JP5874004B2 - Circuit forming method, substrate holding method, and substrate holder - Google Patents

Circuit forming method, substrate holding method, and substrate holder Download PDF

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JP5874004B2
JP5874004B2 JP2012184512A JP2012184512A JP5874004B2 JP 5874004 B2 JP5874004 B2 JP 5874004B2 JP 2012184512 A JP2012184512 A JP 2012184512A JP 2012184512 A JP2012184512 A JP 2012184512A JP 5874004 B2 JP5874004 B2 JP 5874004B2
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substrate
electrode
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JP2014041979A (en
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満 廣島
満 廣島
大園 満
満 大園
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Panasonic Intellectual Property Management Co Ltd
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本願発明は、フレキシブルな基板に回路を形成する際の基板の保持、および、基板を保持するための基板保持具に関し、特に、薄いシート状やフィルム状の基板などを保持して行う回路形成方法、基板保持方法、および、基板保持具に関する。   TECHNICAL FIELD The present invention relates to holding a substrate when forming a circuit on a flexible substrate and a substrate holder for holding the substrate, and in particular, a circuit forming method for holding a thin sheet-like or film-like substrate. , A substrate holding method, and a substrate holder.

基板に電子部品を実装して回路を形成するシステムとしては、例えば、クリーム半田を基板表面に印刷する印刷装置、半田が印刷された基板の表面に電子部品を実装する部品実装機、基板上の半田を加熱し溶融させて基板上の部品を半田付けするリフロー炉がインラインで並べられ、基板は、各装置を通過するコンベアにより搬送されるシステムがある。   As a system for forming a circuit by mounting electronic components on a substrate, for example, a printing device that prints cream solder on the surface of the substrate, a component mounting machine that mounts electronic components on the surface of the substrate on which the solder is printed, There is a system in which reflow ovens for heating and melting solder to solder components on a substrate are arranged in-line, and the substrate is conveyed by a conveyor passing through each device.

従前の基板は、厚みがあり剛性も高いため、基板の縁部をコンベアが直接保持し、基板を搬送させている。しかしながら、昨今の基板は、電子機器の小型化軽量化のため、厚みが薄く可撓性があるものが多く、この薄型の基板のみを保持して搬送することはほぼ不可能である。   Since the conventional substrate is thick and has high rigidity, the conveyor directly holds the edge of the substrate to convey the substrate. However, many recent substrates are thin and flexible in order to reduce the size and weight of electronic devices, and it is almost impossible to hold and transport only this thin substrate.

ところで、特許文献1には、導電性を備えた平板である第二電極と絶縁性を備える保持板とが積層された基板保持具を用い、保持板の上に基板を載置し、載置された基板を覆う第一電極と前記第二電極との間に電圧をかけることにより保持板と基板とを誘電分極させ、静電吸着により基板を保持板に保持させる技術が記載されている。当該技術は、第一電極と第二電極との間に印加された電圧を解除し、第一電極を取り外した後でも長時間にわたって静電気力による保持力が維持されるものであり、昨今の薄い基板を保持する技術の一つとして考えることができる。   By the way, in patent document 1, the board | substrate was mounted on the holding board using the board | substrate holder with which the 2nd electrode which is a flat board provided with electroconductivity, and the holding board provided with insulation were laminated | stacked, and mounted A technique is described in which a holding plate and a substrate are dielectrically polarized by applying a voltage between a first electrode covering the formed substrate and the second electrode, and the substrate is held on the holding plate by electrostatic adsorption. This technique releases the voltage applied between the first electrode and the second electrode and maintains the holding force by the electrostatic force for a long time even after the first electrode is removed. This can be considered as one of the techniques for holding the substrate.

US7,733,624 B2US7,733,624 B2

ところが、電子部品を基板に実装し回路を形成するための回路形成システムにおいて、前記基板の保持方法を採用すると、基板上に電子部品を実装する際に基板に帯電していた電荷が電子部品に放電し、電子部品に損傷(静電破壊など)を与えたり、基板に半田を印刷する際や部品を実装する際に基板と他の装置とが接触するため基板の電荷が徐々に失われて保持板が基板を保持する力が低下し、基板が保持されなくなったりする懸念がある。   However, in the circuit forming system for mounting the electronic component on the substrate to form a circuit, when the substrate holding method is employed, the electric charge charged on the substrate when the electronic component is mounted on the substrate is transferred to the electronic component. Discharges and damages electronic components (such as electrostatic breakdown), and the board and other devices come into contact with each other when printing solder or mounting components on the board, and the board charge is gradually lost. There is a concern that the force with which the holding plate holds the substrate decreases, and the substrate cannot be held.

本願発明は、上記課題に鑑みなされたものであり、放電による電子部品損傷の可能性を回避し、また、基板の保持力の低下を回避しつつ、静電吸着力を用いて保持された基板に電子部品を実装して回路を形成することのできる回路形成方法、基板保持方法、および、基板保持具の提供を目的とする。   The present invention has been made in view of the above problems, and avoids the possibility of damage to electronic components due to electric discharge, and avoids a decrease in the holding force of the substrate, while holding the substrate using electrostatic adsorption force. An object is to provide a circuit forming method, a substrate holding method, and a substrate holder capable of forming a circuit by mounting electronic components on the substrate.

