JP5231094B2 - Ion generator - Google Patents

Description

  The present invention relates to an ion generator that generates ions.

  Patent Document 1 describes a fine electrode body configured by disposing a discharge electrode and an induction electrode facing the discharge electrode on a dielectric. Two or more fine electrode bodies are linearly arranged along the longitudinal direction of the long sheet-like support. In particular, FIG. 10 shows an ion generator that is elongated by arranging a plurality of supports each having a fine electrode body along one direction. As the electrode contacts, for example, in FIG. 6, common electrode contacts are drawn from the discharge electrode and the induction electrode provided in each fine electrode body to both ends perpendicular to the dielectric, and in FIG. An example is described in which it is extended from the dielectric electrode as it is.

JP 2007-80663 A

  However, in the ion generator provided with the ion generating element shown in FIG. 6 of Patent Document 1, two electrode contacts (feed terminals) are formed at both ends orthogonal to the longitudinal direction of the dielectric, The wiring from the terminal to the upper drive circuit becomes complicated. In addition, in the ion generator provided with the ion generating element shown in FIG. 1, the ion distribution is reduced at the end of the support. Further, in the ion generating device shown in FIG. A gap is generated between a plurality of arranged fine electrodes, and the ion distribution is uneven in the gap.

  Therefore, an object of the present invention is to facilitate the routing of wiring to a higher-level drive circuit and to widen the effective ion generation region of the ion generator, and to provide a plurality of ion generation elements along one direction. In the arranged ion generator, it is providing the ion generator which suppressed the nonuniformity between the several ion generating elements arrange | positioned in ion generation distribution.

Means for Solving the Problems and Effects of the Invention

The ion generator of the present invention includes a long rectangular dielectric, a linear ion generating electrode arranged along the longitudinal direction on the surface of the dielectric, and the ions on the back of the dielectric. An ion generation device comprising a plurality of ion generation elements having linear induction electrodes arranged in parallel with the generation electrodes, wherein the plurality of ion generation elements are arranged linearly along the longitudinal direction, Each of the ion generating elements is connected to a first end near one end of the dielectric with respect to the longitudinal direction, out of two ends of the ion generating electrode with respect to the longitudinal direction, The first wiring extending so as to approach the second end far from the one end, and the other end of the dielectric in the longitudinal direction of the two ends of the induction electrode in the longitudinal direction Close to the first end near Connected to the second wiring, the second wiring extending so as to approach the second end far from the other end of the dielectric, the first power supply terminal connected to the first wiring, and the second wiring. A second power supply terminal, wherein the first power supply terminal and the second power supply terminal are on the same side with respect to an orthogonal direction orthogonal to the longitudinal direction with respect to the ion generation electrode and the induction electrode, And it is arrange | positioned inside the both ends of the said ion generating electrode regarding the said longitudinal direction.

According to the ion generator of the present invention, it is easy to route wiring to a higher-level drive circuit, and the effective ion generation region of the ion generator can be widened. In addition, since the first power supply terminal and the second power supply terminal are provided on the same side with respect to the orthogonal direction orthogonal to the longitudinal direction with respect to the ion generation electrode and the induction electrode, the length of the ion generation element in the orthogonal direction is increased. The thickness can be reduced evenly.

In addition, since the plurality of ion generating elements are arranged linearly along the longitudinal direction , the first feeding terminal and the second feeding terminal are arranged on the inner side with respect to the longitudinal direction than both ends of the ion generating electrode. it is, in the ion generating apparatus in which a plurality of arranged along the ion generating element in the longitudinal direction, it becomes possible to extend without the ion generating electrode and the induction electrode takes a large gap along the longitudinal direction, easily the longitudinal An ion generator that is long in the direction can be provided.

Furthermore, it is preferable that the plurality of ion generating elements generate ions with respect to the object to be neutralized conveyed along the orthogonal direction. According to this, it is possible to easily neutralize an object to be neutralized that is long in the longitudinal direction .

  Hereinafter, preferred embodiments of the present invention will be described with reference to the drawings. The static eliminator according to the present embodiment neutralizes the static elimination target object by alternately generating positive ions and negative ions with respect to the static elimination target object conveyed in one direction on the conveyance surface. FIG. 1 is a longitudinal sectional view of the static eliminator. FIG. 2 is a schematic plan view of the static eliminator. FIG. 3 is a perspective view of the element unit to which the ion generating element is attached.

