JP5986698B1 - インクジェット用接着剤、半導体装置の製造方法及び電子部品 - Google Patents
インクジェット用接着剤、半導体装置の製造方法及び電子部品 Download PDFInfo
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- JP5986698B1 JP5986698B1 JP2016506009A JP2016506009A JP5986698B1 JP 5986698 B1 JP5986698 B1 JP 5986698B1 JP 2016506009 A JP2016506009 A JP 2016506009A JP 2016506009 A JP2016506009 A JP 2016506009A JP 5986698 B1 JP5986698 B1 JP 5986698B1
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Abstract
Description
上記光硬化性化合物としては、(メタ)アクリロイル基を有する硬化性化合物、ビニル基を有する硬化性化合物及びマレイミド基を有する硬化性化合物等が挙げられる。硬化した接着剤層をより一層高精度に形成する観点からは、上記光硬化性化合物は、(メタ)アクリロイル基(1個以上)を有することが好ましい。上記光硬化性化合物は、1種のみが用いられてもよく、2種以上が併用されてもよい。
接着剤層の厚み精度をより一層高め、更に接着剤層にボイドをより一層生じ難くする観点からは、上記接着剤は、光及び熱硬化性化合物を含むことが好ましい。上記光及び熱硬化性化合物としては、各種の光硬化性官能基(光硬化性反応性基)と各種の熱硬化性官能基とを有する化合物が挙げられる。硬化した接着剤層をより一層高精度に形成する観点からは、上記光及び熱硬化性化合物の上記光硬化性反応性基は、(メタ)アクリロイル基であることが好ましい。硬化した接着剤層をより一層高精度に形成する観点からは、上記光及び熱硬化性化合物は、(メタ)アクリロイル基を1個以上有し、かつ環状エーテル基又は環状チオエーテル基を1個以上(環状エーテル基と環状チオエーテル基との合計数)有することが好ましく、(メタ)アクリロイル基を1個以上有し、かつエポキシ基又はチイラン基を1個以上有することがより好ましく、また(メタ)アクリロイル基を1個以上有し、かつ環状エーテル基を1個以上有することが好ましく、(メタ)アクリロイル基を1個以上有し、かつエポキシ基を1個以上有することがより好ましい。上記光及び熱硬化性化合物は、環状チオエーテル基を有していてもよい。上記光及び熱硬化性化合物は、1種のみが用いられてもよく、2種以上が併用されてもよい。
熱硬化性化合物としては、環状エーテル基を有する熱硬化性化合物、及びチイラン基等の環状チオエーテル基を有する熱硬化性化合物等が挙げられる。硬化した接着剤層をより一層高精度に形成する観点から、熱硬化性化合物として、環状エーテル基又は環状チオエーテル基を1個以上(環状エーテル基と環状チオエーテル基との合計数)有する熱硬化性化合物が用いられる。環状エーテル基を有する熱硬化性化合物は、エポキシ基を有する熱硬化性化合物(エポキシ化合物)であることがより好ましい。上記熱硬化性化合物は、環状チオエーテル基を有する熱硬化性化合物であってもよい。上記熱硬化性化合物は、1種のみが用いられてもよく、2種以上が併用されてもよい。
光重合開始剤としては、光ラジカル重合開始剤及び光カチオン重合開始剤等が挙げられる。本発明では、光重合開始剤として、光ラジカル重合開始剤が用いられる。上記光ラジカル開始剤は、1種のみが用いられてもよく、2種以上が併用されてもよい。
上記熱硬化性化合物と反応可能な化合物は、熱硬化剤であることが好ましい。上記熱硬化性化合物と反応可能な化合物は、芳香族アミンを含有する。芳香族アミンは、芳香族骨格を有するアミン化合物である。上記熱硬化性化合物と反応可能な化合物は1種のみが用いられてもよく、2種以上が併用されてもよい。
上記硬化促進剤としては、第三級アミン、イミダゾール、第四級アンモニウム塩、第四級ホスホニウム塩、有機金属塩、リン化合物及び尿素系化合物等が挙げられる。
上記接着剤は溶剤を含まないか又は含む。上記接着剤は、溶剤を含んでいてもよく、含んでいなくてもよい。接着剤層の厚み精度をより一層高め、更に接着剤層にボイドをより一層生じ難くする観点からは、上記接着剤における溶剤の含有量は少ないほどよい。
