JP6075832B2 - 粘着テープ用フィルムおよび粘着テープ - Google Patents
粘着テープ用フィルムおよび粘着テープ Download PDFInfo
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- JP6075832B2 JP6075832B2 JP2012170937A JP2012170937A JP6075832B2 JP 6075832 B2 JP6075832 B2 JP 6075832B2 JP 2012170937 A JP2012170937 A JP 2012170937A JP 2012170937 A JP2012170937 A JP 2012170937A JP 6075832 B2 JP6075832 B2 JP 6075832B2
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- meth
- pressure
- film
- silicone
- sensitive adhesive
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- 239000002985 plastic film Substances 0.000 claims description 40
- 229920006255 plastic film Polymers 0.000 claims description 40
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- 238000012545 processing Methods 0.000 claims description 12
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- 239000000178 monomer Substances 0.000 description 52
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- 239000003431 cross linking reagent Substances 0.000 description 24
- 238000011156 evaluation Methods 0.000 description 23
- 239000011259 mixed solution Substances 0.000 description 21
- OMIGHNLMNHATMP-UHFFFAOYSA-N 2-hydroxyethyl prop-2-enoate Chemical compound OCCOC(=O)C=C OMIGHNLMNHATMP-UHFFFAOYSA-N 0.000 description 20
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- CERQOIWHTDAKMF-UHFFFAOYSA-N Methacrylic acid Chemical compound CC(=C)C(O)=O CERQOIWHTDAKMF-UHFFFAOYSA-N 0.000 description 16
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- 238000012360 testing method Methods 0.000 description 12
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- 239000003795 chemical substances by application Substances 0.000 description 11
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 10
- 125000004432 carbon atom Chemical group C* 0.000 description 10
- 238000012790 confirmation Methods 0.000 description 10
- 125000000753 cycloalkyl group Chemical group 0.000 description 10
- VVQNEPGJFQJSBK-UHFFFAOYSA-N Methyl methacrylate Chemical compound COC(=O)C(C)=C VVQNEPGJFQJSBK-UHFFFAOYSA-N 0.000 description 9
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- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 8
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- BJQHLKABXJIVAM-UHFFFAOYSA-N bis(2-ethylhexyl) phthalate Chemical compound CCCCC(CC)COC(=O)C1=CC=CC=C1C(=O)OCC(CC)CCCC BJQHLKABXJIVAM-UHFFFAOYSA-N 0.000 description 6
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- 238000005259 measurement Methods 0.000 description 4
- JDSHMPZPIAZGSV-UHFFFAOYSA-N melamine Chemical compound NC1=NC(N)=NC(N)=N1 JDSHMPZPIAZGSV-UHFFFAOYSA-N 0.000 description 4
- PNJWIWWMYCMZRO-UHFFFAOYSA-N pent‐4‐en‐2‐one Natural products CC(=O)CC=C PNJWIWWMYCMZRO-UHFFFAOYSA-N 0.000 description 4
- 239000000523 sample Substances 0.000 description 4
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- 125000000954 2-hydroxyethyl group Chemical group [H]C([*])([H])C([H])([H])O[H] 0.000 description 3
- SXIFAEWFOJETOA-UHFFFAOYSA-N 4-hydroxy-butyl Chemical group [CH2]CCCO SXIFAEWFOJETOA-UHFFFAOYSA-N 0.000 description 3
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 3
- 229910002601 GaN Inorganic materials 0.000 description 3
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 3
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 3
- WMFOQBRAJBCJND-UHFFFAOYSA-M Lithium hydroxide Chemical compound [Li+].[OH-] WMFOQBRAJBCJND-UHFFFAOYSA-M 0.000 description 3
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 3
- 230000000052 comparative effect Effects 0.000 description 3
- 238000011109 contamination Methods 0.000 description 3
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- RAXXELZNTBOGNW-UHFFFAOYSA-N imidazole Natural products C1=CNC=N1 RAXXELZNTBOGNW-UHFFFAOYSA-N 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- DJDSLBVSSOQSLW-UHFFFAOYSA-N mono(2-ethylhexyl) phthalate Chemical compound CCCCC(CC)COC(=O)C1=CC=CC=C1C(O)=O DJDSLBVSSOQSLW-UHFFFAOYSA-N 0.000 description 3
- WWZKQHOCKIZLMA-UHFFFAOYSA-N octanoic acid Chemical compound CCCCCCCC(O)=O WWZKQHOCKIZLMA-UHFFFAOYSA-N 0.000 description 3
- 238000001028 reflection method Methods 0.000 description 3
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 3
