JP5992143B2 - ライン走査型分光装置 - Google Patents

ライン走査型分光装置 Download PDF

Info

Publication number
JP5992143B2
JP5992143B2 JP2010543575A JP2010543575A JP5992143B2 JP 5992143 B2 JP5992143 B2 JP 5992143B2 JP 2010543575 A JP2010543575 A JP 2010543575A JP 2010543575 A JP2010543575 A JP 2010543575A JP 5992143 B2 JP5992143 B2 JP 5992143B2
Authority
JP
Japan
Prior art keywords
sample
line focus
detector
data
line
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2010543575A
Other languages
English (en)
Japanese (ja)
Other versions
JP2011510317A5 (enExample
JP2011510317A (ja
Inventor
ポール ヘイワード イアン
ポール ヘイワード イアン
ジョン エドワード スミス ブライアン
ジョン エドワード スミス ブライアン
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Renishaw PLC
Original Assignee
Renishaw PLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from PCT/GB2008/000252 external-priority patent/WO2008090350A1/en
Application filed by Renishaw PLC filed Critical Renishaw PLC
Publication of JP2011510317A publication Critical patent/JP2011510317A/ja
Publication of JP2011510317A5 publication Critical patent/JP2011510317A5/ja
Application granted granted Critical
Publication of JP5992143B2 publication Critical patent/JP5992143B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0289—Field-of-view determination; Aiming or pointing of a spectrometer; Adjusting alignment; Encoding angular position; Size of measurement area; Position tracking
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/44—Raman spectrometry; Scattering spectrometry ; Fluorescence spectrometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/65—Raman scattering
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/65—Raman scattering
    • G01N2021/653—Coherent methods [CARS]
    • G01N2021/656—Raman microprobe
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/10—Scanning
    • G01N2201/103—Scanning by mechanical motion of stage
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/10—Scanning
    • G01N2201/105—Purely optical scan

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
  • Spectrometry And Color Measurement (AREA)
JP2010543575A 2008-01-25 2009-01-26 ライン走査型分光装置 Active JP5992143B2 (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
GBPCT/GB2008/000252 2008-01-25
PCT/GB2008/000252 WO2008090350A1 (en) 2007-01-25 2008-01-25 Spectroscopic apparatus and methods
GBGB0803798.8A GB0803798D0 (en) 2008-02-29 2008-02-29 Spectroscopic apparatus and methods
GB0803798.8 2008-02-29
PCT/GB2009/000214 WO2009093050A1 (en) 2008-01-25 2009-01-26 Line scanning raman spectroscopic apparatus

Publications (3)

Publication Number Publication Date
JP2011510317A JP2011510317A (ja) 2011-03-31
JP2011510317A5 JP2011510317A5 (enExample) 2012-03-08
JP5992143B2 true JP5992143B2 (ja) 2016-09-14

Family

ID=39315747

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010543575A Active JP5992143B2 (ja) 2008-01-25 2009-01-26 ライン走査型分光装置

Country Status (5)

Country Link
EP (1) EP2243008B1 (enExample)
JP (1) JP5992143B2 (enExample)
CN (1) CN101925806B (enExample)
GB (1) GB0803798D0 (enExample)
WO (1) WO2009093050A1 (enExample)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB201317429D0 (en) * 2013-10-02 2013-11-13 Renishaw Plc Spectroscopy apparatus and method
WO2015049341A1 (en) 2013-10-03 2015-04-09 Renishaw Plc Method of inspecting an object with a camera probe
CN104729994B (zh) * 2013-12-20 2018-05-29 福州高意通讯有限公司 用于增强拉曼光谱仪信噪比的方法和装置
GB201503911D0 (en) * 2015-03-09 2015-04-22 Renishaw Plc Transmission raman spectroscopy
JP5901814B1 (ja) 2015-03-25 2016-04-13 日本分光株式会社 顕微分光装置
US9739661B2 (en) * 2015-06-30 2017-08-22 Agilent Technologies, Inc. Infrared imaging system with automatic referencing
WO2019036941A1 (zh) * 2017-08-23 2019-02-28 深圳前海达闼云端智能科技有限公司 物质检测方法、装置、存储介质及电子设备
DE102017128443A1 (de) * 2017-11-30 2019-06-06 Universität Duisburg-Essen Kompaktes Gerät und Verfahren für POCT-Diagnostik mittels SERS
GB2572662B (en) * 2018-10-05 2020-06-03 Res & Innovation Uk Raman spectrometer
CN113643387B (zh) * 2021-10-14 2022-02-22 深圳市海谱纳米光学科技有限公司 寻找fpi响应中心点的往复式边界检索的方法及其验证方法
GB202404510D0 (en) 2024-03-28 2024-05-15 Renishaw Plc Spectroscopy
GB202404511D0 (en) 2024-03-28 2024-05-15 Renishaw Plc Spectroscopy
GB202404500D0 (en) 2024-03-28 2024-05-15 Renishaw Plc Spectroscopy