  As shown in FIG. 1, the static eliminator 1 is supported by a support member (not shown), and below the transfer surface 30a of the transfer device (not shown) with a predetermined interval below the Y direction (from the left side of FIG. 1). It faces the object to be neutralized 30 conveyed in the conveyance direction toward the right).

  Moreover, the static elimination apparatus 1 has the housing | casing 2 in which the partition plate 7 which partitions off space into two was formed. As shown in FIG. 2, the housing 2 is long in the X direction (a direction orthogonal to the Y direction in the transport surface 30 a), and the control board 4 is sequentially formed in an upper space of the housing 2 from one end in the X direction. And three power supply boards 5 are arranged, and three element units 3 and three gas tanks 6 are arranged in the lower space. The three element units 3 and the three gas tanks 6 are arranged along the X direction.

  Returning to FIG. 1, the detection sensor 25 is arranged on the upstream side in the transport direction from the static eliminator 1. When the detection sensor 25 faces the static elimination target 30 transported on the transport surface 30 a, the static elimination target 30. Is detected and a detection signal is output to the control board 4. The distance in the transport direction between the static elimination device 1 and the detection sensor 25 is set so that the static elimination target 30 faces the static elimination device 1 after a detection signal is input from the detection sensor 25 to the control board 4 and a desired time A has elapsed. ing. Before the desired time A, when the static elimination target 30 is detected by the detection sensor 25 within a certain time B interval shorter than the desired time A, the static elimination device 1 continues below the static elimination device 1. Thus, it operates in the normal operation mode as if the object to be discharged has been conveyed. Before the desired time A, when the detection sensor 25 detects that the object 30 to be discharged has not been conveyed for a certain time B or longer within the desired time A, the charge removal apparatus 1 is in the discharge current detection mode. Operate. When the detection sensor 25 detects that the object 30 to be discharged has not been transported for at least a time C longer than the desired time A before the desired time A, the static eliminator 1 causes the ion generation element to generate ions. To stop driving. Details will be described later.

  As shown in FIGS. 1 to 3, the element unit 3 has a support 3 a made of a resin molded body or the like, has a long shape in the X direction, and has a bottom surface when viewed from the Y direction. Inverted C-shaped slopes 3c and 3d are formed. On the inclined surfaces 3c and 3d, ion generating elements 11 and 12 that are long in the X direction are arranged with stabilizing electrodes 26a and 26b described later interposed therebetween. In FIG. 2, the static eliminator 1 is viewed from the Y direction, and only the ion generating element 11 appears.

  The ion generating elements 11 and 12 are arranged close to each other along the Y direction with the longitudinal direction parallel to the X direction, and the ion generating surface opposite to the surface facing the inclined surfaces 3c and 3d of the support 3a. From 11a, 12a (see FIG. 6), either one of positive ions and negative ions is generated. In the present embodiment, negative ions are generated from the ion generating surface 11a of the ion generating element 11 located downstream in the transport direction, and positive ions are generated from the ion generating surface 12a of the ion generating element 12 positioned upstream in the transport direction. To do.

  The inclined surface 3c of the support 3a forms an acute angle 45 degrees to the downstream side in the transport direction with the transport surface 30a on which the object 30 to be discharged is transported. Therefore, the ion generating surface 11a of the ion generating element 11 disposed on the inclined surface 3c forms an acute angle that is 45 degrees open to the downstream side in the transport direction with the transport surface 30a. Further, the inclined surface 3d of the support 3a forms an acute angle that is 45 degrees open to the upstream side in the transport direction with the transport surface 30a. Accordingly, the ion generation surface 12a of the ion generation element 12 disposed on the inclined surface 3d forms an acute angle that is 45 degrees open to the upstream side in the transport direction with the transport surface 30a. That is, the ion generation surfaces 11a and 12a form the same angle although the direction opened between the ion generation surfaces 11a and 12a is opposite to the transport direction.

