JP5981551B2 - 放電プラズマ加工装置および放電プラズマ加工品の製造方法 - Google Patents
放電プラズマ加工装置および放電プラズマ加工品の製造方法 Download PDFInfo
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- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 description 2
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Description
図1および図2を参照して、本発明に基づく実施の形態1における放電プラズマ加工装置101について説明する。図1は、本実施の形態における放電プラズマ加工装置101の概念図である。図1に示すように、本実施の形態における放電プラズマ加工装置101は、真空容器1と、上下方向に互いに対向する2つのパンチ2a,2bと、円筒形のダイ3と、パルス電流発生器6と、配線7a,7b,7c,7dと、変位部8a,8bと、光ファイバ9と、分光器10と、制御部12とを備える。
(実施例1)
図1に示した放電プラズマ加工装置101にさらに熱検出部を設けた放電プラズマ加工装置を用いて、パンチ2a,2b間に被加工物を配置し、パンチ2a,2bで加圧しながらパルス電流を印加して、被加工物を加工した。ただし、ここでいう熱検出部は、ダイ3に設けられた熱電対である。
実施例1と同様に、図1に示した放電プラズマ加工装置101にさらに熱検出部を設けた放電プラズマ加工装置を用いて、被加工物を加工した。本実施例における被加工物は、チタン酸バリウムの粉末である。これを直径15mm、厚み3mmの円板形状に焼結するように加工した。
本発明に基づく実施の形態2における放電プラズマ加工品の製造方法について説明する。本実施の形態における放電プラズマ加工品の製造方法は、被加工物に対する加圧を開始する工程と、被加工物に対してパルス電流の印加を開始する工程と、パルス電流の印加によって発生するプラズマの光のスペクトルを検出する工程と、検出する工程による検出結果によってパルス電流を制御する工程とを含む。
検出する工程には、光ファイバと分光器とを用いることが好ましい。この方法であれば、光が通過する部分が狭くても、パルス電流を印加することにより発生するプラズマの光は、光ファイバによって受光され、分光器によって検出される。
Claims (14)
- 被加工物を加圧する加圧部と、
前記被加工物にパルス電流を印加するパルス電流印加部と、
前記パルス電流の印加によって発生するプラズマの光のスペクトルを検出する検出部と、
前記検出部の検出結果であるスペクトルによって前記パルス電流を制御する制御部とを備える、放電プラズマ加工装置。 - 前記加圧部は、前記被加工物を挟み込む2つのパンチと、前記2つのパンチおよび前記被加工物を取り囲むダイとを含み、
前記パルス電流印加部は前記2つのパンチの間に前記パルス電流を印加する、請求項1に記載の放電プラズマ加工装置。 - 前記ダイは、一部が前記被加工物に対向する内側の面と、前記内側の面に対向する外側の面とを有し、前記ダイには、前記内側の面における被加工物に対向する部分と前記外側の面とを接続し、前記プラズマの光を前記検出部へと通過させるための貫通孔が設けられている、請求項2に記載の放電プラズマ加工装置。
- 前記ダイは、赤外線を透過する材料からなる、請求項2に記載の放電プラズマ加工装置。
- 前記検出部は、光ファイバと分光器とを含む、請求項1から4のいずれかに記載の放電プラズマ加工装置。
- 前記検出部は、CCD素子とレンズフィルタとを含む、請求項1から4のいずれかに記載の放電プラズマ加工装置。
- 前記被加工物の近傍の温度を測定する熱検出部を備える、請求項1から6のいずれかに記載の放電プラズマ加工装置。
- 被加工物に対する加圧を開始する工程と、
前記被加工物に対してパルス電流の印加を開始する工程と、
前記パルス電流の印加によって発生するプラズマの光のスペクトルを検出する工程と、
前記検出する工程による検出結果であるスペクトルによって前記パルス電流を制御する工程とを含む、放電プラズマ加工品の製造方法。 - 前記パルス電流の印加を開始する工程の前に、前記被加工物を2つのパンチで挟み込むようにして、前記2つのパンチおよび前記被加工物をダイの内部に配置する工程を含み、
前記パルス電流の印加を開始する工程では、前記2つのパンチの間に前記パルス電流を印加する、請求項8に記載の放電プラズマ加工品の製造方法。 - 前記ダイは、一部が前記被加工物に対向する内側の面と、前記内側の面に対向する外側の面とを有し、前記ダイには、前記内側の面における前記被加工物に対向する部分と前記外側の面とを接続し、前記プラズマの光を通過させるための貫通孔が設けられている、請求項9に記載の放電プラズマ加工品の製造方法。
- 前記ダイは、赤外線を透過する材料からなる、請求項9に記載の放電プラズマ加工品の製造方法。
- 前記検出する工程には、光ファイバと分光器とを用いる、請求項8から11のいずれかに記載の放電プラズマ加工品の製造方法。
- 前記検出する工程には、CCD素子とフィルタレンズとを用いる、請求項8から11のいずれかに記載の放電プラズマ加工品の製造方法。
- 前記被加工物の近傍の温度を測定する工程を含み、
前記温度を測定する工程による測定結果は、前記被加工物の近傍の温度の異常な変化を検出するために利用される、請求項8から13のいずれかに記載の放電プラズマ加工品の製造方法。
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JP2000128648A (ja) * | 1998-10-23 | 2000-05-09 | Asahi Optical Co Ltd | 焼結体の製造方法 |
US5989487A (en) * | 1999-03-23 | 1999-11-23 | Materials Modification, Inc. | Apparatus for bonding a particle material to near theoretical density |
JP2003315159A (ja) * | 2002-04-19 | 2003-11-06 | Yamaguchi Technology Licensing Organization Ltd | 放射温度計測装置 |
US6890874B1 (en) * | 2002-05-06 | 2005-05-10 | Corning Incorporated | Electro-optic ceramic material and device |
JP2007100131A (ja) * | 2005-09-30 | 2007-04-19 | Matsumura Seikei:Kk | 通電加熱焼結方法及び通電加熱焼結装置 |
JP5161469B2 (ja) * | 2007-03-16 | 2013-03-13 | 株式会社日立ハイテクノロジーズ | プラズマ処理装置 |
JP5382382B2 (ja) * | 2010-01-20 | 2014-01-08 | 株式会社村田製作所 | 半導体結晶体の加工方法 |
-
2013
- 2013-03-19 WO PCT/JP2013/057822 patent/WO2014020935A1/ja active Application Filing
- 2013-03-19 JP JP2014528012A patent/JP5981551B2/ja active Active
- 2013-03-19 CN CN201380033580.8A patent/CN104396350B/zh active Active
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2015
- 2015-01-14 US US14/596,517 patent/US20150145173A1/en not_active Abandoned
Also Published As
Publication number | Publication date |
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CN104396350A (zh) | 2015-03-04 |
WO2014020935A1 (ja) | 2014-02-06 |
US20150145173A1 (en) | 2015-05-28 |
CN104396350B (zh) | 2017-09-15 |
JPWO2014020935A1 (ja) | 2016-07-21 |
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