上記接着剤はフィラーを含まないか又は含む。上記接着剤は、フィラーを含んでいてもよく、含んでいなくてもよい。接着剤層の厚み精度をより一層高め、更に接着剤層にボイドをより一層生じ難くする観点からは、上記接着剤におけるフィラーの含有量は少ないほどよい。更に、上記接着剤におけるフィラーの含有量が少ないほど、インクジェット装置による吐出不良の発生が抑えられる。
上記接着剤は、他の成分を含んでいてもよい。他の成分としては特に限定されないが、カップリング剤等の接着助剤、顔料、染料、レベリング剤、消泡剤、及び重合禁止剤等が挙げられる。
以下、本発明の一実施形態に係るインクジェット用接着剤を用いて得られる電子部品の他の具体例について説明する。
攪拌機、冷却機及び温度計を備えた2Lの反応機内に、エタノール250mLと、純水250mLと、チオシアン酸カリウム20gとを加え、チオシアン酸カリウムを溶解させ、第1の溶液を調製した。その後、容器内の温度を20〜25℃の範囲内に保持した。次に、20〜25℃に保持された容器内の第1の溶液を攪拌しながら、ビスフェノールA型エポキシ樹脂160gを5mL/分の速度で滴下した。滴下後、更に30分間攪拌し、エポキシ化合物含有混合液を得た。次に、純水100mLと、エタノール100mLとを含む溶液に、チオシアン酸カリウム20gを溶解させた第2の溶液を用意した。得られたエポキシ化合物含有混合液に、得られた第2の溶液を5mL/分の速度で添加した後、30分攪拌した。攪拌後、純水100mLとエタノール100mLとを含む溶液に、チオシアン酸カリウム20gを溶解させた第2の溶液を更に用意し、該第2の溶液を5mL/分の速度で容器内に更に添加し、30分間攪拌した。その後、容器内の温度を10℃に冷却し、2時間攪拌し、反応させた。次に、容器内に飽和食塩水100mLを加え、10分間攪拌した。攪拌後、容器内にトルエン300mLを更に加え、10分間攪拌した。その後、容器内の溶液を分液ロートに移し、2時間静置し、溶液を分離させた。分液ロート内の下方の溶液を排出し、上澄み液を取り出した。取り出された上澄み液にトルエン100mLを加え、攪拌し、2時間静置した。更に、トルエン100mLを加え、攪拌し、2時間静置した。次に、トルエンが加えられた上澄み液に、硫酸マグネシウム50gを加え、5分間攪拌した。攪拌後、ろ紙により硫酸マグネシウムを取り除いて、溶液を分離した。真空乾燥機を用いて、分離された溶液を80℃で減圧乾燥することにより、残存している溶剤を除去した。このようにして、エポキシ基がチイラン基に置換されたチイラン基を有する25℃で液状の化合物(A)を得た。
チイラン基を有する化合物(A)の合成において、ビスフェノールA型エポキシ樹脂を4−ヒドロキシブチルアクリレートグリシジルエーテルに変更したこと以外は同様の操作を行い、エポキシ基がチイラン基に置換されたチイラン基を有する25℃で液状の化合物(B)を得た。
接着剤Aの調製:
光硬化性化合物としてトリシクロデカンジメタノールジアクリレート(IRR−214K、ダイセル・オルネクス社製)2重量部、2−エチルヘキシルアクリレート(AEH、日本触媒社製)11重量部、光及び熱硬化性化合物として4−ヒドロキシブチルアクリレートグリシジルエーテル(4HBAGE、日本化成社製)41重量部、熱硬化性化合物としてビスフェノールA型エポキシ樹脂(YD−127、新日鐵住金化学社製)20重量部、熱硬化剤として芳香族アミン(EH−105L、ADEKA社製)15重量部、硬化促進剤としてDBU−オクチル酸塩(UCAT SA−102、サンアプロ社製)1重量部、及び光重合開始剤として2−ベンジル−2−ジメチルアミノ−1−(4−モルホリノフェニル)−ブタノン−1(IRGACURE369、BASF社製)5重量部を均一に混合し、接着剤Aを得た。
配合成分の種類及び配合量を下記の表1〜4に示すように変更したこと以外は以下の表2,3に示す接着剤B〜W及びAA〜ADを得た。
シリコンウエハ上に上述した電子部品の製造方法に従って、図2(a)〜(e)に示す各工程を経て、接着剤層を形成した。上記接着剤を70℃で循環させながら、塗布する上記塗布工程と、上記第1の光照射工程(365nmを主波長とするUV−LEDランプ、100mW/cm2、0.1秒)とを繰り返し、縦3mm×横3mm×厚み30μmの接着剤層を形成し、第2の光照射工程(超高圧水銀ランプ、100mW/cm2、10秒)で光硬化させた。その後、接着剤層上に、ダイボンド装置を用いて、半導体チップ(縦3mm×横3mm×厚み750μm)に見立てたシリコンベアチップを110℃で0.1MPaの条件で1秒間加圧して、Bステージ接着試験片を得た。ダイシェア強度測定装置(Dage社製「Dage シリーズ4000」、試験温度:25℃)を用いてBステージ接着試験片のダイシェア強度の測定を行った。
