JP6101584B2 - 形状計測方法及び装置 - Google Patents

形状計測方法及び装置 Download PDF

Info

Publication number
JP6101584B2
JP6101584B2 JP2013143152A JP2013143152A JP6101584B2 JP 6101584 B2 JP6101584 B2 JP 6101584B2 JP 2013143152 A JP2013143152 A JP 2013143152A JP 2013143152 A JP2013143152 A JP 2013143152A JP 6101584 B2 JP6101584 B2 JP 6101584B2
Authority
JP
Japan
Prior art keywords
ellipse
measurement
shape
distance sensor
shape measuring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2013143152A
Other languages
English (en)
Japanese (ja)
Other versions
JP2015017811A (ja
JP2015017811A5 (enExample
Inventor
啓晃 笠井
啓晃 笠井
達雄 針山
達雄 針山
渡辺　正浩
正浩 渡辺
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP2013143152A priority Critical patent/JP6101584B2/ja
Priority to US14/898,661 priority patent/US9733066B2/en
Priority to PCT/JP2014/061810 priority patent/WO2015004974A1/ja
Publication of JP2015017811A publication Critical patent/JP2015017811A/ja
Publication of JP2015017811A5 publication Critical patent/JP2015017811A5/ja
Application granted granted Critical
Publication of JP6101584B2 publication Critical patent/JP6101584B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/08—Measuring arrangements characterised by the use of optical techniques for measuring diameters
    • G01B11/12—Measuring arrangements characterised by the use of optical techniques for measuring diameters internal diameters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/026—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by measuring distance between sensor and object
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP2013143152A 2013-07-09 2013-07-09 形状計測方法及び装置 Active JP6101584B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2013143152A JP6101584B2 (ja) 2013-07-09 2013-07-09 形状計測方法及び装置
US14/898,661 US9733066B2 (en) 2013-07-09 2014-04-28 Shape measuring method and device
PCT/JP2014/061810 WO2015004974A1 (ja) 2013-07-09 2014-04-28 形状計測方法及び装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2013143152A JP6101584B2 (ja) 2013-07-09 2013-07-09 形状計測方法及び装置

Publications (3)

Publication Number Publication Date
JP2015017811A JP2015017811A (ja) 2015-01-29
JP2015017811A5 JP2015017811A5 (enExample) 2016-03-31
JP6101584B2 true JP6101584B2 (ja) 2017-03-22

Family

ID=52279670

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2013143152A Active JP6101584B2 (ja) 2013-07-09 2013-07-09 形状計測方法及び装置

Country Status (3)

Country Link
US (1) US9733066B2 (enExample)
JP (1) JP6101584B2 (enExample)
WO (1) WO2015004974A1 (enExample)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6417645B2 (ja) * 2015-02-27 2018-11-07 株式会社東京精密 表面形状測定装置のアライメント方法
JP6789187B2 (ja) * 2017-07-07 2020-11-25 東京エレクトロン株式会社 基板反り検出装置及び基板反り検出方法、並びにこれらを用いた基板処理装置及び基板処理方法
CZ2017549A3 (cs) * 2017-09-17 2019-11-06 Vysoká Škola Báňská - Technická Univerzita Ostrava Způsob bezkontaktního měření tlouštěk stěn rotačních skořepin křivkového profilu s plovoucí tloušťkou a zařízení k provádění tohoto způsobu
JP7193992B2 (ja) 2018-11-28 2022-12-21 株式会社日立製作所 形状測定システム、プローブ先端部、形状測定方法、及びプログラム
JP6928982B1 (ja) * 2020-07-31 2021-09-01 三鷹光器株式会社 非接触真円度及び直径測定方法
WO2022064576A1 (ja) 2020-09-23 2022-03-31 株式会社ソニー・インタラクティブエンタテインメント 位置情報取得装置、ヘッドマウントディスプレイ、および位置情報取得方法
JP7446455B2 (ja) * 2020-09-24 2024-03-08 株式会社ソニー・インタラクティブエンタテインメント 位置情報取得システム、位置情報取得方法、および位置情報取得装置
DE102021208378A1 (de) * 2021-08-03 2023-02-09 Sms Group Gmbh Anordnung zur optischen Vermessung eines Gewindes an einem Ende eines Metallrohres oder an einer Muffe sowie Verfahren zur Vermessung
CN116618729B (zh) * 2023-07-21 2024-04-26 辉县市腾飞机械制造有限公司 一种大齿圈铣面装置
CN118237984B (zh) * 2024-05-27 2024-07-19 深圳市侨柏科技有限公司 一种数控机床车削件尺寸测量装置

