JP5992334B2 - ウエハのエッジおよび斜面の堆積を修正するためのシャドウリング - Google Patents
ウエハのエッジおよび斜面の堆積を修正するためのシャドウリング Download PDFInfo
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Description
Claims (14)
- 堆積チャンバ内で使用するシャドウリングであって、
上面および底面を有する環状の本体であって、底面が第1の環状の底面及び第2の環状の底面を含み、第2の環状の底面が第1の環状の底面に対して内側に設置されたくぼんだスロット内に設置され、第2の環状の底面が第1の環状の底面の上方に深さを有する、環状の本体と、
第1の環状の底面から延在する少なくとも1つのピン部材と、
くぼんだスロットに対して内側に延在する環状の縁であって、該環状の縁が垂直な表面と第3の環状の底面とを有し、該第3の環状の底面が第1の環状の底面と第2の環状の底面の間の深さで、該垂直な表面が該第3の環状の底面を該第2の環状の底面に接続する、
シャドウリング。 - 少なくとも1つのピン部材が先細の側部を有する、請求項1に記載のシャドウリング。
- 少なくとも1つのピン部材が円錐台形状である、請求項1に記載のシャドウリング。
- くぼんだスロットが約0.254mm以上の幅を有する、請求項1に記載のシャドウリング。
- シャドウリングの外径上に配置される1つまたは複数の突起をさらに備える、請求項1に記載のシャドウリング。
- ウエハ上に材料を堆積させるためのチャンバであって、
チャンバ本体と、
ウエハを支持するための上面を有する基板支持体と、
シャドウリングと
を備え、シャドウリングが、
第1の環状の底面と、
第1の環状の底面から延在する少なくとも1つのピン部材と、
第1の環状の底面に対して内側に設置されたくぼんだスロット内に設置された第2の環状の底面であって、第2の環状の底面が第1の環状の底面の上方に深さを有する、第2の環状の底面と、
くぼんだスロットに対して内側に延在する環状の縁であって、該環状の縁が垂直な表面と第3の環状の底面とを有し、該第3の環状の底面が第1の環状の底面と第2の環状の底面の間の深さで、該垂直な表面が該第3の環状の底面を該第2の環状の底面に接続する、
チャンバ。 - 基板支持体の上面に少なくとも1つの位置合わせ凹部をさらに備え、少なくとも1つの位置合わせ凹部が少なくとも1つのピンと結合し、シャドウリングを基板支持体に対して位置合わせする、
請求項6に記載のチャンバ。 - 少なくとも1つのピン部材が先細の側部を有する、請求項7に記載のチャンバ。
- 少なくとも1つのピン部材が円錐台形状である、請求項7に記載のチャンバ。
- 処理チャンバ内で堆積プロセス中のウエハのエッジにおける材料の堆積を調整する方法であって、
ウエハのエッジにおいて、堆積に影響を及ぼし堆積均一性を改善するように、シャドウリングの少なくとも1つのパラメータを変更するステップを含み、シャドウリングが、
第1の環状の底面と、
第1の環状の底面に対して内側に設置されたくぼんだスロット内に設置された第2の環状の底面であって、第2の環状の底面が第1の環状の底面の上方に深さを有する、第2の環状の底面と、
第1の環状の底面から延在する少なくとも1つのピン部材と、
くぼんだスロットに対して内側に延在する環状の縁であって、環状の縁が第1の環状の底面と第2の環状の底面の間の深さで第3の環状の底面を有する、環状の縁と
を備える、方法。 - シャドウリングのパラメータを変更するステップが、くぼんだスロットのサイズを改変するステップを含む、請求項10に記載の方法。
- シャドウリングのパラメータを変更するステップが、シャドウリングの上面から材料を追加または除去するステップを含む、請求項10に記載の方法。
- シャドウリングのパラメータを変更するステップが、環状の縁のサイズを増加または減少させるステップのうちの1つのステップを含む、請求項10に記載の方法。
- シャドウリングのパラメータを変更するステップが、シャドウリングを形成する材料の組成物を変更するステップを含む、請求項10に記載の方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US29168009P | 2009-12-31 | 2009-12-31 | |
US61/291,680 | 2009-12-31 | ||
PCT/US2010/061470 WO2011082020A2 (en) | 2009-12-31 | 2010-12-21 | Shadow ring for modifying wafer edge and bevel deposition |
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JP2013516766A JP2013516766A (ja) | 2013-05-13 |
JP5992334B2 true JP5992334B2 (ja) | 2016-09-14 |
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JP2012547135A Active JP5992334B2 (ja) | 2009-12-31 | 2010-12-21 | ウエハのエッジおよび斜面の堆積を修正するためのシャドウリング |
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US (2) | US10227695B2 (ja) |
JP (1) | JP5992334B2 (ja) |
KR (3) | KR102124441B1 (ja) |
CN (1) | CN102714146A (ja) |
TW (1) | TWI537409B (ja) |
WO (1) | WO2011082020A2 (ja) |
Families Citing this family (58)
Publication number | Priority date | Publication date | Assignee | Title |
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CN102714146A (zh) * | 2009-12-31 | 2012-10-03 | 应用材料公司 | 用以修改晶圆边缘与斜面沉积的遮蔽环 |
JP5562065B2 (ja) * | 2010-02-25 | 2014-07-30 | Sppテクノロジーズ株式会社 | プラズマ処理装置 |
