JP5989730B2 - プラスチックモールドされた半導体集積回路パッケージの開封方法及びプラスチックモールドされた半導体集積回路パッケージの開封装置 - Google Patents
プラスチックモールドされた半導体集積回路パッケージの開封方法及びプラスチックモールドされた半導体集積回路パッケージの開封装置 Download PDFInfo
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- JP5989730B2 JP5989730B2 JP2014192630A JP2014192630A JP5989730B2 JP 5989730 B2 JP5989730 B2 JP 5989730B2 JP 2014192630 A JP2014192630 A JP 2014192630A JP 2014192630 A JP2014192630 A JP 2014192630A JP 5989730 B2 JP5989730 B2 JP 5989730B2
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- 238000000034 method Methods 0.000 title claims description 38
- 239000004033 plastic Substances 0.000 title claims description 38
- 229920003023 plastic Polymers 0.000 title claims description 38
- 239000004065 semiconductor Substances 0.000 title claims description 31
- 239000000126 substance Substances 0.000 claims description 116
- 239000000243 solution Substances 0.000 claims description 115
- 239000002184 metal Substances 0.000 claims description 73
- 229910052751 metal Inorganic materials 0.000 claims description 73
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 claims description 47
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 40
- 239000010949 copper Substances 0.000 claims description 35
- 229910052802 copper Inorganic materials 0.000 claims description 34
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 claims description 33
- 239000007788 liquid Substances 0.000 claims description 28
- 229910017604 nitric acid Inorganic materials 0.000 claims description 23
- 229910052709 silver Inorganic materials 0.000 claims description 21
- 239000004332 silver Substances 0.000 claims description 21
- 239000002253 acid Substances 0.000 claims description 13
- 239000000463 material Substances 0.000 claims description 13
- 239000011259 mixed solution Substances 0.000 claims description 11
- 238000003860 storage Methods 0.000 description 20
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical group [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 19
- 238000004090 dissolution Methods 0.000 description 18
- 239000000758 substrate Substances 0.000 description 9
- 239000000203 mixture Substances 0.000 description 6
- 230000007797 corrosion Effects 0.000 description 4
- 238000005260 corrosion Methods 0.000 description 4
- 150000002739 metals Chemical class 0.000 description 4
- 238000000465 moulding Methods 0.000 description 4
- 239000011347 resin Substances 0.000 description 4
- 229920005989 resin Polymers 0.000 description 4
- 150000007513 acids Chemical class 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N iron Substances [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000008155 medical solution Substances 0.000 description 3
- 238000002844 melting Methods 0.000 description 3
- 230000008018 melting Effects 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N nickel Substances [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 3
- 229920006395 saturated elastomer Polymers 0.000 description 3
- 235000013351 cheese Nutrition 0.000 description 2
- 229920001971 elastomer Polymers 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000012790 confirmation Methods 0.000 description 1
- 150000001879 copper Chemical class 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
- H01L21/56—Encapsulations, e.g. encapsulation layers, coatings
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67126—Apparatus for sealing, encapsulating, glassing, decapsulating or the like