  The element unit 3 has a cover 9 that covers the outer surface of the support 3a. The cover 9 covers the periphery of the ion generating elements 11 and 12 and fixes them to the support 3a. In addition, the cover 9 is formed with an opening so as to expose the ion generating portions of the ion generating elements 11 and 12, and a plurality of holes 9a are formed at positions corresponding to the gas delivery holes 6a described later. . In addition, current detection electrodes 27a and 27b are arranged on the upper outer surface of the cover 9 at a position where the ion generating elements 11 and 12 are sandwiched with respect to the transport direction. The two current detection electrodes 27a and 27b are for detecting the discharge currents of the ion generating elements 11 and 12, respectively, and are arranged at locations where there is little influence on the distribution of ions generated from the ion generating elements 11 and 12. . That is, it is arranged above the ion generating elements 11 and 12 in the direction orthogonal to the transport surface 30a. Holes are formed in the current detection electrodes 27 a and 27 b at positions corresponding to the holes 9 a of the cover 9. Note that this is a conventionally known technique in which ions generated from an ion generating element are received from a predetermined electrode and the amount of current flowing through the electrode can be regarded as the amount of generated ions.

  In the present embodiment, such element units 3 are arranged along the X direction with three units for one housing 2.

  Next, the ion generating elements 11 and 12 will be described. FIG. 4 is a plan view of the ion generating element. FIG. 5 is an enlarged view of the one-dot chain line region of FIG. FIG. 6 is a schematic partially enlarged view of FIG. Since the ion generating elements 11 and 12 have the same configuration except for generating different polarities due to different applied pulse voltages, only the ion generating element 11 will be described. The description of 12 is omitted. As shown in FIG. 4, when a plurality of element units 3 are connected along the X direction (see FIGS. 2 and 3), a plurality of ion generating elements 11 are substantially arranged in the X direction. .

  As shown in FIGS. 4 to 6, the ion generating element 11 has an ion generating electrode 16 and induction electrodes 17 a and 17 b arranged on the front surface 15 a and the back surface 15 b of the dielectric 15, respectively. The surface 15a of the dielectric 15 is a surface opposite to the inclined surface 3c of the support 3a, and the back surface 15b is a surface facing the inclined surface 3c.

  The dielectric 15 is a long rectangular plate in which a large number of mica are laminated with an adhesive. The dielectric 15 has a thickness of 70 μm in this embodiment. The dielectric 15 is not limited to a mica laminate, and may be ceramic, glass, polymer, or the like. In addition, power supply terminals 62 and 64 are formed on the surface 15a of the dielectric 15 so as to be electrically connected to the power supply substrate 5 and to which a voltage applied from the power supply substrate 5 is supplied. The power feeding terminals 62 and 64 overlap along the X direction, and are arranged on the inner side with respect to the X direction than both ends of the ion generating electrode 16.

  The ion generating electrode 16 is made of stainless steel on the surface 15a of the dielectric 15 and has a plurality of fine triangular protruding electrodes protruding from the linear electrode 16a and the linear electrode 16a in the short direction perpendicular to the longitudinal direction. 16b. The plurality of protruding electrodes 16b are arranged in two rows in a staggered manner on both sides in the short direction of the linear electrode 16a at equal intervals along the X direction. In the present embodiment, the width X of the linear electrode 16a, the length Y of the bottom side of the protruding electrode 16b, and the height Z of the protruding electrode 16b are 0.1 mm. The angle α formed from the two sides forming the protruding electrode 16b is 53.13 degrees, and the distance L between the apexes 16c of the two adjacent protruding electrodes 16b is 0.3 mm. Yes.

  Further, one end portion (lower end portion in FIG. 4) of the ion generating electrode 16 is connected to the power supply terminal 62 (first wiring) via a wiring 61 (first wiring) bent inward with respect to the X direction from both ends of the ion generating electrode 16. Is electrically connected to the power supply terminal.

  The induction electrodes 17 a and 17 b are formed of stainless steel on the back surface 15 b of the dielectric 15 in the same manner as the ion generation electrode 16, and are parallel to the ion generation electrode 16. The two linear electrodes 17 a and 17 b are arranged on both sides of the ion generating electrode 16 in the short direction when the induction electrodes 17 a and 17 b are viewed from the ion generating electrode 16. In the present embodiment, the distance K in the short direction from the protruding electrode 16b to the induction electrode 17b is 0.05 mm. The material of the ion generating electrode 16 and the induction electrodes 17a and 17b is not limited to stainless steel, but is a single metal such as carbon, tungsten, aluminum, copper, gold, tantalum, tungsten or nickel, or an alloy thereof, or conductive. Ceramics may be used.