US20140007901A1 (en) * | 2012-07-06 | 2014-01-09 | Jack Chen | Methods and apparatus for bevel edge cleaning in a plasma processing system |
US8865602B2 (en) | 2012-09-28 | 2014-10-21 | Applied Materials, Inc. | Edge ring lip |
KR200483130Y1 (ko) * | 2012-10-20 | 2017-04-18 | 어플라이드 머티어리얼스, 인코포레이티드 | 세그먼트화된 포커스 링 조립체 |
CN104704626B (zh) | 2012-10-24 | 2017-12-05 | 应用材料公司 | 用于快速热处理的最小接触边缘环 |
JP5343162B1 (ja) * | 2012-10-26 | 2013-11-13 | エピクルー株式会社 | エピタキシャル成長装置 |
US20140225502A1 (en) * | 2013-02-08 | 2014-08-14 | Korea Institute Of Machinery & Materials | Remote plasma generation apparatus |
US9997381B2 (en) * | 2013-02-18 | 2018-06-12 | Lam Research Corporation | Hybrid edge ring for plasma wafer processing |
CN103730318B (zh) * | 2013-11-15 | 2016-04-06 | 中微半导体设备(上海)有限公司 | 一种晶圆边缘保护环及减少晶圆边缘颗粒的方法 |
CN104733344A (zh) * | 2013-12-18 | 2015-06-24 | 北京北方微电子基地设备工艺研究中心有限责任公司 | 一种边沿保护装置及等离子体加工设备 |
US9236284B2 (en) | 2014-01-31 | 2016-01-12 | Applied Materials, Inc. | Cooled tape frame lift and low contact shadow ring for plasma heat isolation |
CN103996643A (zh) * | 2014-05-30 | 2014-08-20 | 沈阳拓荆科技有限公司 | 立柱式陶瓷环定位用销 |
US9368340B2 (en) | 2014-06-02 | 2016-06-14 | Lam Research Corporation | Metallization of the wafer edge for optimized electroplating performance on resistive substrates |
US11195756B2 (en) * | 2014-09-19 | 2021-12-07 | Applied Materials, Inc. | Proximity contact cover ring for plasma dicing |
JP6516436B2 (ja) * | 2014-10-24 | 2019-05-22 | 東京エレクトロン株式会社 | 成膜装置及び成膜方法 |
CN105624634B (zh) * | 2014-11-04 | 2018-05-08 | 北京北方华创微电子装备有限公司 | 反应腔室及半导体加工设备 |
US10903055B2 (en) * | 2015-04-17 | 2021-01-26 | Applied Materials, Inc. | Edge ring for bevel polymer reduction |
US9879358B2 (en) * | 2015-05-27 | 2018-01-30 | Applied Materials, Inc. | Heat shield ring for high growth rate EPI chamber |
CN105040097B (zh) * | 2015-06-30 | 2018-05-01 | 上海华力微电子有限公司 | 针对晶圆晶边的化学气相沉积工艺腔及化学气相沉积方法 |
EP3116022A3 (en) * | 2015-07-08 | 2017-03-08 | IMEC vzw | Method for producing an integrated circuit device with enhanced mechanical properties |
CN107304473B (zh) * | 2016-04-20 | 2020-08-21 | 北京北方华创微电子装备有限公司 | 反应腔室及半导体加工设备 |
KR102487342B1 (ko) | 2016-06-14 | 2023-01-13 | 삼성전자주식회사 | 정전척 어셈블리 및 이를 구비하는 플라즈마 처리장치 |
CN106643598A (zh) * | 2016-10-10 | 2017-05-10 | 上海华力微电子有限公司 | 一种检测淀积APF设备阴影shadowring位偏及解决方法 |
KR101754589B1 (ko) * | 2016-11-21 | 2017-07-10 | 피에스케이 주식회사 | 기판 처리 장치 및 기판 처리 방법 |
US10704147B2 (en) * | 2016-12-03 | 2020-07-07 | Applied Materials, Inc. | Process kit design for in-chamber heater and wafer rotating mechanism |
CN108231525B (zh) * | 2016-12-14 | 2020-03-31 | 北京北方华创微电子装备有限公司 | 一种腔室和半导体设备 |
JP7108623B2 (ja) * | 2017-02-16 | 2022-07-28 | アプライド マテリアルズ インコーポレイテッド | 高温環境において高周波電力を測定するための電圧-電流プローブ、及び電圧-電流プローブを較正する方法 |
CN108573845B (zh) * | 2017-03-07 | 2020-02-14 | 北京北方华创微电子装备有限公司 | 反应腔室及半导体加工设备 |
US11043364B2 (en) * | 2017-06-05 | 2021-06-22 | Applied Materials, Inc. | Process kit for multi-cathode processing chamber |
CN109256357B (zh) * | 2017-07-13 | 2020-06-19 | 北京北方华创微电子装备有限公司 | 高温静电卡盘 |
