JP6009134B1 - 多接合型太陽電池セルの製造方法 - Google Patents
多接合型太陽電池セルの製造方法 Download PDFInfo
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
- H01L31/042—PV modules or arrays of single PV cells
- H01L31/043—Mechanically stacked PV cells
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/547—Monocrystalline silicon PV cells
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Photovoltaic Devices (AREA)
Abstract
Description
1.シリコン基板の一方の面にアルミニウムペーストの塗膜を形成する工程aと、
前記シリコン基板及び前記塗膜を焼成処理する工程bと、
前記シリコン基板の他方の面に、III−V族化合物太陽電池層をウェハボンディング又は結晶成長により積層する工程c、
とを備えることを特徴とする、多接合型太陽電池セルの製造方法。
2.前記工程bと工程cとの間に前記シリコン基板を研磨する工程dをさらに含む、上記項1に記載の作製方法。
3.シリコン基板の一方の面にアルミニウムペーストの塗膜を形成する工程aと、
前記シリコン基板及び前記塗膜を焼成処理する工程bと、
前記シリコン基板を研磨する工程dとをこの順に備え、
前記工程dにおける研磨によって前記シリコン基板を取り除くことによって前記塗膜が焼成処理されて形成された焼結層を得た後、この焼結層の一方の面にIII−V族化合物太陽電池層をウェハボンディング又は結晶成長により積層する工程を備えることを特徴とする、多接合型太陽電池セルの製造方法。
4.前記III−V族化合物太陽電池層は、GaAs、InGaAs、GaP、InGaP、AlInP及びGaNからなる群から選択される少なくとも1種を含む、上記項1〜3のいずれか1項に記載の製造方法。
5.前記アルミニウムペーストには、平均粒子径が20μm以下であるアルミニウム粒子と、有機溶剤とが含まれる、上記項1〜4のいずれか1項に記載の製造方法。
6.前記工程bの焼成処理の温度が600℃以上1000℃以下の範囲内である、上記項1〜5のいずれか1項に記載の製造方法。
7.前記工程aにおいて絶縁膜を介在させてからアルミニウムペーストの塗膜を形成する、上記項1〜6のいずれか1項に記載の製造方法。
図1は、実施例1における多接合型太陽電池セルAの製造工程を模式的に示している。
図3は、実施例2における多接合型太陽電池セルAの製造工程を模式的に示している。
図4は、実施例3における多接合型太陽電池セルAの製造工程を模式的に示している。
まず、実施例1と同様の方法によって、n型シリコン基板1の片面に、アルミニウムシリコン合金層3とp型シリコン層4を形成させた。次いで、これを研磨することにより(工程d)、n型シリコン基板1の厚みを100μmまで薄型化した。
1 n型シリコン基板
2 アルミニウムペースト
3 アルミニウムシリコン合金層
4 p型シリコン層
5 III−V族化合物太陽電池層
6 絶縁膜
Claims (6)
- シリコン基板の一方の面にアルミニウムペーストの塗膜を形成する工程aと、
前記シリコン基板及び前記塗膜を焼成処理する工程bと、
前記シリコン基板の他方の面に、III−V族化合物太陽電池層をウェハボンディング又は結晶成長により積層する工程c、
とを備え、
前記工程bと工程cとの間に前記シリコン基板を研磨する工程dをさらに含むことを特徴とする、多接合型太陽電池セルの製造方法。 - シリコン基板の一方の面にアルミニウムペーストの塗膜を形成する工程aと、
前記シリコン基板及び前記塗膜を焼成処理する工程bと、
前記シリコン基板を研磨する工程dとをこの順に備え、
前記工程dにおける研磨によって前記シリコン基板を取り除くことによって前記塗膜が焼成処理されて形成された焼結層を得た後、この焼結層の一方の面にIII−V族化合物太陽電池層をウェハボンディング又は結晶成長により積層する工程を備えることを特徴とする、多接合型太陽電池セルの製造方法。 - 前記III−V族化合物太陽電池層は、GaAs、InGaAs、GaP、InGaP、AlInP及びGaNからなる群から選択される少なくとも1種を含む、請求項1又は2に記載の製造方法。
- 前記アルミニウムペーストには、平均粒子径が20μm以下であるアルミニウム粒子と、有機溶剤とが含まれる、請求項1〜3のいずれか1項に記載の製造方法。
- 前記工程bの焼成処理の温度が600℃以上1000℃以下の範囲内である、請求項1〜4のいずれか1項に記載の製造方法。
- 前記工程aにおいて絶縁膜を介在させてからアルミニウムペーストの塗膜を形成する、請求項1〜5のいずれか1項に記載の製造方法。
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