上記目的を達成するために、本願発明にかかる回路形成方法は、可撓性のある基板に回路を形成する回路形成方法であって、絶縁性材料からなる保持部材の上に基板を配置する基板配置工程と、前記基板の面に対して平面視で、回路が形成されない前記基板の領域である非形成領域と前記基板が配置されていない前記保持部材の領域である非配置領域の前記保持部材との間に、絶縁性材料からなり柔軟性を有するシート状のカバー部材を架橋状に配置するカバー工程と、前記保持部材との間で、少なくとも前記保持部材の非配置領域に当接された前記カバー部材を挟み込むように第一電極を配置する電極配置工程と、前記保持部材に対して基板が配置される側とは反対側に配置される第二電極と前記第一電極との間に電圧を印加する印加工程と、配置された前記第一電極を前記カバー部材から引き離す分離工程とを含むことを特徴とする。   In order to achieve the above object, a circuit forming method according to the present invention is a circuit forming method for forming a circuit on a flexible substrate, wherein the substrate is disposed on a holding member made of an insulating material. Arrangement step and non-arrangement region that is a region of the substrate where no circuit is formed and a non-arrangement region that is a region of the holding member where the substrate is not disposed in plan view with respect to the surface of the substrate Between the holding step and the cover step of arranging a flexible sheet-like cover member made of an insulating material in a bridging manner and at least a non-placement region of the holding member Between the electrode placement step of placing the first electrode so as to sandwich the cover member, and the second electrode placed on the opposite side of the holding member from the side on which the substrate is placed, and the first electrode Applying process to apply voltage , Characterized in that the placed the first electrode and a separation step of separating from the cover member.

これによれば、保持部材の非配置領域と当接しているカバー部材の部分と保持部材との間で静電吸着による保持力が発生し、当該保持力を用いてカバー部材が基板の非形成領域を保持部材に押しつけている。従って、基板自体は帯電していないため、基板の回路が形成される形成領域にクリーム半田を印刷し、また、部品を装着するような回路を形成する際に、放電により電子部品が破損したり、保持力が低下したりする不具合を回避することができる。   According to this, a holding force is generated between the portion of the cover member that is in contact with the non-arrangement region of the holding member and the holding member, and the cover member is not formed on the substrate by using the holding force. The region is pressed against the holding member. Therefore, since the substrate itself is not charged, cream solder is printed on the formation area where the circuit of the substrate is formed, and when a circuit for mounting the component is formed, the electronic component may be damaged by discharge. In addition, it is possible to avoid a problem that the holding force is reduced.

また、前記カバー工程では、前記基板の非形成領域である周縁部を前記カバー部材で押さえ、前記電極配置工程では、前記基板を囲むように前記第一電極を配置してもよい。   Further, in the cover step, a peripheral portion that is a non-formation region of the substrate may be pressed by the cover member, and in the electrode placement step, the first electrode may be disposed so as to surround the substrate.

これによれば、基板の周縁部全体を保持部材に押しつけた状態で保持することができる。安定した状態で基板を保持することが可能となる。   According to this, the whole peripheral part of a board | substrate can be hold | maintained in the state pressed against the holding member. The substrate can be held in a stable state.

上記目的を達成するために、本願発明に係る基板保持方法は、可撓性のある基板を固定する基板保持方法であって、絶縁性材料からなる保持部材の上に基板を配置する基板配置工程と、前記基板の面に対して平面視で、回路が形成されない前記基板の領域である非形成領域と前記基板が配置されていない前記保持部材の領域である非配置領域の前記保持部材との間に、絶縁性材料からなり柔軟性を有するシート状のカバー部材を架橋状に配置するカバー工程と、前記保持部材との間で、少なくとも前記保持部材の非配置領域に当接された前記カバー部材を挟み込むように第一電極を配置する電極配置工程と、前記保持部材に対して基板が配置される側とは反対側に配置される第二電極と前記第一電極との間に電圧を印加する印加工程と、配置された前記第一電極を前記カバー部材から引き離す分離工程とを含むことを特徴とする。   In order to achieve the above object, a substrate holding method according to the present invention is a substrate holding method for fixing a flexible substrate, wherein the substrate is arranged on a holding member made of an insulating material. And a non-formation region that is a region of the substrate in which a circuit is not formed and a holding member in a non-arrangement region that is a region of the holding member in which the substrate is not arranged in a plan view with respect to the surface of the substrate The cover that is in contact with at least the non-arrangement region of the holding member between the holding step and the cover step in which the sheet-like cover member made of an insulating material and having flexibility is arranged in a bridge A voltage is applied between the first electrode and an electrode arranging step of arranging the first electrode so as to sandwich the member, and the second electrode arranged on the opposite side of the holding member from the side on which the substrate is arranged. Application process to be applied and arrangement Characterized in that it comprises a said first electrode and separating step of separating from the cover member.

これによれば、保持部材の非配置領域と当接しているカバー部材の部分と保持部材との間で静電吸着による保持力を発生させることができ、当該保持力を用いてカバー部材が基板の非形成領域を保持部材に押しつけて基板を保持することができる。従って、基板の回路が形成されている形成領域に実装されている電子部品が放電により破損したり、基板の保持力が低下したりする不具合を回避した状態で、基板を部品実装機に供することが可能となる。   According to this, it is possible to generate a holding force due to electrostatic attraction between the portion of the cover member that is in contact with the non-arranged region of the holding member and the holding member, and the cover member is used as a substrate by using the holding force. The non-formed area can be pressed against the holding member to hold the substrate. Therefore, the board should be provided to the component mounting machine in a state where the electronic components mounted in the formation area where the circuit of the board is formed are damaged due to discharge or the holding power of the board is reduced. Is possible.

