JP6022263B2 - ポリベンゾオキサゾール前駆体の製造方法 - Google Patents

ポリベンゾオキサゾール前駆体の製造方法 Download PDF

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Publication number
JP6022263B2
JP6022263B2 JP2012192514A JP2012192514A JP6022263B2 JP 6022263 B2 JP6022263 B2 JP 6022263B2 JP 2012192514 A JP2012192514 A JP 2012192514A JP 2012192514 A JP2012192514 A JP 2012192514A JP 6022263 B2 JP6022263 B2 JP 6022263B2
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polybenzoxazole precursor
solvent
water
polybenzoxazole
aprotic polar
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Japanese (ja)
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JP2013064130A (ja
JP2013064130A5 (enExample
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直也 沓澤
直也 沓澤
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Toho Chemical Industry Co Ltd
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Toho Chemical Industry Co Ltd
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    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G73/00—Macromolecular compounds obtained by reactions forming a linkage containing nitrogen with or without oxygen or carbon in the main chain of the macromolecule, not provided for in groups C08G12/00 - C08G71/00
    • C08G73/06—Polycondensates having nitrogen-containing heterocyclic rings in the main chain of the macromolecule
    • C08G73/22—Polybenzoxazoles

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  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Organic Chemistry (AREA)
  • Macromolecular Compounds Obtained By Forming Nitrogen-Containing Linkages In General (AREA)
JP2012192514A 2011-08-31 2012-08-31 ポリベンゾオキサゾール前駆体の製造方法 Active JP6022263B2 (ja)

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JP2012192514A JP6022263B2 (ja) 2011-08-31 2012-08-31 ポリベンゾオキサゾール前駆体の製造方法

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JP2011190080 2011-08-31
JP2011190080 2011-08-31
JP2012192514A JP6022263B2 (ja) 2011-08-31 2012-08-31 ポリベンゾオキサゾール前駆体の製造方法

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JP2013064130A JP2013064130A (ja) 2013-04-11
JP2013064130A5 JP2013064130A5 (enExample) 2016-04-14
JP6022263B2 true JP6022263B2 (ja) 2016-11-09

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US (1) US8487068B2 (enExample)
JP (1) JP6022263B2 (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPWO2014111998A1 (ja) * 2013-01-18 2017-01-19 日立化成デュポンマイクロシステムズ株式会社 ポリマ溶液の製造方法及びポリマ溶液
JP6538027B2 (ja) 2013-05-17 2019-07-03 フジフイルム エレクトロニック マテリアルズ ユー．エス．エー．， インコーポレイテッド 新規ポリマー及びそれを含有する熱硬化性組成物
TWI634135B (zh) * 2015-12-25 2018-09-01 日商富士軟片股份有限公司 樹脂、組成物、硬化膜、硬化膜的製造方法及半導體元件
JP2020164657A (ja) * 2019-03-29 2020-10-08 住友ベークライト株式会社 ポリベンゾオキサゾールの製造方法および感光性樹脂組成物
JP7454350B2 (ja) 2019-10-01 2024-03-22 太陽ホールディングス株式会社 ポリベンゾオキサゾール前駆体の製造方法

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6440530A (en) * 1987-08-06 1989-02-10 Prod Dev Res Inst Production of polybenzo-oxy or thio-azole
US4939215A (en) * 1987-11-24 1990-07-03 Hoechst Celanese Corporation Heat resistant polybenzoxazole from bis-((aminohydroxyphenyl)hexafluoroisopropyl)diphenyl ether
US4845183A (en) * 1987-11-24 1989-07-04 Hoechst Celanese Corporation Heat resistant polyamide and polybenzoxazole from bis-((amino-hydroxyphenyl)hexafluoroisopropyl)diphenyl ethers
JPH03188128A (ja) * 1989-12-15 1991-08-16 Honda Motor Co Ltd ポリベンゾビスオキサゾールの製造方法
JP2001163975A (ja) * 1999-12-03 2001-06-19 Sumitomo Bakelite Co Ltd ポリベンゾオキサゾール樹脂及びその前駆体
JP2007106786A (ja) 2005-10-11 2007-04-26 Sony Corp 残留ハロゲンを含有しないポリベンゾオキサゾール前駆体、ポリベンゾオキサゾール、及びこれらの製造方法
JP5332326B2 (ja) * 2007-06-18 2013-11-06 住友ベークライト株式会社 半導体装置の製造方法
JP2009074038A (ja) * 2007-08-29 2009-04-09 Sumitomo Bakelite Co Ltd ポリベンゾオキサゾール前駆体の製造方法

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US20130059985A1 (en) 2013-03-07
US8487068B2 (en) 2013-07-16
JP2013064130A (ja) 2013-04-11

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