JP6090988B2 - 半導体装置 - Google Patents
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- JP6090988B2 JP6090988B2 JP2013042492A JP2013042492A JP6090988B2 JP 6090988 B2 JP6090988 B2 JP 6090988B2 JP 2013042492 A JP2013042492 A JP 2013042492A JP 2013042492 A JP2013042492 A JP 2013042492A JP 6090988 B2 JP6090988 B2 JP 6090988B2
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- 239000004065 semiconductor Substances 0.000 title claims description 42
- 239000012535 impurity Substances 0.000 claims description 20
- 230000015556 catabolic process Effects 0.000 description 18
- 238000005468 ion implantation Methods 0.000 description 12
- 238000002513 implantation Methods 0.000 description 10
- 239000000758 substrate Substances 0.000 description 9
- 230000000052 comparative effect Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000002347 injection Methods 0.000 description 3
- 239000007924 injection Substances 0.000 description 3
- 230000006378 damage Effects 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 230000001681 protective effect Effects 0.000 description 2
- 230000004888 barrier function Effects 0.000 description 1
- 230000005465 channeling Effects 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000004088 simulation Methods 0.000 description 1
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Description
前記JTE領域に、第1JTE領域と、前記第1JTE領域より不純物濃度が低い第2JTE領域を設け、前記第1JTE領域を、前記第2JTE領域に挟み込まれるように設け、
前記半導体装置が主接合領域にp領域を備えたショットキーダイオードである場合、前記第1JTE領域における不純物濃度を4.4×1017cm-3以上8×1017cm-3以下、前記第2JTE領域における不純物濃度を2×1017cm-3以下とし、前記半導体装置がジャンクションバリアショットキー(JBS)ダイオードである場合、前記第1JTE領域における不純物濃度を6×1017cm-3以上8×1017cm-3以下、前記第2JTE領域における不純物濃度を2×1017cm-3以下とすることである。
第2イオン注入(第1JTEの領域及び第2JTEの領域):25、55、95、150、220、320、450keV
第1JTE領域におけるAlの最大濃度(ボックスプロファイルのピーク設定濃度)を6×1017cm-3とし、第2JTE領域におけるAlの最大濃度を2×1017cm-3としたが、高ドープ領域へのイオン注入の最高エネルギー(第1イオン注入エネルギー)を第2イオン注入エネルギーよりも低くすることで、Alの濃度分布を図5のように、pn接合深さの水平方向における第1JTEと第2JTEの2つの領域における濃度差がほぼ零となるようにした。
2 ドリフト領域
3 p型半導体領域
4 カソード電極
6 JTE領域
7 注入量の多い第1JTE領域
8 注入量の少ない第2JTE領域
9 アバランシェ降伏位置の例
10 ショットキー電極
Claims (3)
- n型の導電型を有するドリフト領域上に主接合領域と前記主接合領域の周囲に隣接して形成されたp型のJTE領域を備えた半導体装置において、
前記JTE領域に、第1JTE領域と、前記第1JTE領域より不純物濃度が低い第2JTE領域を有し、
前記第1JTE領域は、前記第2JTE領域に挟み込まれるように設けられ、
前記第1JTE領域の接合深さは、前記第2JTE領域の接合深さと同じになるように設けられるとともに、当該接合深さにおける前記第1JTE領域の不純物濃度と前記第2JTE領域の不純物濃度は同じとなるように設けられることを特徴とする半導体装置。 - 請求項1に記載の半導体装置において、
前記第1JTE領域と前記第2JTE領域の接合深さにおける不純物濃度の差はゼロとなるようにすることを特徴する半導体装置。 - 請求項1に記載の半導体装置において、
前記第2JTE領域の幅と間隔の比が前記主接合領域からの距離に応じて小さいことを特徴とする半導体装置。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2013042492A JP6090988B2 (ja) | 2013-03-05 | 2013-03-05 | 半導体装置 |
PCT/JP2013/083101 WO2014136344A1 (ja) | 2013-03-05 | 2013-12-10 | 半導体装置 |
US14/768,173 US9478605B2 (en) | 2013-03-05 | 2013-12-10 | Semiconductor device with similar impurity concentration JTE regions |
DE112013006513.4T DE112013006513T5 (de) | 2013-03-05 | 2013-12-10 | Halbleitervorrichtung |
US15/279,192 US9755014B2 (en) | 2013-03-05 | 2016-09-28 | Semiconductor device with substantially equal impurity concentration JTE regions in a vicinity of a junction depth |
