JP6131916B2 - 情報保存装置 - Google Patents

情報保存装置 Download PDF

Info

Publication number
JP6131916B2
JP6131916B2 JP2014132258A JP2014132258A JP6131916B2 JP 6131916 B2 JP6131916 B2 JP 6131916B2 JP 2014132258 A JP2014132258 A JP 2014132258A JP 2014132258 A JP2014132258 A JP 2014132258A JP 6131916 B2 JP6131916 B2 JP 6131916B2
Authority
JP
Japan
Prior art keywords
attribute
information
sub
identification mark
region
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2014132258A
Other languages
English (en)
Japanese (ja)
Other versions
JP2016012381A5 (https=
JP2016012381A (ja
Inventor
祐樹 有塚
祐樹 有塚
尚子 中田
尚子 中田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dai Nippon Printing Co Ltd
Original Assignee
Dai Nippon Printing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dai Nippon Printing Co Ltd filed Critical Dai Nippon Printing Co Ltd
Priority to JP2014132258A priority Critical patent/JP6131916B2/ja
Publication of JP2016012381A publication Critical patent/JP2016012381A/ja
Publication of JP2016012381A5 publication Critical patent/JP2016012381A5/ja
Application granted granted Critical
Publication of JP6131916B2 publication Critical patent/JP6131916B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Landscapes

  • Optical Recording Or Reproduction (AREA)
  • Manufacturing Optical Record Carriers (AREA)
  • Optical Head (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Optical Record Carriers And Manufacture Thereof (AREA)
JP2014132258A 2014-06-27 2014-06-27 情報保存装置 Expired - Fee Related JP6131916B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2014132258A JP6131916B2 (ja) 2014-06-27 2014-06-27 情報保存装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2014132258A JP6131916B2 (ja) 2014-06-27 2014-06-27 情報保存装置

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2017082094A Division JP6319497B2 (ja) 2017-04-18 2017-04-18 情報保存装置

Publications (3)

Publication Number Publication Date
JP2016012381A JP2016012381A (ja) 2016-01-21
JP2016012381A5 JP2016012381A5 (https=) 2017-04-06
JP6131916B2 true JP6131916B2 (ja) 2017-05-24

Family

ID=55229005

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2014132258A Expired - Fee Related JP6131916B2 (ja) 2014-06-27 2014-06-27 情報保存装置

Country Status (1)

Country Link
JP (1) JP6131916B2 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7133379B2 (ja) * 2018-07-20 2022-09-08 株式会社Screenホールディングス 描画装置および描画方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3149455B2 (ja) * 1990-05-25 2001-03-26 株式会社日立製作所 情報記録装置、情報再生装置及び情報記録方法
JP2952170B2 (ja) * 1994-12-16 1999-09-20 オリンパス光学工業株式会社 情報再生システム
JPH10283666A (ja) * 1997-04-08 1998-10-23 Olympus Optical Co Ltd 光演算装置及びそれを用いたキーワード検索装置
JP4333386B2 (ja) * 2004-02-04 2009-09-16 ソニー株式会社 ホログラム読出システム、及びホログラフィック・ディスク記録媒体からのデータ読出方法
WO2012032601A1 (ja) * 2010-09-07 2012-03-15 株式会社 東芝 2次元情報記録再生方法

Also Published As

Publication number Publication date
JP2016012381A (ja) 2016-01-21

Similar Documents

Publication Publication Date Title
WO2017046967A1 (ja) 情報保存装置および情報読出装置
TWI618976B (zh) 於微影製程中使圖案合格
JP6241566B1 (ja) 情報記録媒体の作成方法
JP2008112178A (ja) マスク検査装置
JP2015516568A (ja) レチクルの劣化を検出するための反射マップおよび透過マップの使用
US20100162196A1 (en) Structure and methodology for fabrication and inspection of photomasks
CN107065446B (zh) 用于产生晶片结构的光刻工艺的仿真的方法和装置
JP4095621B2 (ja) 光学画像取得装置、光学画像取得方法、及びマスク検査装置
US20170102609A1 (en) Method for repairing mask defects
CN107615384A (zh) 数据保存介质和其制造方法、数据保存用介质、数据读出装置以及数据读出方法
KR101218498B1 (ko) 노광용 마스크, 그 제조 방법 및 반도체 장치의 제조 방법
KR101962492B1 (ko) 패턴 생성 방법, 프로그램, 정보 처리 장치, 및 마스크 제조 방법
JP6628168B2 (ja) 情報記録媒体
JP6131916B2 (ja) 情報保存装置
JP6468387B2 (ja) 情報記録媒体
JP6319497B2 (ja) 情報保存装置
JP6562230B2 (ja) 情報記録媒体
JP6384570B2 (ja) 情報保存装置および情報読出装置
JP6149771B2 (ja) 情報保存装置および情報読出装置
CN101063822A (zh) 改善边界对比度的方法和系统
JP2010079305A (ja) エリアコード付きフォトマスク、およびフォトマスクの製造方法
JP4816924B2 (ja) 濃度分布マスクの製造方法
JP2005265963A (ja) フォトマスク、及び、フォトマスクのセット

Legal Events

Date Code Title Description
A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20170306

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20170306

A871 Explanation of circumstances concerning accelerated examination

Free format text: JAPANESE INTERMEDIATE CODE: A871

Effective date: 20170306

A975 Report on accelerated examination

Free format text: JAPANESE INTERMEDIATE CODE: A971005

Effective date: 20170307

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20170321

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20170403

R150 Certificate of patent or registration of utility model

Ref document number: 6131916

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

LAPS Cancellation because of no payment of annual fees