JP5993312B2 - 圧力測定器及びその圧力測定器を備える基板処理装置 - Google Patents

圧力測定器及びその圧力測定器を備える基板処理装置 Download PDF

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Publication number
JP5993312B2
JP5993312B2 JP2013005777A JP2013005777A JP5993312B2 JP 5993312 B2 JP5993312 B2 JP 5993312B2 JP 2013005777 A JP2013005777 A JP 2013005777A JP 2013005777 A JP2013005777 A JP 2013005777A JP 5993312 B2 JP5993312 B2 JP 5993312B2
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Japan
Prior art keywords
diaphragm
pressure measuring
pressure
measuring device
pressure chamber
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JP2013005777A
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English (en)
Japanese (ja)
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JP2014137275A5 (cg-RX-API-DMAC7.html
JP2014137275A (ja
Inventor
悟 小池
悟 小池
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Tokyo Electron Ltd
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Tokyo Electron Ltd
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Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Priority to JP2013005777A priority Critical patent/JP5993312B2/ja
Priority to KR1020140000821A priority patent/KR101810729B1/ko
Priority to US14/150,457 priority patent/US9360390B2/en
Publication of JP2014137275A publication Critical patent/JP2014137275A/ja
Publication of JP2014137275A5 publication Critical patent/JP2014137275A5/ja
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14—Housings
    • G01L19/145—Housings with stress relieving means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
    • G01L19/0627—Protection against aggressive medium in general
    • G01L19/0636—Protection against aggressive medium in general using particle filters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0042—Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Child & Adolescent Psychology (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Measuring Fluid Pressure (AREA)
  • Engineering & Computer Science (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
JP2013005777A 2013-01-16 2013-01-16 圧力測定器及びその圧力測定器を備える基板処理装置 Active JP5993312B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2013005777A JP5993312B2 (ja) 2013-01-16 2013-01-16 圧力測定器及びその圧力測定器を備える基板処理装置
KR1020140000821A KR101810729B1 (ko) 2013-01-16 2014-01-03 압력 측정기 및 압력 측정기를 구비하는 기판 처리 장치
US14/150,457 US9360390B2 (en) 2013-01-16 2014-01-08 Pressure measuring instrument and substrate processing apparatus provided with the pressure measuring instrument

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2013005777A JP5993312B2 (ja) 2013-01-16 2013-01-16 圧力測定器及びその圧力測定器を備える基板処理装置

Publications (3)

Publication Number Publication Date
JP2014137275A JP2014137275A (ja) 2014-07-28
JP2014137275A5 JP2014137275A5 (cg-RX-API-DMAC7.html) 2016-05-19
JP5993312B2 true JP5993312B2 (ja) 2016-09-14

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JP2013005777A Active JP5993312B2 (ja) 2013-01-16 2013-01-16 圧力測定器及びその圧力測定器を備える基板処理装置

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Country Link
US (1) US9360390B2 (cg-RX-API-DMAC7.html)
JP (1) JP5993312B2 (cg-RX-API-DMAC7.html)
KR (1) KR101810729B1 (cg-RX-API-DMAC7.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2020034325A (ja) * 2018-08-28 2020-03-05 株式会社エー・アンド・デイ 圧力センサ

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9429110B2 (en) 2013-01-16 2016-08-30 Ford Global Technologies, Llc Method and system for vacuum control
JP6727871B2 (ja) 2016-03-18 2020-07-22 東京エレクトロン株式会社 排気システム及びこれを用いた基板処理装置
CN106197826B (zh) * 2016-06-28 2018-10-12 蚌埠大洋传感系统工程有限公司 一种高精度传感器
CN106197828B (zh) * 2016-06-28 2019-01-01 蚌埠大洋传感系统工程有限公司 一种准确性高的传感器
CN106197825B (zh) * 2016-06-28 2018-10-12 蚌埠大洋传感系统工程有限公司 一种用于测量压强的传感器
CN106197827B (zh) * 2016-06-28 2019-01-01 蚌埠大洋传感系统工程有限公司 一种测量准确的传感器
US10310028B2 (en) * 2017-05-26 2019-06-04 Allegro Microsystems, Llc Coil actuated pressure sensor
JP7330060B2 (ja) 2019-10-18 2023-08-21 東京エレクトロン株式会社 成膜装置、制御装置及び圧力計の調整方法
CN110987282A (zh) * 2019-11-29 2020-04-10 中国科学院微电子研究所 一种防沉积匀气环
KR102850639B1 (ko) * 2022-12-19 2025-08-26 (주) 케이브이씨 방폭 진공게이지

Family Cites Families (9)

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Publication number Priority date Publication date Assignee Title
US5811685A (en) * 1996-12-11 1998-09-22 Mks Instruments, Inc. Fluid pressure sensor with contaminant exclusion system
JP3494594B2 (ja) * 1999-08-05 2004-02-09 忠弘 大見 圧力検出器の取付け構造
US7252011B2 (en) * 2002-03-11 2007-08-07 Mks Instruments, Inc. Surface area deposition trap
US7253107B2 (en) * 2004-06-17 2007-08-07 Asm International N.V. Pressure control system
US7204150B2 (en) * 2005-01-14 2007-04-17 Mks Instruments, Inc. Turbo sump for use with capacitive pressure sensor
JP4874984B2 (ja) 2005-09-27 2012-02-15 株式会社日立国際電気 基板処理装置
EP1979730B1 (de) 2006-01-18 2011-06-01 Inficon GmbH Vakuummesszelle mit membran
US7707891B2 (en) 2008-06-27 2010-05-04 Inficon Gmbh Optical interferometric pressure sensor
SG11201401275TA (en) * 2011-10-11 2014-05-29 Mks Instr Inc Pressure sensor

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2020034325A (ja) * 2018-08-28 2020-03-05 株式会社エー・アンド・デイ 圧力センサ
JP7002821B2 (ja) 2018-08-28 2022-01-20 株式会社エー・アンド・デイ 圧力センサ

Also Published As

Publication number Publication date
US9360390B2 (en) 2016-06-07
US20140196545A1 (en) 2014-07-17
KR101810729B1 (ko) 2017-12-19
KR20140092762A (ko) 2014-07-24
JP2014137275A (ja) 2014-07-28

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