JP6008151B2 - 圧電振動片および圧電振動子 - Google Patents
圧電振動片および圧電振動子 Download PDFInfo
- Publication number
- JP6008151B2 JP6008151B2 JP2015091240A JP2015091240A JP6008151B2 JP 6008151 B2 JP6008151 B2 JP 6008151B2 JP 2015091240 A JP2015091240 A JP 2015091240A JP 2015091240 A JP2015091240 A JP 2015091240A JP 6008151 B2 JP6008151 B2 JP 6008151B2
- Authority
- JP
- Japan
- Prior art keywords
- axis
- vibrating piece
- piezoelectric vibrating
- excitation
- piezoelectric
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 230000005284 excitation Effects 0.000 claims description 87
- 239000000758 substrate Substances 0.000 claims description 49
- 239000010453 quartz Substances 0.000 claims description 36
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 36
- 239000013078 crystal Substances 0.000 claims description 27
- 230000002093 peripheral effect Effects 0.000 claims description 22
- 230000003287 optical effect Effects 0.000 claims description 4
- 238000004519 manufacturing process Methods 0.000 description 13
- 238000005260 corrosion Methods 0.000 description 12
- 230000007797 corrosion Effects 0.000 description 12
- 238000005530 etching Methods 0.000 description 12
- 230000008878 coupling Effects 0.000 description 10
- 238000010168 coupling process Methods 0.000 description 10
- 238000005859 coupling reaction Methods 0.000 description 10
- 230000000052 comparative effect Effects 0.000 description 8
- 230000000694 effects Effects 0.000 description 8
- 238000000605 extraction Methods 0.000 description 8
- 239000000243 solution Substances 0.000 description 8
- 238000000034 method Methods 0.000 description 7
- 238000012986 modification Methods 0.000 description 7
- 230000004048 modification Effects 0.000 description 7
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 6
- 239000000853 adhesive Substances 0.000 description 6
- 230000001070 adhesive effect Effects 0.000 description 6
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 5
- 229910052804 chromium Inorganic materials 0.000 description 5
- 239000011651 chromium Substances 0.000 description 5
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 5
- 229910052737 gold Inorganic materials 0.000 description 5
- 239000010931 gold Substances 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- 238000005452 bending Methods 0.000 description 4
- 238000005259 measurement Methods 0.000 description 4
- 238000009826 distribution Methods 0.000 description 3
- 238000010030 laminating Methods 0.000 description 3
- 238000000059 patterning Methods 0.000 description 3
- 238000000206 photolithography Methods 0.000 description 3
- 239000000470 constituent Substances 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 239000011259 mixed solution Substances 0.000 description 2
- 229920002120 photoresistant polymer Polymers 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 238000001771 vacuum deposition Methods 0.000 description 2
- DDFHBQSCUXNBSA-UHFFFAOYSA-N 5-(5-carboxythiophen-2-yl)thiophene-2-carboxylic acid Chemical compound S1C(C(=O)O)=CC=C1C1=CC=C(C(O)=O)S1 DDFHBQSCUXNBSA-UHFFFAOYSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 238000004380 ashing Methods 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000012993 chemical processing Methods 0.000 description 1
- 239000007772 electrode material Substances 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- CUPFNGOKRMWUOO-UHFFFAOYSA-N hydron;difluoride Chemical compound F.F CUPFNGOKRMWUOO-UHFFFAOYSA-N 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 238000005488 sandblasting Methods 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
Landscapes
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2015091240A JP6008151B2 (ja) | 2015-04-28 | 2015-04-28 | 圧電振動片および圧電振動子 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2015091240A JP6008151B2 (ja) | 2015-04-28 | 2015-04-28 | 圧電振動片および圧電振動子 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2014056309A Division JP5741876B2 (ja) | 2014-03-19 | 2014-03-19 | 圧電振動片および圧電振動子 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2016180375A Division JP6327307B2 (ja) | 2016-09-15 | 2016-09-15 | 圧電振動片および圧電振動子 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2015165701A JP2015165701A (ja) | 2015-09-17 |
| JP2015165701A5 JP2015165701A5 (enrdf_load_stackoverflow) | 2015-11-05 |
| JP6008151B2 true JP6008151B2 (ja) | 2016-10-19 |
Family
ID=54187980
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2015091240A Active JP6008151B2 (ja) | 2015-04-28 | 2015-04-28 | 圧電振動片および圧電振動子 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP6008151B2 (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2016213900A (ja) * | 2016-09-15 | 2016-12-15 | セイコーエプソン株式会社 | 圧電振動片および圧電振動子 |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005151432A (ja) * | 2003-11-19 | 2005-06-09 | Universal Scientific Industrial Co Ltd | 水晶デバイス用チップ及びその製造方法 |
| JP4075893B2 (ja) * | 2004-05-21 | 2008-04-16 | セイコーエプソン株式会社 | 水晶振動子の製造方法、その装置及び水晶振動子 |
| JP4572807B2 (ja) * | 2005-10-31 | 2010-11-04 | エプソントヨコム株式会社 | メサ型圧電振動片 |
| JP4936221B2 (ja) * | 2007-06-08 | 2012-05-23 | セイコーエプソン株式会社 | メサ型圧電振動片、メサ型圧電振動デバイス、発振器、及び電子機器 |
-
2015
- 2015-04-28 JP JP2015091240A patent/JP6008151B2/ja active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2016213900A (ja) * | 2016-09-15 | 2016-12-15 | セイコーエプソン株式会社 | 圧電振動片および圧電振動子 |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2015165701A (ja) | 2015-09-17 |
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