SG11201401275TA - Pressure sensor - Google Patents
Pressure sensorInfo
- Publication number
- SG11201401275TA SG11201401275TA SG11201401275TA SG11201401275TA SG11201401275TA SG 11201401275T A SG11201401275T A SG 11201401275TA SG 11201401275T A SG11201401275T A SG 11201401275TA SG 11201401275T A SG11201401275T A SG 11201401275TA SG 11201401275T A SG11201401275T A SG 11201401275TA
- Authority
- SG
- Singapore
- Prior art keywords
- pressure sensor
- sensor
- pressure
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
- G01L9/0075—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a ceramic diaphragm, e.g. alumina, fused quartz, glass
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
- G01N27/227—Sensors changing capacitance upon adsorption or absorption of fluid components, e.g. electrolyte-insulator-semiconductor sensors, MOS capacitors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
- G01L19/0627—Protection against aggressive medium in general
- G01L19/0636—Protection against aggressive medium in general using particle filters
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201161545790P | 2011-10-11 | 2011-10-11 | |
| PCT/US2012/059697 WO2013055882A1 (en) | 2011-10-11 | 2012-10-11 | Pressure sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| SG11201401275TA true SG11201401275TA (en) | 2014-05-29 |
Family
ID=47116417
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| SG11201401275TA SG11201401275TA (en) | 2011-10-11 | 2012-10-11 | Pressure sensor |
| SG10201509452UA SG10201509452UA (en) | 2011-10-11 | 2012-10-11 | Pressure sensor |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| SG10201509452UA SG10201509452UA (en) | 2011-10-11 | 2012-10-11 | Pressure sensor |
Country Status (9)
| Country | Link |
|---|---|
| US (1) | US8887575B2 (en) |
| EP (1) | EP2766705B1 (en) |
| JP (2) | JP5826943B2 (en) |
| KR (2) | KR101588725B1 (en) |
| CN (2) | CN105758579B (en) |
| DK (1) | DK2766705T3 (en) |
| SG (2) | SG11201401275TA (en) |
| TW (1) | TWI532982B (en) |
| WO (1) | WO2013055882A1 (en) |
Families Citing this family (22)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI532982B (en) * | 2011-10-11 | 2016-05-11 | Ｍｋｓ公司 | Pressure sensor |
| JP6002016B2 (en) * | 2012-11-30 | 2016-10-05 | アズビル株式会社 | Capacitive pressure sensor |
| JP2014126504A (en) * | 2012-12-27 | 2014-07-07 | Azbil Corp | Capacitance type pressure sensor |
| JP5993312B2 (en) * | 2013-01-16 | 2016-09-14 | 東京エレクトロン株式会社 | Pressure measuring instrument and substrate processing apparatus including the pressure measuring instrument |
| US9562820B2 (en) * | 2013-02-28 | 2017-02-07 | Mks Instruments, Inc. | Pressure sensor with real time health monitoring and compensation |
| JP6231812B2 (en) * | 2013-08-09 | 2017-11-15 | アズビル株式会社 | Capacitive pressure sensor |
| JP6126545B2 (en) * | 2014-03-20 | 2017-05-10 | アズビル株式会社 | Capacitive pressure sensor |
| JP2016097033A (en) | 2014-11-20 | 2016-05-30 | キヤノン株式会社 | Capacitance type transducer and subject information acquisition device |
| DE102014118616A1 (en) * | 2014-12-15 | 2016-06-16 | Endress + Hauser Gmbh + Co. Kg | pressure transducers |
| CN108349775A (en) * | 2015-10-30 | 2018-07-31 | 康宁股份有限公司 | 3D molding glass based articles and its manufacturing method and equipment |
| JP6608332B2 (en) * | 2016-05-23 | 2019-11-20 | 東京エレクトロン株式会社 | Deposition equipment |
| JP6815221B2 (en) * | 2017-02-17 | 2021-01-20 | アズビル株式会社 | Capacitive pressure sensor |
| CN107505069B (en) * | 2017-10-17 | 2023-06-09 | 河北工业大学 | Pressure detection system based on capacitive displacement sensor |
| CN107843379B (en) * | 2017-12-13 | 2023-09-22 | 沈阳市传感技术研究所 | Capacitive pressure sensor with assembled fixed electrode |
| JP6981885B2 (en) * | 2018-01-23 | 2021-12-17 | アズビル株式会社 | Anomaly detection method and device for capacitive pressure sensor |