  In addition, one end portion (the upper end portion in FIG. 4) of the induction electrodes 17a and 17b is connected to a wiring 63 (second wiring) bent inward with respect to the X direction from both ends of the induction electrodes 17a and 17b and a through hole (not shown). Are electrically connected to the power supply terminal 64 (second power supply terminal).

  Further, a surface protective layer 18 that covers the surface 15 a of the dielectric 15 and the ion generating electrode 16 is formed on the entire surface 15 a of the dielectric 15. The surface protective layer 18 is formed for the purpose of preventing peeling of the dielectric 15 and improving moisture resistance, and is made of, for example, a silica coating material or an acrylic coating material.

  In addition, a back surface protective layer 19 that covers the back surface 15b of the dielectric 15 and the induction electrodes 17a and 17b is formed on the entire back surface 15b of the dielectric 15. The back surface protective layer 19 is made of, for example, a silicon coating material or an epoxy coating material.

  As shown in FIG. 5, the stabilization electrode 26a is arrange | positioned between the back surface protective layer 19 of the ion generating element 11, and the slope 3c of the support body 3a. A bias voltage having the same polarity as the ions generated from the ion generating electrode 16 is applied to the stabilizing electrode 26a. That is, since negative ions are generated from the ion generation electrode 16 of the ion generation element 11, a negative bias voltage is applied to the stabilization electrode 26 a corresponding to the ion generation element 11. Further, since positive ions are generated from the ion generation electrode 16 of the ion generation element 12, a positive bias voltage is applied to the stabilization electrode 26b corresponding to the ion generation element 12. In this embodiment, bias voltages of minus 12V and plus 12V are applied, respectively.

  The ion generation element 11 generates negative ions from the ion generation electrode 16 by applying a negative pulse voltage between the ion generation electrode 16 and the induction electrodes 17a and 17b using the induction electrodes 17a and 17b as a reference potential. . The ion generating element 12 applies positive pulse voltage from the ion generating electrode 16 by applying a positive pulse voltage between the ion generating electrode 16 and the induction electrodes 17a and 17b with the induction electrodes 17a and 17b as a reference potential. Occur.

  Here, if the generation of negative ions from the ion generation electrode 16 of the ion generation element 11 is continued, the amount of ions generated from the ion generation electrode 16 decreases. This is presumably because, unless the stabilization electrode 26 a is arranged, the back surface protection layer 19 is charged with a polarity opposite to that of ions generated from the ion generation electrode 16. When the support 3a is made of a resin, the support 3a is charged in addition to the back surface protective layer 19. By providing the stabilizing electrode 26a to which a negative bias voltage is applied to the ion generating element 11 that generates negative ions as in the present embodiment, the back surface protective layer 19 or the support 3a is additionally provided. Prevent charging. As a result, the amount of ions generated from the ion generating electrode 16 does not decrease and stabilizes.

  Returning to FIGS. 1 and 2, the three gas tanks 6 are hollow and communicate with each other via a connecting member (not shown). In the gas tank 6, a plurality of two gas delivery holes 6a opened downward on both sides in the Y direction of the two ion generating elements 11, 12 are formed along the X direction. The gas tank 6 is connected to a gas supply source (not shown). As the gas, air gas or inert gas such as nitrogen is suitable. The compressed gas supplied from the gas supply source is sent out from the gas delivery hole 6a of the gas tank 6 through the hole 9a of the cover 9 and the holes of the current detection electrodes 27a and 27b in the direction orthogonal to the transport surface 30a. That is, the gas delivered from the plurality of gas delivery holes 6a of the gas tank 6 extends in the X direction with the two ion generating elements 11 and 12 sandwiched with respect to the transport direction and facing the direction orthogonal to the transport surface 30a. A gas curtain is formed.

  Here, since the two ion generating elements 11 and 12 generate ions, dust easily adheres due to static electricity regardless of polarity. Therefore, by forming the gas curtain, the distribution region of ions generated from the ion generation surfaces 11a and 12a of the ion generation elements 11 and 12 toward the transport surface 30a is blocked from the outside by the gas curtain. It becomes difficult to adhere to the ion generation surfaces 11a and 12a. In addition, ions generated from the ion generation surfaces 11a and 12a flow more efficiently to the transport surface 30a, and the charge removal target 30 can be discharged more effectively. Furthermore, it is possible to prevent the ions generated from the two ion generation surfaces 11a and 12a from being dispersed. In addition, since the gas curtain is formed in a direction perpendicular to the transport surface 30a, positive ions and negative ions generated from the two ion generation surfaces 11a and 12a are less likely to be mixed and neutralized.