CN110506326B (zh) * | 2017-07-24 | 2024-03-19 | 朗姆研究公司 | 可移动的边缘环设计 |
CN107297296B (zh) * | 2017-08-10 | 2023-03-10 | 珠海三威注塑模具有限公司 | 自动涂装遮蔽设备、自动涂装系统和自动涂装方法 |
US10468221B2 (en) * | 2017-09-27 | 2019-11-05 | Applied Materials, Inc. | Shadow frame with sides having a varied profile for improved deposition uniformity |
CN109755101B (zh) * | 2017-11-01 | 2021-05-14 | 长鑫存储技术有限公司 | 成膜方法 |
CN108103473B (zh) * | 2017-12-18 | 2020-04-24 | 沈阳拓荆科技有限公司 | 用于半导体处理腔体的遮蔽装置及其使用方法 |
US20190287835A1 (en) * | 2018-02-01 | 2019-09-19 | Yield Engineering Systems, Inc. | Interchangeable Edge Rings For Stabilizing Wafer Placement And System Using Same |
TWI721463B (zh) * | 2019-06-21 | 2021-03-11 | 日月光半導體製造股份有限公司 | 環狀件及晶圓夾持組件 |
US20210047730A1 (en) * | 2019-08-13 | 2021-02-18 | Applied Materials, Inc. | Chamber configurations for controlled deposition |
KR20220129045A (ko) * | 2020-01-17 | 2022-09-22 | 램 리써치 코포레이션 | 웨이퍼 에지 가스를 배기하기 위한 플로우 경로들을 갖는 배제 링 |
WO2021162865A1 (en) | 2020-02-11 | 2021-08-19 | Lam Research Corporation | Carrier ring designs for controlling deposition on wafer bevel/edge |
CN111364022B (zh) * | 2020-03-10 | 2023-02-10 | 北京北方华创微电子装备有限公司 | 反应腔室 |
CN113764328B (zh) * | 2020-06-02 | 2024-06-21 | 拓荆科技股份有限公司 | 用于加工晶圆的装置及方法 |
CN111613512B (zh) * | 2020-06-22 | 2022-10-21 | 北京北方华创微电子装备有限公司 | 半导体设备及其工艺腔室 |
CN114517292A (zh) * | 2020-11-18 | 2022-05-20 | 中国科学院微电子研究所 | 一种晶圆托盘结构及设备 |
US20220199373A1 (en) * | 2020-12-18 | 2022-06-23 | Applied Materials, Inc. | Methods to eliminate of deposition on wafer bevel and backside |
CN114717514B (zh) * | 2021-01-06 | 2023-12-15 | 鑫天虹(厦门)科技有限公司 | 薄膜沉积设备 |
CN114763602B (zh) * | 2021-01-13 | 2023-09-29 | 台湾积体电路制造股份有限公司 | 晶圆处理设备与制造半导体装置的方法 |
TWI745240B (zh) * | 2021-02-22 | 2021-11-01 | 天虹科技股份有限公司 | 晶圓承載固定裝置及應用該晶圓承載固定裝置的薄膜沉積設備 |
CN112877655A (zh) * | 2021-03-08 | 2021-06-01 | 泰杋科技股份有限公司 | 一种溅镀沉积的反应腔体 |
US11881375B2 (en) | 2021-04-15 | 2024-01-23 | Applied Materials, Inc. | Common substrate and shadow ring lift apparatus |
CN113241312A (zh) * | 2021-04-30 | 2021-08-10 | 北京北方华创微电子装备有限公司 | 半导体工艺设备的工艺腔室及半导体工艺设备 |
WO2023041185A1 (en) * | 2021-09-20 | 2023-03-23 | Applied Materials, Inc. | Mask frame support element, edge exclusion mask, mask frame element, substrate support, substrate processing apparatus, and method of manufacturing one or more devices on a substrate |
CN113921365B (zh) * | 2021-09-29 | 2024-03-26 | 北京北方华创微电子装备有限公司 | 半导体工艺设备及其边缘保护机构 |
US20230307211A1 (en) * | 2022-03-25 | 2023-09-28 | Applied Materials, Inc. | Process Chamber And Process Kits For Advanced Packaging |
US20230357929A1 (en) * | 2022-05-05 | 2023-11-09 | Applied Materials, Inc. | Apparatus and methods to promote wafer edge temperature uniformity |
CN115863245A (zh) * | 2022-12-20 | 2023-03-28 | 深圳市硕凯电子股份有限公司 | 一种晶圆结构的制作方法及晶圆结构 |
CN115896738B (zh) * | 2023-03-10 | 2023-05-30 | 上海陛通半导体能源科技股份有限公司 | 环形屏蔽件及薄膜沉积设备 |