また、上記目的を達成するために、本願発明に係る基板保持具は、回路形成装置に供される基板を保持する基板保持具であって、絶縁性材料からなり基板が当接状態で配置される保持部材と、前記保持部材に対して基板が配置される側とは反対側に配置される導電性材料からなる第二電極と、基板に対して平面視で、基板の回路が形成されない領域である非形成領域と前記基板が配置されていない前記保持部材の領域である非配置領域の前記保持部材との間に架橋状に配置される絶縁性材料からなり柔軟性を有するシート状のカバー部材とを備えることを特徴とする。   In order to achieve the above object, a substrate holder according to the present invention is a substrate holder for holding a substrate to be used in a circuit forming apparatus, and is made of an insulating material and arranged in a contact state. A holding member, a second electrode made of a conductive material disposed on a side opposite to the side on which the substrate is disposed with respect to the retaining member, and a region in which a circuit of the substrate is not formed in plan view with respect to the substrate And a flexible sheet-like cover made of an insulating material arranged in a bridging manner between the non-formation region and the holding member in the non-arrangement region where the substrate is not arranged. And a member.

これによれば、保持部材の非配置領域と当接しているカバー部材の部分と保持部材との間で静電吸着による保持力を発生させることができ、当該保持力を用いてカバー部材が基板の非形成領域を保持部材に押しつけて基板を保持することができる。従って、放電により電子部品が破損したり、保持力が低下したりする不具合を回避した状態で、基板を部品実装機に供することが可能となる。   According to this, it is possible to generate a holding force due to electrostatic attraction between the portion of the cover member that is in contact with the non-arranged region of the holding member and the holding member, and the cover member is used as a substrate by using the holding force. The non-formed area can be pressed against the holding member to hold the substrate. Therefore, it is possible to provide the substrate to the component mounting machine in a state in which the problem that the electronic component is damaged or the holding force is reduced due to the discharge is avoided.

前記カバー部材は、前記基板の非形成領域である周縁部に対応する環形状であってもかまわない。   The cover member may have an annular shape corresponding to a peripheral portion that is a non-formation region of the substrate.

これによれば、基板の周縁部全体を保持部材に押しつけた状態で保持することができる。安定した状態で基板を保持することが可能となる。   According to this, the whole peripheral part of a board | substrate can be hold | maintained in the state pressed against the holding member. The substrate can be held in a stable state.

なお、前記回路形成方法が含む各処理をコンピュータに実行させるためのプログラムを実施することも本願発明の実施に該当する。無論、そのプログラムが記録された記録媒体を実施することも本願発明の実施に該当する。   It should be noted that executing a program for causing a computer to execute each process included in the circuit forming method also corresponds to the implementation of the present invention. Of course, implementing the recording medium in which the program is recorded also corresponds to the implementation of the present invention.

本願発明によれば、基板に電子部品を実装などして回路を形成する際の放電による電子部品の損傷などの不具合を回避しつつ、静電吸着を利用して可撓性のある基板を保持部材に保持させることが可能となる。   According to the present invention, a flexible substrate is held using electrostatic adsorption while avoiding problems such as damage to the electronic component due to electric discharge when a circuit is formed by mounting the electronic component on the substrate. The member can be held.

図1は、回路形成システムを模式的に示す図である。FIG. 1 is a diagram schematically showing a circuit forming system. 図2は、基板保持具に基板を保持させる基板保持装置を示す斜視図である。FIG. 2 is a perspective view showing a substrate holding device for holding the substrate on the substrate holder. 図3は、基板保持装置の一部を示す断面図である。FIG. 3 is a cross-sectional view showing a part of the substrate holding device. 図4は、基板を示す平面図である。FIG. 4 is a plan view showing the substrate. 図5は、第一電極を示す上面図である。FIG. 5 is a top view showing the first electrode. 図6は、カバー部材を示す上面図である。FIG. 6 is a top view showing the cover member. 図7は、保持部材に基板を載置した状態を示す斜視図である。FIG. 7 is a perspective view showing a state where the substrate is placed on the holding member. 図8は、カバー部材を載置した状態を示す斜視図である。FIG. 8 is a perspective view showing a state where the cover member is placed. 図9は、第一電極を載置した状態を示す斜視図である。FIG. 9 is a perspective view showing a state where the first electrode is placed. 図10は、帯電電源を接続した状態を示す斜視図である。FIG. 10 is a perspective view showing a state in which a charging power source is connected. 図11は、別態様の基板保持装置の一部を示す断面図である。FIG. 11 is a cross-sectional view showing a part of another embodiment of the substrate holding apparatus. 図12は、別態様の基板保持装置において、第一電極とカバー部材とを密着させた状態の一部を示す断面図である。FIG. 12 is a cross-sectional view showing a part of a state in which the first electrode and the cover member are in close contact with each other in the substrate holding apparatus according to another aspect. 図13は、支持部材に支持される基板保持装置を示す斜視図である。FIG. 13 is a perspective view showing the substrate holding device supported by the support member.

次に、本願発明に係る回路形成方法、基板保持方法、および、基板保持具の実施の形態について、図面を参照しつつ説明する。なお、以下の実施の形態は、本願発明に係る回路形成方法、基板保持方法、および、基板保持具の一例を示したものに過ぎない。従って本願発明は、以下の実施の形態を参考に請求の範囲の文言によって範囲が画定されるものであり、以下の実施の形態のみに限定されるものではない。   Next, embodiments of a circuit forming method, a substrate holding method, and a substrate holder according to the present invention will be described with reference to the drawings. The following embodiments are merely examples of a circuit forming method, a substrate holding method, and a substrate holder according to the present invention. Accordingly, the scope of the present invention is defined by the wording of the claims with reference to the following embodiments, and is not limited to the following embodiments.

図1は、回路形成システムを模式的に示す図である。   FIG. 1 is a diagram schematically showing a circuit forming system.