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS511154B1 (enExample) 1970-12-30 1976-01-14
JPS511154A (ja) * 1974-06-24 1976-01-07 Canon Kk Hikaribiimuoshoshita sokuteikenshutsuhoho
JPS5917806U (ja) * 1983-05-19 1984-02-03 大阪機工株式会社 被加工物の平均直径同時測定装置
JP4328921B2 (ja) * 1999-09-16 2009-09-09 横河電機株式会社 レーザ距離計及びレーザ距離計を用いたレベル計
JP4234490B2 (ja) * 2003-05-09 2009-03-04 株式会社長浜製作所 環状回転体の機種判別装置
DE10337894A1 (de) 2003-08-18 2005-03-17 Robert Bosch Gmbh Optisches Messsystem zum Erfassen von Geometriedaten von Oberflächen
JP2008304407A (ja) 2007-06-11 2008-12-18 Techno System Kk 内径測定装置
DE102007059903A1 (de) 2007-12-12 2009-06-18 Robert Bosch Gmbh Sonde und Vorrichtung zum optischen Prüfen von Messobjekten
JP2010025878A (ja) * 2008-07-24 2010-02-04 Citizen Machinery Co Ltd 情報検出装置及び情報検出方法
JP5754833B2 (ja) * 2010-03-23 2015-07-29 株式会社栗本鐵工所 内径測定装置
JP6169339B2 (ja) 2012-10-04 2017-07-26 株式会社日立製作所 形状計測方法及び装置

Also Published As

Publication number Publication date
US9733066B2 (en) 2017-08-15
JP2015017811A (ja) 2015-01-29
US20160131473A1 (en) 2016-05-12
WO2015004974A1 (ja) 2015-01-15

Similar Documents

Publication Publication Date Title
JP6101584B2 (ja) 形状計測方法及び装置
JP6169339B2 (ja) 形状計測方法及び装置
US11566897B2 (en) Surveying instrument and method of calibrating a survey instrument
US20120133924A1 (en) Measurement of the Positions of Centres of Curvature of Optical Surfaces of a Multi-Lens Optical System
EP3358299B1 (en) Surveying system
WO2008072369A1 (ja) 測定装置および測定方法
ES2910957T3 (es) Sistema de medición y método de fabricación de un eje con orificio
CN103162644A (zh) 转动角检测装置及测量装置
CN103162663A (zh) 旋转角检测装置及测量装置
CN101666640A (zh) 一种二维姿态角的测量方法和系统
CN108196377A (zh) 一种扫描机构光路调试装置及调试方法
JP2018179588A (ja) レーザスキャナ
JP2020521123A (ja) 複数方向での撮像センサのアライメントシステム
JP2020148700A (ja) 距離画像センサ、および角度情報取得方法
JP5517097B2 (ja) 屈折率測定装置及び屈折率測定方法
EP2607846B1 (en) Surveying apparatus
JP6924953B2 (ja) 形状測定装置及び形状測定方法
JP2014126396A (ja) 内径測定装置
JP5309542B2 (ja) 測定装置およびその方法
CN109764952B (zh) 一种轴抖动检测、转速测量方法
CN106767555A (zh) 一种轴系晃动与跳动的复合检测装置及方法
JP2008517283A (ja) 改良した測定システム
JPH1194700A (ja) レンズの測定装置及び測定方法
KR20150137034A (ko) 레이저와 레이저 광센서를 이용하여 폐 궤적 곡선을 결정하는 방법 및 폐 궤적 곡선을 결정하는 장치
JP2016109602A (ja) 傾斜検出装置

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20160209

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20160209

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20160809

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20160829

RD04 Notification of resignation of power of attorney

Free format text: JAPANESE INTERMEDIATE CODE: A7424

Effective date: 20170110

RD04 Notification of resignation of power of attorney

Free format text: JAPANESE INTERMEDIATE CODE: A7424

Effective date: 20170112

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20170131

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20170227

R150 Certificate of patent or registration of utility model

Ref document number: 6101584

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150