Family Cites Families (44)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5094885A (en) * | 1990-10-12 | 1992-03-10 | Genus, Inc. | Differential pressure cvd chuck |
US5447570A (en) * | 1990-04-23 | 1995-09-05 | Genus, Inc. | Purge gas in wafer coating area selection |
US5855687A (en) * | 1990-12-05 | 1999-01-05 | Applied Materials, Inc. | Substrate support shield in wafer processing reactors |
US5328722A (en) | 1992-11-06 | 1994-07-12 | Applied Materials, Inc. | Metal chemical vapor deposition process using a shadow ring |
US5326725A (en) * | 1993-03-11 | 1994-07-05 | Applied Materials, Inc. | Clamping ring and susceptor therefor |
US5511799A (en) * | 1993-06-07 | 1996-04-30 | Applied Materials, Inc. | Sealing device useful in semiconductor processing apparatus for bridging materials having a thermal expansion differential |
US5421401A (en) * | 1994-01-25 | 1995-06-06 | Applied Materials, Inc. | Compound clamp ring for semiconductor wafers |
US5888304A (en) | 1996-04-02 | 1999-03-30 | Applied Materials, Inc. | Heater with shadow ring and purge above wafer surface |
US6033480A (en) | 1994-02-23 | 2000-03-07 | Applied Materials, Inc. | Wafer edge deposition elimination |
US5476548A (en) | 1994-06-20 | 1995-12-19 | Applied Materials, Inc. | Reducing backside deposition in a substrate processing apparatus through the use of a shadow ring |
US5868847A (en) * | 1994-12-16 | 1999-02-09 | Applied Materials, Inc. | Clamp ring for shielding a substrate during film layer deposition |
US5632873A (en) * | 1995-05-22 | 1997-05-27 | Stevens; Joseph J. | Two piece anti-stick clamp ring |
US6102164A (en) * | 1996-02-28 | 2000-08-15 | Applied Materials, Inc. | Multiple independent robot assembly and apparatus for processing and transferring semiconductor wafers |
US5810931A (en) * | 1996-07-30 | 1998-09-22 | Applied Materials, Inc. | High aspect ratio clamp ring |
TW350983B (en) * | 1996-10-15 | 1999-01-21 | Applied Materials Inc | Wafer edge deposition elimination |
WO1998029704A1 (en) * | 1997-01-02 | 1998-07-09 | Cvc Products, Inc. | Thermally conductive chuck for vacuum processor |
KR19980071011A (ko) * | 1997-01-24 | 1998-10-26 | 조셉 제이. 스위니 | 고온 및 고 흐름 속도의 화학적 기상 증착 장치 및 관련증착 방법 |
US5983906A (en) | 1997-01-24 | 1999-11-16 | Applied Materials, Inc. | Methods and apparatus for a cleaning process in a high temperature, corrosive, plasma environment |
US6063440A (en) | 1997-07-11 | 2000-05-16 | Applied Materials, Inc. | Method for aligning a wafer |
US6186092B1 (en) | 1997-08-19 | 2001-02-13 | Applied Materials, Inc. | Apparatus and method for aligning and controlling edge deposition on a substrate |
US6051122A (en) * | 1997-08-21 | 2000-04-18 | Applied Materials, Inc. | Deposition shield assembly for a semiconductor wafer processing system |
JP4019466B2 (ja) * | 1997-09-26 | 2007-12-12 | 富士通株式会社 | 膜形成装置 |
US6138745A (en) * | 1997-09-26 | 2000-10-31 | Cvc Products, Inc. | Two-stage sealing system for thermally conductive chuck |
