JP5995198B2 - 非接触吸着装置 - Google Patents

非接触吸着装置 Download PDF

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Publication number
JP5995198B2
JP5995198B2 JP2011224069A JP2011224069A JP5995198B2 JP 5995198 B2 JP5995198 B2 JP 5995198B2 JP 2011224069 A JP2011224069 A JP 2011224069A JP 2011224069 A JP2011224069 A JP 2011224069A JP 5995198 B2 JP5995198 B2 JP 5995198B2
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Japan
Prior art keywords
opening
suction
workpiece
intermediate member
adsorption
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Expired - Fee Related
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JP2011224069A
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English (en)
Japanese (ja)
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JP2012106331A5 (enrdf_load_stackoverflow
JP2012106331A (ja
Inventor
阿部　裕幸
裕幸 阿部
義弘 菊島
義弘 菊島
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
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National Institute of Advanced Industrial Science and Technology AIST
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Publication date
Application filed by National Institute of Advanced Industrial Science and Technology AIST filed Critical National Institute of Advanced Industrial Science and Technology AIST
Priority to JP2011224069A priority Critical patent/JP5995198B2/ja
Publication of JP2012106331A publication Critical patent/JP2012106331A/ja
Publication of JP2012106331A5 publication Critical patent/JP2012106331A5/ja
Application granted granted Critical
Publication of JP5995198B2 publication Critical patent/JP5995198B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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  • Manipulator (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP2011224069A 2010-10-29 2011-10-11 非接触吸着装置 Expired - Fee Related JP5995198B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2011224069A JP5995198B2 (ja) 2010-10-29 2011-10-11 非接触吸着装置

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2010243754 2010-10-29
JP2010243754 2010-10-29
JP2011224069A JP5995198B2 (ja) 2010-10-29 2011-10-11 非接触吸着装置

Publications (3)

Publication Number Publication Date
JP2012106331A JP2012106331A (ja) 2012-06-07
JP2012106331A5 JP2012106331A5 (enrdf_load_stackoverflow) 2014-09-04
JP5995198B2 true JP5995198B2 (ja) 2016-09-21

Family

ID=46492533

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011224069A Expired - Fee Related JP5995198B2 (ja) 2010-10-29 2011-10-11 非接触吸着装置

Country Status (1)

Country Link
JP (1) JP5995198B2 (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101600382B1 (ko) * 2014-05-12 2016-03-08 제트에스-핸들링 게엠베하 비접촉식 기판 그립핑 장치
CN109677499B (zh) * 2019-02-14 2024-01-16 河北工业大学 一种间隙式负压吸附爬壁机器人
KR102032957B1 (ko) * 2019-03-21 2019-10-16 조석훈 코안다 효과를 이용한 고정지그

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS631647A (ja) * 1986-06-23 1988-01-06 Taiyo Tekko Kk 無接触吸着装置
JPS6450239U (enrdf_load_stackoverflow) * 1987-09-24 1989-03-28
JPH09181026A (ja) * 1995-12-25 1997-07-11 Toshiba Corp 半導体装置の製造装置
JP5046009B2 (ja) * 2007-05-15 2012-10-10 圭三 大谷 ノンコンタクト搬送パッド
KR100928674B1 (ko) * 2009-04-07 2009-11-27 삼성코닝정밀유리 주식회사 비접촉 석션 그립핑 장치 및 이를 갖는 비접촉 석션 그립핑 프레임

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Publication number Publication date
JP2012106331A (ja) 2012-06-07

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