JP6113542B2 - 半導体装置 - Google Patents
半導体装置 Download PDFInfo
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- JP6113542B2 JP6113542B2 JP2013058840A JP2013058840A JP6113542B2 JP 6113542 B2 JP6113542 B2 JP 6113542B2 JP 2013058840 A JP2013058840 A JP 2013058840A JP 2013058840 A JP2013058840 A JP 2013058840A JP 6113542 B2 JP6113542 B2 JP 6113542B2
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Description
本実施形態の半導体装置は、ソース端子と、ドレイン端子と、ゲート端子と、ソース端子に接続される第1のソース、第1のドレイン、ゲート端子に接続される第1のゲートを有するノーマリーオフトランジスタと、第1のドレインに接続される第2のソース、ドレイン端子に接続される第2のドレイン、ソース端子に接続される第2のゲートを有するノーマリーオントランジスタと、を備える。そして、ノーマリーオフトランジスタのオフ時の第1のソースと第1のドレイン間の耐圧が、ノーマリーオントランジスタの第2のソースと第2のゲート間の耐圧よりも低い。
本実施形態の半導体装置は、第1のソースに接続される第1のアノードと、第1のドレインおよび第2のソースに接続される第1のカソードを有し、ツェナー電圧がノーマリーオフトランジスタのアバランシェ降伏電圧よりも低いツェナーダイオードを、さらに備える点で、第1の実施形態と異なっている。第1の実施形態と重複する内容については記述を省略する。
本実施形態の半導体装置は、第1のドレインおよび第2のソースとツェナーダイオードとの間に設けられ、第1のドレインおよび第2のソースに接続される第2のアノードと、第1のカソードに接続される第2のカソードを有するダイオードと、第1のカソードおよび第2のカソードと、第1のソースとの間に、ツェナーダイオードと並列に設けられるコンデンサを、さらに備える点で、第2の実施形態と異なっている。第2の実施形態と重複する内容については記述を省略する。
本実施形態の半導体装置は、ノーマリーオントランジスタがゲートフィールドプレート(以下GFPとも記述)を有する。その他の構成については、第1の実施形態と同様である。したがって、第1の実施形態と重複する内容については記述を省略する。
本実施形態の半導体装置は、第1のソースに接続される第3のアノードと、第1のドレインおよび第2のソースに接続される第3のカソードを有し、順方向降下電圧が、ノーマリーオフトランジスタの寄生ボディダイオードの順方向降下電圧よりも低く、第1のカソードおよび第2のカソードと、第1のソースとの間に、ツェナーダイオードと並列に設けられるショットキーバリアダイオードを、さらに備える点で第2の実施形態の半導体装置と異なる。以下、第1および第2の実施形態と重複する内容については記述を省略する。
本実施形態の半導体装置は、基板、ソースのリード線、ドレインのリード線、ゲートのリード線をさらに備える。そして、基板上に、ノーマリーオフトランジスタ、ノーマリーオントランジスタ、ツェナーダイオード、ショットキーバリアダイオードが実装される。そして、ソースのリード線側からドレインのリード線側に向けて、ショットキーバリアダイオード、ツェナーダイオード、ノーマリーオントランジスタの順に配置される。また、ソースのリード線側からドレインのリード線側に向けて、ノーマリーオフトランジスタ、ノーマリーオントランジスタの順に配置される。そして、ソースのリード線と、第3のアノードおよび第1のソースが接続され、ドレインのリード線と、第2のドレインが接続される。
本実施形態の半導体装置は、ソース端子と、ドレイン端子と、ゲート端子と、放電端子と、ソース端子に接続される第1のソース、第1のドレイン、ゲート端子に接続される第1のゲートを有するノーマリーオフトランジスタと、第1のドレインに接続される第2のソース、ドレイン端子に接続される第2のドレイン、ソース端子に接続される第2のゲートを有するノーマリーオントランジスタと、放電端子に接続される第1のアノードと、第1のドレインおよび第2のソースに接続される第1のカソードを有し、ツェナー電圧がノーマリーオントランジスタの第2のソースと第2のゲート間の耐圧よりも低く、ツェナー電圧がノーマリーオフトランジスタのアバランシェ降伏電圧よりも低いツェナーダイオードを備える。