同図に示す回路形成システム300は、基板保持具100に保持された基板200に部品201を実装して電子回路を形成するシステムである。本実施の形態の場合、回路形成システム300は、インラインで配置される複数の各種部品実装装置(302〜304)と、これらの間で基板200を基板保持具100と共に搬送するコンベア301とを備えている。また、回路形成システム300は、部品実装装置として、基板200の表面にクリーム半田のパターンを印刷する印刷装置302と、基板200に各種部品201を装着する部品実装機303(マウンター)と、加熱により基板200上のクリーム半田を溶融させて部品201を半田付けするリフロー炉304とを備えている。   A circuit forming system 300 shown in the figure is a system for forming an electronic circuit by mounting a component 201 on a substrate 200 held by a substrate holder 100. In the case of the present embodiment, the circuit forming system 300 includes a plurality of various component mounting apparatuses (302 to 304) arranged inline, and a conveyor 301 that conveys the substrate 200 together with the substrate holder 100 therebetween. ing. In addition, the circuit forming system 300 includes a printing device 302 that prints a cream solder pattern on the surface of the substrate 200, a component mounter 303 (mounter) that mounts various components 201 on the substrate 200, and a component mounting device. And a reflow furnace 304 for melting the cream solder on the substrate 200 and soldering the component 201.

図2は、基板保持具に基板を保持させる基板保持装置を示す斜視図である。   FIG. 2 is a perspective view showing a substrate holding device for holding the substrate on the substrate holder.

図3は、基板保持装置の一部を示す断面図である。   FIG. 3 is a cross-sectional view showing a part of the substrate holding device.

これらの図に示すように、基板保持装置110は、基板保持具100に基板200を保持させるための装置であって、第一電極111と、帯電電源112とを備えている。   As shown in these drawings, the substrate holding device 110 is a device for holding the substrate 200 on the substrate holder 100 and includes a first electrode 111 and a charging power source 112.

第一電極111は、保持部材101の非配置領域と当接しているカバー部材103の部分に対して保持部材101とは反対側から当接状態で配置される導電性の部材である。本実施の形態の場合、第一電極111は、基板200の外側を取り囲む矩形の環形状となっている。   The first electrode 111 is a conductive member that is disposed in contact with the portion of the cover member 103 that is in contact with the non-arranged region of the holding member 101 from the side opposite to the holding member 101. In the case of the present embodiment, the first electrode 111 has a rectangular ring shape that surrounds the outside of the substrate 200.

なお、第一電極111は、基板200の種々の形状に対応しうる単純な環形状ばかりでなく、保持対象である基板200の形状に対応した任意の形状を採用することができる。例えば、図2、図4に示す基板200のように、一つの基板200に部品201が実装されて回路が形成される領域である形成領域Bが分離して複数箇所存在するようないわゆるマルチ基板のような構成の場合、本実施の形態では説明を容易にするために例えば2箇所存在するような場合を例示する、第一電極111は、図5に示すように、基板200を囲う矩形の枠部の他に、二つの形成領域Bの間を通り、基板200を横断(縦断)するような部分を一体、または、別体で備えてもよい。   The first electrode 111 can adopt not only a simple ring shape that can correspond to various shapes of the substrate 200 but also any shape corresponding to the shape of the substrate 200 to be held. For example, as in the substrate 200 shown in FIGS. 2 and 4, a so-called multi-substrate in which a plurality of formation regions B, which are regions in which components 201 are mounted on one substrate 200 and a circuit is formed, are separated. In the case of such a configuration, in the present embodiment, for ease of explanation, for example, the case where there are two places is illustrated. The first electrode 111 is a rectangular shape surrounding the substrate 200 as shown in FIG. In addition to the frame portion, a portion that passes between the two formation regions B and crosses (vertically cuts) the substrate 200 may be provided integrally or separately.

なお、カバー部材103は、マルチ基板のブレイクライン上に沿って基板200の非形成領域を押さえるものであっても良い。   In addition, the cover member 103 may hold down the non-formation area | region of the board | substrate 200 along the break line of a multi board | substrate.

また、第一電極111は、図11に示すような、保持部材101に配置された基板200を押さえるカバー部材103の全体を覆う柔軟性、かつ、導電性を有するシート状(メッシュ状含む)の部材であっても良い。また、第一電極111は、枠体113によりしわのない状態で保持されても良い。そして、図12に示すように、枠体113を保持部材101に対して押しつけることで、第一電極111は、カバー部材103に沿って変形する。ここで、基板200と第一電極111とは、カバー部材103の厚さだけ距離が離れているため、第一電極111に電圧が印加された場合でも、基板200が帯電することを回避できる。   Moreover, the 1st electrode 111 is the sheet | seat form (including mesh shape) which has the softness | flexibility and electroconductivity which cover the whole cover member 103 which hold | suppresses the board | substrate 200 arrange | positioned at the holding member 101 as shown in FIG. It may be a member. The first electrode 111 may be held by the frame body 113 without wrinkles. Then, as shown in FIG. 12, the first electrode 111 is deformed along the cover member 103 by pressing the frame body 113 against the holding member 101. Here, since the substrate 200 and the first electrode 111 are separated from each other by the thickness of the cover member 103, the substrate 200 can be prevented from being charged even when a voltage is applied to the first electrode 111.

帯電電源112は、保持部材101の非配置領域に対して直接接しているカバー部材103を挟むように配置される第一電極111と第二電極102(後述)に対して、その間に直流電圧を印加することのできる電源装置である。例えば帯電電源112は、200v以上、3000v以下の範囲から選定される電圧を固定的、または、可変的に印加できる電源装置が好ましい。   The charging power source 112 applies a DC voltage between the first electrode 111 and the second electrode 102 (described later) disposed so as to sandwich the cover member 103 that is in direct contact with the non-arranged region of the holding member 101. It is a power supply device that can be applied. For example, the charging power supply 112 is preferably a power supply device that can apply a voltage selected from a range of 200 v or more and 3000 v or less in a fixed or variable manner.