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE69222191T2 (de) * 1991-11-16 1998-01-22 Renishaw Plc, Wotton-Under-Edge, Gloucestershire Probenbeleuchtung für spektroskopisches Gerät und Verfahren
JP2000292422A (ja) * 1999-04-02 2000-10-20 Olympus Optical Co Ltd 走査型サイトメータ
JP3708929B2 (ja) * 2003-03-31 2005-10-19 株式会社東芝 パターン欠陥検査方法及びパターン欠陥検査装置
JP4565119B2 (ja) * 2004-10-18 2010-10-20 学校法人早稲田大学 ラマン分光装置
JP2006242726A (ja) * 2005-03-03 2006-09-14 Funai Electric Co Ltd 蛍光検出装置
GB0701477D0 (en) * 2007-01-25 2007-03-07 Renishaw Plc Spectroscopic apparatus and methods
GB0708582D0 (en) * 2007-05-03 2007-06-13 Renishaw Plc Spectroscope apparatus and methods

Also Published As

Publication number Publication date
CN101925806B (zh) 2011-11-09
JP2011510317A (ja) 2011-03-31
CN101925806A (zh) 2010-12-22
GB0803798D0 (en) 2008-04-09
EP2243008B1 (en) 2018-08-29
WO2009093050A1 (en) 2009-07-30
EP2243008A1 (en) 2010-10-27

Similar Documents

Publication Publication Date Title
JP5443171B2 (ja) 分光装置および方法
JP2011510317A (ja) ライン走査型分光装置
US8179526B2 (en) Spectroscopic apparatus with dispersive device for collecting sample data in synchronism with relative movement of a focus
JP3385164B2 (ja) 分光装置の操作方法
JP2733491B2 (ja) ラマン分析装置
JP4887989B2 (ja) 光学顕微鏡及びスペクトル測定方法
CN101680840B (zh) 用于探测样品表面的光谱成像方法和系统
JP4116622B2 (ja) 共焦点スリットスキャナを備える、対象物を結像するための走査型顕微鏡
JP6811708B2 (ja) 分光装置
US9442013B2 (en) Microscope spectrometer, optical axis shift correction device, spectroscope and microscope using same
US7139071B2 (en) Spectroscopy apparatus and method
JP5563405B2 (ja) 分光画像取得装置及び方法
EP3276336A1 (en) Microspectroscope
CN101014841A (zh) 通过应用两个光谱计装置改善探测器利用的阶梯光栅-光谱计
JP5163993B2 (ja) 分光装置および分光方法
WO2016152850A1 (ja) 顕微分光装置
WO2024189376A1 (en) Spectroscopy apparatus and methods

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20120118

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20120118

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20130321

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20130329

A601 Written request for extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A601

Effective date: 20130627

A602 Written permission of extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A602

Effective date: 20130704

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20130930

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20140212

A601 Written request for extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A601

Effective date: 20140512

A602 Written permission of extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A602

Effective date: 20140519

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20140612

A02 Decision of refusal

Free format text: JAPANESE INTERMEDIATE CODE: A02

Effective date: 20140805

RD13 Notification of appointment of power of sub attorney

Free format text: JAPANESE INTERMEDIATE CODE: A7433

Effective date: 20141208

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A821

Effective date: 20141208

RD15 Notification of revocation of power of sub attorney

Free format text: JAPANESE INTERMEDIATE CODE: A7435

Effective date: 20151015

A601 Written request for extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A601

Effective date: 20160308

A601 Written request for extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A601

Effective date: 20160408

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20160509

A601 Written request for extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A601

Effective date: 20160728

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20160817

R150 Certificate of patent or registration of utility model

Ref document number: 5992143

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250