1,
Wherein the insulating material is a resin having a thermal conductivity of 1.0 W / m · K or more and 2.0 W / m · K or less in a direction perpendicular to the surface of the substrate,
Wherein the substrate is made of a material having a thermal conductivity of 0.1 W / m · K or more and 0.9 W / m · K or less. The method according to claim 1,
Wherein the substrate, the heat conductor, and the heating section are integrally assembled. There is provided a conveying device for conveying a conveyed object, comprising a plurality of conveying rollers for conveying plate-shaped conveyed articles from below in a conveying direction,
A charge-discharge device comprising the charge-eliminating device according to any one of claims 1 to 6,
Wherein the static eliminator is mounted between a plurality of the conveying rollers in the conveying direction and is mounted at a position near the lower side of the conveyed article supported by the conveying roller,
Conveying device.
KR1020150040634A 2014-03-28 2015-03-24 Neutralization device and transport apparatus having the same KR101956653B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPJP-P-2014-068999 2014-03-28
JP2014068999A JP6139451B2 (en) 2014-03-28 2014-03-28 Static eliminator and transport device equipped with the same

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KR20150112833A true KR20150112833A (en) 2015-10-07
KR101956653B1 KR101956653B1 (en) 2019-03-11

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CN108463043B (en) 2020-10-02
TWI672076B (en) 2019-09-11
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JP6139451B2 (en) 2017-05-31
CN104955254B (en) 2018-05-04

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