なお、基板保持装置110は、コンベア301で搬送される基板保持具100に対して、第一電極111を近接させ、また、離隔させることができる移動装置などを備え、自動的に基板200を基板保持具100に保持させるものでもかまわない。   The substrate holding device 110 includes a moving device that can bring the first electrode 111 close to and away from the substrate holder 100 conveyed by the conveyor 301, and automatically transfers the substrate 200 to the substrate. What hold | maintains to the holder 100 may be used.

基板保持具100は、部品実装装置(302〜304)に供される基板200を保持する治具であって、保持部材101と、第二電極102と、カバー部材103とを備えている。   The substrate holder 100 is a jig for holding the substrate 200 used in the component mounting apparatuses (302 to 304), and includes a holding member 101, a second electrode 102, and a cover member 103.

保持部材101は、絶縁性材料からなり当接状態で配置される基板200が誘電分極が可能な部材である。本実施の形態の場合、保持部材101は、平板形状であり、第二電極102を内包している。   The holding member 101 is a member that can be dielectrically polarized by the substrate 200 made of an insulating material and disposed in a contact state. In the case of the present embodiment, the holding member 101 has a flat plate shape and includes the second electrode 102.

なお、本実施の形態の場合、保持部材101の基板200を載置する載置面は平面であるが、保持部材101における基板200の位置を定めるための位置決め部を設けてもかまわない。位置決め部としては、保持部材101の表面に対して基板200の形状に窪ませたものや、基板200の隅部に当接する突起(ピン)や、基準のマークやラインを設けたものなどを例示できる。   In the present embodiment, the mounting surface on which the substrate 200 of the holding member 101 is mounted is a flat surface, but a positioning portion for determining the position of the substrate 200 on the holding member 101 may be provided. Examples of the positioning portion include a portion that is recessed in the shape of the substrate 200 with respect to the surface of the holding member 101, a protrusion (pin) that contacts a corner portion of the substrate 200, a reference mark or a line provided, and the like. it can.

なお、基板200の保持部材101への設置性や位置決め性を高めるため、基板200と保持部材101との間に液体(例えば水やアルコールなどの溶剤、その他の基板200や保持部材101に損傷を与えない液体)や、ゾルやゲルなどを配置してもかまわない。   In addition, in order to improve the installation property and positioning property of the substrate 200 to the holding member 101, liquid (for example, a solvent such as water or alcohol, or other substrate 200 or the holding member 101 is damaged between the substrate 200 and the holding member 101. Liquid that is not applied) or sol or gel may be disposed.

また、保持部材101を構成する材料は、誘電分極が可能な絶縁性の材料であれば特に限定されるものではないが、リフロー炉304を通過させるなど加熱される必要がある場合、耐熱性(例えば、150℃以上の耐熱性)を備える材料が好ましい。例えば、保持部材101は、ポリイミドで構成されるものが好ましい。   In addition, the material constituting the holding member 101 is not particularly limited as long as it is an insulating material capable of dielectric polarization. However, if the material needs to be heated such as passing through a reflow furnace 304, For example, a material having a heat resistance of 150 ° C. or higher is preferable. For example, the holding member 101 is preferably made of polyimide.

第二電極102は、保持部材101の基板200が配置される側と反対側に配置される導電性材料からなる部材である。   The second electrode 102 is a member made of a conductive material disposed on the side of the holding member 101 opposite to the side on which the substrate 200 is disposed.

本実施の形態の場合、第二電極102は、保持部材101の載置面のほぼ全体に広がって配置される平板形状の電極であり、全体が保持部材101に覆われている。なお、第二電極102は、帯電電源112と接続するための端子部121を備えている。端子部121は、保持部材101を貫通した状態で配置されている。   In the case of the present embodiment, the second electrode 102 is a plate-like electrode that is disposed so as to spread over substantially the entire mounting surface of the holding member 101, and is entirely covered with the holding member 101. Note that the second electrode 102 includes a terminal portion 121 for connecting to the charging power source 112. The terminal part 121 is arranged in a state of penetrating the holding member 101.

カバー部材103は、基板200の面に対して平面視で、部品201が実装されず回路が形成されない基板200の領域である非形成領域A(図4参照)と保持部材101との間に架橋状に配置される絶縁性材料からなり柔軟性を有するシート状の部材である。   The cover member 103 is bridged between the holding member 101 and the non-formation region A (see FIG. 4), which is a region of the substrate 200 where the component 201 is not mounted and a circuit is not formed, in a plan view with respect to the surface of the substrate 200. It is a sheet-like member made of an insulating material and having flexibility.

ここで、基板200の面に対して平面視で、回路が形成されない領域とは、基板保持具100が基板200を保持している間においては回路が形成されないことを意味している。従って、基板保持具100に保持されていない状態の基板200の非形成領域Aに回路が形成されても当該領域は、基板200の面に対して平面視で、回路が形成されない非形成領域Aである。   Here, the region in which no circuit is formed in plan view with respect to the surface of the substrate 200 means that no circuit is formed while the substrate holder 100 is holding the substrate 200. Therefore, even if a circuit is formed in the non-formation region A of the substrate 200 that is not held by the substrate holder 100, the region is a non-formation region A in which no circuit is formed in plan view with respect to the surface of the substrate 200. It is.