  Next, the electrical configuration of the static eliminator 1 will be described with reference to the drawings. FIG. 7 is a block diagram illustrating an electrical configuration of the static eliminator. FIG. 8 is a diagram illustrating transmission / reception of various signals of the static eliminator. FIG. 9 is an internal circuit diagram of the power supply board. FIG. 10 is a diagram showing voltage waveforms applied to the two ion generating elements from the power supply substrate. FIGS. 11A and 11B are schematic plan views for explaining the process of neutralizing the object to be neutralized by the ion generating element, in which FIG. 11A is during neutralization and FIG.

  As shown in FIGS. 7 and 8, the three power supply substrates 5 are connected to the respective electric elements in the corresponding element unit 3. That is, the power supply substrate 5 is electrically connected to the corresponding ion generating elements 11 and 12 through the power supply terminals 62 and 64, respectively. The power supply substrate 5 is electrically connected to the corresponding stabilization electrodes 26a and 26b. Various voltages are supplied to the ion generating elements 11 and 12 under the control of an ion generating voltage control unit 31 (control board 4) described later. The power supply substrate 5 is electrically connected to the current detection electrodes 27a and 27b. Various voltages are supplied to the current detection electrodes 27a and 27b under the control of a current detection voltage control unit 32 described later. Each power supply substrate 5 detects a discharge current from the current detection electrodes 27 a and 27 b and feeds it back to the control substrate 4.

  As shown in FIG. 9, each power supply board 5 includes a power supply 51, a drive circuit 52, a transformer 53, and a secondary circuit 54. The drive circuit 52, the transformer 53, and the secondary circuit 54 are provided corresponding to the ion generating elements 11 and 12, respectively. The voltage output from the power supply 51 is applied to the ion generating elements 11 and 12 via the drive circuit 52, the transformer 53, and the secondary circuit 54, respectively. At this time, since a negative pulse voltage is applied to the ion generating element 11, negative ions are generated, and since a positive pulse voltage is applied to the ion generating element 12, positive ions are generated.

  The control board 4 includes a ROM (Read Only Memory) in which programs and data for controlling various operations are stored, a CPU (Central Processing Unit) for executing various operations to generate signals for controlling the various operations, and a CPU RAM (Random Access Memory) etc. that temporarily stores data such as the calculation results in the are included. Alternatively, the control board 4 may be configured by a logic IC, ASIC, FPGA, or the like. Further, as shown in FIG. 7, the control board 4 functions as an ion generation voltage control unit 31 and a current detection voltage control unit 32.

  The ion generation voltage control unit 31 is in the normal operation mode and the discharge current detection mode, that is, while the object to be discharged 30 is continuously conveyed under the charge removal device 1 (in the normal operation mode), and in the charge removal device. 1 during the desired time A but while the object 30 to be discharged is not transported for a certain time B or longer (in the discharge current detection mode), the voltage is applied to the ion generating element 11 while shifting the voltage application timing. The power supply substrate 5 is controlled so that a positive pulse voltage is applied to the ion generating element 12. Further, the ion generation voltage control unit 31 detects, before the desired time A, that the detection sensor 25 detects that the object 30 to be discharged is not transported for at least a time C longer than the desired time A, that is, the charge removal While the object to be discharged 30 is not transported continuously under the apparatus 1 and is on standby for the charge removal of the next object 30 to be discharged, voltage application to the ion generating elements 11 and 12 is stopped. The power supply board 5 is controlled to do so.

  Specifically, as shown in FIG. 10, the ion generation voltage control unit 31 is positive twice continuously for one cycle (for example, 10 to 500 Hz) from the power supply substrate 5 to the ion generation element 12. After applying the pulse voltage, the voltage application cycle V1 for applying a positive bias voltage is repeated. In addition, the ion generation voltage control unit 31 applies a negative pulse voltage to the ion generation element 11 from the power supply substrate 5 continuously in one cycle, and then applies a negative bias voltage. Repeat cycle V2. In this embodiment, the pulse width B is 5 μs, the pulse interval C is 300 μs, and the output voltage V is 2.4 kVpk. Note that the number of pulse voltages and the peak value of the pulse voltage in one cycle can be variously changed according to the amount of ions to be generated.

