JP6023010B2 - 基板処理方法、プログラム、コンピュータ記憶媒体及び基板処理システム - Google Patents
基板処理方法、プログラム、コンピュータ記憶媒体及び基板処理システム Download PDFInfo
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- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
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- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
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- H01L21/3083—Chemical or electrical treatment, e.g. electrolytic etching using masks characterised by their size, orientation, disposition, behaviour, shape, in horizontal or vertical plane
- H01L21/3086—Chemical or electrical treatment, e.g. electrolytic etching using masks characterised by their size, orientation, disposition, behaviour, shape, in horizontal or vertical plane characterised by the process involved to create the mask, e.g. lift-off masks, sidewalls, or to modify the mask, e.g. pre-treatment, post-treatment
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- G03F7/20—Exposure; Apparatus therefor
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- G03F7/0002—Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
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- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/16—Coating processes; Apparatus therefor
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- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/26—Processing photosensitive materials; Apparatus therefor
- G03F7/30—Imagewise removal using liquid means
- G03F7/32—Liquid compositions therefor, e.g. developers
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/26—Processing photosensitive materials; Apparatus therefor
- G03F7/40—Treatment after imagewise removal, e.g. baking
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- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
- H01L21/0226—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process
- H01L21/02282—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process liquid deposition, e.g. spin-coating, sol-gel techniques, spray coating
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- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
- H01L21/0271—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers
- H01L21/0273—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers characterised by the treatment of photoresist layers
- H01L21/0274—Photolithographic processes
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3105—After-treatment
- H01L21/311—Etching the insulating layers by chemical or physical means
- H01L21/31127—Etching organic layers
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- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
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- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
- H01L21/67051—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing using mainly spraying means, e.g. nozzles
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67063—Apparatus for fluid treatment for etching
- H01L21/67075—Apparatus for fluid treatment for etching for wet etching
- H01L21/6708—Apparatus for fluid treatment for etching for wet etching using mainly spraying means, e.g. nozzles
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C2201/00—Manufacture or treatment of microstructural devices or systems
- B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