- 229910010271 silicon carbide Inorganic materials 0.000 description 3
- 230000000007 visual effect Effects 0.000 description 3
- JAHNSTQSQJOJLO-UHFFFAOYSA-N 2-(3-fluorophenyl)-1h-imidazole Chemical compound FC1=CC=CC(C=2NC=CN=2)=C1 JAHNSTQSQJOJLO-UHFFFAOYSA-N 0.000 description 2
- GPZYYYGYCRFPBU-UHFFFAOYSA-N 6-Hydroxyflavone Chemical compound C=1C(=O)C2=CC(O)=CC=C2OC=1C1=CC=CC=C1 GPZYYYGYCRFPBU-UHFFFAOYSA-N 0.000 description 2
- LVGFPWDANALGOY-UHFFFAOYSA-N 8-methylnonyl prop-2-enoate Chemical compound CC(C)CCCCCCCOC(=O)C=C LVGFPWDANALGOY-UHFFFAOYSA-N 0.000 description 2
- WWXUGNUFCNYMFK-UHFFFAOYSA-N Acetyl citrate Chemical compound CC(=O)OC(=O)CC(O)(C(O)=O)CC(O)=O WWXUGNUFCNYMFK-UHFFFAOYSA-N 0.000 description 2
- 239000005711 Benzoic acid Substances 0.000 description 2
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- 244000043261 Hevea brasiliensis Species 0.000 description 2
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- 125000001204 arachidyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 2
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- 125000000484 butyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 2
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- 238000002788 crimping Methods 0.000 description 1
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- 239000012975 dibutyltin dilaurate Substances 0.000 description 1
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- 230000000877 morphologic effect Effects 0.000 description 1
- GEMHFKXPOCTAIP-UHFFFAOYSA-N n,n-dimethyl-n'-phenylcarbamimidoyl chloride Chemical compound CN(C)C(Cl)=NC1=CC=CC=C1 GEMHFKXPOCTAIP-UHFFFAOYSA-N 0.000 description 1
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- 150000003839 salts Chemical class 0.000 description 1
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- 238000001228 spectrum Methods 0.000 description 1
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- YBRBMKDOPFTVDT-UHFFFAOYSA-N tert-butylamine Chemical compound CC(C)(C)N YBRBMKDOPFTVDT-UHFFFAOYSA-N 0.000 description 1
- BFKJFAAPBSQJPD-UHFFFAOYSA-N tetrafluoroethene Chemical group FC(F)=C(F)F BFKJFAAPBSQJPD-UHFFFAOYSA-N 0.000 description 1
- YNJBWRMUSHSURL-UHFFFAOYSA-N trichloroacetic acid Chemical compound OC(=O)C(Cl)(Cl)Cl YNJBWRMUSHSURL-UHFFFAOYSA-N 0.000 description 1
- CHJMFFKHPHCQIJ-UHFFFAOYSA-L zinc;octanoate Chemical compound [Zn+2].CCCCCCCC([O-])=O.CCCCCCCC([O-])=O CHJMFFKHPHCQIJ-UHFFFAOYSA-L 0.000 description 1
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| KR1020120114664A KR101920086B1 (ko) | 2011-10-17 | 2012-10-16 | 점착 테이프용 필름 및 점착 테이프 |
| CN2012103949279A CN103045116A (zh) | 2011-10-17 | 2012-10-17 | 压敏胶粘带用膜和压敏胶粘带 |
| TW101138312A TWI605101B (zh) | 2011-10-17 | 2012-10-17 | 黏著帶用膜及黏著帶 |
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| JP2012170937A JP6075832B2 (ja) | 2011-10-17 | 2012-08-01 | 粘着テープ用フィルムおよび粘着テープ |
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| JP2017132940A (ja) * | 2016-01-29 | 2017-08-03 | 日東電工株式会社 | 粘着テープ |
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| JPH05117605A (ja) * | 1991-10-28 | 1993-05-14 | Nitto Denko Corp | 剥離性処理層、粘着部材及びセパレータ |
| JPH08188759A (ja) * | 1994-11-07 | 1996-07-23 | Sekisui Chem Co Ltd | 表面保護用粘着テープ |
| JP4540150B2 (ja) * | 1998-09-30 | 2010-09-08 | 日東電工株式会社 | 熱剥離型粘着シート |
| JP2003338678A (ja) * | 2002-05-21 | 2003-11-28 | Nitto Denko Corp | 回路基板の製造方法、回路基板仮固定用粘着テープ、及び多層配線板 |
| JP2007314636A (ja) * | 2006-05-24 | 2007-12-06 | Nitto Denko Corp | 粘着シート |
| JP5338519B2 (ja) * | 2008-09-30 | 2013-11-13 | Ｔｄｋ株式会社 | 剥離フィルム及びセラミック部品シート |
| JP2011089009A (ja) * | 2009-10-22 | 2011-05-06 | Hitachi Maxell Ltd | 放射線硬化性粘着剤組成物、それを用いたダイシング用粘着フィルム、及び切断片の製造方法 |
| JP5482368B2 (ja) * | 2010-03-29 | 2014-05-07 | Ｔｄｋ株式会社 | 剥離フィルム |
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| WO2018190085A1 (ja) * | 2017-04-12 | 2018-10-18 | 日東電工株式会社 | ウエハ加工用粘着シート |
| JP2018182054A (ja) * | 2017-04-12 | 2018-11-15 | 日東電工株式会社 | ウエハ加工用粘着シート |
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| JP2013099926A (ja) | 2013-05-23 |
| TWI605101B (zh) | 2017-11-11 |
| TW201321464A (zh) | 2013-06-01 |
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