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JP2013042492A JP6090988B2 (ja) | 2013-03-05 | 2013-03-05 | 半導体装置 |
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JP2014170866A JP2014170866A (ja) | 2014-09-18 |
JP6090988B2 true JP6090988B2 (ja) | 2017-03-08 |
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US (2) | US9478605B2 (ja) |
JP (1) | JP6090988B2 (ja) |
DE (1) | DE112013006513T5 (ja) |
WO (1) | WO2014136344A1 (ja) |
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LT3370733T (lt) * | 2015-11-02 | 2021-10-25 | Board Of Regents, The University Of Texas System | Cd40 aktyvinimo ir imuninės kontrolės taškų blokados būdai |
JP6672764B2 (ja) * | 2015-12-16 | 2020-03-25 | 富士電機株式会社 | 半導体装置および半導体装置の製造方法 |
JP6610786B2 (ja) * | 2016-07-15 | 2019-11-27 | 富士電機株式会社 | 炭化珪素半導体装置 |
JP2019054170A (ja) | 2017-09-15 | 2019-04-04 | 株式会社東芝 | 半導体装置 |
JP2020205295A (ja) * | 2019-06-14 | 2020-12-24 | 国立研究開発法人産業技術総合研究所 | 炭化珪素半導体装置 |
US20220157951A1 (en) * | 2020-11-17 | 2022-05-19 | Hamza Yilmaz | High voltage edge termination structure for power semicondcutor devices and manufacturing method thereof |
US11817478B2 (en) | 2020-12-23 | 2023-11-14 | Semiconductor Components Industries, Llc | Termination structures with reduced dynamic output capacitance loss |
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JPH07193018A (ja) * | 1993-12-27 | 1995-07-28 | Takaoka Electric Mfg Co Ltd | 高耐圧半導体素子の製造方法 |
US6002159A (en) | 1996-07-16 | 1999-12-14 | Abb Research Ltd. | SiC semiconductor device comprising a pn junction with a voltage absorbing edge |
JP3914226B2 (ja) | 2004-09-29 | 2007-05-16 | 株式会社東芝 | 高耐圧半導体装置 |
US20070228505A1 (en) * | 2006-04-04 | 2007-10-04 | Mazzola Michael S | Junction barrier schottky rectifiers having epitaxially grown p+-n junctions and methods of making |
JP2008103529A (ja) * | 2006-10-19 | 2008-05-01 | Toyota Central R&D Labs Inc | 半導体装置 |
US9640609B2 (en) * | 2008-02-26 | 2017-05-02 | Cree, Inc. | Double guard ring edge termination for silicon carbide devices |
JP5601849B2 (ja) * | 2010-02-09 | 2014-10-08 | 三菱電機株式会社 | 炭化珪素半導体装置の製造方法 |
JP5554415B2 (ja) * | 2010-10-15 | 2014-07-23 | 三菱電機株式会社 | 半導体装置およびその製造方法 |
US8803277B2 (en) * | 2011-02-10 | 2014-08-12 | Cree, Inc. | Junction termination structures including guard ring extensions and methods of fabricating electronic devices incorporating same |
JP5558393B2 (ja) | 2011-03-10 | 2014-07-23 | 株式会社東芝 | 半導体装置 |
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- 2013-03-05 JP JP2013042492A patent/JP6090988B2/ja active Active
- 2013-12-10 US US14/768,173 patent/US9478605B2/en active Active
- 2013-12-10 WO PCT/JP2013/083101 patent/WO2014136344A1/ja active Application Filing
- 2013-12-10 DE DE112013006513.4T patent/DE112013006513T5/de active Granted
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US20160005810A1 (en) | 2016-01-07 |
WO2014136344A1 (ja) | 2014-09-12 |
US9478605B2 (en) | 2016-10-25 |
US20170018605A1 (en) | 2017-01-19 |
US9755014B2 (en) | 2017-09-05 |
DE112013006513T5 (de) | 2015-10-15 |
JP2014170866A (ja) | 2014-09-18 |
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