JP6991776B2 - 半導体装置 - Google Patents
半導体装置 Download PDFInfo
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- JP6991776B2 JP6991776B2 JP2017150076A JP2017150076A JP6991776B2 JP 6991776 B2 JP6991776 B2 JP 6991776B2 JP 2017150076 A JP2017150076 A JP 2017150076A JP 2017150076 A JP2017150076 A JP 2017150076A JP 6991776 B2 JP6991776 B2 JP 6991776B2
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- transistor
- semiconductor device
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- 229910052751 metal Inorganic materials 0.000 claims description 40
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- 238000007789 sealing Methods 0.000 description 7
- 229910052802 copper Inorganic materials 0.000 description 4
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- 229910052759 nickel Inorganic materials 0.000 description 4
- 239000002344 surface layer Substances 0.000 description 4
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- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
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Description
図1~図5は、本発明の第1実施形態に係る半導体装置を示している。本実施形態の半導体装置A1は、第1トランジスタ1、第2トランジスタ2、リードフレーム3、複数のソースワイヤ41S、ゲートワイヤ41G、複数のドレインワイヤ41D、ワイヤ41Gs,複数のワイヤ42Sおよび封止樹脂6を備えている。
図6は、本発明の第2実施形態に係る半導体装置A2を示す平面図であり、図7は、半導体装置A2の回路図である。本実施形態においては、半導体装置A1が抵抗素子51を備えている。また、抵抗素子51を備えることに対応して、金属層32やワイヤの接続構成が上述した実施形態と異なっている。また、上述した実施形態の副ゲート端子31Gsおよびワイヤ41Gsは、備えられていない。なお、本実施形態においても、距離D1は、距離D3よりも大きい。
図8は、本発明の第3実施形態に係る半導体装置A3を示す平面図であり、図9は、半導体装置A3の回路図である。本実施形態においては、図9に示すように、第2トランジスタ2が抵抗素子25(図8においては図示略)を内蔵している。抵抗素子25は、例えば、第2ゲート電極21Gと素子本体20のAlGaN層204との導通経路に作り込まれている。また、半導体装置A3は、ワイヤ43Gを備えている。ワイヤ43Gは、第2トランジスタ2の第2ゲート電極21Gと第1トランジスタ1の第1ソース電極11Sとに接続されている。
図10は、本発明の第4実施形態に係る半導体装置A4を示す平面図である。図11は、図10のXI-XI線に沿う断面図であり、図12は、図10のXII-XII線に沿う断面図である。図13は、半導体装置A4の回路図である。
図14は、本発明の第5実施形態に係る半導体装置A5を示す平面図である。図15は、図14のXV-XV線に沿う断面図である。図16は、半導体装置A5の回路図である。
図17は、本発明の第6実施形態に係る半導体装置A6を示す平面図である。図18は、半導体装置A6の回路図である。本実施形態の半導体装置A6においては、抵抗素子51の電気的な配置が上述した半導体装置A5と異なっている。
図19は、本発明の第7実施形態に係る半導体装置A7を示す平面図である。図20は、半導体装置A7の回路図である。
1 :第1トランジスタ
2 :第2トランジスタ
3 :リードフレーム
6 :封止樹脂
10 :素子本体
11D :第1ドレイン電極
11G :第1ゲート電極
11S :第1ソース電極
19 :接合層
20 :素子本体
21D :第2ドレイン電極
21G :第2ゲート電極
21S :第2ソース電極
25 :抵抗素子
29 :接合層
30 :アイランド部
31D :ドレイン端子
31G :ゲート端子
31Gs :副ゲート端子
31S :ソース端子
32 :金属層(支持部)
33 :絶縁層
41D :ドレインワイヤ
