JP6081260B2 - 蛍光ｘ線分析装置 - Google Patents

蛍光ｘ線分析装置 Download PDF

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Publication number
JP6081260B2
JP6081260B2 JP2013068420A JP2013068420A JP6081260B2 JP 6081260 B2 JP6081260 B2 JP 6081260B2 JP 2013068420 A JP2013068420 A JP 2013068420A JP 2013068420 A JP2013068420 A JP 2013068420A JP 6081260 B2 JP6081260 B2 JP 6081260B2
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gas
ray
fluorescent
sample
incident window
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JP2014190921A (ja
JP2014190921A5 (https=
Inventor
宏彰 野原
宏彰 野原
吉毅 的場
吉毅 的場
範昭 坂井
範昭 坂井
俊公 竹内
俊公 竹内
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Hitachi High Tech Analysis Corp
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Hitachi High Tech Science Corp
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Priority to JP2013068420A priority Critical patent/JP6081260B2/ja
Priority to US14/219,579 priority patent/US9400255B2/en
Publication of JP2014190921A publication Critical patent/JP2014190921A/ja
Publication of JP2014190921A5 publication Critical patent/JP2014190921A5/ja
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/223—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material by irradiating the sample with X-rays or gamma-rays and by measuring X-ray fluorescence
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00—Investigating materials by wave or particle radiation
    • G01N2223/07—Investigating materials by wave or particle radiation secondary emission
    • G01N2223/076—X-ray fluorescence

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  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
JP2013068420A 2013-03-28 2013-03-28 蛍光ｘ線分析装置 Active JP6081260B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2013068420A JP6081260B2 (ja) 2013-03-28 2013-03-28 蛍光ｘ線分析装置
US14/219,579 US9400255B2 (en) 2013-03-28 2014-03-19 X-ray fluorescence spectrometer comprising a gas blowing mechanism

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2013068420A JP6081260B2 (ja) 2013-03-28 2013-03-28 蛍光ｘ線分析装置

Publications (3)

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JP2014190921A JP2014190921A (ja) 2014-10-06
JP2014190921A5 JP2014190921A5 (https=) 2016-02-12
JP6081260B2 true JP6081260B2 (ja) 2017-02-15

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JP2013068420A Active JP6081260B2 (ja) 2013-03-28 2013-03-28 蛍光ｘ線分析装置

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US (1) US9400255B2 (https=)
JP (1) JP6081260B2 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9933375B2 (en) * 2015-09-25 2018-04-03 Olympus Scientific Solutions Americas, Inc. XRF/XRD system with dynamic management of multiple data processing units
WO2022004000A1 (ja) * 2020-06-30 2022-01-06 株式会社島津製作所 蛍光ｘ線分析装置

Family Cites Families (33)

* Cited by examiner, † Cited by third party
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EP0781992B1 (en) * 1995-12-21 2006-06-07 Horiba, Ltd. Fluorescence X-ray analyzer
US6052429A (en) * 1997-02-20 2000-04-18 Dkk Corporation X-ray analyzing apparatus
WO1999009401A1 (en) * 1997-08-15 1999-02-25 Hara David B O Apparatus and method for improved energy dispersive x-ray spectrometer
JPH1183689A (ja) * 1997-09-03 1999-03-26 Mitsubishi Materials Corp 蛍光ｘ線分析用試料の清掃方法およびその装置
US6012325A (en) * 1997-11-05 2000-01-11 The Boc Group, Inc. (A Delaware Corporation) Method and apparatus for measuring metallic impurities contained within a fluid
JP3491668B2 (ja) * 1998-01-23 2004-01-26 横河電機株式会社 Ｘ線型硫黄計
DE19820321B4 (de) * 1998-05-07 2004-09-16 Bruker Axs Gmbh Kompaktes Röntgenspektrometer
EP1121584A4 (en) * 1998-09-17 2002-10-16 Noran Instr Inc USE OF X-RAY OPTICS FOR DISPENSIVE SPECTROSCOPY
JP3284198B2 (ja) * 1998-10-30 2002-05-20 理学電機工業株式会社 蛍光ｘ線分析装置
DE19932275B4 (de) * 1999-07-06 2005-08-04 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Vorrichtung zur Röntgenfluoreszenzanalyse
DE19948382A1 (de) * 1999-10-07 2001-05-03 Gemetec Ges Fuer Mestechnik Un Detektor für grosse Waferflächen
DE10050116A1 (de) * 1999-10-21 2001-04-26 Koninkl Philips Electronics Nv Verfahren und Vorrichtung zum Untersuchen einer Probe mit Hilfe von Röntgenfluoreszenzanalyse
RU2180439C2 (ru) * 2000-02-11 2002-03-10 Кумахов Мурадин Абубекирович Способ получения изображения внутренней структуры объекта с использованием рентгеновского излучения и устройство для его осуществления
WO2003048745A2 (en) * 2001-12-04 2003-06-12 X-Ray Optical Systems, Inc. X-ray fluorescence analyser for analysing fluid streams using a semiconductor-type detector and focusing means
JP3996821B2 (ja) * 2002-03-27 2007-10-24 株式会社堀場製作所 Ｘ線分析装置
DE10230990A1 (de) * 2002-07-10 2004-02-05 Elisabeth Katz Vorrichtung zur Durchführung einer Online-Elementanalyse
FI20031753L (fi) * 2003-12-01 2005-06-02 Metorex Internat Oy Parannettu mittausjärjestely röntgenfluoresenssianalyysiä varten
DE102004019030A1 (de) * 2004-04-17 2005-11-03 Katz, Elisabeth Vorrichtung für die Elementanalyse
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JP5045999B2 (ja) * 2006-03-30 2012-10-10 エスアイアイ・ナノテクノロジー株式会社 蛍光ｘ線分析装置
US8064570B2 (en) * 2006-12-20 2011-11-22 Innov-X-Systems, Inc. Hand-held XRF analyzer
JP2009180636A (ja) * 2008-01-31 2009-08-13 Sumitomo Metal Mining Co Ltd 分別装置、分別方法及び資材の製造方法
DE102008039024A1 (de) * 2008-08-21 2010-02-25 Sikora Aktiengesellschaft Fensteranordnung an einem Druckrohr
JP5269521B2 (ja) * 2008-08-22 2013-08-21 株式会社日立ハイテクサイエンス Ｘ線分析装置及びｘ線分析方法
JP5307504B2 (ja) * 2008-08-22 2013-10-02 株式会社日立ハイテクサイエンス Ｘ線分析装置及びｘ線分析方法
JP2011203102A (ja) 2010-03-25 2011-10-13 Nikon Corp 試料ホルダ及び試料分析方法
DE102011109822B4 (de) * 2011-08-09 2019-10-10 Ketek Gmbh Vorrichtung für einen Strahlungsdetektor sowie Strahlungsdetektor mit der Vorrichtung
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JP6096419B2 (ja) * 2012-04-12 2017-03-15 株式会社堀場製作所 Ｘ線検出装置
CN104395983B (zh) * 2012-04-20 2017-10-10 布鲁克Axs手持设备公司 用于保护辐射窗口的设备
US8982338B2 (en) * 2012-05-31 2015-03-17 Thermo Scientific Portable Analytical Instruments Inc. Sample analysis

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Publication number Publication date
JP2014190921A (ja) 2014-10-06
US9400255B2 (en) 2016-07-26
US20140294143A1 (en) 2014-10-02

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