JP5997153B2 - 荷電粒子検出器 - Google Patents

荷電粒子検出器 Download PDF

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Publication number
JP5997153B2
JP5997153B2 JP2013524216A JP2013524216A JP5997153B2 JP 5997153 B2 JP5997153 B2 JP 5997153B2 JP 2013524216 A JP2013524216 A JP 2013524216A JP 2013524216 A JP2013524216 A JP 2013524216A JP 5997153 B2 JP5997153 B2 JP 5997153B2
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Prior art keywords
detector
charged particle
charged
target
particles
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Japanese (ja)
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JP2013535800A5 (enExample
JP2013535800A (ja
Inventor
エリック・ニードラー
ジョナサン・エイチ・オルロフ
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エフ・イ−・アイ・カンパニー
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/244—Detectors; Associated components or circuits therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/04—Means for controlling the discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/04—Means for controlling the discharge
    • H01J2237/047—Changing particle velocity
    • H01J2237/0475—Changing particle velocity decelerating
    • H01J2237/04756—Changing particle velocity decelerating with electrostatic means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/05—Arrangements for energy or mass analysis
    • H01J2237/053—Arrangements for energy or mass analysis electrostatic
    • H01J2237/0535—Mirror analyser

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  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Measurement Of Radiation (AREA)
JP2013524216A 2010-08-10 2011-08-10 荷電粒子検出器 Active JP5997153B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US12/854,008 2010-08-10
US12/854,008 US8481962B2 (en) 2010-08-10 2010-08-10 Distributed potential charged particle detector
PCT/US2011/047294 WO2012021652A2 (en) 2010-08-10 2011-08-10 Charged particle detector

Publications (3)

Publication Number Publication Date
JP2013535800A JP2013535800A (ja) 2013-09-12
JP2013535800A5 JP2013535800A5 (enExample) 2014-09-25
JP5997153B2 true JP5997153B2 (ja) 2016-09-28

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ID=45564131

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2013524216A Active JP5997153B2 (ja) 2010-08-10 2011-08-10 荷電粒子検出器

Country Status (5)

Country Link
US (2) US8481962B2 (enExample)
EP (1) EP2603926B1 (enExample)
JP (1) JP5997153B2 (enExample)
CN (1) CN103038856B (enExample)
WO (1) WO2012021652A2 (enExample)

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US8481962B2 (en) 2010-08-10 2013-07-09 Fei Company Distributed potential charged particle detector
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JP6228870B2 (ja) * 2013-06-19 2017-11-08 日本電子株式会社 検出器および荷電粒子線装置
US9418819B2 (en) 2013-09-06 2016-08-16 Kla-Tencor Corporation Asymmetrical detector design and methodology
US10040062B2 (en) 2014-01-14 2018-08-07 Wisconsin Alumni Research Foundation Device and method for transferring a target between locations
CN103823234B (zh) * 2014-03-12 2017-02-08 中国工程物理研究院电子工程研究所 一种脉冲带电粒子束探测器
JP6294758B2 (ja) * 2014-05-12 2018-03-14 株式会社ニューフレアテクノロジー 荷電粒子ビーム描画装置及び荷電粒子ビームのドーズ量異常検出方法
US9673019B2 (en) 2014-09-22 2017-06-06 El-Mul Technologies Ltd. Electron detection system
CZ305883B6 (cs) * 2014-11-07 2016-04-20 Tescan Orsay Holding, A.S. Zobrazovací zařízení zobrazující svazkem nabitých částic a detekující signální nabité částice víceúčelovým selektivním detektorem
US10236156B2 (en) 2015-03-25 2019-03-19 Hermes Microvision Inc. Apparatus of plural charged-particle beams
KR20200007103A (ko) 2015-11-30 2020-01-21 에이에스엠엘 네델란즈 비.브이. 복수의 하전된 입자 빔의 장치
US10605755B2 (en) * 2015-12-01 2020-03-31 Academia Sinica Method and device for detecting charged particles
EP3176808B1 (en) * 2015-12-03 2019-10-16 Carl Zeiss Microscopy Ltd. Method for detecting charged particles and particle beam device for carrying out the method
KR20200044100A (ko) * 2017-09-29 2020-04-28 에이에스엠엘 네델란즈 비.브이. 하전 입자에 대한 다중 셀 검출기
KR101914881B1 (ko) * 2017-11-01 2018-11-02 한국기초과학지원연구원 소형 비행시간 질량 분석기
US10692694B2 (en) * 2017-12-27 2020-06-23 Fei Company Method and apparatus for enhancing SE detection in mirror-based light imaging charged particle microscopes
JP7074479B2 (ja) * 2018-01-11 2022-05-24 株式会社ニューフレアテクノロジー マルチビーム検査装置
DE102018107529B4 (de) 2018-03-29 2023-03-23 Bruker Daltonics GmbH & Co. KG Verfahren zum Betrieb eines Sekundärelektronenvervielfachers im Ionendetektor eines Massenspektrometers für die Verlängerung der Lebensdauer
US10770262B1 (en) * 2018-05-30 2020-09-08 National Technology & Engineering Solutions Of Sandia, Llc Apparatus, method and system for imaging and utilization of SEM charged particles
JP7495939B2 (ja) * 2019-01-08 2024-06-05 アプライド マテリアルズ イスラエル リミテッド 走査電子顕微鏡およびオーバーレイ監視方法
CN109742007B (zh) * 2019-01-18 2021-02-26 西藏大学 一种紧凑型带电粒子检测器
JP7362477B2 (ja) * 2019-12-27 2023-10-17 浜松ホトニクス株式会社 電子増倍器およびそれを含む光電子増倍器
US10861666B1 (en) * 2020-01-30 2020-12-08 ICT Integrated Circuit Testing Gesellschaft für Halbletterprüftechnik mbH Method of operating a charged particle gun, charged particle gun, and charged particle beam device
WO2021255886A1 (ja) * 2020-06-18 2021-12-23 株式会社日立ハイテク 荷電粒子線装置
EP3929962A1 (en) * 2020-06-25 2021-12-29 FEI Company Method of imaging a specimen using a transmission charged particle microscope
US11921488B2 (en) * 2020-12-15 2024-03-05 Xerox Corporation System and method for machine-learning-enabled micro-object density distribution control with the aid of a digital computer

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Also Published As

Publication number Publication date
EP2603926A4 (en) 2014-07-09
US8481962B2 (en) 2013-07-09
CN103038856B (zh) 2015-10-07
EP2603926B1 (en) 2016-12-21
JP2013535800A (ja) 2013-09-12
US20130214156A1 (en) 2013-08-22
EP2603926A2 (en) 2013-06-19
US8907305B2 (en) 2014-12-09
CN103038856A (zh) 2013-04-10
WO2012021652A3 (en) 2012-05-03
US20120037802A1 (en) 2012-02-16
WO2012021652A2 (en) 2012-02-16

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