JP6133319B2 - 気相からの堆積によって、かつ液状のシロキサン供給材料を霧化することによる合成石英ガラスの製造法 - Google Patents

気相からの堆積によって、かつ液状のシロキサン供給材料を霧化することによる合成石英ガラスの製造法 Download PDF

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Publication number
JP6133319B2
JP6133319B2 JP2014542831A JP2014542831A JP6133319B2 JP 6133319 B2 JP6133319 B2 JP 6133319B2 JP 2014542831 A JP2014542831 A JP 2014542831A JP 2014542831 A JP2014542831 A JP 2014542831A JP 6133319 B2 JP6133319 B2 JP 6133319B2
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Prior art keywords
sio
feed
liquid
feedstock
feed material
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Japanese (ja)
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JP2015500785A (ja
JP2015500785A5 (de
Inventor
ハインツ　ファビアン
ファビアン ハインツ
レーパー ユルゲン
レーパー ユルゲン
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Heraeus Quarzglas GmbH and Co KG
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Heraeus Quarzglas GmbH and Co KG
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    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B20/00—Processes specially adapted for the production of quartz or fused silica articles, not otherwise provided for
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01—Manufacture of glass fibres or filaments
    • C03B37/012—Manufacture of preforms for drawing fibres or filaments
    • C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
    • C03B37/01413—Reactant delivery systems
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B19/00—Other methods of shaping glass
    • C03B19/14—Other methods of shaping glass by gas- or vapour- phase reaction processes
    • C03B19/1415—Reactant delivery systems
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01—Manufacture of glass fibres or filaments
    • C03B37/011—Manufacture of glass fibres or filaments starting from a liquid phase reaction process, e.g. through a gel phase
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/30—For glass precursor of non-standard type, e.g. solid SiH3F
    • C03B2207/32—Non-halide
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/30—For glass precursor of non-standard type, e.g. solid SiH3F
    • C03B2207/34—Liquid, e.g. mist or aerosol
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/80—Feeding the burner or the burner-heated deposition site
    • C03B2207/85—Feeding the burner or the burner-heated deposition site with vapour generated from liquid glass precursors, e.g. directly by heating the liquid

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Manufacturing & Machinery (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Life Sciences & Earth Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Dispersion Chemistry (AREA)
  • Glass Melting And Manufacturing (AREA)
  • Silicon Compounds (AREA)
JP2014542831A 2011-11-25 2012-11-22 気相からの堆積によって、かつ液状のシロキサン供給材料を霧化することによる合成石英ガラスの製造法 Active JP6133319B2 (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
DE102011119339.5 2011-11-25
DE102011119339A DE102011119339A1 (de) 2011-11-25 2011-11-25 Zerstäubungsverfahren zur Herstellung von synthetischem Quarzglas
US201161569163P 2011-12-09 2011-12-09
US61/569,163 2011-12-09
PCT/EP2012/073345 WO2013076195A1 (de) 2011-11-25 2012-11-22 Verfahren zur herstellung von synthetischem quarzglas durch abscheidung aus der dampfphase und mittels zerstäubung des flüssigen siloxaneinsatzmaterials

Publications (3)

Publication Number Publication Date
JP2015500785A JP2015500785A (ja) 2015-01-08
JP2015500785A5 JP2015500785A5 (de) 2015-12-03
JP6133319B2 true JP6133319B2 (ja) 2017-05-24

Family

ID=48287834

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2014542831A Active JP6133319B2 (ja) 2011-11-25 2012-11-22 気相からの堆積によって、かつ液状のシロキサン供給材料を霧化することによる合成石英ガラスの製造法

Country Status (7)

Country Link
US (1) US8984911B2 (de)
EP (1) EP2782877B1 (de)
JP (1) JP6133319B2 (de)
KR (1) KR101625843B1 (de)
CN (1) CN103946168B (de)
DE (1) DE102011119339A1 (de)
WO (1) WO2013076195A1 (de)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102011121190A1 (de) * 2011-12-16 2013-06-20 Heraeus Quarzglas Gmbh & Co. Kg OMCTS-Verdampfungsverfahren
US10007039B2 (en) 2012-09-26 2018-06-26 8797625 Canada Inc. Multilayer optical interference filter
DE102013202256B3 (de) * 2013-02-12 2014-07-17 Heraeus Quarzglas Gmbh & Co. Kg Verfahren zur Herstellung von Titan-dotiertem synthetischen Quarzglas und dessen Verwendung
EP3424883A1 (de) * 2017-07-05 2019-01-09 Evonik Degussa GmbH Sprühverdampfung eines flüssigen rohstoffes zur herstellung von siliciumdioxid und metalloxiden
JP6793676B2 (ja) * 2018-04-02 2020-12-02 信越化学工業株式会社 光ファイバ用多孔質ガラス母材の製造装置および製造方法
CN109373196A (zh) * 2018-12-05 2019-02-22 上海正帆科技股份有限公司 一种八甲基环四硅氧烷的输送及汽化系统和方法
JP7058627B2 (ja) 2019-06-11 2022-04-22 信越化学工業株式会社 光ファイバ用多孔質ガラス母材の製造装置および製造方法
CN112028466B (zh) * 2020-09-01 2021-08-31 长飞光纤光缆股份有限公司 一种用于制备光纤预制棒的有机硅原料蒸发装置
JP7428632B2 (ja) 2020-12-14 2024-02-06 信越化学工業株式会社 多孔質ガラス母材の製造方法及び製造装置
CN115583791B (zh) * 2022-10-18 2023-12-01 长飞光纤光缆股份有限公司 一种适用于ovd工艺的d4快速气化装置

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Also Published As

Publication number Publication date
JP2015500785A (ja) 2015-01-08
US8984911B2 (en) 2015-03-24
US20130133376A1 (en) 2013-05-30
EP2782877A1 (de) 2014-10-01
KR20140098814A (ko) 2014-08-08
CN103946168A (zh) 2014-07-23
KR101625843B1 (ko) 2016-06-01
WO2013076195A1 (de) 2013-05-30
DE102011119339A1 (de) 2013-05-29
EP2782877B1 (de) 2016-05-25
CN103946168B (zh) 2017-02-22

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