本実施の形態の場合、カバー部材103は、保持対象である基板200の回路が形成される領域である形成領域Bに対応した基板200の保持形状が採用されている。本実施の形態で示される基板200は、一つの基板200に形成領域Bが分離して2箇所存在するものであるため、カバー部材103は、図6に示すように、基板200を囲う矩形の枠部の他に、二つの形成領域Bの間を通り、基板200を横断(縦断)するような部分を備える形状となっている。つまり、カバー部材103は、矩形のシートに二つの矩形の孔が並んで配置されている形状となっている。   In the case of the present embodiment, the cover member 103 adopts the holding shape of the substrate 200 corresponding to the formation region B which is a region where the circuit of the substrate 200 to be held is formed. Since the substrate 200 shown in this embodiment has two formation regions B on one substrate 200, the cover member 103 has a rectangular shape surrounding the substrate 200 as shown in FIG. In addition to the frame portion, it has a shape including a portion that passes between the two formation regions B and traverses (vertically cuts) the substrate 200. That is, the cover member 103 has a shape in which two rectangular holes are arranged side by side on a rectangular sheet.

当該形状とすることにより、カバー部材103が基板200を保持部材101に強く押しつけることができ、基板保持具100の基板200を保持する力を高めることができるため好ましい。   This shape is preferable because the cover member 103 can strongly press the substrate 200 against the holding member 101 and the force for holding the substrate 200 of the substrate holder 100 can be increased.

なお、カバー部材103の形状は、特に限定されるものでは無く、基板200の種々の形状に対応しうる単純な環形状や、帯状などでもかまわない。また、カバー部材103の厚みは、例えば数μm〜数十μm程度でよい。   The shape of the cover member 103 is not particularly limited, and may be a simple ring shape that can correspond to various shapes of the substrate 200, a belt shape, or the like. Further, the thickness of the cover member 103 may be about several μm to several tens of μm, for example.

次に、回路形成方法、および、基板保持方法を図面に基づき説明する。   Next, a circuit forming method and a substrate holding method will be described with reference to the drawings.

図7に示すように、保持部材101の載置面の上に基板200を乗せて配置する(基板配置工程)。この際、保持部材101に位置決め部があれば、位置決め部に合わせて基板200を配置する。   As shown in FIG. 7, the substrate 200 is placed on the placement surface of the holding member 101 and placed (substrate placement step). At this time, if the holding member 101 has a positioning portion, the substrate 200 is arranged in accordance with the positioning portion.

次に、図8に示すように、基板200の非形成領域Aと保持部材101との間に、カバー部材103を架橋状に配置する(カバー工程)。本実施の形態の場合、基板200の周縁部をカバー部材103で押さえ、かつ、基板200の外周に対応する保持部材101の載置面の部分もカバー部材103で覆う。さらに、基板200が備える二つの形成領域Bの間もカバー部材103で押さえている。   Next, as shown in FIG. 8, the cover member 103 is disposed in a bridging manner between the non-formation region A of the substrate 200 and the holding member 101 (cover process). In the present embodiment, the periphery of the substrate 200 is pressed by the cover member 103, and the portion of the mounting surface of the holding member 101 corresponding to the outer periphery of the substrate 200 is also covered by the cover member 103. Further, the cover member 103 holds down between the two formation regions B included in the substrate 200.

次に、図9に示すように、保持部材101との間でカバー部材103の一部を挟み込むように第一電極111を配置する(電極配置工程)。本実施の形態の場合、カバー部材103の上に第一電極111を載置しているが、若干のカバー部材103を保持部材101に押しつける押圧力を加えてもかまわない。   Next, as shown in FIG. 9, the first electrode 111 is arranged so as to sandwich a part of the cover member 103 with the holding member 101 (electrode arrangement step). In the present embodiment, the first electrode 111 is placed on the cover member 103, but a pressing force that presses the cover member 103 against the holding member 101 may be applied.

次に、図10に示すように、第二電極102(図10中に図示せず)と第一電極111との間に帯電電源112により電圧を印加する(印加工程)。   Next, as shown in FIG. 10, a voltage is applied by the charging power source 112 between the second electrode 102 (not shown in FIG. 10) and the first electrode 111 (application process).

以上の行程により、保持部材101とカバー部材103とが誘電分極し、保持部材101とカバー部材103とが静電吸着する。そして、当該静電吸着の力により、カバー部材103は基板200を保持部材101に押しつけ、基板200は、基板保持具100に保持される。   Through the above process, the holding member 101 and the cover member 103 are dielectrically polarized, and the holding member 101 and the cover member 103 are electrostatically adsorbed. The cover member 103 presses the substrate 200 against the holding member 101 by the electrostatic attraction force, and the substrate 200 is held by the substrate holder 100.

次に、帯電電源112による電圧の印加を解除し、カバー部材103上に配置された第一電極111をカバー部材103から引き離す(分離工程)。外観的には図8に示す状態となり、基板200が基板保持具100に保持される(基板保持方法)。   Next, the application of voltage by the charging power source 112 is canceled, and the first electrode 111 disposed on the cover member 103 is separated from the cover member 103 (separation process). The appearance is as shown in FIG. 8, and the substrate 200 is held by the substrate holder 100 (substrate holding method).

当該状態においても保持部材101とカバー部材103とは誘電分極により静電吸着した状態が維持されており、基板200は、基板保持具100に保持された状態が維持される。従って、基板保持具100とともに基板200をコンベア301で搬送することが可能となる。   Even in this state, the holding member 101 and the cover member 103 are maintained in a state of being electrostatically attracted by dielectric polarization, and the substrate 200 is maintained in the state of being held by the substrate holder 100. Therefore, the substrate 200 can be transported by the conveyor 301 together with the substrate holder 100.

次に、基板保持具100に保持された基板200の表面に印刷装置302によりクリーム半田のパターンを印刷し、部品201を部品実装機303により装着し、リフロー炉304により基板保持具100に保持された基板200を加熱して半田付け等を行い、回路を形成する(回路形成工程)。   Next, a cream solder pattern is printed on the surface of the substrate 200 held by the substrate holder 100 by the printing device 302, the component 201 is mounted by the component mounter 303, and is held by the substrate holder 100 by the reflow furnace 304. The substrate 200 is heated and soldered to form a circuit (circuit forming step).