| CN108593198A (en) * | 2018-04-23 | 2018-09-28 | 武汉华星光电技术有限公司 | Capacitance diaphragm gauge and dry etching apparatus chamber pressure test system |
| CN108760140A (en) * | 2018-07-26 | 2018-11-06 | 沈阳白云机械有限公司 | Pressure detecting instrument |
| CN109746177B (en) * | 2019-03-12 | 2024-03-12 | 重庆大学 | Piezoelectric ultrasonic transducer and working method thereof |
| US11287342B2 (en) * | 2020-03-20 | 2022-03-29 | Mks Instruments, Inc. | Capacitance manometer with improved baffle for improved detection accuracy |
| TWI783803B (en) * | 2021-12-01 | 2022-11-11 | 台灣電力股份有限公司 | Method for measuring steam pressure |
| CN114264403A (en) * | 2021-12-03 | 2022-04-01 | 北京晨晶精仪电子有限公司 | Particle blocking structure of vacuum gauge |
| KR102631601B1 (en) * | 2023-06-05 | 2024-02-02 | 주식회사 이너센서 | Sensing device for a catalytic combustion typed gas sensor and catalytic combustion typed gas sensor including the same |
Family Cites Families (39)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4499773A (en) | 1983-04-28 | 1985-02-19 | Dresser Industries, Inc. | Variable capacitance pressure transducer |
| US4785669A (en) | 1987-05-18 | 1988-11-22 | Mks Instruments, Inc. | Absolute capacitance manometers |
| JPH01262432A (en) * | 1988-04-12 | 1989-10-19 | Nec Corp | Diaphragm capacity type vacuum gauge |
| US4823603A (en) | 1988-05-03 | 1989-04-25 | Vacuum General, Inc. | Capacitance manometer having stress relief for fixed electrode |
| JPH0375500U (en) * | 1989-11-27 | 1991-07-29 | ||
| US5271277A (en) * | 1991-12-23 | 1993-12-21 | The Boc Group, Inc. | Capacitance pressure transducer |
| JP2815279B2 (en) * | 1993-03-30 | 1998-10-27 | 本田技研工業株式会社 | pressure sensor |
| US5396803A (en) * | 1993-07-07 | 1995-03-14 | Tylan General, Inc. | Dual balanced capacitance manometers for suppressing vibration effects |
| US5808206A (en) | 1996-01-16 | 1998-09-15 | Mks Instruments, Inc. | Heated pressure transducer assembly |
| US5625152A (en) | 1996-01-16 | 1997-04-29 | Mks Instruments, Inc. | Heated pressure transducer assembly |
| US5811685A (en) | 1996-12-11 | 1998-09-22 | Mks Instruments, Inc. | Fluid pressure sensor with contaminant exclusion system |
| SE9700612D0 (en) | 1997-02-20 | 1997-02-20 | Cecap Ab | Sensor element with integrated reference pressure |
| US5942692A (en) | 1997-04-10 | 1999-08-24 | Mks Instruments, Inc. | Capacitive pressure sensing method and apparatus avoiding interelectrode capacitance by driving with in-phase excitation signals |
| US5911162A (en) | 1997-06-20 | 1999-06-08 | Mks Instruments, Inc. | Capacitive pressure transducer with improved electrode support |
| US5965821A (en) | 1997-07-03 | 1999-10-12 | Mks Instruments, Inc. | Pressure sensor |
| US20040099061A1 (en) | 1997-12-22 | 2004-05-27 | Mks Instruments | Pressure sensor for detecting small pressure differences and low pressures |
| US6568274B1 (en) | 1998-02-04 | 2003-05-27 | Mks Instruments, Inc. | Capacitive based pressure sensor design |
| US6029525A (en) | 1998-02-04 | 2000-02-29 | Mks Instruments, Inc. | Capacitive based pressure sensor design |
| JP3260721B2 (en) * | 1999-04-02 | 2002-02-25 | 山形日本電気株式会社 | Diaphragm vacuum gauge |
| TW418296B (en) * | 1999-06-30 | 2001-01-11 | Koninkl Philips Electronics Nv | A low-pressure apparatus for carrying out steps in the manufacture of a device, a method of manufacturing a device making use of such an apparatus, and a pressure control valve |
| US6105436A (en) | 1999-07-23 | 2000-08-22 | Mks Instruments, Inc. | Capacitive pressure transducer with improved electrode support |
| US6443015B1 (en) | 1999-09-10 | 2002-09-03 | Mks Instruments, Inc. | Baffle for a capacitive pressure sensor |