  At this time, the ion generation voltage control unit 31 applies a negative pulse voltage to the ion generation element 11 while applying a positive bias voltage to the ion generation element 12 from the power supply substrate 5, and While applying a negative bias voltage to the ion generating element 11, a positive pulse voltage is applied to the ion generating element 12. That is, the ion generation voltage control unit 31 alternately applies a pulse voltage from the power supply substrate 5 to the ion generation elements 11 and 12. Therefore, the static elimination apparatus 1 generates positive ions and negative ions alternately from the ion generating elements 11 and 12 to neutralize the static elimination target 30.

  Further, the ion generation voltage control unit 31 is configured so that the discharge current detected by the current detection electrodes 27a and 27b coincides with the target current, that is, the target ion amount is generated from the ion generation elements 11 and 12. 5 to perform feedback control for changing the peak value of the pulse voltage applied to the ion generating elements 11 and 12.

  In the normal operation mode in which the current detection voltage control unit 32 detects that the static elimination target 30 is continuously conveyed under the static eliminator 1 as shown in FIG. A positive bias voltage is applied from the power supply substrate 5 to the current detection electrode 27b arranged on the side of the ion generating element 12 that generates the. The current detection voltage control unit 32 applies a negative bias voltage from the power supply substrate 5 to the current detection electrode 27a disposed on the side of the ion generating element 11 that generates negative ions. The current detection electrodes 27a and 27b are arranged in positions orthogonal to the transport surface 30a and above the ion generation elements 11 and 12 and at a position that has little influence on the ion distribution generated from the ion generation elements 11 and 12. is there. However, by providing such an electrode, an undesired voltage may be applied to the electrode inadvertently during use, and ions generated from the ion generating elements 11 and 12 are attracted or repelled to the electrode detection electrodes 27a and 27b. Adversely affected. As described above, by applying a bias voltage having the same polarity as the ions generated from the nearby ion generating elements 11 and 12 to the current detection electrodes 27a and 27b, the generated ion distribution can be prevented from being affected. In this embodiment, the bias voltages are plus 12V and minus 12V, respectively.

  In addition, as shown in FIG. 11B, the current detection voltage control unit 32 is configured so that the detection sensor 25 is within the desired time A before the desired time A, but the object 30 to be neutralized is equal to or longer than the predetermined time B. In the so-called discharge current detection mode in which it is detected that no current is conveyed, a negative bias voltage is applied from the power supply substrate 5 to the current detection electrode 27b, and a positive bias voltage is applied from the power supply substrate 5 to the current detection electrode 27a. Let In this way, by applying a bias voltage having a polarity opposite to that of ions generated from the nearby ion generation elements 11 and 12 to the current detection electrodes 27a and 27b, the generated ions are forcibly attracted to the current detection electrodes 27a and 27b. Thus, the discharge current is accurately detected. In this embodiment, bias voltages of minus 12V and plus 12V are applied, respectively.

  The period for sending the gas from the gas delivery hole 6a of the gas tank 6 may be only during the gas, the normal operation mode and the discharge current detection mode, but it prevents the dust from adhering to the ion generating elements 11 and 12. From the point of view, it is preferable that the operation is always performed including the standby state in which the driving for generating ions is stopped.

  Next, the charge removal process of the charge removal target 30 by the charge removal apparatus 1 will be described. As shown in FIG. 11A, ions are generated from the ion generation electrode 16 portion, which is the center of ion generation, in the longitudinal section along the Y direction of the ion generation elements 11 and 12. The distance M from the ion generating elements 11 and 12 to the transport surface 30a in the direction orthogonal to the transport surface 30a is equal to or greater than the distance N between the two ion generating electrodes 16 of the two ion generating elements 11 and 12. . In the present embodiment, the distance N is 10 mm, and the distance M is preferably 10 to 500 mm. In this distance relationship, the static eliminator 1 can effectively neutralize the object 30 to be neutralized. When the distance M is equal to or less than the distance N, the ion distribution generated from each of the ion generating elements 11 and 12 becomes an independent distribution on the transport surface 30a, and there is a possibility that the object 30 to be neutralized is overcharged. By setting the distance M to be equal to or greater than the distance N, a coexisting portion of ion distributions generated from the ion generating elements 11 and 12 can be formed on the transport surface 30a, and overcharge of the object to be neutralized 30 can be prevented. On the other hand, if the distance M is too large, ions generated from the ion generating elements 11 and 12 are diffused outward until they are transported to the transport surface 30a, and excessive neutralization of the ions occurs. The distance M is preferably set within a predetermined distance.