41G :ゲートワイヤ
41S :ソースワイヤ
41Gs,42G,42S,43G,45S:ワイヤ
51 :抵抗素子
61 :表面
62 :裏面
63 :側面
64 :端面
120 :端縁
121 :第1素子端縁
201 :Si層
202 :バッファ層
203 :GaN層
204 :AlGaN層
205 :絶縁層
210G :第2ゲート配線
220 :端縁
221 :第1素子端縁
301 :表面
302 :裏面
311D,311S:拡幅部
320 :端縁
321 :第1支持部端縁
322 :第2支持部端縁
325 :主部
326 :副部
D1,D2,D3:距離
Claims (17)
- 第1ソース電極、第1ドレイン電極および第1ゲート電極を有する、ノーマリーオフである第1トランジスタと、
第2ソース電極、第2ドレイン電極および第2ゲート電極を有する、ノーマリーオンである第2トランジスタと、
前記第1ソース電極に接続されたソース端子と、
前記第1ゲート電極に接続されたゲート端子と、
前記第2ドレイン電極に接続されたドレイン端子と、
前記第1ソース電極に接続され且つ前記第1ソース電極と前記ソース端子との導通経路を構成する、ソースワイヤと、
前記第1ゲート電極に接続され且つ前記第1ゲート電極と前記ゲート端子との導通経路を構成する、ゲートワイヤと、
前記第2ドレイン電極に接続され且つ前記第2ドレイン電極と前記ドレイン端子との導通経路を構成する、ドレインワイヤと、
前記第1トランジスタおよび前記第2トランジスタの少なくとも一方が直接接合されることにより、前記第1トランジスタおよび前記第2トランジスタを支持する支持部と、を備えた半導体装置であって、
前記支持部は、各々が第1方向に平行であり且つ前記第1方向に対して直角である第2方向に離れた一対の第1支持部端縁と、当該一対の第1支持部端縁の両端を繋ぐ一対の第2支持部端縁と、を有し、
前記ソースワイヤ、前記ゲートワイヤおよび前記ドレインワイヤは、平面視において前記一対の第2支持部端縁の少なくともいずれかと交差し、
前記第2ドレイン電極は、前記第1方向を長手方向とする細長状であり、
複数の前記ドレインワイヤを備えており、
前記複数のドレインワイヤの一端は、前記第1方向に並んだ状態で前記第2ドレイン電極に接続されていることを特徴とする、半導体装置。 - 前記第1トランジスタおよび前記第2トランジスタは、前記支持部にそれぞれ直接接合されている、請求項1に記載の半導体装置。
- 前記第2トランジスタは、前記支持部に直接接合されており、
前記第1トランジスタは、前記第2トランジスタを介して前記支持部に支持されている、請求項1に記載の半導体装置。 - 前記第1トランジスタおよび前記第2トランジスタの端縁は、各々が前記第1方向に平行であり且つ前記第2方向における距離が最も大の組合せである一対の第1素子端縁を含み、
前記ソースワイヤ、前記ゲートワイヤおよび前記ドレインワイヤは、前記第2方向における前記一対の第1素子端縁の間において、前記第1トランジスタおよび前記第2トランジスタの端縁と交差する、請求項1ないし3のいずれかに記載の半導体装置。 - 前記第1ソース電極および前記第1ゲート電極と第1ドレイン電極とは、互いに反対側を向く、請求項1ないし4のいずれかに記載の半導体装置。
- 前記第2ソース電極、前記第2ドレイン電極および前記第2ゲート電極は、いずれも同じ側を向く、請求項1ないし5のいずれかに記載の半導体装置。
- 前記第2トランジスタは、III族窒化物半導体を含む層を有する、請求項6に記載の半導体装置。
- 前記ソースワイヤは、一端が前記第1ソース電極に直接接合され、他端が前記ソース端子に直接接合され、
前記ゲートワイヤは、一端が前記第1ゲート電極に直接接合され、他端が前記ゲート端子に直接接合され、
前記ドレインワイヤは、一端が前記第2ドレイン電極に直接接合され、他端が前記ドレイン端子に直接接合されている、請求項1ないし7のいずれかに記載の半導体装置。 - 金属からなるアイランド部と、当該アイランド部に積層された絶縁層と、当該絶縁層に積層された前記支持部としての金属層と、を備える、請求項1ないし8のいずれかに記載の半導体装置。
- 前記ゲート端子、前記ドレイン端子および前記ソース端子が、前記支持部に対して前記第1方向一方側に位置する、請求項1ないし9のいずれかに記載の半導体装置。
- 前記ゲート端子、前記ドレイン端子および前記ソース端子が、前記支持部に対して前記第1方向の両側に位置する、請求項1ないし9のいずれかに記載の半導体装置。
- 複数の前記ドレイン端子を備える、請求項11に記載の半導体装置。
- 複数の前記ソース端子を備える、請求項11または12に記載の半導体装置。
- 1つのみの前記ソース端子および1つのみの前記ドレイン端子を備える、請求項10に記載の半導体装置。
- 前記第2ゲート電極に導通する副ゲート端子をさらに備える、請求項1ないし14のいずれかに記載の半導体装置。
- 前記副ゲート端子に導通する別体の抵抗素子を備える、請求項15に記載の半導体装置。
- 前記第2トランジスタが、前記副ゲート端子に導通する抵抗素子を内蔵する、請求項15に記載の半導体装置。
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