| US6672171B2 (en) | 2001-07-16 | 2004-01-06 | Mks Instruments, Inc. | Combination differential and absolute pressure transducer for load lock control |
| US6901808B1 (en) | 2002-02-12 | 2005-06-07 | Lam Research Corporation | Capacitive manometer having reduced process drift |
| US6993973B2 (en) * | 2003-05-16 | 2006-02-07 | Mks Instruments, Inc. | Contaminant deposition control baffle for a capacitive pressure transducer |
| FR2859528B1 (en) | 2003-09-09 | 2006-01-06 | Thales Sa | MICRO-FACTORY GYROMETER WITH DOUBLE DIAPASON AND DETECTION IN PLATE PLATE |
| US6909975B2 (en) | 2003-11-24 | 2005-06-21 | Mks Instruments, Inc. | Integrated absolute and differential pressure transducer |
| JP2005351744A (en) * | 2004-06-10 | 2005-12-22 | Nabtesco Corp | Electrostatic capacitance type pressure sensor |
| JP4014006B2 (en) * | 2004-06-17 | 2007-11-28 | 株式会社山武 | Pressure sensor |
| US7201057B2 (en) | 2004-09-30 | 2007-04-10 | Mks Instruments, Inc. | High-temperature reduced size manometer |
| US7137301B2 (en) | 2004-10-07 | 2006-11-21 | Mks Instruments, Inc. | Method and apparatus for forming a reference pressure within a chamber of a capacitance sensor |
| US7141447B2 (en) | 2004-10-07 | 2006-11-28 | Mks Instruments, Inc. | Method of forming a seal between a housing and a diaphragm of a capacitance sensor |
| US7000479B1 (en) | 2005-05-02 | 2006-02-21 | Mks Instruments, Inc. | Heated pressure transducer |
| ATE511633T1 (en) | 2006-01-18 | 2011-06-15 | Inficon Gmbh | VACUUM MEASURING CELL WITH MEMBRANE |
| DE112007001835B4 (en) | 2006-08-09 | 2018-05-09 | Mks Instruments, Inc. | Constant power conversion in capacitive pressure transducers |
| US7706995B2 (en) | 2007-04-16 | 2010-04-27 | Mks Instr Inc | Capacitance manometers and methods relating to auto-drift correction |
| US7757563B2 (en) | 2008-04-10 | 2010-07-20 | Mks Instruments, Inc. | Capacitance manometers and methods of making same |
| US8704538B2 (en) * | 2010-07-01 | 2014-04-22 | Mks Instruments, Inc. | Capacitance sensors |
| TWI532982B (en) * | 2011-10-11 | 2016-05-11 | Ｍｋｓ公司 | Pressure sensor |
-
2012
- 2012-10-11 TW TW101137478A patent/TWI532982B/en active
- 2012-10-11 EP EP12780604.0A patent/EP2766705B1/en active Active
- 2012-10-11 US US13/649,476 patent/US8887575B2/en active Active
- 2012-10-11 SG SG11201401275TA patent/SG11201401275TA/en unknown
- 2012-10-11 CN CN201610107791.7A patent/CN105758579B/en active Active
- 2012-10-11 KR KR1020147012582A patent/KR101588725B1/en active IP Right Grant
- 2012-10-11 KR KR1020167001155A patent/KR101849211B1/en active IP Right Grant
- 2012-10-11 SG SG10201509452UA patent/SG10201509452UA/en unknown
- 2012-10-11 JP JP2014535863A patent/JP5826943B2/en active Active
- 2012-10-11 DK DK12780604T patent/DK2766705T3/en active
- 2012-10-11 CN CN201280059759.6A patent/CN104145179B/en active Active
- 2012-10-11 WO PCT/US2012/059697 patent/WO2013055882A1/en active Application Filing
-
2015
- 2015-10-14 JP JP2015203223A patent/JP6063540B2/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| US20130189160A1 (en) | 2013-07-25 |
| KR20140088144A (en) | 2014-07-09 |
| TW201337229A (en) | 2013-09-16 |
| CN105758579B (en) | 2019-06-11 |
| JP2016029385A (en) | 2016-03-03 |
| US8887575B2 (en) | 2014-11-18 |
| KR101849211B1 (en) | 2018-04-16 |
| WO2013055882A1 (en) | 2013-04-18 |
| SG10201509452UA (en) | 2015-12-30 |
| JP5826943B2 (en) | 2015-12-02 |
| JP2014528593A (en) | 2014-10-27 |
| EP2766705A1 (en) | 2014-08-20 |
| CN105758579A (en) | 2016-07-13 |
| EP2766705B1 (en) | 2019-08-28 |
| CN104145179A (en) | 2014-11-12 |
| JP6063540B2 (en) | 2017-01-18 |
| KR20160012247A (en) | 2016-02-02 |
| KR101588725B1 (en) | 2016-01-26 |
| CN104145179B (en) | 2016-11-09 |
| DK2766705T3 (en) | 2019-10-28 |
| TWI532982B (en) | 2016-05-11 |
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