JP5992143B2 - ライン走査型分光装置 - Google Patents

ライン走査型分光装置 Download PDF

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Publication number
JP5992143B2
JP5992143B2 JP2010543575A JP2010543575A JP5992143B2 JP 5992143 B2 JP5992143 B2 JP 5992143B2 JP 2010543575 A JP2010543575 A JP 2010543575A JP 2010543575 A JP2010543575 A JP 2010543575A JP 5992143 B2 JP5992143 B2 JP 5992143B2
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Japan
Prior art keywords
sample
line focus
detector
data
line
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JP2010543575A
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English (en)
Japanese (ja)
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JP2011510317A5 (enExample
JP2011510317A (ja
Inventor
ポール ヘイワード イアン
ポール ヘイワード イアン
ジョン エドワード スミス ブライアン
ジョン エドワード スミス ブライアン
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Renishaw PLC
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Renishaw PLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from PCT/GB2008/000252 external-priority patent/WO2008090350A1/en
Application filed by Renishaw PLC filed Critical Renishaw PLC
Publication of JP2011510317A publication Critical patent/JP2011510317A/ja
Publication of JP2011510317A5 publication Critical patent/JP2011510317A5/ja
Application granted granted Critical
Publication of JP5992143B2 publication Critical patent/JP5992143B2/ja
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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0289—Field-of-view determination; Aiming or pointing of a spectrometer; Adjusting alignment; Encoding angular position; Size of measurement area; Position tracking
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/44—Raman spectrometry; Scattering spectrometry ; Fluorescence spectrometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/65—Raman scattering
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/65—Raman scattering
    • G01N2021/653—Coherent methods [CARS]
    • G01N2021/656—Raman microprobe
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/10—Scanning
    • G01N2201/103—Scanning by mechanical motion of stage
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/10—Scanning
    • G01N2201/105—Purely optical scan

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
  • Spectrometry And Color Measurement (AREA)
JP2010543575A 2008-01-25 2009-01-26 ライン走査型分光装置 Active JP5992143B2 (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
PCT/GB2008/000252 WO2008090350A1 (en) 2007-01-25 2008-01-25 Spectroscopic apparatus and methods
GBPCT/GB2008/000252 2008-01-25
GB0803798.8 2008-02-29
GBGB0803798.8A GB0803798D0 (en) 2008-02-29 2008-02-29 Spectroscopic apparatus and methods
PCT/GB2009/000214 WO2009093050A1 (en) 2008-01-25 2009-01-26 Line scanning raman spectroscopic apparatus

Publications (3)

Publication Number Publication Date
JP2011510317A JP2011510317A (ja) 2011-03-31
JP2011510317A5 JP2011510317A5 (enExample) 2012-03-08
JP5992143B2 true JP5992143B2 (ja) 2016-09-14

Family

ID=39315747

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010543575A Active JP5992143B2 (ja) 2008-01-25 2009-01-26 ライン走査型分光装置

Country Status (5)

Country Link
EP (1) EP2243008B1 (enExample)
JP (1) JP5992143B2 (enExample)
CN (1) CN101925806B (enExample)
GB (1) GB0803798D0 (enExample)
WO (1) WO2009093050A1 (enExample)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB201317429D0 (en) * 2013-10-02 2013-11-13 Renishaw Plc Spectroscopy apparatus and method
JP7246127B2 (ja) 2013-10-03 2023-03-27 レニショウ パブリック リミテッド カンパニー カメラプローブによって物体を検査する方法
CN104729994B (zh) * 2013-12-20 2018-05-29 福州高意通讯有限公司 用于增强拉曼光谱仪信噪比的方法和装置
GB201503911D0 (en) * 2015-03-09 2015-04-22 Renishaw Plc Transmission raman spectroscopy
JP5901814B1 (ja) * 2015-03-25 2016-04-13 日本分光株式会社 顕微分光装置
US9739661B2 (en) * 2015-06-30 2017-08-22 Agilent Technologies, Inc. Infrared imaging system with automatic referencing
CN107995948B (zh) * 2017-08-23 2021-01-15 深圳前海达闼云端智能科技有限公司 物质检测方法、装置、存储介质及电子设备
DE102017128443A1 (de) * 2017-11-30 2019-06-06 Universität Duisburg-Essen Kompaktes Gerät und Verfahren für POCT-Diagnostik mittels SERS
GB2572662B (en) * 2018-10-05 2020-06-03 Res & Innovation Uk Raman spectrometer
CN113643387B (zh) * 2021-10-14 2022-02-22 深圳市海谱纳米光学科技有限公司 寻找fpi响应中心点的往复式边界检索的方法及其验证方法
GB202404510D0 (en) 2024-03-28 2024-05-15 Renishaw Plc Spectroscopy
GB202404500D0 (en) 2024-03-28 2024-05-15 Renishaw Plc Spectroscopy
GB202404511D0 (en) 2024-03-28 2024-05-15 Renishaw Plc Spectroscopy

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0638788B1 (en) * 1991-11-16 1998-09-30 RENISHAW plc Spectroscopic methods
JP2000292422A (ja) * 1999-04-02 2000-10-20 Olympus Optical Co Ltd 走査型サイトメータ
JP3708929B2 (ja) * 2003-03-31 2005-10-19 株式会社東芝 パターン欠陥検査方法及びパターン欠陥検査装置
JP4565119B2 (ja) * 2004-10-18 2010-10-20 学校法人早稲田大学 ラマン分光装置
JP2006242726A (ja) * 2005-03-03 2006-09-14 Funai Electric Co Ltd 蛍光検出装置
GB0701477D0 (en) * 2007-01-25 2007-03-07 Renishaw Plc Spectroscopic apparatus and methods
GB0708582D0 (en) * 2007-05-03 2007-06-13 Renishaw Plc Spectroscope apparatus and methods

Also Published As

Publication number Publication date
WO2009093050A1 (en) 2009-07-30
GB0803798D0 (en) 2008-04-09
CN101925806A (zh) 2010-12-22
EP2243008A1 (en) 2010-10-27
CN101925806B (zh) 2011-11-09
EP2243008B1 (en) 2018-08-29
JP2011510317A (ja) 2011-03-31

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