US6073576A (en) * | 1997-11-25 | 2000-06-13 | Cvc Products, Inc. | Substrate edge seal and clamp for low-pressure processing equipment |
US6511543B1 (en) * | 1997-12-23 | 2003-01-28 | Unaxis Balzers Aktiengesellschaft | Holding device |
US6096135A (en) | 1998-07-21 | 2000-08-01 | Applied Materials, Inc. | Method and apparatus for reducing contamination of a substrate in a substrate processing system |
US6168668B1 (en) * | 1998-11-25 | 2001-01-02 | Applied Materials, Inc. | Shadow ring and guide for supporting the shadow ring in a chamber |
US6277198B1 (en) | 1999-06-04 | 2001-08-21 | Applied Materials, Inc. | Use of tapered shadow clamp ring to provide improved physical vapor deposition system |
US6355108B1 (en) * | 1999-06-22 | 2002-03-12 | Applied Komatsu Technology, Inc. | Film deposition using a finger type shadow frame |
US6375748B1 (en) * | 1999-09-01 | 2002-04-23 | Applied Materials, Inc. | Method and apparatus for preventing edge deposition |
US6589352B1 (en) * | 1999-12-10 | 2003-07-08 | Applied Materials, Inc. | Self aligning non contact shadow ring process kit |
US6223447B1 (en) * | 2000-02-15 | 2001-05-01 | Applied Materials, Inc. | Fastening device for a purge ring |
US6350320B1 (en) * | 2000-02-22 | 2002-02-26 | Applied Materials, Inc. | Heater for processing chamber |
US6521292B1 (en) * | 2000-08-04 | 2003-02-18 | Applied Materials, Inc. | Substrate support including purge ring having inner edge aligned to wafer edge |
TW518690B (en) | 2000-09-14 | 2003-01-21 | Tokyo Electron Ltd | Plasma processing apparatus and its electrode plate, its electrode supporting body and its shield ring |
US6544340B2 (en) * | 2000-12-08 | 2003-04-08 | Applied Materials, Inc. | Heater with detachable ceramic top plate |
US6676812B2 (en) * | 2002-05-09 | 2004-01-13 | Taiwan Semiconductor Manufacturing Co., Ltd. | Alignment mark shielding ring without arcing defect and method for using |
US7024105B2 (en) * | 2003-10-10 | 2006-04-04 | Applied Materials Inc. | Substrate heater assembly |
US20050196971A1 (en) * | 2004-03-05 | 2005-09-08 | Applied Materials, Inc. | Hardware development to reduce bevel deposition |
JP4590363B2 (ja) * | 2005-03-16 | 2010-12-01 | 日本碍子株式会社 | ガス供給部材及びそれを用いた処理装置 |
US20060207508A1 (en) * | 2005-03-16 | 2006-09-21 | Applied Materials, Inc. | Film deposition using a spring loaded contact finger type shadow frame |
US20070065597A1 (en) * | 2005-09-15 | 2007-03-22 | Asm Japan K.K. | Plasma CVD film formation apparatus provided with mask |
US7754518B2 (en) * | 2008-02-15 | 2010-07-13 | Applied Materials, Inc. | Millisecond annealing (DSA) edge protection |
CN102714146A (zh) * | 2009-12-31 | 2012-10-03 | 应用材料公司 | 用以修改晶圆边缘与斜面沉积的遮蔽环 |
-
2010
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US11136665B2 (en) | 2021-10-05 |
CN102714146A (zh) | 2012-10-03 |
WO2011082020A3 (en) | 2011-11-17 |
US20110159211A1 (en) | 2011-06-30 |
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TWI537409B (zh) | 2016-06-11 |
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