回路形成工程の後などに、基板保持具100の保持部材101に保持された基板200を下記方法により取り外す(基板取り出し工程)。カバー部材103と保持部材101に誘電分極した電子を解放、あるいは、中和する。電子の解放、分極の中和の具体的な方法としては、第二電極102をGNDに接地する方法、逆電圧を印加する方法、あるいは、イオナイザー照射する方法などがある。これにより、保持部材101よりカバー部材103を取り外すことができ、基板200の取り出しが可能となる。   After the circuit formation step, the substrate 200 held by the holding member 101 of the substrate holder 100 is removed by the following method (substrate removal step). Electrons that are dielectrically polarized in the cover member 103 and the holding member 101 are released or neutralized. Specific methods for releasing electrons and neutralizing polarization include a method in which the second electrode 102 is grounded to GND, a method in which a reverse voltage is applied, and a method in which ionizer irradiation is performed. Thereby, the cover member 103 can be removed from the holding member 101, and the substrate 200 can be taken out.

以上のように、基板保持具100は、基板200自体を帯電させるものでは無いため、電子部品201を装着する際の静電気による電子部品201の損傷を回避することができ、基板200と他の装置との接触等に起因した放電などによる基板200の保持力の低下を回避することができる。   As described above, since the substrate holder 100 does not charge the substrate 200 itself, the electronic component 201 can be prevented from being damaged due to static electricity when the electronic component 201 is mounted. It is possible to avoid a decrease in the holding force of the substrate 200 due to discharge caused by contact with the substrate.

また、基板保持具100は、基板200の上方にカバー部材103を配置するだけで基板200を保持することができる。従って、機械的に基板200を保持した場合に比べてクリーム半田を印刷をする際に邪魔にならず、部品201を基板200表面に装着する際に邪魔になりにくい。さらに、接着剤などで基板200を保持するものでは無いため、接着剤の劣化などによる保持力の低下はない。また、真空吸着のように常に真空系と接続する必要が無いため、基板200を自由に搬送することが可能である。   Further, the substrate holder 100 can hold the substrate 200 only by disposing the cover member 103 above the substrate 200. Therefore, compared with the case where the substrate 200 is mechanically held, it does not get in the way when printing the cream solder, and is less likely to get in the way when the component 201 is mounted on the surface of the substrate 200. Further, since the substrate 200 is not held by an adhesive or the like, there is no decrease in holding force due to deterioration of the adhesive or the like. Further, since it is not always necessary to connect to a vacuum system as in vacuum suction, the substrate 200 can be freely transported.

なお、本願発明は、上記実施の形態に限定されるものではない。例えば、本明細書において記載した構成要素を任意に組み合わせて、また、構成要素のいくつかを除外して実現される別の実施の形態を本願発明の実施の形態としてもよい。また、上記実施の形態に対して本願発明の主旨、すなわち、請求の範囲に記載される文言が示す意味を逸脱しない範囲で当業者が思いつく各種変形を施して得られる変形例も本願発明に含まれる。   In addition, this invention is not limited to the said embodiment. For example, another embodiment realized by arbitrarily combining the components described in this specification and excluding some of the components may be used as an embodiment of the present invention. In addition, the present invention includes modifications obtained by making various modifications conceivable by those skilled in the art without departing from the gist of the present invention, that is, the meaning described in the claims. It is.

上記実施の形態では回路形成方法、および、基板保持具100が部品201の実装に適用される場合を例示したが、これに限定されるものではない。例えば、スクリーン印刷を使った導電性パターンの形成や、絶縁膜の形成なども回路形成の一つであって、回路形成方法、および、基板保持具100を採用することができる。   In the above embodiment, the circuit forming method and the case where the substrate holder 100 is applied to the mounting of the component 201 are exemplified, but the present invention is not limited to this. For example, formation of a conductive pattern using screen printing, formation of an insulating film, or the like is one of circuit formation, and the circuit formation method and the substrate holder 100 can be employed.

また、第二電極102は、保持部材101の基板200が保持される側とは反対側に配置されている構成であれば良く、必ずしも保持部材101に包まれた一体型の状態である必要はなく、保持部材101と分離可能な構成(別体)であってもかまわない。   In addition, the second electrode 102 may be configured to be disposed on the side of the holding member 101 opposite to the side on which the substrate 200 is held, and is not necessarily in an integrated state wrapped in the holding member 101. Alternatively, a configuration (separate body) separable from the holding member 101 may be used.

また、基板200を保持して搬送される基板保持具100の剛性が低く、搬送に支障を来す場合には、図13に示すように、保持部材101をさらに支持するトレーなどの支持部材119で支持しつつ搬送してもかまわない。   Further, when the substrate holder 100 transported while holding the substrate 200 is low in rigidity and hinders transportation, a support member 119 such as a tray that further supports the holding member 101 as shown in FIG. It may be transported while being supported.

また、分離工程にて、第一電極111をカバー部材103から引き離す操作と同様に、保持部材101から第二電極102を引き離してもかまわない。   In the separation step, the second electrode 102 may be separated from the holding member 101 in the same manner as the operation of separating the first electrode 111 from the cover member 103.

また、一つの基板保持具100に一枚の基板200を保持させていたが、これに限定されず、一つの基板保持具100に複数枚の基板200を保持させるものでもかまわない。   In addition, although one substrate 200 is held by one substrate holder 100, the present invention is not limited to this, and a plurality of substrates 200 may be held by one substrate holder 100.