更にBステージ接着試験片を160℃、7気圧の加圧オーブン内に入れ、3時間加熱することで、熱硬化させることにより、熱硬化後の接着試験片を得た。ダイシェア強度測定装置(Dage社製「Dage シリーズ4000」、試験温度:260℃)を用いて、熱硬化後の接着試験片のダイシェア強度の測定を行った。
上述した熱硬化後の接着試験片を120℃、100RH%及び2気圧の条件下で24時間及び48時間放置し、100℃で3時間乾燥させた。その後、ダイシェア強度測定装置(Dage社製「Dage シリーズ4000」、試験温度:260℃)を用いて、耐湿接着試験後のダイシェア強度の測定を行った。耐湿接着試験後のダイシェア強度を以下の基準で判定した。
○○:接着力の低下が0%以上〜10%未満
○:接着力の低下が10%以上〜50%未満
△:接着力の低下が50%以上〜70%未満
×:接着力の低下が70%以上
配線の段差が5μmあるBGA基板(厚み0.3mm、市販のソルダーレジストが塗布されている、縦10mm×横10mmの半導体チップが置かれる場所が5行×16列で80か所設けられている)を用意した。上述した電子部品の製造方法に従って、図2(a)〜(e)に示す各工程を経て、接着剤層を形成した。上記接着剤を70℃で循環させながら、塗布する上記塗布工程と、上記第1の光照射工程(365nmを主波長とするUV−LEDランプ、100mW/cm2、0.1秒)とを繰り返し、縦10mm×横10mm×厚み30μmの接着剤層を形成し、第2の光照射工程(超高圧水銀ランプ、100mW/cm2、10秒)で光硬化させた。その後、接着剤層上に、ダイボンド装置を用いて、半導体チップ(縦10mm×横10mm×厚み80μm)に見立てたシリコンベアチップを110℃で0.1MPaの条件で1秒間加圧して、積層体を得た。シリコンベアチップを積層した後、光学顕微鏡(キーエンス社製「デジタルマイクロスコープVH−Z100」)を用いて接着剤層のはみ出しが100μm未満であることを確認した。得られた積層体を160℃、7気圧の加圧オーブン内に入れ、3時間加熱することで、熱硬化させることにより、80個の半導体装置(積層構造体)を得た。
○○:ボイドがほとんど観察されない
○:ボイドがわずかに観察される(使用上問題がない)
×:ボイドが観察される(使用上問題あり)
上記半導体装置のボイドの確認の評価で得られた半導体装置(80個)を85℃、85RH%の条件下で168時間放置して吸湿させた後、半田リフロー炉(プレヒート150℃×100秒、リフロー[最高温度260℃])に5サイクル通過させた。その吸湿リフロー試験を行った半導体装置を液槽式熱衝撃試験機(ESPEC社製「TSB−51」)を用いて、−55℃で10分間保持した後、150℃まで昇温し、150℃で10分間保持した後−50℃まで降温する過程を1サイクルとする冷熱サイクル試験を実施した。250サイクル、500サイクル及び1000サイクル後に半導体装置を取り出し、超音波探査映像装置(日立建機ファインテック社製「mi−scope hyper II」)を用いて、半導体装置の接着剤層の剥離を観察し、下記の基準で評価した。
○○:剥離していない
○:わずかに剥離している(使用上問題がない)
×:大きく剥離している(使用上問題あり)
1A…一次積層体
2…第1の電子部品本体
3…接着剤層(加熱後)
4…第2の電子部品本体
11,11X…インクジェット装置
12…接着剤層
12A…第1の光照射部により光が照射された接着剤層
12B…第2の光照射部により光が照射された接着剤層
13…第1の光照射部
14…第2の光照射部
21…インクタンク
22…吐出部
23,23X…循環流路部
23A…バッファタンク
23B…ポンプ
31…電子部品
32…多層の接着剤層(加熱後)
32A,32B,32C…接着剤層(加熱後)
51,71…半導体装置
52…積層構造体
53,53A…基板
53a…第1の接続端子
53b…第2の接続端子
54,61,72…接着剤層
55…第2の半導体ウェハ
55a,73a…接続端子
56,63,74…配線
62,73…第1の半導体ウェハ
62a…接続端子
Claims (18)
- 光硬化性化合物と、
光ラジカル開始剤と、