  In the normal operation mode, when the static elimination object 30 is conveyed in the conveyance direction along the conveyance surface 30a and the static elimination apparatus 1 and the static elimination object 30 face each other, of the generated positive ions and negative ions, Ions having the opposite polarity to the charged polarity of the object 30 to be discharged are attracted to the object 30 to be discharged, and the object 30 to be discharged is discharged. At this time, since the coexistence region exists in the distribution of the negative ions and the positive ions generated from the ion generating elements 11 and 12 as described above, the overcharge of the object 30 to be neutralized is prevented.

  At this time, the power supply terminals 62 and 64 of the ion generating elements 11 and 12 in the X direction are provided on the same side with respect to the ion generating electrode 16, so that the wiring from the power supply terminals 62 and 64 to the power supply substrate 5 can be performed. It is easy to route. In the case where a plurality of ion generating elements 11 and 12 are arranged along the X direction, the power supply terminals 62 and 64 are arranged on the inner side in the X direction than both ends of the ion generating electrode 16. The ion generating electrode 16 and the induction electrodes 17a and 17b extend without taking a gap along the X direction, and an ion generating element that is long in one direction can be easily formed. Thereby, the static elimination target 30 long in the X direction can be easily neutralized. Furthermore, as can be understood from FIGS. 1, 3, and 4, for example, the power supply terminals 62 and 64 are arranged on the inner side in the X direction than the both ends of the ion generating electrode 16 at the end in the X direction as the ion generator. Therefore, the effective region of the ion generation distribution can be expanded.

  The ion generation surface 11a of the ion generating element 11 located on the downstream side in the transport direction is not parallel to the transport surface 30a and is inclined 45 degrees downstream in the transport direction. Then, since the negative ions generated from the ion generating element 11 are distributed along the ion generating surface 11a, the amount of the negative ions generated from the ion generating element 11 increases from the upstream side to the downstream side in the transport direction. It is running low. Therefore, negative ions are rarely carried to the object to be neutralized 30 that is transported to the downstream side in the transport direction after the neutralization is completed, and it is possible to prevent excessive charging.

  Further, since the ion generation surface 11a is opposed to the object to be neutralized 30 by a predetermined area by being inclined 45 degrees downstream in the transport direction, ions can be efficiently conveyed to the object to be neutralized 30. Furthermore, in this embodiment, the ion generation surface 12a of the ion generating element 12 located on the upstream side of the transport side is also inclined 45 degrees upstream of the transport surface 30a in the transport direction. That is, the ion generating surfaces 11a and 12a of the two ion generating elements 11 and 12 form the same angle although the direction opened between the ion generating surfaces 11a and 12a is opposite to the transport direction. According to this, in the two ion generating elements 11, 12, there are portions of the ion generating surfaces 11 a, 12 a that are opposed to the object to be neutralized 30 by a predetermined area, and both ions are efficiently applied to the object to be neutralized 30. Can carry well. In particular, since the inclination is the same angle, negative ions and positive ions are uniformly conveyed from the two ion generating elements 11 and 12 to the object 30 to be neutralized, and the ion distribution is more uniform including the coexistence region. Can be formed. When negative ions and positive ions are generated alternately, it is possible to avoid excessive or abrupt neutralization of ions during the transfer of ions onto the object 30 to be neutralized, efficiently carrying ions, And it is preferable at the point which can form the coexistence region of useful ion.

  The preferred embodiments of the present invention have been described above, but the present invention is not limited to the above-described embodiments, and various modifications can be made as long as they are described in the claims. For example, in this embodiment, the angle formed between the ion generation surfaces 11a and 12a and the transport surface 30a is 45 degrees, but any angle may be used as long as it is an acute angle. However, 45 degrees can maintain the highest static elimination efficiency and make it difficult to generate extra charge on the static elimination target 30.

  Further, the angle formed between the ion generation surface 11a and the transport surface 30a and the angle formed between the ion generation surface 12a and the transport surface 30a may not be the same angle.