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/98—Methods for disconnecting semiconductor or solid-state bodies
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
- H01L2224/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
- H01L2224/45001—Core members of the connector
- H01L2224/45099—Material
- H01L2224/451—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
- H01L2224/45138—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
- H01L2224/45139—Silver (Ag) as principal constituent
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
- H01L2224/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
- H01L2224/45001—Core members of the connector
- H01L2224/45099—Material
- H01L2224/451—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
- H01L2224/45138—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
- H01L2224/45144—Gold (Au) as principal constituent
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
- H01L2224/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
- H01L2224/45001—Core members of the connector
- H01L2224/45099—Material
- H01L2224/451—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
- H01L2224/45138—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
- H01L2224/45147—Copper (Cu) as principal constituent
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/42—Wire connectors; Manufacturing methods related thereto
- H01L24/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
- H01L24/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/00011—Not relevant to the scope of the group, the symbol of which is combined with the symbol of this group
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/14—Integrated circuits
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/181—Encapsulation
Landscapes
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
Description
金属を溶解させていない発煙硝酸100%の薬液、銅を溶解した薬液、および、銀を溶解した薬液の3種類を、いずれも常温で使用した。
金属を溶解させていない濃硫酸10%と発煙硝酸90%の混合液、銅を溶解した薬液、および、銀を溶解した薬液の3種類を、いずれも常温で使用した。
2…薬液収納容器2
3…排液タンク
4、5、31、32〜35、37、54…配管
6、42、44…排液管
11〜18、36…バルブ
21〜23…ポンプ
30…マニホールド
40…ステージ
43…サンプル
43a…ICチップ
50…試料台
50a…耐食性のブロック
50b…温度制御される金属ブロック
50c…ゴムシール材
50d…加熱ヒータ
51…カバー
52…気液分離器
53…チーズ
60…薬液貯蔵部
62…上蓋
63…薬液溜め部
64…金属片
Claims (8)
- プラスチックによりモールドされた半導体装置を開封するプラスチックモールド開封方法であって、
前記モールドされた半導体装置は、酸を含む液体に金属を溶解させた薬液を使用して開封され、
前記金属の材質は、
前記モールドされた半導体装置のボンディングワイヤの材質と同じであることを特徴とするプラスチックモールド開封方法。 - プラスチックによりモールドされた半導体装置を開封するプラスチックモールド開封方法であって、
前記モールドされた半導体装置は、酸を含む液体に金属を溶解させた薬液を使用して開封され、
前記金属は銅又は銀であり、
前記モールドされた半導体装置のボンディングワイヤの材質は銅又は銀であることを特徴とするプラスチックモールド開封方法。 - 前記薬液中において、
前記金属が飽和率70%以上の状態であることを特徴とする請求項1又は2に記載のプラスチックモールド開封方法。 - 前記酸を含む液体は、硫酸溶液、硝酸溶液、又は硫酸と硝酸との混合溶液であることを特徴とする請求項1又は2に記載のプラスチックモールド開封方法。
- プラスチックによりモールドされた半導体装置を開封するプラスチックモールド開封装置であって、
前記モールドされた半導体装置は、酸を含む液体に金属を溶解させた薬液を使用して開封され、
前記金属の材質は、
前記モールドされた半導体装置のボンディングワイヤの材質と同じであることを特徴とするプラスチックモールド開封装置。 - プラスチックによりモールドされた半導体装置を開封するプラスチックモールド開封方法であって、
前記モールドされた半導体装置は、酸を含む液体に金属を溶解させた薬液を使用して開封され、
前記金属は銅又は銀であり、
前記モールドされた半導体装置のボンディングワイヤの材質は銅又は銀であることを特徴とするプラスチックモールド開封装置。 - 前記薬液中において、
前記金属が飽和率70%以上の状態であることを特徴とする請求項5又は6に記載のプラスチックモールド開封装置。 - 前記酸を含む液体は、硫酸溶液、硝酸溶液、又は硫酸と硝酸との混合溶液であることを特徴とする請求項5又は6に記載のプラスチックモールド開封装置。
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2014192630A JP5989730B2 (ja) | 2014-09-22 | 2014-09-22 | プラスチックモールドされた半導体集積回路パッケージの開封方法及びプラスチックモールドされた半導体集積回路パッケージの開封装置 |
PCT/JP2014/077420 WO2016046995A1 (ja) | 2014-09-22 | 2014-10-15 | プラスチックモールドされた半導体集積回路パッケージの開封方法及び開封装置 |
EP14897887.7A EP3041037A4 (en) | 2014-09-22 | 2014-10-15 | Plastic-molded semiconductor integrated circuit package unsealing method and unsealing device |