環状エーテル基又は環状チオエーテル基を1個以上有する熱硬化性化合物と、
前記熱硬化性化合物と反応可能な化合物とを含み、
溶剤を含まないか、又は、溶剤を5重量%以下で含み、
前記熱硬化性化合物と反応可能な化合物が、芳香族アミンを含有する、インクジェット用接着剤。 - 前記芳香族アミンが25℃で固形である、請求項1に記載のインクジェット用接着剤。
- 前記芳香族アミンの融点が50℃以上である、請求項1又は2に記載のインクジェット用接着剤。
- 前記芳香族アミンが、アミノ基を2個以上有する、請求項1〜3のいずれか1項に記載のインクジェット用接着剤。
- 前記環状エーテル基又は環状チオエーテル基を1個以上有する熱硬化性化合物が25℃で固形である、請求項1〜4のいずれか1項に記載のインクジェット用接着剤。
- 前記環状エーテル基又は環状チオエーテル基を1個以上有する熱硬化性化合物の軟化点が30℃以上である、請求項1〜5のいずれか1項に記載のインクジェット用接着剤。
- 前記環状エーテル基又は環状チオエーテル基を1個以上有する熱硬化性化合物が、エポキシ基又はチイラン基を1個以上有する熱硬化性化合物を含む、請求項6に記載のインクジェット用接着剤。
- (メタ)アクリロイル基を1個以上有し、かつ環状エーテル基又は環状チオエーテル基を1個以上有する光及び熱硬化性化合物を含む、請求項1〜7のいずれか1項に記載のインクジェット用接着剤。
- 前記(メタ)アクリロイル基を1個以上有し、かつ環状エーテル基又は環状チオエーテル基を1個以上有する光及び熱硬化性化合物が、(メタ)アクリロイル基を1個以上有し、かつエポキシ基又はチイラン基を1個以上有する光及び熱硬化性化合物を含む、請求項8に記載のインクジェット用接着剤。
- 前記光及び熱硬化性化合物が、4−ヒドロキシブチル(メタ)アクリレートグリシジルエーテルを含有する、請求項9に記載のインクジェット用接着剤。
- 前記光硬化性化合物が、(メタ)アクリロイル基を1個有する第1の光硬化性化合物と、(メタ)アクリロイル基を2個以上有する第2の光硬化性化合物とを含む、請求項1〜10のいずれか1項に記載のインクジェット用接着剤。
- 前記第1の光硬化性化合物と前記第2の光硬化性化合物との合計100重量%中、前記第1の光硬化性化合物の含有量が50重量%以上、99.9重量%以下、前記第2の光硬化性化合物の含有量が0.1重量%以上、50重量%以下である、請求項11に記載のインクジェット用接着剤。
- 前記第1の光硬化性化合物が、2−エチルヘキシル(メタ)アクリレートを含有する、請求項11又は12に記載のインクジェット用接着剤。
- JIS K2283に準拠して測定された25℃及び10rpmでの粘度が5mPa・s以上、1600mPa・s以下である、請求項1〜13のいずれか1項に記載のインクジェット用接着剤。
- 半導体素子搭載用の支持部材又は半導体素子の表面上に、インクジェット装置を用いて、請求項1〜14のいずれか1項に記載のインクジェット用接着剤を塗布して、接着剤層を形成する塗布工程と、
光の照射により前記接着剤層の硬化を進行させて、Bステージ化接着剤層を形成する工程と、
前記Bステージ化接着剤層の前記支持部材又は前記半導体素子側とは反対の表面上に、半導体素子を積層する工程と、
前記半導体素子の積層後に、前記Bステージ化接着剤層を熱硬化させる工程とを備える、半導体装置の製造方法。 - 半導体ウェハの表面上に、インクジェット装置を用いて、請求項1〜14のいずれか1項に記載のインクジェット用接着剤を吐出して、接着剤層を形成する塗布工程と、
光の照射により前記接着剤層の硬化を進行させて、Bステージ化接着剤層を形成する工程と、
前記Bステージ化接着剤層の前記半導体ウェハ側とは反対の表面上に、カバーガラスを積層して、積層体を得る工程と、
前記積層体における前記Bステージ化接着剤層を熱硬化させる工程と、
熱硬化後に前記積層体を切断する工程とを備える、半導体装置の製造方法。 - 第1の電子部品本体と、第2の電子部品本体と、前記第1の電子部品本体と前記第2の電子部品本体とを接続している接着剤層とを備え、
前記接着剤層が、請求項1〜14のいずれか1項に記載のインクジェット用接着剤の硬化物である、電子部品。 - 前記第1の電子部品本体が半導体素子搭載用の支持部材又は半導体素子であり、
前記第2の電子部品本体が半導体素子である、請求項17に記載の電子部品。
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