JP6133218B2 - 化学機械平坦化パッドコンディショナー - Google Patents

化学機械平坦化パッドコンディショナー Download PDF

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Publication number
JP6133218B2
JP6133218B2 JP2013557810A JP2013557810A JP6133218B2 JP 6133218 B2 JP6133218 B2 JP 6133218B2 JP 2013557810 A JP2013557810 A JP 2013557810A JP 2013557810 A JP2013557810 A JP 2013557810A JP 6133218 B2 JP6133218 B2 JP 6133218B2
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Prior art keywords
protrusions
protrusion
pad conditioner
substrate
pad
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Japanese (ja)
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JP2014510645A (ja
JP2014510645A5 (enExample
Inventor
スミス、ジョセフ
ギャルピン、アンドリュー
ワーゴ、クリストファー
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Entegris Inc
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Entegris Inc
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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B53/00—Devices or means for dressing or conditioning abrasive surfaces
    • B24B53/017—Devices or means for dressing, cleaning or otherwise conditioning lapping tools
    • H10P52/00—

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Grinding-Machine Dressing And Accessory Apparatuses (AREA)
JP2013557810A 2011-03-07 2012-03-06 化学機械平坦化パッドコンディショナー Active JP6133218B2 (ja)

Applications Claiming Priority (7)

Application Number Priority Date Filing Date Title
US201161449851P 2011-03-07 2011-03-07
US61/449,851 2011-03-07
US201161506483P 2011-07-11 2011-07-11
US61/506,483 2011-07-11
US201161513294P 2011-07-29 2011-07-29
US61/513,294 2011-07-29
PCT/US2012/027916 WO2012122186A2 (en) 2011-03-07 2012-03-06 Chemical mechanical planarization pad conditioner

Publications (3)

Publication Number Publication Date
JP2014510645A JP2014510645A (ja) 2014-05-01
JP2014510645A5 JP2014510645A5 (enExample) 2015-04-23
JP6133218B2 true JP6133218B2 (ja) 2017-05-24

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JP2013557810A Active JP6133218B2 (ja) 2011-03-07 2012-03-06 化学機械平坦化パッドコンディショナー

Country Status (8)

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US (2) US9132526B2 (enExample)
EP (1) EP2684211B1 (enExample)
JP (1) JP6133218B2 (enExample)
KR (1) KR101916492B1 (enExample)
CN (1) CN103688343B (enExample)
SG (1) SG193340A1 (enExample)
TW (1) TWI592258B (enExample)
WO (1) WO2012122186A2 (enExample)

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Also Published As

Publication number Publication date
US20160074993A1 (en) 2016-03-17
EP2684211A4 (en) 2014-08-20
TWI592258B (zh) 2017-07-21
EP2684211B1 (en) 2017-01-18
KR20140036160A (ko) 2014-03-25
US9132526B2 (en) 2015-09-15
JP2014510645A (ja) 2014-05-01
EP2684211A2 (en) 2014-01-15
US20140113532A1 (en) 2014-04-24
US9616547B2 (en) 2017-04-11
WO2012122186A4 (en) 2013-01-10
KR101916492B1 (ko) 2018-11-07
WO2012122186A3 (en) 2012-11-08
SG193340A1 (en) 2013-10-30
CN103688343A (zh) 2014-03-26
CN103688343B (zh) 2016-09-07
TW201249595A (en) 2012-12-16
WO2012122186A2 (en) 2012-09-13

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