CN201480047035.9A CN105723502A (zh) | 2014-09-22 | 2014-10-15 | 塑料模制半导体集成电路封装件的开封方法及开封装置 |
TW104130405A TW201612971A (en) | 2014-09-22 | 2015-09-15 | Method for unsealing plastic mold and apparatus for unsealing plastic mold |
US15/002,566 US20160141186A1 (en) | 2014-09-22 | 2016-01-21 | Decapsulation method and decapsulation system for plastic molded ic package |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2014192630A JP5989730B2 (ja) | 2014-09-22 | 2014-09-22 | プラスチックモールドされた半導体集積回路パッケージの開封方法及びプラスチックモールドされた半導体集積回路パッケージの開封装置 |
Publications (2)
Publication Number | Publication Date |
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JP2016063194A JP2016063194A (ja) | 2016-04-25 |
JP5989730B2 true JP5989730B2 (ja) | 2016-09-07 |
Family
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Family Applications (1)
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JP2014192630A Expired - Fee Related JP5989730B2 (ja) | 2014-09-22 | 2014-09-22 | プラスチックモールドされた半導体集積回路パッケージの開封方法及びプラスチックモールドされた半導体集積回路パッケージの開封装置 |
Country Status (6)
Country | Link |
---|---|
US (1) | US20160141186A1 (ja) |
EP (1) | EP3041037A4 (ja) |
JP (1) | JP5989730B2 (ja) |
CN (1) | CN105723502A (ja) |
TW (1) | TW201612971A (ja) |
WO (1) | WO2016046995A1 (ja) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
NL2017198B1 (en) | 2016-07-20 | 2018-01-26 | Jiaco Instr Holding B V | Decapsulation of electronic devices |
KR102337659B1 (ko) * | 2018-02-21 | 2021-12-09 | 삼성전자주식회사 | 금형 검사 장치 및 금형 검사 방법 |
CN110371923A (zh) * | 2019-06-03 | 2019-10-25 | 航天科工防御技术研究试验中心 | 一种mems加速度传感器件的开封方法 |
CN111089776A (zh) * | 2019-12-23 | 2020-05-01 | 青岛歌尔微电子研究院有限公司 | 一种银线塑封器件的开封方法 |
CN116469780A (zh) * | 2023-04-14 | 2023-07-21 | 深圳市芯海微电子有限公司 | 一种银键合线焊线芯片的塑封器件开封方法 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0621130A (ja) | 1992-07-06 | 1994-01-28 | Matsushita Electron Corp | 樹脂封止型半導体装置の樹脂開封方法 |
JPH07235556A (ja) * | 1994-02-25 | 1995-09-05 | Matsushita Electron Corp | 半導体装置の解析方法 |
US5783098A (en) * | 1996-05-31 | 1998-07-21 | Nisene Technology Group | Decapsulator and method for decapsulating plastic encapsulated device |
JP3340675B2 (ja) * | 1998-05-26 | 2002-11-05 | 日本サイエンティフィック株式会社 | プラスチックモールド開封装置 |
JP2006196592A (ja) * | 2005-01-12 | 2006-07-27 | Matsushita Electric Ind Co Ltd | 樹脂封止型半導体装置の検査方法 |
JP5793990B2 (ja) * | 2011-06-24 | 2015-10-14 | 日立化成株式会社 | 半導体パッケージの開封方法、及び半導体パッケージの検査方法 |
US8945343B2 (en) * | 2011-09-30 | 2015-02-03 | Nisene Technology Group | Decapsulator with applied voltage for etching plastic-encapsulated devices |
US9059184B2 (en) * | 2011-12-19 | 2015-06-16 | Rkd Engineering Corporation | Apparatus and method for decapsulating packaged integrated circuits |
-
2014
- 2014-09-22 JP JP2014192630A patent/JP5989730B2/ja not_active Expired - Fee Related
- 2014-10-15 WO PCT/JP2014/077420 patent/WO2016046995A1/ja active Application Filing
- 2014-10-15 EP EP14897887.7A patent/EP3041037A4/en not_active Withdrawn
- 2014-10-15 CN CN201480047035.9A patent/CN105723502A/zh active Pending
-
2015
- 2015-09-15 TW TW104130405A patent/TW201612971A/zh unknown
-
2016
- 2016-01-21 US US15/002,566 patent/US20160141186A1/en not_active Abandoned
Also Published As
Publication number | Publication date |
---|---|
EP3041037A4 (en) | 2017-05-10 |
JP2016063194A (ja) | 2016-04-25 |
TW201612971A (en) | 2016-04-01 |
US20160141186A1 (en) | 2016-05-19 |
WO2016046995A1 (ja) | 2016-03-31 |
EP3041037A1 (en) | 2016-07-06 |
CN105723502A (zh) | 2016-06-29 |
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