本願発明は、基板に部品を実装する部品実装や、絶縁膜の形成など回路形成システムに利用可能である。   The present invention can be used in circuit forming systems such as component mounting for mounting components on a substrate and formation of an insulating film.

100 基板保持具
101 保持部材
102 第二電極
103 カバー部材
110 基板保持装置
111 第一電極
112 帯電電源
121 端子部
200 基板
201 部品
300 回路形成システム
301 コンベア
302 印刷装置
303 部品実装機
304 リフロー炉
DESCRIPTION OF SYMBOLS 100 Substrate holder 101 Holding member 102 Second electrode 103 Cover member 110 Substrate holding device 111 First electrode 112 Charging power supply 121 Terminal unit 200 Substrate 201 Component 300 Circuit forming system 301 Conveyor 302 Printing device 303 Component mounting machine 304 Reflow furnace

Claims (5)

可撓性のある基板に回路を形成する回路形成方法であって、
絶縁性材料からなる保持部材の上に基板を配置する基板配置工程と、
前記基板の面に対して平面視で、回路が形成されない前記基板の領域である非形成領域と前記基板が配置されていない前記保持部材の領域である非配置領域の前記保持部材との間に、絶縁性材料からなり柔軟性を有するシート状のカバー部材を架橋状に配置するカバー工程と、
前記保持部材との間で、少なくとも前記保持部材の非配置領域に当接された前記カバー部材を挟み込むように第一電極を配置する電極配置工程と、
前記保持部材に対して基板が配置される側とは反対側に配置される第二電極と前記第一電極との間に電圧を印加する印加工程と、
配置された前記第一電極を前記カバー部材から引き離す分離工程と
を含む回路形成方法。
A circuit forming method for forming a circuit on a flexible substrate,
A substrate placement step of placing a substrate on a holding member made of an insulating material;
In plan view with respect to the surface of the substrate, between the non-formation region which is a region of the substrate where no circuit is formed and the holding member in the non-arrangement region which is a region of the holding member where the substrate is not arranged A cover step of arranging a sheet-like cover member made of an insulating material and having flexibility, in a cross-linked manner;
An electrode arrangement step of arranging a first electrode so as to sandwich at least the cover member in contact with the non-arrangement region of the holding member between the holding member;
An application step of applying a voltage between the first electrode and the second electrode disposed on the side opposite to the side on which the substrate is disposed with respect to the holding member;
A circuit forming method including a separating step of pulling the arranged first electrode away from the cover member.
前記カバー工程では、前記基板の非形成領域である周縁部を前記カバー部材で押さえ、
前記電極配置工程では、前記基板を囲むように前記第一電極を配置する
請求項1に記載の回路形成方法。
In the cover step, a peripheral portion which is a non-formation region of the substrate is pressed by the cover member,
The circuit forming method according to claim 1, wherein in the electrode placement step, the first electrode is placed so as to surround the substrate.
可撓性のある基板を固定する基板保持方法であって、
絶縁性材料からなる保持部材の上に基板を配置する基板配置工程と、
前記基板の面に対して平面視で、回路が形成されない前記基板の領域である非形成領域と前記基板が配置されていない前記保持部材の領域である非配置領域の前記保持部材との間に、絶縁性材料からなり柔軟性を有するシート状のカバー部材を架橋状に配置するカバー工程と、
前記保持部材との間で、少なくとも前記保持部材の非配置領域に当接された前記カバー部材を挟み込むように第一電極を配置する電極配置工程と、
前記保持部材に対して基板が配置される側とは反対側に配置される第二電極と前記第一電極との間に電圧を印加する印加工程と、
配置された前記第一電極を前記カバー部材から引き離す分離工程と
を含む基板保持方法。
A substrate holding method for fixing a flexible substrate,
A substrate placement step of placing a substrate on a holding member made of an insulating material;
In plan view with respect to the surface of the substrate, between the non-formation region which is a region of the substrate where no circuit is formed and the holding member in the non-arrangement region which is a region of the holding member where the substrate is not arranged A cover step of arranging a sheet-like cover member made of an insulating material and having flexibility, in a cross-linked manner;
An electrode arrangement step of arranging a first electrode so as to sandwich at least the cover member in contact with the non-arrangement region of the holding member between the holding member;
An application step of applying a voltage between the first electrode and the second electrode disposed on the side opposite to the side on which the substrate is disposed with respect to the holding member;
A separation step of separating the first electrode arranged from the cover member.
部品実装装置に供される基板を保持する基板保持具であって、
絶縁性材料からなり基板が当接状態で配置される保持部材と、
前記保持部材に対して基板が配置される側とは反対側に配置される導電性材料からなる第二電極と、
基板に対して平面視で、基板の回路が形成されない領域である非形成領域と前記基板が配置されていない前記保持部材の領域である非配置領域の前記保持部材との間に架橋状に配置される絶縁性材料からなり柔軟性を有するシート状のカバー部材と
を備える基板保持具。
A board holder for holding a board to be used in a component mounting apparatus,
A holding member made of an insulating material and disposed in contact with the substrate;
A second electrode made of a conductive material disposed on the side opposite to the side on which the substrate is disposed with respect to the holding member;
In a plan view with respect to the substrate, the substrate is arranged in a bridging manner between a non-formation region where a circuit of the substrate is not formed and a holding member in a non-arrangement region where the substrate is not arranged. And a sheet-like cover member made of an insulating material and having flexibility.
前記カバー部材は、前記基板の非形成領域である周縁部に対応する環形状である
請求項4に記載の基板保持具。
The substrate holder according to claim 4, wherein the cover member has a ring shape corresponding to a peripheral portion which is a non-formation region of the substrate.
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