  Furthermore, the stabilization electrodes 26a and 26b may be grounded. Since the stabilization electrodes 26a and 26b are grounded, the back surface protective layer 19 and the support 3a can be prevented from being charged, so that the generation of ions from the ion generation electrode 16 is stabilized.

  In addition, the shape of the protruding electrode 16b of the ion generating electrode 16 is not limited to a triangular shape, and may be any shape such as a wave shape, a circular shape, or a lattice shape.

  Further, in the present embodiment, positive ions and negative ions are alternately generated from the ion generating elements 11 and 12, but may be generated simultaneously.

  Furthermore, a gas tank 6 is provided if dust does not float around the static elimination device 1 and ions generated from the ion generating elements 11 and 12 can reach the static elimination target 30 without using a gas flow. It does not have to be.

  In addition, in the present embodiment, three ion generating elements 11 and 12, the power supply substrate 5 and the air tank 6 are arranged along the X direction. However, one or more may be arranged. Good. Any number can be selected according to the designed lengths of the ion generating elements 11 and 12 and the desired length of the static elimination apparatus 1 in the X direction.

  In this embodiment, negative ions are generated from the ion generating element 11 and positive ions are generated from the ion generating element 12. However, positive ions are generated from the ion generating element 11 and negative ions are generated from the ion generating element 12. The structure which generate | occur | produces ion may be sufficient. Alternatively, the ion generating element 11 may alternately repeat negative ions and positive ions in time, and the ion generating element 12 may alternately repeat positive ions and negative ions.

  Further, as the applied voltage to the ion generating elements 11 and 12, in the example of FIG. 10, a method of constantly applying a bias voltage is used, but a pulse voltage having a predetermined peak from the ground voltage (0 volt) is used for generating ions. The driving method may be a method of applying a voltage, and a known and well-known driving method can be used.

It is a longitudinal cross-sectional view of a static elimination apparatus. It is a schematic plan view of a static elimination apparatus. It is a perspective view of an element unit to which an ion generating element is attached. It is a top view of an ion generating element. It is an enlarged view of the dashed-dotted line area | region of FIG. FIG. 2 is a schematic partial enlarged view of FIG. 1. It is a block diagram which shows the electric constitution of a static elimination apparatus. It is a figure which shows transmission / reception of the various signals of a static elimination apparatus. It is an internal circuit diagram of a power supply board. It is a figure which shows the voltage waveform each applied to two ion generating elements from a power supply board | substrate. It is a schematic plan view explaining the static elimination process of the static elimination target object by an ion generating element, (a) is in the process of static elimination, (b) is in the process of detecting a discharge current.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Static elimination apparatus 2 Element unit 4 Control board 5 Power supply board 11, 12 Ion generating element 11a, 12a Ion generating surface 16 Ion generating electrode 16b Protrusion electrode 17a, 17b Induction electrode 30 Electric discharge object 61, 63 Wiring 62, 64 Feeding terminal

Claims (2)

A dielectric having a long rectangular shape, a linear ion generating electrode disposed on the surface of the dielectric along the longitudinal direction thereof, and a rear surface of the dielectric disposed in parallel with the ion generating electrode. A plurality of ion generating elements having a linear induction electrode;
The ion generating device in which the plurality of ion generating elements are linearly arranged along the longitudinal direction,
Each of the ion generating elements is
Of the two ends of the ion generating electrode with respect to the longitudinal direction, the second end is connected to a first end near the one end of the dielectric with respect to the longitudinal direction, and is far from the one end of the dielectric. A first wiring extending to approach the two ends;
Of the two ends of the induction electrode with respect to the longitudinal direction, a second end that is connected to the first end near the other end of the dielectric with respect to the longitudinal direction and is far from the other end of the dielectric. A second wiring extending to approach the end,
A first power supply terminal connected to the first wiring;
A second power supply terminal connected to the second wiring,
The first feeding terminal and the second feeding terminal are on the same side with respect to the orthogonal direction orthogonal to the longitudinal direction with respect to the ion generating electrode and the induction electrode, and on the inner side of both ends of the ion generating electrode with respect to the longitudinal direction. The ion generator characterized by being arrange | positioned. The ion generation device according to claim 1, wherein the ion generation element generates ions with respect to an object to be neutralized conveyed along the orthogonal direction.

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