- B81C2201/0101—Shaping material; Structuring the bulk substrate or layers on the substrate; Film patterning
- B81C2201/0147—Film patterning
- B81C2201/0149—Forming nanoscale microstructures using auto-arranging or self-assembling material
Description
その後カセットステーション10のウェハ搬送装置23によって所定のカセット載置板21のカセットCに搬送される。
30 現像装置
31 有機溶剤供給装置
32 反射防止膜形成装置
33 中性層形成装置
34 レジスト塗布装置
35 ブロック共重合体塗布装置
40 熱処理装置
200 第1の極性有機溶剤
201 第2の極性有機溶剤
300 制御部
400 反射防止膜
401 中性層
402 反射防止膜
403 ブロック共重合体
404 親水性ポリマー
405 疎水性ポリマー
W ウェハ
Claims (11)
- 親水性ポリマーと疎水性ポリマーとを含むブロック共重合体を用いて、基板を処理する方法であって、
前記親水性ポリマーと前記疎水性ポリマーに対して中間の親和性を有する中性層を基板上に形成する中性層形成工程と、
中性層上に形成されたレジスト膜を露光処理し、次いで露光処理後のレジスト膜を現像してレジストパターンを形成するレジストパターン形成工程と、
前記レジストパターン形成後の基板に対して前記ブロック共重合体を塗布するブロック共重合体塗布工程と、
前記ブロック共重合体を前記親水性ポリマーと前記疎水性ポリマーに相分離させるポリマー分離工程と、
前記相分離したブロック共重合体から、前記親水性ポリマーを選択的に除去するポリマー除去工程と、を有し、
前記ポリマー除去工程では、
前記相分離したブロック共重合体にエネルギー線を照射し、
次いで前記親水性ポリマーに対して第1の溶解度を有し、水より沸点が低く、水に対して可溶で、且つ前記疎水性ポリマーを溶解しない第1の極性有機溶剤を、前記ブロック共重合体に供給し、
次いで、前記第1の溶解度より低い第2の溶解度を有し、水よりも沸点が高く、且つ前記疎水性ポリマーを溶解しない第2の極性有機溶剤を、前記ブロック共重合体に供給することで前記親水性ポリマーを除去することを特徴とする、基板処理方法。 - 前記第1の極性有機溶剤と前記第2の極性有機溶剤は、互いに可溶であることを特徴とする、請求項1に記載の基板処理方法。
- 前記第1の極性有機溶剤は、IPA、アセトンまたはエタノールのいずれかであることを特徴とする請求項1または2のいずれかに記載の基板処理方法。
- 前記第2の極性有機溶剤は、MIBCであることを特徴とする、請求項1〜3のいずれかに記載の基板処理方法。
- 前記親水性ポリマーはポリメタクリル酸メチルであり、
前記疎水性ポリマーはポリスチレンであることを特徴とする、請求項1〜4のいずれかに記載の基板処理方法。 - 請求項1〜5のいずれかに記載の基板処理方法を基板処理システムによって実行させるために、当該基板処理システムを制御する制御部のコンピュータ上で動作するプログラム。
- 請求項6に記載のプログラムを格納した読み取り可能なコンピュータ記憶媒体。
- 親水性ポリマーと疎水性ポリマーとを含むブロック共重合体を用いて、基板を処理するシステムであって、
前記親水性ポリマーと前記疎水性ポリマーに対して中間の親和性を有する中性層を基板上に形成する中性層形成装置と、
中性層上に形成された露光処理後のレジスト膜を現像してレジストパターンを形成する現像装置と、
前記レジストパターン形成後の基板に対して前記ブロック共重合体を塗布するブロック共重合体塗布装置と、
前記ブロック共重合体を前記親水性ポリマーと前記疎水性ポリマーに相分離させるポリマー分離装置と、
前記相分離したブロック共重合体にエネルギー線を照射する改質処理装置と、
前記相分離したブロック共重合体から、前記親水性ポリマーを選択的に除去するポリマー除去装置と、を有し、
前記ポリマー除去装置は、前記親水性ポリマーに対して第1の溶解度を有し、水より沸点が低く、水に対して可溶で、且つ前記疎水性ポリマーを溶解しない第1の極性有機溶剤を前記ブロック共重合体に供給する第1の供給部と、前記第1の溶解度より低い第2の溶解度を有し、水よりも沸点が高く、且つ前記疎水性ポリマーを溶解しない第2の極性有機溶剤を、前記ブロック共重合体に供給する第2の供給部とを有することを特徴とする、基板処理システム。 - 前記第1の極性有機溶剤と前記第2の極性有機溶剤は、互いに可溶であることを特徴とする、請求項8に記載の基板処理システム。
- 前記第1の極性有機溶剤は、IPA、アセトンまたはエタノールのいずれかであることを特徴とする請求項8または9のいずれかに記載の基板処理システム。
- 前記第2の極性有機溶剤は、MIBCであることを特徴とする、請求項8〜10のいずれかに記載の基板処理システム。
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JP2013133383A JP6023010B2 (ja) | 2013-06-26 | 2013-06-26 | 基板処理方法、プログラム、コンピュータ記憶媒体及び基板処理システム |
KR1020157036324A KR102153767B1 (ko) | 2013-06-26 | 2014-06-06 | 기판 처리 방법, 컴퓨터 기억 매체 및 기판 처리 시스템 |
US14/896,415 US9810987B2 (en) | 2013-06-26 | 2014-06-06 | Substrate treatment method, computer storage medium and substrate treatment system |
PCT/JP2014/065087 WO2014208311A1 (ja) | 2013-06-26 | 2014-06-06 | 基板処理方法、コンピュータ記憶媒体及び基板処理システム |
TW103121719A TWI571920B (zh) | 2013-06-26 | 2014-06-24 | Substrate processing methods, programs, computer memory media and substrate processing systems |
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TWI648320B (zh) * | 2014-01-23 | 2019-01-21 | 東京應化工業股份有限公司 | 含相分離結構之結構體之製造方法、圖型形成方法、微細圖型形成方法 |
US9523917B2 (en) * | 2014-09-16 | 2016-12-20 | SK Hynix Inc. | Methods of forming patterns |
US9458353B1 (en) * | 2015-04-15 | 2016-10-04 | International Business Machines Corporation | Additives for orientation control of block copolymers |
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US20160124307A1 (en) | 2016-05-05 |
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