本実施形態の半導体装置は、基板、ソースのリード線、ドレインのリード線、ゲートのリード線、ゲートのリード線に隣接する放電用のリード線を備える。そして、基板上に、ノーマリーオフトランジスタ、ノーマリーオントランジスタ、ツェナーダイオードが実装される。そして、ソースのリード線に第1のソースが接続され、ドレインのリード線に第2のドレインが接続され、ゲートのリード線に第1のゲートが接続され、放電用のリード線に第1のアノードが接続される。
本実施形態の半導体装置は、ツェナーダイオードと放電端子との間に、第1のアノードに接続される第2のアノードと、放電端子に接続される第2のカソードを有するダイオードを、さらに備えること以外は、第7の実施形態と同様である。以下、第7の実施形態と重複する内容については記述を省略する。
11 第1のソース
12 第1のドレイン
13 第1のゲート
20 ノーマリーオントランジスタ
21 第2のソース
22 第2のドレイン
23 第2のゲート
30 ツェナーダイオード
31 第1のアノード
32 第1のカソード
40 ダイオード
41 第2のアノード
42 第2のカソード
50 コンデンサ
60 ショットキーバリアダイオード
61 第3のアノード
62 第3のカソード
70 ツェナーダイオード
71 第1のアノード
72 第1のカソード
80 ダイオード
81 第2のアノード
82 第2のカソード
90 基板
91 ソースのリード線
92 ドレインのリード線
93 ゲートのリード線
94 放電用のリード線
100 ソース端子
200 ドレイン端子
300 ゲート端子
Claims (8)
- ソース端子に接続される第1のソース、第1のドレイン、ゲート端子に接続される第1のゲートを有するノーマリーオフトランジスタと、
前記第1のドレインに接続される第2のソース、ドレイン端子に接続される第2のドレイン、前記ソース端子に接続される第2のゲートを有するノーマリーオントランジスタと、
前記第1のソースに接続される第1のアノードと、前記第1のドレインおよび前記第2のソースに接続される第1のカソードを有し、ツェナー電圧が前記ノーマリーオフトランジスタのアバランシェ降伏電圧よりも低いツェナーダイオードと、
前記第1のドレインおよび前記第2のソースと前記ツェナーダイオードとの間に設けられ、前記第1のドレインおよび前記第2のソースに接続される第2のアノードと、前記第1のカソードに接続される第2のカソードを有するダイオードと、
前記第1のカソードおよび前記第2のカソードと、前記第1のソースとの間に、前記ツェナーダイオードと並列に設けられるコンデンサと、を備え、
前記ノーマリーオフトランジスタのオフ時の前記第1のソースと前記第1のドレイン間の耐圧が、前記ノーマリーオントランジスタの前記第2のソースと前記第2のゲート間の耐圧よりも低いことを特徴とする半導体装置。 - 前記ノーマリーオントランジスタは、GaN系のHEMTであることを特徴とする請求項1記載の半導体装置。
- 前記ノーマリーオントランジスタは、ゲートフィールドプレートを有することを特徴とする請求項2記載の半導体装置。
- 前記ノーマリーオフトランジスタは、Siの縦型MOSFETであることを特徴とする請求項1ないし請求項3いずれか一項記載の半導体装置。
- ソース端子に接続される第1のソース、第1のドレイン、ゲート端子に接続される第1のゲートを有するノーマリーオフトランジスタと、
前記第1のドレインに接続される第2のソース、ドレイン端子に接続される第2のドレイン、前記ソース端子に接続される第2のゲートを有するノーマリーオントランジスタと、
放電端子に接続される第1のアノードと、前記第1のドレインおよび前記第2のソースに接続される第1のカソードを有し、ツェナー電圧が前記ノーマリーオントランジスタの前記第2のソースと前記第2のゲート間の耐圧よりも低く、前記ツェナー電圧が前記ノーマリーオフトランジスタのアバランシェ降伏電圧よりも低いツェナーダイオードを備えることを特徴とする半導体装置。 - 前記ツェナーダイオードと前記放電端子との間に、前記第1のアノードに接続される第2のアノードと、前記放電端子に接続される第2のカソードを有するダイオードを、さらに備えることを特徴とする請求項5記載の半導体装置
- 前記放電端子は、電源に接続されることを特徴とする請求項5または請求項6記載の半導体装置。
- 基板、ソースのリード線、ドレインのリード線、ゲートのリード線、前記ソースのリード線に隣接する放電用のリード線をさらに備え、
前記基板上に、前記ノーマリーオフトランジスタ、前記ノーマリーオントランジスタ、前記ツェナーダイオードが実装され、
前記ソースのリード線に前記第1のソースが接続され、
前記ドレインのリード線に前記第2のドレインが接続され、
前記ゲートのリード線に前記第1のゲートが接続され、
前記放電用のリード線に前記第1のアノードが接続されることを特徴とする請求項5記載の半導体装置。
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